JP2007237113A - Apparatus for supplying ozone water - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for supplying ozone water capable of supplying an intended amount of ozone water of a high ozone concentration. <P>SOLUTION: The apparatus 1 for supplying ozone water equipped with a production apparatus 7 for producing ozone water by dissolving ozone gas into water, a supply pipe 3 for supplying ozone water prepared by the production apparatus 7 of ozone water to a use point, a discharge pipe 4 for discharging ozone water branched from the supply pipe 3 for supplying ozone water, and an on-off valve 10 for opening and closing the discharge pipe 4 for discharging ozone water is constituted in such a manner that the flow rate of the ozone water to be supplied to the use point can be adjusted by adjusting the degree of opening the on-off valve 10. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an ozone water supply device that supplies high-concentration ozone water to a use point.

  Ozone water has been conventionally used for wet cleaning of electronic parts and resist removal in a photo process. As an ozone water supply device that manufactures ozone water and supplies it to a use point, for example, an ozone water supply device disclosed in Patent Document 1 is known.

As shown in FIG. 3, the ozone water supply apparatus 100 is connected to a water supply pipe 118 that supplies water and an ozone gas supply pipe 128 that supplies ozone gas, and ozone that produces ozone water by dissolving ozone gas in water. An ozone water supply device comprising a water production device 113, a gas-liquid separation device 117 that separates ozone water and ozone gas produced by the ozone water production device 113, and an ozone water supply pipe 127 that supplies ozone water to a use point. The on-off valve 116 for opening and closing the ozone water supply pipe 127 is provided, and the flow rate of the ozone water supplied to the use point can be adjusted by adjusting the opening degree of the on-off valve 116.
JP 2003-210956 A

  However, in such an ozone water supply device 100, particularly when high-pressure ozone water is produced by pressurization, the opening / closing valve 116 is opened to adjust the flow rate of ozone water supplied to the use point to a desired amount. When throttled, the pressure difference at the on-off valve 116 increases, and the pressure of the ozone water that has passed through the on-off valve 116 suddenly decreases. As a result, the ozone gas dissolved in the ozone water is vaporized and the ozone concentration of the ozone water is greatly reduced, so that there is a problem that high-concentration ozone water cannot be supplied to the use point.

  The present invention has been made to solve the above problem, and an object thereof is to provide an ozone water supply device capable of supplying high-concentration ozone water at a desired flow rate.

  The object of the present invention includes an ozone water production apparatus for producing ozone water by dissolving ozone gas in water, and an ozone water supply pipe for supplying ozone water produced by the ozone water production apparatus to a use point. An ozone water supply device, comprising: an ozone water discharge pipe that branches off from the ozone water supply pipe and discharges ozone water; and an on-off valve that opens and closes the ozone water discharge pipe, and is configured by adjusting an opening of the on-off valve. This is achieved by an ozone water supply device configured to be capable of adjusting the flow rate of ozone water supplied to the use point.

  The ozone water supply device adjusts the opening of the on-off valve based on a flow rate detector that detects the flow rate of the ozone water that passes through the ozone water discharge pipe, and a value detected by the flow rate detector. It is preferable to include an opening / closing control means for adjusting the flow rate of the ozone water supplied to the use point.

  The ozone water supply pipe is preferably composed of two or more fluororesin tubes having different diameters.

  Moreover, it is preferable that the said ozone water discharge pipe is connected to the said ozone water manufacturing apparatus, and is comprised so that the discharged ozone water can be supplied to the said ozone water manufacturing apparatus.

  According to the ozone water supply device of the present invention, high-concentration ozone water can be supplied at a desired flow rate.

  Hereinafter, actual forms of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a schematic configuration diagram of an ozone water supply device 1 according to an embodiment of the present invention. The ozone water supply apparatus 1 includes an ozone water production apparatus 7 that produces ozone water, an ozone water supply pipe 3 that supplies ozone water to a use point, and an ozone water discharge pipe 4 that discharges ozone water. .

  As the ozone water production apparatus 7, a known apparatus for producing ozone water by dissolving ozone gas in pure water can be used. In this embodiment, the ejector 26, the pressure pump 27, and the gas-liquid separation are used. Device 28.

  The ejector 26 is connected to a pure water supply pipe 8 that supplies pure water from a pure water tank 21 that stores pure water, and an ozone gas supply pipe 9 that supplies ozone gas from an ozone gas generator 23 that produces ozone gas. In addition, the ozone gas is sucked by the flow of pure water introduced, and the pure water and the ozone gas are mixed. The pure water to be introduced can be produced by a known pure water production apparatus. As the pure water production apparatus, for example, a reverse osmosis pure water production apparatus can be used to produce ultrapure water with high purity. It is preferable to provide a cartridge such as an ion exchange resin so that it can be used. As the ozone gas generator 23, for example, an electrolytic ozone gas generator that electrolyzes pure water to generate high-concentration ozone gas can be used. The pure water supply pipe 8 and the ozone gas supply pipe 9 are respectively provided with a pure water supply valve 31 and an ozone gas supply valve 33 in the middle of the pipelines, and the flow rates of pure water and ozone gas supplied by adjusting the opening of the respective valves are adjusted. It is configured to be adjustable.

  The pressurizing pump 27 is connected to a mixing pipe 17 that transfers a mixed fluid of pure water and ozone gas generated by the ejector 26, and produces ozone water by pressurizing the transferred mixed fluid. It is configured. As the pressurizing pump 27, it is preferable to use a bellows pump made of a fluororesin because of its excellent resistance to ozone gas.

  The gas-liquid separator 28 is connected to a transfer pipe 18 that transfers ozone water pressurized by the pressurizing pump 27. The gas-liquid separation device 28 converts the ozone water and pure water that have been pressure-fed by a liquid cyclone disposed therein. It is configured to be separable from excess ozone gas that has not been dissolved. The gas-liquid separator 28 is connected to the ozone water supply pipe 3 and the ozone gas discharge pipe 19. The separated ozone water is sent to the ozone water supply pipe 3, and surplus ozone gas is passed through the ozone gas discharge pipe 19. Then, it is configured to be transferred to an ozone gas decomposition apparatus (not shown). The ozone gas transferred to the ozone gas decomposing apparatus is decomposed into oxygen. An ozone gas discharge valve 34 is provided in the middle of the ozone gas discharge pipe 19 so that the flow rate of the ozone gas discharged from the ozone gas discharge pipe 19 can be adjusted by adjusting the opening degree of the ozone gas discharge valve 34.

  As shown in FIG. 2, the ozone water supply pipe 3 is composed of two or more fluororesin tubes 41 and 42 having different diameters. The ozone water sent from the gas-liquid separator 28 to the ozone water supply pipe 3 is ozone water. By devising a configuration in which the pressure loss of the supply pipe 3 becomes substantially equal to the pressure difference between the gas-liquid separator 28 and the use point, the pressure can be gradually reduced to the pressure of the use point, and the ozone water supply pipe 3 It is comprised so that it may discharge from a front-end | tip. In the present embodiment, the ozone water supply pipe 3 includes a large-diameter pipe 41 on the upstream side and a small-diameter pipe 42 having a smaller diameter than the large-diameter pipe 41 on the downstream side. This ozone water supply pipe 3 adjusts the pressure loss of ozone water in the pipe by changing the lengths of the large diameter pipe 41 and the small diameter pipe 42 without providing a valve in the middle of the pipe, to the use point. It is comprised so that the pressure of the supplied ozone water can be adjusted. In this case, the ozone water supply pipe 3 can be manufactured by using commercially available fluororesin tubes with standardized diameters as the large-diameter pipe 41 and the small-diameter pipe 42 and combining them with different lengths. Thereby, manufacturing cost can be held down.

  The ozone water discharge pipe 4 is branched from a branching portion 45 in the middle of the use point of the ozone water supply pipe 3, and a part of the ozone water passing through the ozone water supply pipe 3 is branched and the ozone water discharge pipe 4. It is configured to flow to the side.

  The ozone water discharge pipe 4 includes an opening / closing valve 10 that opens and closes the ozone water discharge pipe 4, and the opening / closing control of the opening / closing valve 10 is performed by an opening / closing control device 12. As the on-off valve 10, a needle valve capable of continuously changing the opening degree can be used, and since it is excellent in resistance to ozone gas, it is preferable to use a fluorine resin valve. The opening / closing control device 12 is connected to an input device 14 capable of inputting the flow rate of ozone water supplied to the use point and a flow rate detector 13 for detecting the flow rate of ozone water passing through the ozone water discharge pipe 4. By adjusting the opening of the on-off valve 10 based on the input value at the input device 14 and the detection value at the flow rate detector 13, the flow rate of the ozone water supplied to the use point can be adjusted.

  The ozone water discharge pipe 4 is connected to the pure water tank 21 so that the discharged ozone water can be supplied again to the ejector 26 via the pure water supply pipe 8. The ozone water discharge pipe 4 is connected to the pure water supply pipe 8 without going through the pure water tank 21, and supplies the discharged ozone water directly to the ejector 26 without going through the pure water tank 21. It may be a configuration. The ozone water discharge pipe 4 is provided with a cooling device 48. The cooling device 48 circulates the cooling water between the ozone water discharge pipe 4 and a cooling tower (not shown), so that the ozone water passing through the ozone water discharge pipe 4 is removed. It is configured to cool. The cooling device 48 may be provided in the middle of the pure water supply pipe 8.

  Next, a method for supplying ozone water to a use point using the ozone water supply apparatus 1 configured as described above will be described.

  First, by inputting a desired flow rate to the input device 14, the flow rate of ozone water supplied to the use point is set to a desired value.

  Next, the pure water supply valve 31, the ozone gas supply valve 33, and the ozone gas discharge valve 34 are all opened, so that the pure water in the pure water tank 21 and the ozone gas generated by the ozone gas generator 23 are respectively changed. It is supplied to the ejector 26 through the pure water supply pipe 8 and the ozone gas supply pipe 9. The pure water introduced into the ejector 26 is preferably highly purified ultrapure water.

  The pure water and ozone gas introduced into the ejector 26 are sufficiently mixed in the process of passing through the ejector 26 and the mixing tube 17 to become a mixed fluid. Thereafter, the mixed fluid is pressurized by the pressurizing device 27, whereby the ozone gas is dissolved in pure water, and ozone water is produced. In the pressurizing device 27, it is preferable to pressurize the ozone gas to 0.5 to 0.6 MpasG in order to obtain high-concentration ozone water.

  The pressurized ozone water is pumped to the gas-liquid separator 28 via the transfer pipe 18 and separated into ozone water and surplus ozone gas. Thereafter, the ozone water in the gas-liquid separator 28 is sent to the vicinity of the use point through the ozone water supply pipe 3, and a part of the ozone water is branched from the ozone water supply pipe 3 at the branch portion 45 before the use point. It flows to the water discharge pipe 4 side. The remaining ozone water is supplied to the use point from the ozone water supply pipe 3 on the downstream side of the branch portion 45.

  At this time, the flow rate of the ozone water supplied to the use point is adjusted by the opening / closing control device 12 adjusting the opening of the opening / closing valve 10 based on the input value at the input device 14 and the detection value at the flow rate detector 13. Adjusted. That is, for example, when the flow rate of ozone water supplied to the use point is smaller than the input value at the input device 14, the flow rate of ozone water is lower on the downstream side than the branching portion 45 of the ozone water supply pipe 3, while the ozone water Since the flow rate of the ozone water discharged from the discharge pipe 4 is large and the detection value at the flow rate detector 13 is large, the open / close control device 12 is configured to switch the open / close valve so that the detection value at the flow rate detector 13 becomes small. The flow rate of ozone water discharged from the ozone water discharge pipe 4 is reduced by reducing the opening degree of 10. In this way, the flow rate of the ozone water on the downstream side of the branch portion 45 of the ozone water supply pipe 3 is increased, and the flow rate of the ozone water supplied to the use point is adjusted to a desired flow rate. Further, when the flow rate of ozone water supplied to the use point is large, the detection value of the flow rate detector 13 is small. Therefore, the open / close control device 12 increases the opening degree of the open / close valve 10, and the ozone water discharge pipe 4 Increase the flow rate of discharged ozone water. In this way, the flow rate of ozone water supplied from the ozone water supply pipe 3 to the use point is adjusted.

  The ozone water that flows to the ozone water discharge pipe 4 side and is discharged is cooled by the cooling device 48, then stored in the pure water tank 21, mixed with the pure water, and used for producing new ozone water.

  According to the ozone water supply apparatus 1 according to the present embodiment, the ozone water discharge pipe 4 is branched from the ozone water supply pipe 3, and the ozone water supply pipe 4 is provided with the opening / closing valve 10, so that the ozone water supply The ozone water supplied from the pipe 3 to the point of use does not pass through the valve, and it is possible to prevent the ozone gas from evaporating from the ozone water due to the rapid pressure loss of the ozone water caused by the passage of the valve. Can be supplied to you points. Moreover, since the flow rate of ozone water supplied to the use point can be adjusted by adjusting the opening of the on-off valve 10 provided in the ozone water discharge pipe 4, ozone water is supplied from the ozone water supply pipe 3 to the use point at a desired flow rate. can do.

  Further, since the opening / closing control device 12 opens and closes the opening / closing valve 10 based on the input value at the input device 14 and the detection value at the flow rate detector 13, the flow rate of ozone water can be adjusted automatically, A flow rate of ozone water can be accurately and easily supplied to the point of use.

  Moreover, since the ozone water discharged | emitted from the ozone water discharge pipe 4 is again supplied to the ozone water manufacturing apparatus 7, the ozone water which was not supplied to a use point can be used effectively.

  As mentioned above, although one Embodiment of this invention was described, the specific aspect of this invention is not limited to the said embodiment.

  For example, in the present embodiment, the opening / closing control device 12 adjusts the opening degree of the on-off valve 10 to adjust the flow rate of ozone water supplied to the use point. You may adjust the flow volume of the ozone water supplied to a use point by adjusting.

  In this embodiment, the configuration of the ozone water production apparatus 7 is an ejector type, but is not limited to this configuration. For example, pure water is introduced into a porous tube made of a fluororesin, and the porous tube Various configurations such as a configuration in which ozone gas flowing along the outer surface is pressurized in the same manner as the ejector type can be used.

  In the present embodiment, the flow rate detector 13 detects the flow rate of ozone water in the ozone water discharge pipe 4, but detects the flow rate of ozone water downstream from the branch portion 45 of the ozone water supply pipe 3. It may be a configuration. In this case, the flow rate detector 13 is preferably configured such that the pressure loss of the ozone water passing through the ozone water supply pipe 3 is reduced. For example, a magnetic field is applied in a direction perpendicular to the flow direction of the ozone water. Thus, an electromagnetic flow meter that generates an electromotive force and detects the flow rate of ozone water by measuring the electromotive force can be used. Further, an ultrasonic flowmeter that alternately emits ultrasonic waves from sensors (not shown) installed on the upstream side and the downstream side of the ozone water supply pipe 3 and obtains the flow velocity from the difference between the propagation times may be used. According to such a configuration, since the flow rate of ozone water supplied from the ozone water supply pipe 3 to the use point can be directly detected, ozone water having a desired flow rate can be supplied more accurately.

  Moreover, you may install in the ozone water supply pipe 3 the filter which purifies ozone water as needed. This filter preferably has a low flow resistance, and when installed on the upstream side of the branch portion 45, the ozone water can be purified at a stage where the flow rate of the ozone water is large.

  Moreover, it is preferable that the branch part 45 is provided in the vicinity of the tip on the downstream side of the ozone water supply pipe 3. Thereby, since the flow volume of the ozone water in the ozone water supply pipe 3 does not decrease to the vicinity of the tip on the downstream side, the time for the ozone water to reach the use point from the ozone water production device 7 can be shortened.

  Moreover, in this embodiment, although the ozone water supply pipe | tube 3 was one, it can also be made into multiple according to the number of use points. In this case, the ozone water discharge pipe 4 is branched from each of the plurality of ozone water supply pipes 3. According to such a configuration, it is possible to supply ozone water by selecting a point of use by blocking the sending of ozone water to the unused ozone water supply pipe 3 among the plurality of ozone water supply pipes 3. it can.

It is a schematic block diagram of the ozone water supply apparatus which concerns on one Embodiment of this invention. It is a cross-sectional view of the ozone water supply pipe shown in FIG. It is a schematic block diagram of the conventional ozone water supply apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Ozone water supply apparatus 3 Ozone water supply pipe 4 Ozone water discharge pipe 7 Ozone water production apparatus 8 Pure water supply pipe 9 Ozone gas supply pipe 10 On-off valve 12 Open / close control device 13 Flow rate detector 14 Input device 21 Pure water tank 23 Ozone gas generation Device 26 Ejector 27 Pressure pump 28 Gas-liquid separator

Claims (4)

An ozone water production device for producing ozone water by dissolving ozone gas in water;
An ozone water supply device comprising an ozone water supply pipe for supplying ozone water produced by the ozone water production device to a use point,
An ozone water discharge pipe branched from the ozone water supply pipe and discharging ozone water;
An on-off valve for opening and closing the ozone water discharge pipe,
An ozone water supply device configured to be capable of adjusting the flow rate of ozone water supplied to a use point by adjusting the opening of the on-off valve. A flow rate detector for detecting the flow rate of ozone water passing through the ozone water discharge pipe;
The ozone water supply device according to claim 1, further comprising: an opening / closing control unit that adjusts a flow rate of the ozone water supplied to the use point by adjusting an opening degree of the opening / closing valve based on a detection value of the flow rate detector. .   The ozone water supply apparatus according to claim 1 or 2, wherein the ozone water supply pipe is composed of two or more fluororesin tubes having different diameters. The ozone water according to any one of claims 1 to 3, wherein the ozone water discharge pipe is connected to the ozone water production apparatus and is configured to be able to supply discharged ozone water to the ozone water production apparatus. Feeding device.

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