CN103687820A - Ozone water supply device and ozone water supply method - Google Patents

Abstract

Provided are a device for supplying ozone water and a method for supplying ozone water that supply ozone water to a point of use without reductions in ozone concentration. A device (10) for supplying ozone water is provided with: an ozone water producing means (1) that produces ozone water; a main pipe (11) on which branch points (12, 13, 14), at which the flow of ozone water from the ozone water producing means (1) splits, are formed; branch pipes (15, 16, 17) that connect the branch points and points of use; and a flow rate maintaining means that prevents the flow rate of ozone water flowing in the main pipe and branch pipes from being reduced. The cross-sectional area of the flow path in the main pipe (11) decreases on the downstream side of the branch points (12, 13, 14) from that on the upstream side. The decrease in the cross-sectional area of the flow path of the main pipe (11) corresponds to the amount of flow of ozone water flowing into the branch pipes at the branch points.

Description

Ozone water supply device and ozone water supply method

technical field

The present invention relates to an ozone water supply device and an ozone water supply method. More specifically, it relates to an ozone water supply device and an ozone water supply that supply ozone water from an ozone water generation place to a use place (ozone water use place) without reducing the ozone concentration of ozone water that is wet-processed on electronic materials, etc. method.

Background technique

In the prior art, the cleaning of substrates such as silicon substrates for semiconductors, glass substrates for liquid crystals, or quartz substrates for photomasks and other electronic parts, such as the RCA company of the United States (Radio of Corporation of America Corp.), represented by RCA cleaning, is performed using a high-concentration chemical solution or lotion and a large amount of pure or ultrapure water for washing. For the purpose of reducing the cost of the washing process or reducing the use of a large amount of washing water and protecting the environment, various simplifications of washing technology have been studied, and the results have been continuously improved. As a typical cleaning technique, there is a cleaning technique using cleaning water in which a specific gas such as ozone or hydrogen is dissolved.

For example, ozone water in which ozone is dissolved in pure water has strong oxidizing power even if the dissolved ozone concentration is as low as several mg/L. Therefore, ozone water is used in the process of removing impurities such as organic substances and metals adhering to the surface of the substrate, or in the process of forming an oxide film layer on the surface of the silicon substrate. In such a process, since the concentration of ozone used greatly affects the detergency of the surface of the substrate or the thickness of the formed film, management of the concentration of ozone becomes extremely important.

Ozone is easy to self-decompose. When the distance between the place where the ozone water is generated and the place where it is used is long, the concentration of ozone in the ozone water will decrease while the generated ozone water is being transported to the place where it is used.

When there are multiple usage locations, if the ozone water generated at the ozone water generation site is transported through the pipes and then distributed to the usage locations in sequence, the ozone water will be diverted each time. , the flow rate of ozone water flowing in the piping will decrease. Therefore, it takes time until the ozone water arrives at the usage location located on the downstream side, and when the ozone water reaches the usage location, the ozone self-decomposes and the ozone concentration in the ozone water decreases.

Patent Documents 1 and 2 describe techniques for preventing a decrease in ozone concentration in ozone water.

In Patent Document 1, when transporting ozone water produced by dissolving ozone in pure water, the self-decomposition of ozone is suppressed by dissolving carbon dioxide gas or organic compounds in pure water or ozone water in an ozone water generator. . In Patent Document 2, at any position from the supply pipe of the ozone water of the ozone water supply device until the discharge pipe, a medicament supply device is set, and the nitrous acid, nitrite, carbonic acid, carbonate 1, or 2 or more ozonolysis inhibitors selected from the group consisting of , bicarbonate, sulfurous acid, sulfite, bisulfite, and hydrazine.

Patent Documents 3 to 5 describe techniques that can easily supply ozone water having a desired ozone concentration by adjusting the ozone concentration in the ozone water.

In Patent Document 3, in the method of adjusting the concentration of ozone water by excessively dissolving ozone, the decomposition of ozone is promoted and the ozone concentration is adjusted by the length of the water passage, heating, ultrasonic waves, ultraviolet rays, or turbulence. In Patent Document 4, ozone-containing water is brought into contact with glass, and the ozone concentration of the ozone water is adjusted.

Patent Document 5 describes a technique for stably supplying ozone water of a desired concentration. In Patent Document 5, the ozonated water containing the ozonolysis inhibiting substance is transported to the use location, and is lowered to a predetermined ozone concentration by a concentration adjustment device near the use location.

prior art literature

patent documents

Patent Document 1: Japanese Patent Laid-Open No. 2000-37695

Patent Document 2: Japanese Patent Laid-Open No. 2002-18454

Patent Document 3: Japanese Patent Laid-Open No. 2000-180433

Patent Document 4: Japanese Patent Laid-Open No. 2000-334468

Patent Document 5: Japanese Patent Laid-Open No. 2005-294377

Contents of the invention

The problem to be solved by the invention

The object of the present invention is to provide a method that can supply ozone without lowering the ozone concentration in the ozone water when the distance between the ozone water generating device and the use position is long, and/or when there are a plurality of use positions. An ozone water supply device for water and an ozone water supply method.

Solution to the problem

The ozone water supply device of the first aspect is characterized in that it comprises: an ozone water generator for supplying ozone water to the place of use; connected to the aforementioned ozone water generator and formed with an ozone water distributor that flows inside. And the main pipe of the branch point corresponding to the quantity of the aforementioned use position; The branch pipe of the aforementioned branch point and the aforementioned use position;

According to the first aspect, it is possible to prevent the decrease in the flow velocity of the ozone water, to deliver the ozone water at a desired flow velocity, and to supply the ozone water to the use position before the ozone concentration in the ozone water decreases. Therefore, the first aspect can be suitably used when the distance between the ozone water generator and the use location is long.

In the second aspect, the flow velocity maintaining device is configured such that the cross-sectional flow area of the main pipe is formed to be smaller on the downstream side than the upstream side of the branch point, and the flow cross-sectional area of the main pipe is The amount of reduction corresponds to the flow rate of the ozone water that is diverted to the aforementioned branch pipe at the aforementioned branch point.

According to the second aspect, even after the ozone water is diverted from the main pipe, it is possible to prevent a decrease in the flow velocity of the ozone water. This ozone water supply device can be suitably used for sequentially branching and supplying ozone water from a main pipe which is a supply pipe for ozone water to a plurality of use locations.

In the third aspect, a detour piping that will detour the flow of ozone water toward the aforementioned use position is provided corresponding to the number of the aforementioned use positions, and a switch for making the ozone water flow to the aforementioned use position or the aforementioned detour piping is provided. device.

According to the third aspect, even when the ozone water is not supplied to any of the use positions, the ozone water can be made to flow into the piping for this detour. Therefore, on the downstream side of the branch point of the main pipe corresponding to the use position where no ozone water is supplied, the flow rate of ozone water matching the flow path section of the main pipe can flow, and the flow velocity of the ozone water can be maintained appropriately.

In the ozone water supply device according to the fourth aspect, the flow velocity of the ozone water flowing in the branch pipe immediately before the use position is controlled to be at least 30 m/min.

According to the fourth aspect, the ozone water can be supplied to the use site before the ozone in the ozone water is self-decomposed and the dissolved ozone concentration is reduced.

An ozone water supply device according to a fifth aspect includes a pH suppressing device for suppressing the pH of the ozone water supplied to the use point to 6 or less.

According to the fifth aspect, the pH value of the ozone water is adjusted to be acidic, the self-decomposition of ozone is suppressed, and the reduction of the dissolved ozone concentration in the ozone water can be effectively prevented.

The ozone water supply method of the 6th aspect, it is the ozone water supply method of supplying the ozone water generated by the ozone water generating device to the usage position using the ozone water through piping, it is characterized in that the ozone water flowing in the piping is The flow rate is maintained above the specified value, and the ozone water is supplied to the aforementioned location of use.

According to the sixth aspect, it is possible to transport ozone water at a desired flow rate while preventing a decrease in the flow rate of ozone water. Since the decrease of the flow velocity of the ozone water is prevented, the ozone water can be supplied to the use place before the ozone density|concentration of the ozone water decreases. The sixth means can be preferably used when the distance between the ozone water generator and the place of use is long.

In the 7th aspect, the aforementioned piping is connected to the aforementioned ozone water generator, and is formed with a main pipe that divides the ozone water flowing inside and a branch point corresponding to the number of the aforementioned use positions, and communicates the aforementioned branch point and The branch pipe at the position of use is configured, and the cross-sectional area of the flow path of the main pipe is formed to be reduced on the downstream side compared with the upstream side of the branch point, and the reduction in the cross-sectional area of the flow path of the main pipe is equal to According to the flow rate of the ozone water branched into the said branch pipe at the said branch point, the decrease of the flow velocity of the ozone water flowing in the main pipe is prevented, and ozone water is supplied.

According to the seventh aspect, even after the ozone water is diverted from the main pipe, it is possible to prevent a decrease in the flow velocity of the ozone water flowing through the main pipe. The seventh aspect can be preferably used when the ozone water is sequentially divided from the main pipe which is the supply pipe of the ozone water and supplied to a plurality of use locations.

In the eighth aspect, the detour piping that will detour the flow of ozone water toward the above-mentioned use position is provided corresponding to the number of the above-mentioned use positions, and the flow of ozone water to the above-mentioned use position or the above-mentioned detour piping is provided. Switching device, and through the aforementioned switching device corresponding to the selected aforementioned use position, the ozone water flows to the aforementioned detour piping to prevent the downstream side of the branch point corresponding to the selected aforementioned use position. The flow velocity of the ozone water flowing in the main pipe is reduced, and the ozone water is supplied.

In the eighth aspect, even when the ozone water is not supplied to any of the use positions, the ozone water can be made to flow into the piping for this detour. Therefore, on the downstream side of the branch point of the main pipe corresponding to the use position where no ozone water is supplied, the flow rate of ozone water matching the flow path section of the main pipe can flow, and the flow velocity of the ozone water can be maintained appropriately.

In the ozone water supply method according to the ninth aspect, the ozone water is controlled and supplied so that the flow velocity of the ozone water flowing in the branch pipe immediately before the use position becomes at least 30 m/min.

According to the ninth aspect, the ozone water can be supplied to the use site before the ozone in the ozone water is self-decomposed and the dissolved ozone concentration is reduced.

In the ozone water supply method of Claim 10, the pH value of ozone water is 6 or less, and ozone water is supplied.

According to the tenth aspect, the pH value of the ozone water is adjusted to be acidic, self-decomposition is suppressed, and a decrease in the dissolved concentration of ozone can be effectively prevented.

The effect of the invention

According to the ozone water supply device and the ozone water supply method of the present invention, even when the distance between the ozone water generating device and the use position is long, the ozone water can be transported at a desired flow rate, and the ozone can be dissolved Ozone water is supplied until the concentration decreases.

According to the ozone water supply device and the ozone water supply method of the present invention, even when the ozone water is sequentially divided from the main pipe that transports the ozone water and supplied to a plurality of use positions, it is not necessary to use the ozone water after the division. The flow rate of the ozone water flowing in the main pipe is reduced and transported. As a result, even in the use position located on the downstream side, ozone water can be supplied at a desired flow rate, and it is possible to supply ozone water in which a decrease in dissolved ozone concentration is prevented.

Description of drawings

Fig. 1 is a process system diagram of an ozone water supply device according to a first embodiment of the present invention.

Fig. 2 is a partially cutaway plan view showing a main pipe and branch pipes constituting the ozone water supply device.

Fig. 3 is an explanatory diagram showing symbols of solenoid valves that switch the flow path of ozone water.

Fig. 4 is an explanatory view showing a switching device for switching a flow path of ozone water using a check valve.

Fig. 5 is a process system diagram showing a part of an ozone water supply device according to a second embodiment of the present invention.

Fig. 6 is an explanatory diagram showing symbols of solenoid valves that switch the flow path of ozone water.

Fig. 7 is an explanatory view showing a switching device for switching a flow path of ozone water using a check valve.

Detailed ways

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the technical scope of the present invention is not limited to the following description or drawings.

[the first embodiment]

The ozone water supply device 10 is provided with piping for flowing ozone water, as shown in FIG. 1 . The piping is composed of a main pipe 11 connected to the ozone water generator 1 and a plurality of branch pipes 15 , 16 , 17 branched from the main pipe 11 . In the main pipe 11 , branch points 12 , 13 , 14 corresponding to use positions 21 , 22 , 23 are provided at different positions from the upstream side of the main pipe 11 to the downstream side. The branch pipes 15, 16, 17 are provided so as to connect these branch points 12, 13, 14 and use locations 21, 22, 23, respectively.

Detour pipes 31 , 32 , 33 branched from the branch pipes 15 , 16 , 17 are respectively provided. These detour pipes 31 , 32 , and 33 send ozone water to the recovery line 37 when they are not supplied to the use locations 21 , 22 , and 23 .

<Ozone water generator>

The ozone water generating device 1 includes an ozone generator 4 as an ozone gas supply source, and an ozone dissolving device 5 for dissolving ozone in water (for example, pure water).

The oxygen tank 2 and the carbon dioxide gas tank 3 are connected to the ozone generator 4, and the mixed gas of oxygen gas and carbon dioxide gas is supplied. This ozone generator 4 generates ozone by various ozone generation methods. For example, ozone can be generated using an ozonizer using a silent discharge method, an electrolysis method, or an ultraviolet method.

The ozone dissolving device 5 is supplied with water (for example, pure water, or ultrapure water) and the ozone-containing gas generated by the ozone generator 4 to generate ozone water. Regarding the ozone dissolving device 5, it is not particularly limited. For example, a device that utilizes a gas permeable membrane to dissolve the ozone gas, or a method that uses an injector to dissolve the ozone gas in high-pressure pure water devices etc.

In this ozone water generating device 1 , carbon dioxide gas is dissolved in water to make the pH of the ozone water acidic to suppress self-decomposition of ozone in the ozone water. Adjust the pH of ozone water by controlling the dissolved amount of carbon dioxide gas.

In this embodiment, carbon dioxide gas and oxygen are mixed, but also carbon dioxide gas can be mixed in the ozone gas generated by the ozone generator 4, and carbon dioxide gas can also be added in the ozone water coming from the ozone dissolving device 5 and let it dissolve. However, since carbon dioxide gas is used to suppress self-decomposition of ozone, it is preferable to dissolve carbon dioxide gas in water when or before dissolving ozone gas. In order to adjust the pH of the ozone water to be acidic, other chemicals (pH adjustment liquid) may be used inside the ozone water generator 1 or before and after it.

The pH of the ozone water after pH adjustment is preferably 7 or less, particularly preferably 6 or less, more preferably 2-6.

<utilized location>

At the usage positions 21, 22, and 23, the supplied ozone water is used to clean substrates such as silicon substrates for semiconductors, glass substrates for liquid crystals, or quartz substrates for photomasks, or other electronic components. In use positions 21 , 22 , and 23 , substrates and the like are treated by immersing them in a treatment tank supplied with ozone water, or treated by showering the substrates and the like by spraying ozone water. In the ozone water supply device 10 shown in FIG. 1 , there are three usage positions 21 , 22 , and 23 , but this usage position can also be provided with 1 position, 2 positions, or more than 4 positions.

〈Supervisor and branch management〉

The main pipe 11 transports the ozone water from the ozone water generating device 1 . It is preferable that a pump for sending water is provided at the main pipe 11 . The pump may also be installed on the upstream side of the ozone dissolving device 5 .

The main pipe 11, as shown in FIG. 2, has the same number of branch points 12, 13, 14 as the number of use positions 21, 22, 23, and divides the ozone water. The main pipe 11 has a tapered shape in which the cross-sectional area of the flow path gradually decreases toward the downstream side in the vicinity of the respective branch points 12 , 13 , and 14 .

The branch pipes 15, 16, 17 are respectively connected to the branch points 12, 13, 14 and the use positions 21, 22, 23 of the main pipe 11, and the ozone water diverted from the main pipe 11 at each branch point 12, 13, 14 Water is sent to the use positions 21, 22, 23.

The flow velocity maintaining means, as shown in FIG. 2 , is realized by configuring the main pipe 11 so that the cross-sectional area of the flow path of the main pipe 11 is on the downstream side compared with the upstream side of the branch points 12 , 13 , 14 Reduce, and make the reduction of the cross-sectional area of the flow path of the main pipe 11 correspond to the flow rate of the ozone water branched into the branch pipes 15 , 16 , 17 at the branch points 12 , 13 , 14 .

Even if part of the ozone water flowing in the main pipe 11a on the upstream side of the branch point 12 is diverted from the branch point 12 to the branch pipe 15, the pipe diameter of the main pipe 11b on the downstream side of the branch point 12 becomes the main pipe 11b on the upstream side. Since 11a is small, the flow velocity of the ozone water flowing through the main pipe 11b falls within a predetermined range.

Similarly, even if the ozone water is diverted from the branch points 13,14 to the branch pipes 16,17, because the pipe diameters of the main pipes 11c, 11d on the downstream side of the branch points 12,13 become smaller respectively, therefore, in the main pipe The flow velocity of the ozone water in 11c and 11d falls within a predetermined range.

By configuring the main pipe 11 and the branch pipes 15, 16, 17 in this way, even after the ozone water is diverted from the main pipe 11 to the branch pipes 15, 16, 17, it is possible to prevent the flow velocity of the ozone water flowing in the main pipe 11 from decreasing. . The pipe diameter of the main pipe 11 is designed according to the flow velocity of the ozone water to be obtained.

The flow velocity of the ozone water flowing through the main pipe 11 is controlled according to the distances between the ozone water generator 1 and the use locations 21 , 22 , and 23 . In order to be able to use the ozone water at the use positions 21, 22, and 23 before the dissolved ozone concentration in the ozone water decreases, it is preferable to set the flow velocity of the ozone water at 30 m/min to 180 m/min, more preferably at 30 m/min to 120 m/min , particularly preferably set to 40 m/min to 90 m/min.

The material of the pipes used for the main pipe 11 and the branch pipes 15 , 16 , and 17 is not particularly limited, but it is preferable to use pipes having ozone resistance. For example, PFA piping or the like formed of perfluoroalkoxy fluororesin can be used.

〈Detour piping〉

The detour piping 31 , 32 , 33 can make the ozone water detour through the use positions 21 , 22 , 23 and flow to the recovery line 37 . Detour piping 31, 32, 33 is connected to each branch pipe 15, 16, 17, and when the ozone water is not supplied to the use position 21, 22, 23, the ozone water flowing to the branch pipe 15, 16, 17 Detour to recovery line 37.

At the branch pipes 15-17 and the detour piping 31-33, there is provided a flow channel selection for supplying ozone water to the use positions 21-23 and a flow channel selection for making the ozone water flow to the detour piping 31-33. Switching device (valve) for switching between.

For example, when the use position 21 at the first position among the use positions 21, 22, and 23 of the three positions is not used, the whole amount of ozone water flowing to the branch pipe 15 is transferred from the detour piping 31 Flow to recovery line 37. In this way, even when there is an unused use position 21, the ozone water can be detoured through the detour piping 31, and the ozone water flowing in the main pipe 11b on the downstream side of the branch point 12 of the main pipe 11 can be diverted. The flow rate of ozone water is maintained within the specified range.

Similarly, when not using other use positions 22 or 23, also make the total amount of ozone water flowing in the branch pipes 16, 17 towards each use positions 22, 23 flow from the detour piping 32, 33 to flow to recovery line 37. Thereby, the flow velocity of the ozone water in the main pipes 11c, 11d downstream of the branch points 13, 14 of the main pipe 11 is maintained at a predetermined value.

The diameters of the detour piping 31 , 32 , 33 are preferably the same as those of the branch pipes 15 , 16 , 17 . The material of the detour pipes 31, 32, 33 is not particularly limited, but it is preferable to use a pipe having ozone resistance, for example, a PFA pipe formed of a perfluoroalkoxy fluororesin or the like can be used.

Switching device for selecting the flow path for the entire amount of ozone water flowing into the branch pipes 14, 15, and 16 to flow to the use positions 21, 22, and 23 and to flow to the detour piping 31, 32, and 33 , for example, using a solenoid valve 40 as shown in FIG. 3 or stop valves 41 and 42 as shown in FIG. 4 .

The solenoid valve 40 shown in Figure 3 is switched to make the full amount of ozone water flowing in the branch pipes 15, 16, 17 flow to the use positions 21, 22, 23 and the state of flowing to the detour piping 31 , 32 , 33 . The movement of the spool is performed by turning ON and OFF (opening and closing) current to a solenoid coil included in the solenoid valve 40 .

The check valve 41 shown in FIG. Installed at detour piping 31 , 32 , 33 . When the supply of ozone water to the use positions 21, 22, 23 is stopped, and the ozone water is made to flow to the detour piping 31, 32, 33, the stop valves 41 of the branch pipes 15, 16, 17 are closed, and The check valve 42 of the detour piping 31, 32, 33 is opened. When making the ozone water flow to the usage positions 21, 22, 23, the stop valve 41 is set to open, and the stop valve 42 is set to close.

In addition, the switching of the flow path is not limited to the switching device using the solenoid valve 40 shown in FIG. 3 or the stop valves 41 and 42 shown in FIG. 4 , and switching devices of other configurations may be used.

<Operation of the ozone water supply device>

The above-mentioned ozone water supply device 10 operates as follows.

The ozone water generated by the ozone water generating device 1 flows through the main pipe 11 . As mentioned above, when the ozone water flows in the main pipe 11, the ozone water is sent out at a flow velocity of at least 30m/min, preferably at a flow velocity of 30m/min to 180m/min, more preferably at a rate of 30m/min to 120m/min The flow velocity is particularly preferably a flow velocity of 40 m/min to 90 m/min. At this time, the pH of the ozone water is preferably 7 or less, particularly preferably 6 or less, and more preferably 2-6.

The ozone water sent to the main pipe 11 flows through the section 11 a of the main pipe 11 and reaches the first branch point 12 . A part of the ozone water reaching the branch point 12 is branched into the branch pipe 15 , and the rest flows through the section 11 b of the main pipe 11 .

The ozone water branched from the main pipe 11 to the branch pipe 15 is supplied to the use location 21 . The supplied ozone water is used at the use position 21 to clean substrates such as silicon substrates for semiconductors, glass substrates for liquid crystals, or quartz substrates for photomasks, or other electronic components.

The ozone water not branched into the branch pipe 15 passes through the branch point 12 and flows into the section 11b. Since the vicinity of the branch point 12 becomes a gentle cone, the ozone water flowing inside does not generate turbulent flow near the branch point 12, and the flow rate of the ozone water will not decrease due to energy loss. The main pipe 11 forms the flow path cross-sectional area of the section 11b smaller with respect to the flow path cross-sectional area of the section 11a. Therefore, the flow velocity of the ozone water in the section 11b becomes more than a predetermined value, preferably 30 to 180 m/min, more preferably 30 to 180 m/min. It is preferably 30 to 120 m/min, particularly preferably 40 to 90 m/min.

After the ozone water flowing in the section 11b reaches the branch points 13 and 14, part of it is diverted into the branch pipes 16 and 17, and the rest is flowed into the section 11d on the downstream side of the branch point 14 in the main pipe 11. .

In the branch pipes 15 , 16 , and 17 , the ozone water flowing from the main pipe 11 at a flow velocity equal to or higher than a predetermined value flows in while maintaining the flow velocity. The ozone water branched to the branch pipes 15, 16, 17 flows in the branch pipes 15, 16, 17 and is supplied to the use positions 21, 22, 23, and is used in the electronic Cleaning of parts etc. The ozone water not branched into the branch pipes 15 to 16 at the branch points 12 to 14 flows through the main pipe 11 at a flow velocity equal to or higher than a predetermined value.

In this way, since the fall of the flow velocity of the ozone water which flows through the main pipe 11 is prevented, the ozone water can be made to reach each use location 21,22,23 rapidly. Therefore, the ozone in the ozone water does not self-decompose, and the ozone water is supplied to the use locations 21, 22, and 23 until the dissolved ozone concentration decreases.

The ozone water flowing in the section 14d of the main pipe 11 is then combined in the recovery line 37 and recovered.

When the ozone water is not supplied to any one of the use positions 21 , 22 , 23 , the ozone water is made to flow into the corresponding detour piping 31 , 32 , 33 and detour to the recovery line 37 .

Therefore, even when not supplying ozone water to 1 or 2 or more use positions, the flow velocity of the ozone water in the main pipe 11 on the downstream side of the branch point toward the use position will not become If it is too large, it can be maintained within the specified range.

If the ozone water supply device 10 is used to supply the ozone water, even when the distance between the ozone water generation device 1 and the use positions 21, 22, 23 is long, the ozone water can be delivered at a desired flow rate. , Ozone water can be supplied before the concentration of dissolved ozone decreases.

When a plurality of use positions 21, 22, 23 are sequentially divided and supplied with ozone water from the main pipe 11 that transports ozone water, the flow velocity of the ozone water flowing in the main pipe 11 can not be reduced after the diversion. It is possible to supply ozone water at a desired flow rate even to the usage positions 22 and 23 located on the downstream side. When the ozone water is supplied by the ozone water supply device 10 , the ozone water may not be supplied to a predetermined use position (for example, the use position 21 on the most upstream side). In this case, too, the ozonated water can be supplied while maintaining a desired flow velocity with respect to the use positions 22 and 23 located on the downstream side of the use position 21 .

[the second embodiment]

In the above-described embodiment, the detour piping 31 to 33 branched from the branch pipes 15 to 17 in the middle, but they may branch from the branch point between the main pipe and the branch pipe or its vicinity.

FIG. 5 shows an example of the configuration of the vicinity of the branch point in this embodiment.

Figure 5 shows an ozone water supply device in which branch pipes 55, 56, 57 and detour piping 61, 62, 63 are connected to branch points 52, 53, 54 of the main pipe 51 connected to the ozone water generating device. 10A process system diagram. Since the structure of the ozone water generator used in this 2nd Embodiment is the same as that of 1st Embodiment, the description is abbreviate|omitted here.

The three branch points 52, 53, 54 provided in the main pipe 51 are respectively connected to branch pipes 55, 56, 57 and detour pipes 61, 62, 63 provided independently of the branch pipes 55, 56, 57. These branch pipes 55 , 56 , 57 and detour pipes 61 , 62 , 63 use pipes whose pipe diameters are formed to be the same size as each other, and whose flow path cross-sectional areas are designed to have the same value. Moreover, the cross-sectional flow areas of these branch pipes 55, 56, and 57 and the detour piping 61, 62, and 63 are different from those of the upstream side flow cross-sectional areas of the branch points 52, 53, and 54 of the main pipe 51. Corresponding to the reduction in the cross-sectional area of the road.

The pipe diameter of the main pipe 51b on the downstream side of the branch point 51 is smaller than the pipe diameter of the main pipe 51a on the upstream side of the branch point 51, and the pipe diameter of the main pipe 51c on the downstream side of the branch point 52 is smaller than that of the main pipe 51a on the upstream side of the branch point 52. The pipe diameter of the main pipe 51b on the upstream side of the branch point 53 is smaller than the pipe diameter of the main pipe 51b on the upstream side of the branch point 53, and the pipe diameter of the main pipe 51c on the downstream side of the branch point 53 is smaller than the pipe diameter of the main pipe 51b on the upstream side of the branch point 53.

At each branch point 52, 53, 54, a switching device is provided, and the switching device is used to divert a part of the ozone water flowing from the main pipe 51 to branch pipes 55, 56, 57 or detour piping. 61 , 62 , 63 , and the remainder flows to the downstream side of the branch point 52 , 53 , 54 of the main pipe 51 .

FIG. 6 shows a solenoid valve 70 as an example of switching means. This solenoid valve 70 moves the position of the slide shaft provided by the solenoid valve 70 by turning the current ON and OFF (opening and closing), and makes the flowing ozone water flow to the branch pipes 55, 56, 57 and the main pipe. Switching between the state on the downstream side of 51 and the state in which the ozone water flows to the detour piping 61 , 62 , 63 and the downstream side of the main pipe 51 .

FIG. 7 shows an example using check valves 71 and 72 as switching means. The stop valve 71 is provided in the branch pipes 55 , 56 , 57 connected to the branch points 52 , 53 , 54 , and the stop valve 72 is provided in the detour piping 61 , 62 , 63 . In the switching device shown in FIG. 7, when a part of the ozone water is branched to the branch pipes 55, 56, 57 and the remaining part is made to flow to the downstream side of the main pipe 51, the stop valve 71 is set to open, and Set the stop valve 72 to OFF. Conversely, when part of the ozone water is diverted to the detour piping 61, 62, 63 and the rest is flowed to the downstream side of the main pipe 51, the stop valve 71 is set to off, and the stop valve 72 is set to for open.

In the case of FIG. 7, the branching positions of the detour piping 61, 62, 63 from the main pipe 51 need only be in the vicinity of the branching positions of the branch pipes 55, 56, 57 from the main pipe 51, and may be in the direction of the pipe axis. Make a slight offset.

The detour piping 61 , 62 , 63 is connected to the recovery line 67 , and when the ozone water is not used at the use positions 21 , 22 , 23 , the detour piping 61 , 62 , 63 detours the ozone water to the recovery line 67 .

In the ozone water supply device 10A of this second embodiment, also, the main pipe 51 is formed so that the flow path cross-sectional area on the downstream side becomes smaller with respect to the flow path cross-sectional area on the upstream side of each branch point 52 , 53 , 54 . It is formed so that the reduction of the cross-sectional area of the flow path corresponds to the flow rate of the ozone water branched into the branch pipes 55 , 56 , and 57 . Therefore, the flow velocity of the ozone water flowing through the main pipe 51 on the downstream side of each branch point 52, 53, 54 can be set within a predetermined range. Even when the ozone water is not supplied to the use position, since the ozone water is diverted to the detour piping 61, 62, 63, the branch corresponding to the use position that does not supply the ozone water in the main pipe 51 On the downstream side of the points 52, 53, and 54, the flow velocity of the ozone water flowing through the main pipe 51 does not become too large. It can be set within a predetermined range.

Example

Hereinafter, examples are given, and the present invention is further described in detail. However, the present invention is not limited by the following examples.

In addition, in the examples and comparative examples described below, the ozone generator 4 (Sumitomo Precision Industries Co., Ltd., silent discharge type ozone generator GR-RD) and the ozone dissolving device 5 (JAPAN GORE-TEX Co., Ltd., ozone-dissolving membrane, GNK-01K), to generate ozone water. In addition, the concentration of dissolved ozone was measured using a dissolved ozone meter (Ebara Industrial Co., Ltd., dissolved ozone meter, EL-700A).

[Example]

In this embodiment, an ozone water supply device 10 provided with a main pipe 11 and branch pipes 15 , 16 , 17 shown in FIG. 1 is used. Use positions 21, 22, 23, as shown in Figure 1, be set to 3 positions, and the water delivery distance until use position 21 is set as 30m, the water delivery distance until use position 22 is set as 60m, and the water delivery distance until use position 23 is set as 60m. The water delivery distance is set to 90m. Use a pipe whose inner diameter is set as follows: In the section 11a up to the branch point 12 corresponding to the first use position 21, the inner diameter of the main pipe 11 is 32 mm, and at the branch point from the first use position 21 The inner diameter of the main pipe 11 of the section 11b from the point 12 until the branch point 13 corresponding to the second use position 22 is 25mm, and from the branch point 13 corresponding to the second use position 22 until the branch point 13 corresponding to the third use position The inner diameter of the main pipe 11 in the section 11 c up to the branch point 14 at the position 23 is 20 mm.

The mixed gas of oxygen and carbonic acid gas is supplied to the ozone generator 4, and the ozone gas is generated, and then the generated ozone gas is introduced into the ozone dissolving membrane as the ozone dissolving device 5, and ozone is dissolved in pure water to generate ozone water. The dissolved ozone concentration at the outlet of the ozone dissolving device 5 is 25 mg/L. The generated ozone water has a pH value of 5.

At each use position 21 , 22 , 23 , since the dissolved ozone concentration needs to be at least 20 mg/L, the target value of the dissolved ozone concentration when reaching each use position 21 , 22 , 23 is 20 mg/L.

The generated ozone water was sent to the main pipe 11 at a water supply rate of 35 L/min, and the usage rate of the ozone water at each use position 21 , 22 , 23 was 10 L/min for each position.

The flow velocity of the ozone water flowing through the main pipe 11 is calculated by the following formula (1).

Piping flow rate LV (m/min) = Water supply volume (m ³ /min)/ Piping cross-sectional area (m ² ) (1)

In this formula (1), if the water supply rate = 0.035 (m ³ /min) and the piping cross-sectional area = 16 ² × 3.14 × 10 ^-6 (m ² ) are substituted, and the piping flow velocity in the section 11a is obtained, Then, it becomes about 43.5 m/min.

Similarly, in formula (1), if the water delivery rate = 0.035 - 0.010 = 0.025 (m ³ /min), the piping cross-sectional area = 12.5 ² × 3.14 × 10 ^-6 (m ² ), and find the The piping flow velocity at 11b is about 51.0 m/min. In addition, in the formula (1), if the water delivery rate = 0.025 - 0.010 = 0.015 (m ³ /min), the pipe cross-sectional area = 10 ² × 3.14 × 10 ^-6 (m ² ), and obtain the The flow velocity of the piping at the point becomes about 47.8m/min.

The measurement results of the dissolved ozone concentration of ozone water at each use position 21, 22, 23 are 24 mg/L at the first use position 21, 24 mg/L at the second use position 22, and 24 mg/L at the third use position 23 is 23mg/L.

In this manner, after measuring the dissolved ion concentrations at the use positions 21, 22, and 23, it was confirmed that the decrease in the dissolved ozone concentration of the supplied ozone water was suppressed, and the dissolved ozone concentration was more than the target value.

[comparative example]

In this comparative example, except that the inner diameter of the main pipe 11 is formed to 32 mm in all sections, the same ozone water supply device 10 as that shown in FIG. measured. Same as the embodiment, the use position 21, 22, 23 is set as 3 positions, and the water delivery distance until the use position 21 is set as 30m, the water delivery distance until the use position 22 is set as 60m, and the water delivery distance until the use position 23 is set as 60m. The water delivery distance is set to 90m. The generation of ozone water and the dissolved ozone concentration (25 mg/L) of the generated ozone water were also set to be the same as in the examples.

The generated ozone water was sent to the main pipe 11 at a water supply rate of 35 L/min, and the usage rate of the ozone water at each use position 21 , 22 , 23 was 10 L/min for each position.

In Equation (1), if the flow rate of water = 0.035 (m ³ /min) and the cross-sectional area of piping = 16 ² × 3.14 × 10 ^-6 (m ² ) are substituted, and the piping flow velocity in section 11a is obtained, then It becomes about 43.5m/min. In this point, it is the same as the above-mentioned embodiment.

On the other hand, in formula (1), if water supply = 0.035 - 0.010 = 0.025 (m ³ /min), cross-sectional area of piping = 16 ² × 3.14 × 10 ^-6 (m ² ), and obtain the The piping flow velocity in the section 11b is about 31.1 m/min. In addition, in the formula (1), if the water supply rate = 0.025 - 0.010 = 0.015 (m ³ /min), the cross-sectional area of the piping = 16 ² × 3.14 × 10 ^-6 (m ² ), and obtain the The flow velocity of the piping at the point becomes about 18.7m/min.

Under this condition, the concentration of dissolved ozone in each ozone water use area was measured. As a result, it was 24 mg/L at the first use position 21, 22 mg/L at the second use position 22, and 22 mg/L at the second use position 22. 23 of the 3 usage positions are 18mg/L.

In this way, in the comparative example, as a result of measuring the dissolved ion concentrations at the use positions 21, 22, and 23, it was found that the dissolved ozone concentrations at the use positions on the downstream side decreased sequentially. At the third usage position, the concentration of dissolved ozone decreased to 18 mg/L, which was unable to reach the target value of 20 mg/L or more.

Table 1 shows the piping flow rates of Examples and Comparative Examples, and Table 2 shows the dissolved ozone concentration.

Table 1

Table 2

As is clear from Table 1, in the example using the piping formed so that the piping diameter of the main pipe 11 is gradually reduced every time it passes through a branch point, the piping diameter is maintained at the same size without reducing the piping diameter. Compared with the comparative example of piping, the decrease of the flow velocity of the ozone water flowing in the main pipe 11 was prevented. And, as shown in table 2, in the dissolved ozone concentration of the ozone water of each use position 21,22,23, in embodiment, in all use position 21,22,23 places, all can become as target value The dissolved ozone concentration is above 20mg/L. In contrast, in the comparative example, the concentration of dissolved ozone at each use position 21, 22, and 23 decreases along with the growth of the transport distance of ozone water, and at the 3rd use position 23, the concentration of dissolved ozone decreases to 18mg/L, lower than the target value of dissolved ozone concentration of 20mg/L.

It can be known that, by applying the ozone water supply device of the embodiment, the flow velocity of the ozone water can not be reduced, and the ozone water can be supplied with a flow velocity above a certain value, and the reduction of the dissolved ozone concentration of the ozone water can be effectively prevented. .

Although the present invention has been described in detail using specific aspects, it is obvious to those skilled in the art that various changes can be made without departing from the intention and scope of the present invention.

In addition, this application is based on the JP Patent application (Japanese Patent Application No. 2011-151832) of an application on July 8, 2011, The content is taken in here by reference.

Claims (11)

1. A kind of ozone water supply device, it is the ozone water supply device that ozone water is supplied to use position, it is characterized in that, The ozone water supply device has: An ozone water generating device for generating ozone water; the main pipe through which the ozone water from the ozone water generating device flows; branch points arranged at various positions en route of the main pipe and diverting the ozone water in the main pipe; and The branch pipe that connects the branch point and the location of use, And, this ozone water supply device is constituted as: The flow velocity of the ozone water is equal to or higher than a predetermined value in the entire area in the main pipe on the upstream side of the branch point on the most downstream side. 2. The ozone water supply device according to claim 1, wherein the flow velocity of the ozone water is set within a predetermined range in the entire area in the main pipe on the upstream side of the branch point on the most downstream side. 3. The ozone water supply device according to claim 1 or 2, wherein the flow path cross-sectional area of the main pipe downstream of the branch point is smaller than the flow path cross-sectional area of the upstream side. 4. The ozone water supply device according to claim 3, wherein, near the branch point of the main pipe, there is provided a tapered portion in which the pipe diameter of the main pipe gradually decreases from the upstream side to the downstream side. 5. The ozone water supply device according to claim 4, wherein the branch pipe is connected to the tapered portion or the vicinity of the tapered portion. 6. The ozone water supply device according to any one of claims 1 to 5, wherein: Branched from the branch pipe, there is a detour piping for detouring the ozone water through the use position and flowing to the recovery line, In addition, a flow path selection device is provided, and the flow path selection device selects a flow path that allows the full amount of ozone water flowing into the branch pipe from the main pipe to flow to the use position and makes the ozone water flow into the branch pipe from the main pipe Switch between the flow path selection from the full flow to the detour piping. 7. The ozone water supply device according to any one of claims 1 to 5, wherein: From the vicinity of the branch point, there is a detour piping for detouring the ozone water through the above-mentioned use position and flowing to the recovery pipeline, And, a flow path selection device is provided, and the flow path selection device can only flow a part of the ozone water flowing into the branch point from the main pipe to the flow path selection of the aforementioned branch pipe and make the part of the ozone water flowing from the main pipe into the branch point flow into the branch point. A part of the ozone water flows only to the detour piping to switch between flow path selections. 8. The ozone water supply device according to any one of claims 1 to 7, wherein the flow velocity of the ozone water in the main pipe on the upstream side of the branch point on the most downstream side is 30 to 180 m/min. 9. The ozone water supply device according to any one of claims 1 to 8, which is provided with a pH adjustment device for setting the pH of the ozone water to 6 or less. 10. A method of supplying ozone water, which is a method of supplying ozone water generated by an ozone water generating device to a place of use via piping, wherein: The flow velocity of the ozone water flowing through the piping is set to a predetermined value or more. 11. The ozone water supply method according to claim 10, wherein the ozone water is supplied via the ozone water supply device according to any one of claims 1 to 9.

Images