TW201332641A - Ozonated water manufacturing method and manufacturing apparatus - Google Patents

Abstract

To provide an ozonated water manufacturing method and apparatus. [Solution] An ozonated water manufacturing method comprising an ozone-generating means, a fluid-supplying means, an ozone-dissolving means for dissolving the ozone in the supplied fluid, and a gas-liquid separating means for separating the ozone that was not dissolved by the ozone-dissolving means, wherein: the ozone-dissolving means and the gas-liquid separating means configure a single unit on the same line; at least two of said units are disposed on respective lines that branch in parallel from the fluid-supplying means; and ozone separated by the gas-liquid separating means of one unit is transferred to the ozone-dissolving means of the other unit.

Description

Ozone water manufacturing method and manufacturing device

The present invention relates to a method and apparatus for producing ozone water using residual ozone.

As shown in Fig. 10, the ozone-containing water producing means of the ozone generating means 101 is dissolved and mixed in water by the ozone dissolving means 102. The ozone mixed water enters the gas-liquid separation means 103, and ozone which cannot be completely dissolved by water is separated as residual ozone. The residual ozone is reduced to oxygen by the waste ozone treatment means 104 and discharged to the atmosphere. Further, ozone water is supplied from the gas-liquid separation means 103.

However, in the ozone water producing apparatus of the above configuration, only about 40 to 50% of the ozone supplied from the ozone generating means 101 is dissolved, and the ozone which is not completely dissolved is reduced to oxygen by the ozone treating means 104, and is discharged to the atmosphere. This problem exists.

In response to this problem, an ozone water producing apparatus having a structure in which ozone generating means, two ozone dissolving means for dissolving ozone in pressurized water, and remaining ozone in ozone water are provided In the ozone separation means, two rows of parallel piping portions are formed in the water supply pipe connected to the water supply port of the remaining ozone separation means, and the ozone dissolving means is interposed in each of the parallel piping portions, and one of the ozone dissolving means is provided. Connecting the ozone generating means to return the ozone discharged from the remaining ozone separating means to the other ozone dissolving means. Thereby, the ozone dissolution rate is improved (for example, refer to Patent Document 1). The ozone water producing apparatus 201 (see FIG. 11), the ozone separated by the remaining ozone separating apparatus 202 is not discharged to the atmosphere after the ozone decomposing apparatus 228 is reduced to oxygen, but is returned to the ejector 216 to dissolve it. The ozone can be efficiently used to produce ozone water having a high ozone dissolution rate.

However, the ozone returned by the ozone return pipe 224 is dissolved and mixed in the tap water, merges in front of the water supply port 203, and is again stored in the ozone water tank 205 of the remaining ozone separation device 202 by the water supply port 203, so that the return is low. The remaining ozone of ozone is subjected to a third separation, so there is a problem that the returning ozone is diluted. In addition, the nozzle diameter of the ejector 216 of the parallel piping portion 214a and the diameter of the diffuser are designed to be larger than the parallel piping portion 214b, and the amount of tap water in the parallel piping portion 214a is increased, thereby making the ozone mixing ratio constant. When the amount of tap water in the parallel piping portion 214b is small, the suction force of the ozone returning from the ejector 216 becomes small, and as a result, the returning ozone cannot be mixed and dissolved, and a new problem occurs.

Further, an ozone water production system of the following configuration has been proposed, characterized in that a plurality of ozone dissolving means and a gas-liquid separating means are provided, and the ozone-containing gas which is discharged from the ozone generating means by one of the ozone dissolving means is sprayed. The ozone is dissolved in the water supplied from the water supply system, and the gas component containing the undissolved ozone is separated from the obtained ozone-containing water by the gas-liquid separation means, and the separated gas component is supplied to other ozone dissolution means. The ozone which is sprayed into the water supplied from the water system is dissolved by the ozone dissolving means (for example, refer to Patent Document 2).

As one of the procedures of the aforementioned ozone water production system, except for the water system In addition to 304, another water system 304a is provided, and a gas component containing a high concentration of ozone separated by the gas-liquid separation means 307 provided in the water system 304 is supplied to another ozone dissolving means 302a provided in the other water system 304a (refer to 12 picture). In the water system 304 shown on the upper side of Fig. 12, a circulation pump 329, an ozone dissolving means 302, a gas-liquid separating means 307, and an ozone utilization device 305 are provided in this order from the upstream side to the downstream side, and the ozone generating means 301 is contained. The ozone gas is injected into the ozone dissolution means 302. At the inlet side of the circulation pump 329, the raw water supply device 303 and the water system 304 are merged. In the other water system 304a shown on the lower side of Fig. 12, another circulation pump 329a, other ozone dissolution means 302a, and other ozone utilization means 305a are provided in this order from the upstream side to the downstream side, by the gas-liquid separation means 307. The gas component containing the high concentration of ozone after the separation is injected into the other ozone dissolving means 302a. The other raw water supply device 303a and the other water system 304a are merged on the inlet side of the other circulation pump 329a. By operating the circulation pump 329, the system water of the water system 304 flows into the ozone dissolving means 302, and the ozone-containing gas from the ozone generating means 301 is injected into the ozone dissolving means 302, and the ozone water flows out toward the downstream side of the water system 304. A gas-liquid mixture with a gas component. The gas-liquid mixture then flows into the gas-liquid separation means 307, where a gas component containing a high concentration of ozone is separated from the ozone water. The ozone water flows into the ozone utilization device 305 provided on the downstream side, and the separated gas component flows from the pipe f into the other ozone dissolution means 302a provided in the other water system 304a. On the other hand, by operating the other circulation pump 329a, the system water of the other water system 304a flows into the other ozone dissolution means 302a from the gas-liquid separation means 307. The ozone-containing gas component is injected into the ozone dissolving means 302a, and a gas-liquid mixture of ozone water and gas components flows out toward the downstream side. The gas-liquid mixture then flows into the other ozone utilization device 305a, and discharges the used lower-concentration ozone water toward the downstream side. The discharged ozone water is again circulated to the other ozone dissolving means 302a via the other circulation pump 329a.

According to the ozone water production system of this configuration, the ozone generated by the ozone generating means can be reused without waste, and the operating cost can be greatly reduced compared with the conventional system, and the ozone can be reduced due to the extremely high ozone utilization rate. The capacity of the means is generated, but in order to install the other water system 304a, it is necessary to additionally use other raw water supply means, which causes the system to increase and become complicated, resulting in an increase in installation cost and running cost.

[Patent Document 1] Japanese Patent No. 2976875

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2004-188246

The present invention has been developed in view of the above problems of the prior art, and an object thereof is to provide an ozone water producing method and apparatus which can effectively utilize residual ozone which cannot be completely dissolved, and which has low cost and high ozone dissolution efficiency.

A first feature of the present invention is a method for producing ozone water, comprising: an ozone generating means, a means for supplying a fluid, an ozone dissolving means for dissolving ozone in the supplied fluid, and the insolubilizing means by the ozone dissolving means a gas-liquid separation means for separating dissolved ozone; the ozone dissolution means and the gas-liquid separation means are treated in the same manner One unit is formed on the line, and at least two of the units are disposed on each of the processing lines that are juxtaposed from the means for supplying the fluid, and the ozone separated by the gas-liquid separating means of one of the units is transferred to the other side. The means of ozone dissolution of the unit.

According to a second aspect of the present invention, the ozone dissolving means of each unit is a first ozone dissolving means and a second ozone dissolving means, and the suction pressure (negative pressure) of the first ozone dissolving means and the inhalation of the second ozone dissolving means The ratio of pressure (negative pressure) satisfies the following relationship A/B ≧ 0.28 (1)

A: suction pressure of the first ozone dissolution means (calculation pressure)

B: Suction pressure (calculation pressure) of the second ozone dissolution means.

According to a third aspect of the invention, the suction pressure (counting pressure) of the first ozone dissolving means is -5 kPa or less, and the fourth feature of the present invention is that the maximum linear velocity of the fluid by the first ozone dissolving means is 5.42. Above m/sec, and when the direction of passage of the fluid is the axis, the maximum cross-sectional area and the minimum cross-sectional area ratio for the axis satisfy the following relationship C/D≧2.2 (2)

C: the maximum value of the sectional area

D: The minimum value of the sectional area.

A fifth feature of the present invention is an ozone water producing apparatus comprising: an ozone generator, a fluid supply device, an ozone dissolving device for dissolving ozone in a fluid supplied from the supply device, and the ozone dissolving device by the ozone dissolving device A gas-liquid separation device for separating ozone which cannot be completely dissolved has at least a first unit and a second unit; the first unit has a first An ozone dissolving device and a first gas-liquid separating device disposed on the same processing line as the first ozone dissolving device; the second unit is provided with a second ozone dissolving device, and is disposed in the same treatment as the second ozone dissolving device a second gas-liquid separation device on the line; a first flow regulating valve and a second flow regulating valve are disposed on the upstream side of the first ozone dissolving device and the second ozone dissolving device, respectively, in the first gas-liquid separating device and The downstream side of the second gas-liquid separation device is respectively provided with a first back pressure regulating valve and a second back pressure regulating valve for adjusting the back pressure of the ozone water after the gas-liquid separation; and the fluid is supplied from the fluid supply device. The first unit and the second unit are disposed on each of the processing lines in which the processing lines are arranged in parallel, and the first gas-liquid separating device is coupled to the second ozone dissolving device.

According to a sixth aspect of the invention, the ratio of the suction pressure (negative pressure) of the first ozone dissolving device to the suction pressure (negative pressure) of the second ozone dissolving device satisfies the following relationship A/B ≧ 0.28 (1)

A: suction pressure of the first ozone dissolving device (calculation pressure)

B: suction pressure (counting pressure) of the second ozone dissolving device.

According to a seventh aspect of the invention, the suction pressure (counting pressure) of the first ozone dissolving device is -5 kPa or less; and the eighth feature of the present invention is that the maximum linear velocity of the fluid passing through the first ozone dissolver is 5.42. Above m/sec, and when the direction of passage of the fluid is the axis, the maximum cross-sectional area and the minimum cross-sectional area ratio for the axis satisfy the following relationship C/D≧2.2 (2)

C: the maximum value of the sectional area

D: The minimum value of the sectional area.

According to a ninth aspect of the invention, the ozone dissolving device is an ejector or an air extractor. The ninth aspect of the present invention is characterized in that the ejector is continuously formed with a reduced diameter portion, a throat portion, and an enlarged diameter portion.

According to an eleventh aspect of the present invention, the ejector includes: a first flow path forming means, a second flow path forming means, a third flow path forming means, and a swirling flow generating means; the first flow path forming means having a first inlet portion And a first passage portion extending in a longitudinal direction, forming a first inlet flow path from the first inlet portion to the first passage portion; the second flow path forming means having a second inlet portion and surrounding the first portion a second passage portion extending from a tapered surface around the passage portion, and a second inlet flow path formed from the second inlet portion to the second passage portion; the third flow path forming means has a small diameter portion, an enlarged diameter portion, and In the outlet portion, the flow path area is enlarged from the small diameter portion to the enlarged diameter portion and the outlet portion, and the end portion of the small diameter portion is connected to the first inlet flow path and the second inlet flow path, respectively. An exit flow path for generating a swirling flow in at least one of the first inlet flow path and the second inlet flow path.

According to a twelfth aspect of the present invention, a main body of a concave portion having a truncated cone shape and a nozzle member formed with a convex portion fitted to the concave portion are provided, and the first inlet flow path is formed inside the nozzle member; The second inlet flow path is formed between an inner circumferential surface of the concave portion and an outer circumferential surface of the convex portion, and an end surface of the main body in which the concave portion is formed and an end surface of the nozzle member in which the convex portion is formed; The outlet flow path is formed inside the main body, and the swirling flow generation means is formed by at least one of an inner circumferential surface of the concave portion and an outer circumferential surface of the convex portion, and/or an end surface of the main body and the nozzle member. At least one of the end faces is formed by a plurality of groove portions provided in the circumferential direction.

According to a thirteenth aspect of the invention, the groove portion is provided on at least one of an inner circumferential surface of the concave portion and an outer circumferential surface of the convex portion, and the concave portion and the convex portion are configured to be fitted to the concave portion when the convex portion is fitted The inner circumferential surface of the concave portion and the outer circumferential surface of the convex portion have the same inclination angle, and at least a part of the inner circumferential surface of the concave portion and the outer circumferential surface of the convex portion abut each other; the groove portion is An upstream end portion of at least one of the concave portion and the convex portion is provided to an intermediate portion, and a flow path sectional area is formed between an inner circumferential surface of the concave portion and an outer circumferential surface of the convex portion on a downstream side of the intermediate portion The flow path.

According to a fourteenth aspect of the invention, the main body includes a casing portion and a flow path portion, and the casing portion includes a cylindrical portion having a female screw portion on an inner circumferential surface of both end portions, and a side surface of the cylindrical portion a connecting portion that is protruded and provided with the second inlet portion at an end portion; the flow path portion is disposed at one end portion before the one end side of the outer casing portion The male screw portion to which the female screw portion is screwed is provided with the concave portion at the other end portion, and the outlet flow path is formed inside; the nozzle member includes the convex portion formed at one end portion on the first inlet flow path side, and is formed a cylindrical portion of a male screw portion that is screwed to the female screw portion on the other end side of the outer casing portion on the outer peripheral surface of the other end portion opposite to the first inlet flow path, and a convex portion formed on the convex portion and An intermediate portion of the substantially cylindrical shape between the cylindrical portions; an outer diameter of the intermediate portion is smaller than an outer diameter of the cylindrical portion and smaller than an outer diameter of an end portion of the convex portion connected to the intermediate portion; the second portion The inlet flow path is formed between the inner circumferential surface of the concave portion and the outer circumferential surface of the convex portion, and around the intermediate portion.

The present invention adopts the above configuration, and the following excellent effects can be obtained.

(1) By forming the parallel piping portion, the pressure of the liquid supplied by the pressurization becomes lower than that of the single piping, and a low-cost supply means can be used.

(2) By forming the parallel piping portion, the pressure of the liquid supplied by the pressurization becomes lower than that of the single piping, and ozone water can be produced in a large amount.

(3) The residual ozone can be effectively utilized, so that ozone water having high ozone dissolution efficiency can be produced.

(4) The remaining ozone can be effectively utilized, and the amount of ozone to be discharged is reduced, so that the cost required for the apparatus for treating the remaining ozone is lowered.

(Embodiment 1)

Hereinafter, the first embodiment of the present invention will be described with reference to FIGS. 2 to 4, but the present invention is of course not limited to the embodiment. Further, in the present embodiment, an example in which water is used as the fluid will be described.

In Fig. 2, the ozone water producing apparatus of the present invention comprises an ozone generator 1, a fluid supply device 2, two gas self-priming ozone dissolving devices 3a and 3b, and residual ozone 5a and 5b which cannot be completely dissolved. Two gas-liquid separation devices 4a, 4b for separating the gas, flow regulating valves 7a, 7b for regulating the flow rate of water supplied to each of the ozone dissolving devices 3a, 3b, for adjusting the gas-liquid separating devices 4a, 4b The ozone water back pressure back pressure regulating valves 8a, 8b, and the waste ozone treating device 9 for treating the remaining ozone 5b. The remaining ozone refers to ozone that cannot be completely dissolved by the ozone dissolving device.

The supplied water is pressurized by a fluid supply device 2 such as a pump, and supplied to the first ozone dissolving device 3a and the second ozone dissolving device 3b which are connected by two rows of parallel pipes. The ozone generated by the ozone generator 1 is self-primed by the first ozone dissolving device 3a and mixed with water in the first ozone dissolving device 3a. The ozone mixed water discharged from the first ozone dissolving device 3a is separated into a first residual ozone 5a containing a non-dissolvable ozone and a first ozone water 6a by the first gas-liquid separating device 4a, and the first remaining ozone 5a is further utilized by The second ozone dissolving device 3b is self-priming and is mixed with the diverged water in the second ozone dissolving device 3b. The ozone mixed water discharged from the second ozone dissolving device 3b is separated by the second gas-liquid separating device 4b to contain no The second remaining ozone 5b and the second ozone water 6b of the dissolved ozone cause the first ozone water 6a and the second ozone water 6b to merge. The second remaining ozone 5b is discharged by reduction to oxygen by the ozone treatment device 9. In order to adjust the water flow rate toward the first ozone dissolving device 3a and the second ozone dissolving device 3b, the first flow regulating valve 7a and the second flow regulating valve 7b are used, in order to maintain the first gas-liquid separating device 4a, the second gas-liquid The pressure of the separating device 4b is balanced, and the back pressure is adjusted by the first back pressure regulating valve 8a and the second back pressure regulating valve 8b.

Here, the ratio Ps1 (calculation pressure) / Ps2 (calculation pressure) of the suction pressure Ps1 (the gauge pressure) of the first ozone dissolving device 3a and the suction pressure Ps2 (the gauge pressure) of the second ozone dissolving device 3b, It should be 0.28 or more. At a lower temperature than 0.28, it is necessary to reduce the water flow rate of the first ozone dissolving device 3a, increase the water flow rate of the second ozone dissolving device 3b, or increase the water passing diameter of the first ozone dissolving device 3a. The water discharge diameter of the second ozone dissolving device 3b is reduced, and the mixed solubility of the high-concentration ozone from the ozone generating means in the first ozone dissolving device is lowered, and the dissolved ozone concentration of the ozone water may be lowered.

Further, the suction pressure Ps1 (metering pressure) of the first ozone dissolving device 3a is preferably -5 kPa or less. When -5 kPa < Ps1 (measurement pressure) < 0 kPa, stable suction performance cannot be obtained, and in the case of 0 kPa ≦ Ps1 (measurement pressure), it is necessary to separately provide a means for blowing ozone such as a blower to increase the cost.

Furthermore, in order to maintain Ps1 (measurement pressure) below -5 kPa, the first ozone dissolving device 3a must have a certain degree of flow rate and difference. The pressure, that is, a certain degree of flow velocity difference, preferably the maximum linear velocity LV1max is LV1max ≧ 5.42 m/sec, and the ratio of the maximum cross-sectional area to the minimum cross-sectional area of the shaft is 2.2 when the flow direction of the fluid is the axis. the above.

When the LV1max is less than 5.42 m/sec, it is difficult to maintain the Ps1 (measured pressure) ≦-5 kPa even if the maximum cross-sectional area/water-passing portion of the water-passing portion is 2.2 or more, and the same is true. The cross-sectional area/water-passing portion has a minimum cross-sectional area of less than 2.2. Even if LV1max is 5.42 m/sec or more, it is difficult to maintain Ps1 (measured pressure) ≦-5 kPa.

Hereinafter, an ejector according to a first embodiment of the present invention will be described with reference to Figs. 3 to 9 . Fig. 3 is a longitudinal sectional view showing the structure of the ejector according to the first embodiment of the present invention, and Fig. 4 is an enlarged view of a main part of Fig. 3. The ejector is provided with a main body 11 having a substantially cylindrical outer shape and a nozzle member 12 fitted to the main body 11 and having a substantially cylindrical outer shape.

An accommodating portion 16 for inserting the nozzle member 12 is provided at one end surface of the main body 11, and an outlet opening portion 31 for forming the outlet flow path 15 is provided at the other end surface. The female screw portion 21 is provided on the opening side of the inner peripheral surface of the accommodating portion 16. An annular groove portion 20 is provided on the bottom surface 32 of the accommodating portion 16, and an outer circumferential surface of the annular groove portion 20 is located on a substantially extended line of the female screw portion 21. Inside the main body 11, the reduced diameter portion 17, the throat portion 18, and the enlarged diameter portion 19 are respectively disposed coaxially with the central axis (cylinder central axis) of the main body 11, and the reduced diameter portion 17 is formed on the bottom surface of the accommodating portion 16. The outlet opening portion 31 has a truncated conical diameter; the throat portion 18 is provided in a continuous state in the reduced diameter portion 17 to form a cylindrical narrow diameter portion; and the enlarged diameter portion 19 is provided in the continuous state in the throat portion 18 And, the diameter is expanded in a truncated cone shape toward the outlet opening portion 31. By these The reduced diameter portion 17, the throat portion 18, and the enlarged diameter portion 19 form an outlet flow path 15 having a scribe effect from the reduced diameter portion 17 to the outlet opening portion 31. Further, from the end of the enlarged diameter portion 19 to the outlet opening portion 31, a flow path is formed by a cylindrical surface.

Fig. 5 is a front view of the bottom surface 32 of the accommodating portion 16 of the main body 11 (cross-sectional view taken along line A-A of Fig. 3). As shown in FIG. 5, the second inlet opening portion 30, the second inlet opening portion 30, and the annular groove portion 20 are provided on the circumferential surface of the main body 11 at a predetermined position in the circumferential direction (the fifth drawing is at the top). Connected. In the bottom surface 32 of the accommodating portion 16, a plurality of radiating curved groove portions are provided at equal intervals in the circumferential direction from the annular groove portion 20 to the peripheral edge of the reduced diameter portion 17.

As shown in Fig. 3, the nozzle member 12 includes a cylindrical portion 22 having a male screw portion 24 on the outer peripheral surface thereof, and a projection protruding in a truncated cone shape coaxially with the cylindrical portion 22 at one end surface of the cylindrical portion 22. Part 23. A first inlet opening portion 29 is provided on the other end surface of the cylindrical portion 22, and a discharge port 25 is provided at an end surface of the protruding portion 23. Inside the nozzle member 12, a truncated cone-shaped tapered portion 26 that is reduced in diameter from the middle of the flow path toward the discharge port 25 is provided coaxially with the central axis of the nozzle member 12, and is formed from the first inlet opening portion 29 to the discharge port 25 The first inlet flow path 13 is narrowed at the outlet side. Further, from the first inlet opening portion 29 to the one end portion of the tapered portion 26 and the other end portion of the tapered portion 26, a flow path is formed by a cylindrical surface.

The male screw portion 24 of the nozzle member 12 is screwed to the female screw portion 21 of the housing portion 16 of the main body 11 in a sealed state until the end surface 33 of the cylindrical portion 22 abuts against the bottom surface 32 of the housing portion 16 of the main body 11, thereby Nozzle structure The member 12 is inserted into the receiving portion 16 of the main body 11. At this time, the protruding portion 23 (protrusion portion) is accommodated in the reduced diameter portion (concave portion) 17 of the main body 11, and is provided on the groove portion 34 of the bottom surface 32 of the accommodating portion 16 of the main body 11 and the protruding portion 23 side of the nozzle member 12. The end face 33 forms a communication flow path 27. Further, a gap is provided between the inner peripheral surface (tapered surface) of the reduced diameter portion 17 of the main body 11 and the outer peripheral surface (tapered surface) of the protruding portion 23 of the nozzle member 12, and a gap is formed along the tapered surface by the gap. Flow path 28.

Thereby, the second inlet flow path 14 is formed, which communicates with the throat portion 18 of the main body 11 through the annular groove portion 20, the communication flow path 27, and the annular flow path 28 from the second inlet opening portion 30, and is at the outlet The side is narrowed. Further, the bottom surface 32 of the accommodating portion 16 of the main body 11 and the end surface 33 on the protruding portion 23 side of the nozzle member 12 may be in contact with each other or may be provided with an appropriate gap therebetween. In the case where a gap is provided, the gap portion and the groove portion 34 portion form a communication flow path 27 that connects the annular groove portion 20 and the annular flow path 28.

The shape of the groove portion 34 is not limited to that shown in Fig. 5. For example, as shown in Fig. 6, a plurality of straight lines are eccentrically arranged with respect to the central axis of the first inlet flow path 13 in the nozzle member 12. The groove portion 34b may also be formed. In other words, the groove portion 34b may be provided along a straight line extending outward in the radial direction so as not to intersect the central axis of the flow path in the nozzle member 12, and may be tangential to the circumference of the peripheral portion of the reduced diameter portion 17 in order to generate the swirling flow. It is sufficient to communicate, and the shape of the groove portion 34 is not particularly limited. The cross-sectional shape of the groove portion 34 and the number of the groove portions 34 are not particularly limited.

Further, the material of the main body 11 and the nozzle member 12 is not particularly limited as long as it is not corroded by the fluid to be used, and may be polyvinyl chloride. Any of alkene, polypropylene, polyethylene, and the like. Especially in the case of using corrosive fluids, preferably polytetrafluoroethylene, polyvinylidene fluoride, tetrafluoroethylene. When a fluororesin such as a perfluoroalkyl vinyl ether copolymer resin is used as a fluororesin, it can be used for a corrosive fluid, and it is preferable to pass through a corrosive gas without fear of corrosion of the piping member. The configuration of the main body 11 or the nozzle member 12 can be made into a transparent or translucent member, and in this case, the state of mixing of the fluid can be visually confirmed, and thus it is preferable. According to the substance flowing through the fluid mixer, the material of each part may be a metal or an alloy of iron, copper, copper alloy, brass, aluminum, stainless steel, titanium or the like. Particularly in the case where the fluid is corrosive, it is preferably a stainless steel which is hygienic and has a long life. The method of assembling the main body 11 and the nozzle member 12 may be any one of a method of maintaining internal fluid tightness by screwing, welding, welding, adhering, pinning, fitting, or the like. A pipe (not shown) for introducing and discharging a fluid is connected to each of the first inlet opening 29, the second inlet opening 30, and the outlet opening 31, and the connection method is not particularly limited.

The structure of the other communication flow path 27 will be described with reference to Figs. 7 and 8 . In the above configuration, the groove portion 34 is provided in the bottom surface 32 of the accommodating portion 16 of the main body 11 to form the communication flow path 27. In the other configuration, the groove portion 34 is provided on the end surface 33 of the nozzle member 12 on the protruding portion 23 side. . Fig. 7 is a front view showing the main portion structure of the ejector when the nozzle member 12 is viewed from the outlet opening portion 31 side of Fig. 3. The same reference numerals are given to the same parts as those of the third and fourth figures. Hereinafter, the difference from the form in which the groove portion 34 is provided on the main body 11 side will be mainly described.

As shown in Fig. 7, the end face 33 of the nozzle member 12 is provided for use. The groove portion 35 that connects the flow path 27 is formed. Although not shown in the drawings, the groove portion is not formed in the bottom surface 32 of the accommodating portion 16 of the main body 11. The groove portion 35 is provided in a radial curved shape from the outer peripheral edge of the end surface of the nozzle member 12 so as to tangentially communicate with the circumference of the outer circumferential groove portion 36 provided on the peripheral edge of the root portion of the protruding portion 23, and the nozzle is screwed in the main body 11. In the case of the member 12, the communication passage 27 is formed by the groove portion 35 of the nozzle member 12 and the bottom surface 32 of the accommodating portion 16 of the main body 11. Thereby, the second inlet flow path 14 is formed, and the second inlet opening portion 30 communicates with the throat portion 18 of the main body 11 through the annular groove portion 20, the communication flow path 27, and the annular flow path 28. In this case, the fluid flowing through the communication passage 27 becomes a swirling flow along the outer peripheral surface of the protruding portion 23.

Further, the groove portion 35 is not limited to the radial curved shape as shown in Fig. 7, and as shown in Fig. 8, a groove portion 35 which is linearly eccentric with respect to the central axis of the flow path may be formed. The shape is not particularly limited as long as it is tangentially connected to the circumference of the outer circumferential groove portion 36. Further, the cross-sectional shape of the groove and the number of grooves are also not particularly limited.

Providing the groove portion 35 on the nozzle member 12 side as in the present embodiment has the advantage that the cleaning of the groove portion 35 is facilitated at the time of disassembly, and the nozzle member 12 is replaced with the groove portion 35. The other nozzle member 12 is changed, and the introduction condition of the main fluid and the suction condition of the sub fluid can be easily changed.

The description of the use of other injectors will be made with reference to Figs. 9a and 9b. The protruding portion 23 of the nozzle member 12 is provided at one end surface of the cylindrical portion 22 with an intermediate portion 38 which is coaxial with the cylindrical portion 22 and whose outer diameter is smaller than the maximum outer diameter of the protruding portion 23 and protrudes in a cylindrical shape. At the end face of the intermediate portion 38, A protruding portion 23 having a spiral groove portion 37 formed on the outer peripheral surface thereof is provided coaxially with the intermediate portion 38. The spiral groove portion 37 is formed from the end surface on the upstream side of the protruding portion 23 to the middle. The outer circumferential surface of the portion of the protruding portion 23 where the spiral groove portion 37 is provided and the inner circumferential surface of the portion of the reduced diameter portion 17 opposed to the spiral groove portion 37 have the same inclination angle to form abutting. In addition, the gap formed by the inner peripheral surface of the reduced diameter portion 17 and the outer peripheral surface of the protruding portion 23 on the downstream side of the spiral groove portion 37 has substantially the same flow path cross-sectional area on the upstream side and the downstream side. Further, the end faces on the downstream side of the protruding portion 23 and the reduced diameter portion 17 are located on substantially the same surface, or the end faces of the protruding portions 23 are located on the downstream side of the end faces of the reduced diameter portions 17.

Further, in the present embodiment, the main body 11 is constituted by a cylindrical main body casing portion 41 and a main body flow path portion 43. The main body outer casing portion 41 is provided with a connecting portion 39 having a second inlet portion formed on a side surface thereof, and has a female screw portion 40 on an inner circumferential surface of the both end portions. The main body flow path portion 43 is provided with a female screw portion 40 at one end. The male screw portion 42 is formed with a reduced diameter portion 17 at the other end, and an outlet flow path 15 is provided therein. Fig. 9a is a longitudinal sectional view showing the structure of another injector, and Fig. 9b is a perspective view showing the structure of the nozzle member 12 of Fig. 9a. The same reference numerals are given to the same portions as those of Figs. 3 and 4.

As shown in Fig. 9a, at one end surface of the cylindrical portion 22 of the nozzle member 12, there is provided an intermediate portion 38 which is coaxial with the cylindrical portion 22 and whose outer diameter is smaller than the maximum outer diameter of the protruding portion 23 and protrudes in a cylindrical shape. . On the end surface of the intermediate portion 38, a protruding portion 23 having a spiral groove portion 37 formed on the outer peripheral surface is provided coaxially with the intermediate portion 38. The nozzle member 12 is fitted to the main body flow path portion 43, and the outer peripheral surface and the reduced diameter portion of the portion of the protruding portion 23 where the spiral groove portion 37 is provided The inner peripheral surface of the portion facing the spiral groove portion 37 is in contact with each other, and the nozzle member 12 is screwed to the main body outer casing portion 41 in a state of being aligned with the flow path axis of the main body flow path portion 43.

The communication flow path 27 is formed by the end surface on the upstream side of the main body flow path portion 43, the end surface on the downstream side of the cylindrical portion 22 of the nozzle member 12, the outer circumferential surface of the intermediate portion 38, and the end surface on the upstream side of the protruding portion 23. Further, the annular flow path 28 formed by the inner circumferential surface of the reduced diameter portion 17 and the outer circumferential surface of the protruding portion 23 is a gap between the swirling portion 44 including the spiral groove portion 37 and the downstream side of the spiral groove portion 37. The formed flat portion 45 is formed. With this, the second inlet opening portion 30 communicates with the second inlet flow path 14 of the throat portion 18 of the main body flow path portion 43 through the annular groove portion 20, the communication flow path 27, and the annular flow path 28. In this case, the main fluid flowing through the annular flow path 28 first flows into the swirling portion 44 from the end surface on the upstream side of the protruding portion 23. The fluid that has flowed into the swirling portion 44 becomes a swirling flow, and flows through the flat portion 45 having a flat flow path, and flows into the throat portion 18 uniformly over the entire circumference of the annular flow path 28.

Further, in the present embodiment, the cross-sectional area of the flow path on the upstream side and the downstream side of the flat portion 45 of the annular flow path 28 is substantially the same. As described above, when the main fluid flows through the flat portion 45, fluctuations in the flow rate and flow rate of the main fluid, the state of the swirling flow, and the like can be suppressed, and a good balance can be maintained. Therefore, the main fluid flowing in from the second inlet flow path 14 can be stably sucked into the sub fluid at the throat portion 18 with high efficiency.

Further, in the present embodiment, it is preferable that the end faces on the downstream side of the protruding portion 23 and the reduced diameter portion 17 are substantially flush with each other, or the end faces of the protruding portion 23 are located on the downstream side of the end faces of the reduced diameter portion 17. When the main fluid passes through the ring In the case of the flow path 28, in the vicinity of the exit of the annular flow path 28, cavitation occurs as the cross-sectional area of the flow path increases. In this manner, the main fluid and the secondary fluid can be more uniformly mixed by combining the primary fluid and the secondary fluid in a portion where cavitation is likely to occur.

Further, in the present embodiment, the main body 11 is constituted by the main body outer casing portion 41 and the main body flow path portion 43. By screwing the main body flow path portion 43 and the nozzle member 12 in the main body outer casing portion 41, the shape of the communication flow path 27 and the annular flow path 28 can be easily changed, and the introduction condition of the main fluid and the suction condition of the sub fluid can be expanded. The advantages.

The ozone water produced by the ozone water producing device of the present invention is suitable for: disinfection and sterilization of hands, machines, water tanks, water, floors, air, hot springs, swimming pool water, sea water, environmental water, clothing, vegetables, metal parts, Sterilization, antibacterial, antibacterial, sterilization; cleaning of wafers, semiconductor substrates, photomask substrates, germanium materials, foodstuffs, films, clothing, vegetables, metal parts; removal of photoresist and residues, organic compounds, Oxidation of inorganic compounds and metals; water treatment of wastewater from business sites such as water, sewage, and workshops; purification and decontamination of contaminated sites; pretreatment of plating treatment, foodstuffs, films, clothing, vegetables, and metal parts Surface treatment; bleaching of pulp, promotion of oxidation treatment, and the like.

[Examples]

Next, an ozone dissolution test was carried out using an embodiment of the present invention. The results are shown below.

As shown in Figure 2, use a pump to benefit from a sink that stores tap water. Water is supplied separately by an ozone dissolving device connected in parallel by two rows of pipes. The ozone generated by the ozone generating device is self-primed by the first ozone dissolving device and mixed with the tap water in the first ozone dissolving device. After the ozone mixed water discharged from the first ozone dissolving device is separated into the first remaining ozone containing the insoluble ozone and the first ozone water by the first gas-liquid separating device, the first remaining ozone is further passed through the second ozone dissolving device Self-priming, mixing in the second ozone dissolving device and tap water after the divergence. The ozone mixed water discharged from the second ozone dissolving device is separated into a second residual ozone containing the undissolved ozone and the second ozone water by the second gas-liquid separating device, and then the first ozone water and the second ozone water are combined. The second remaining ozone is reduced to oxygen by an ozonolysis device and discharged. The ozone concentration generated by the ozone generator is measured using a gas phase ozone concentration meter, and the ozone concentration of the combined ozone water is measured using a liquid phase ozone concentration meter.

In this test, the amount of ozone per unit time was calculated from the liquid phase ozone concentration of ozone water produced and the gas phase ozone concentration generated by the ozone generator, and the ozone dissolution efficiency was determined by the following formula.

Dissolution efficiency (%) = amount of ozone in the liquid phase / amount of gas phase ozone introduced × 100

[Measurement of gas phase ozone concentration]

Gas phase ozone concentration meter: OZ-30 made by East Asia DKK Co., Ltd.

[Determination of liquid phase ozone concentration]

Liquid phase ozone concentration meter: OZ-20 made by East Asia DKK Co., Ltd.

The ozone dissolution test of the present invention is directed to Examples 1 to 3 and Comparative Examples 1 to 3 were each carried out. The test results are shown in Tables 1 to 3.

[Example 1]

The ozone dissolving device is an ozone dissolving test using an ejector having a water supply pressure of 0.01 to 0.05 MPa and a suction pressure (measuring pressure) of -1 to 21 kPa when the flow rate of tap water is 10 to 25 L/min, and the ozone dissolution efficiency is as follows. 1 is shown.

[Embodiment 2]

The ozone dissolving device is an ozone dissolving test using an ejector having a water supply pressure of 0.01 to 0.09 MPa and a suction pressure (measuring pressure) of -7 to -50 kPa when the flow rate of tap water is 10 to 25 L/min, and the ozone dissolution efficiency is as follows. 2 is shown.

[Example 3]

The ozone dissolving device is an ozone dissolving test using an ejector having a water supply pressure of 0.04 to 0.27 MPa and a suction pressure (measuring pressure) of -15 to -72 kPa when the flow rate of tap water is 10 to 25 L/min, and the ozone dissolution efficiency is as follows. 3 is shown.

Further, the ozone self-priming performance of each Ps1 (measurement pressure) at a certain time when the ratio of Ps1 (calculation pressure) and Ps2 (calculation pressure) was investigated was examined, and the results at this time are shown in Table 4.

Furthermore, the relationship between PV1 and Ps1 (measurement pressure) is shown in Table 5.

[Comparative Example 1]

Using the ozone dissolving device used in Example 1, the ozone dissolving test was carried out using a separate pipe instead of the parallel piping, and the oxygen dissolution efficiency at this time is shown in Table 1.

[Comparative Example 2]

Using the ozone dissolving device used in Example 2, the ozone dissolving test was carried out using a separate pipe instead of the parallel piping, and the oxygen dissolution efficiency at this time is shown in Table 2.

[Comparative Example 3]

Using the ozone dissolving device used in Example 3, the ozone dissolving test was carried out using a separate pipe instead of the parallel piping, and the oxygen dissolution efficiency at this time is shown in Table 3.

According to the results of Table 1, the water supply pressures of Examples 1-1 to 1-6 were lower than those of Comparative Examples 1-1 to 1-3 at the same water flow rate. Further, the ozone dissolution efficiency was reduced only when Ps1 (metering pressure) / Ps2 (metering pressure) = 0.11.

According to the results of Table 2, the water supply pressures of Examples 2-1 to 2-6 were lower than those of Comparative Examples 2-1 to 2-3 at the same water flow rate. Further, the ozone dissolution efficiencies of Examples 2-1 to 2-6 were higher than those of Comparative Examples 2-1 to 2-3.

According to the results of Table 3, the water supply pressures of Examples 3-1 to 3-6 were lower than those of Comparative Examples 3-1 to 3-3 at the same water flow rate. Further, the ozone dissolution efficiencies of Examples 3-1 to 3-6 were higher than those of Comparative Examples 3-1 to 3-3.

As is clear from the results of Tables 1 to 2, the water supply pressure when ozone water was produced using two injectors was lower than that of using the ejector alone.

In addition, under the condition that Ps1 (calculation pressure) / Ps2 (calculation pressure) is 0.28 or more, it is seen that the dissolution rate of 7 to 19% or more is improved at the same water flow rate, and the water supply pressure is reduced by 50% or more.

According to Table 4, the condition in which ozone can stably self-prime is the suction pressure Ps1 (measurement pressure) Ps1 ≦ -5 kPa.

Further, as is clear from Table 5, the maximum linear velocity LV1max when the suction pressure Ps1 (the gauge pressure) satisfies the condition of Ps1 ≦ -5 kPa is LV1max ≧ 5.42 m/sec.

1‧‧Ozone generator

2‧‧‧Fluid supply device

3a‧‧‧First Ozone Dissolving Unit

3b‧‧‧Second ozone dissolving device

4a‧‧‧First gas-liquid separation device

4b‧‧‧Second gas-liquid separation device

5a‧‧‧First residual ozone

5b‧‧‧Second residual ozone

6a‧‧‧First ozone water

6b‧‧‧Second ozone water

7a‧‧‧First flow control valve

7b‧‧‧Second flow regulating valve

8a‧‧‧First back pressure regulating valve

8b‧‧‧Second back pressure regulating valve

9‧‧‧Waste ozone treatment unit

10‧‧‧Injector

11‧‧‧ Subject

12‧‧‧Nozzle components

13‧‧‧First entrance flow path

14‧‧‧Second entrance flow path

15‧‧‧Export flow path

16‧‧‧Receiving Department

17‧‧‧Reducing section

18‧‧‧ throat

19‧‧‧Expanding Department

20‧‧‧Ring groove

21‧‧‧Mask thread

22‧‧‧Cylinder

23‧‧‧Protruding

24‧‧‧ Male thread

25‧‧‧Exporting

26‧‧‧Cone

27‧‧‧Connected flow path

28‧‧‧Circular flow path

29‧‧‧First entrance opening

30‧‧‧Second entrance opening

31‧‧‧Export opening

32‧‧‧ bottom

33‧‧‧ end face

34, 34b‧‧‧ Groove Department

35, 35b‧‧‧ Groove Department

36‧‧‧outer groove

37‧‧‧Spiral groove

38‧‧‧Intermediate

39‧‧‧Connecting Department

40‧‧‧Female thread

41‧‧‧ body shell

42‧‧‧ Male thread

43‧‧‧Main flow section

44‧‧‧Revolving Department

45‧‧‧flat

101‧‧‧Ozone generating means

102‧‧‧Ozone dissolution means

103‧‧‧ gas-liquid separation means

104‧‧‧ Waste ozone treatment

201‧‧‧Ozone water manufacturing equipment

202‧‧‧Remaining ozone separation unit

203‧‧‧Water supply port

205‧‧Ozone sink

214a, 214b‧‧‧Parallel piping department

216‧‧‧Injector

223‧‧Ozone generator

224‧‧‧Ozone return tube

228‧‧‧Ozone decomposition device

301‧‧‧Ozone generating means

301a‧‧‧Other means of ozone production

302‧‧‧Ozone dissolution means

302a‧‧‧Other ozone dissolution means

302b‧‧‧3rd ozone dissolution means

303‧‧‧ Raw water supply device

303a‧‧‧Other raw water supply devices

304‧‧‧Water system

304a‧‧‧Other water systems

305‧‧Ozone use equipment

305a‧‧‧Other ozone utilization equipment

306‧‧‧Exhaust treatment unit

307‧‧‧ gas-liquid separation means

329‧‧‧Circulating pump

329a‧‧‧Other circulating pumps

f‧‧‧Pipe

Fig. 1 is a flow chart showing the ozone water production program of the first embodiment of the present invention.

Fig. 2 is a flow chart showing the ozone water producing apparatus of the first embodiment of the present invention.

Fig. 3 is a longitudinal sectional view showing the ejector of the first embodiment of the present invention.

Fig. 4 is an enlarged view of the main part of Fig. 3.

Fig. 5 is a front view showing a groove portion formed on the main body of the injector of Fig. 3.

Fig. 6 is a front elevational view showing another form of the groove portion formed on the main body of the injector of Fig. 3.

Fig. 7 is a front view showing a groove portion formed on the nozzle of the injector of Fig. 3.

Fig. 8 is a front view showing another form of the groove portion formed on the nozzle of the injector of Fig. 3.

Fig. 9a is a longitudinal sectional view showing another injector of the first embodiment of the present invention.

Figure 9b is a perspective view showing the nozzle of Figure 9a.

Figure 10 is a flow chart of a conventional ozone water production system.

Fig. 11 is a schematic structural view of another conventional ozone water producing apparatus.

Figure 12 is a flow chart of other conventional ozone water manufacturing systems.

Claims (14)

An ozone water producing method comprising: an ozone generating means, means for supplying a fluid, an ozone dissolving means for dissolving ozone in the supplied fluid, and a gas for separating ozone which cannot be completely dissolved by the ozone dissolving means The liquid separation means is characterized in that the ozone dissolving means and the gas-liquid separating means form a unit on the same processing line, and at least two of the units are disposed on each processing line which is branched from the means for supplying the fluid. An ozone dissolution means for transferring ozone separated by the gas-liquid separation means of one of the units to the other unit. The method for producing ozone water according to claim 1, wherein the ozone dissolving means of each of the units is a first ozone dissolving means, a second ozone dissolving means, and a suction pressure of the first ozone dissolving means (negative pressure) The ratio of the suction pressure (negative pressure) to the second ozone dissolution means satisfies the following relationship A/B ≧ 0.28 (1) A: suction pressure of the first ozone dissolution means (calculation pressure) B: second ozone dissolution The suction pressure of the means (measured pressure). The method for producing ozone water according to the second aspect of the invention, wherein the first ozone dissolution means has a suction pressure (a gauge pressure) of -5 kPa or less. Ozone water as described in any one of claims 1 to 3 In the manufacturing method, the maximum linear velocity of the fluid by the first ozone dissolving means is 5.42 m/sec or more, and when the direction of passage of the fluid is the axis, the relationship between the maximum sectional area and the minimum sectional area ratio of the shaft satisfies the following relationship C/D≧2.2 (2) C: Maximum value of sectional area D: Minimum value of sectional area. An ozone water producing device comprising: an ozone generator, a fluid supply device, an ozone dissolving device for dissolving ozone in a fluid supplied by the supplying device, and separating ozone which cannot be completely dissolved by the ozone dissolving device The gas-liquid separation device has at least a first unit and a second unit; the first unit is provided with a first ozone dissolving device and a first gas liquid disposed on the same processing line as the first ozone dissolving device a second unit comprising: a second ozone dissolving device; and a second gas-liquid separating device disposed on the same processing line as the second ozone dissolving device; the first ozone dissolving device and the second ozone dissolving device The first flow regulating valve and the second flow regulating valve are respectively disposed on the upstream side, and the ozone water after the gas-liquid separation is disposed on the downstream side of the first gas-liquid separating device and the second gas-liquid separating device, respectively. a first back pressure regulating valve and a second back pressure regulating valve for back pressure; at a processing line for supplying fluid from the fluid supply device described above The differences between the respective processing lines configuring the first unit and the second unit, so that the first gas-liquid separating means and the second coupling means ozone dissolution. The ozone water producing apparatus according to claim 5, wherein a ratio of a suction pressure (negative pressure) of the first ozone dissolving device to a suction pressure (negative pressure) of the second ozone dissolving device satisfies the following relationship A/B ≧ 0.28 (1) A: suction pressure (calculation pressure) of the first ozone dissolving device B: suction pressure (calculation pressure) of the second ozone dissolving device. The ozone water producing apparatus according to claim 6, wherein the first ozone dissolving device has a suction pressure (counting pressure) of -5 kPa or less. The ozone water producing apparatus according to any one of claims 5 to 7, wherein the maximum linear velocity of the fluid passing through the first ozone dissolving device is 5.42 m/sec or more, and the direction of passage of the fluid is In the case of the shaft, the maximum cross-sectional area and the minimum cross-sectional area ratio for the shaft satisfy the following relationship C/D ≧ 2.2 (2) C: maximum value of the sectional area D: the minimum value of the sectional area. The ozone water producing apparatus according to any one of claims 5 to 8, wherein the ozone dissolving device is an ejector or an aspirator. The apparatus for producing ozone water according to claim 9, wherein The ejector is formed continuously with a reduced diameter portion, a throat portion, and an enlarged diameter portion. The ozone water producing apparatus according to claim 9, wherein the injector includes a first flow path forming means, a second flow path forming means, a third flow path forming means, and a swirling flow generating means; The first-class path forming means has a first inlet portion and a first passage portion extending in the longitudinal direction, and a first inlet flow path is formed from the first inlet portion to the first passage portion; the second flow path forming means has a second An inlet portion and a second passage portion extending along a tapered surface surrounding the circumference of the first passage portion, and a second inlet flow path formed from the second inlet portion to the second passage portion; the third flow path forming means a small-diameter portion, an enlarged diameter portion, and an outlet portion, wherein the flow path area is enlarged from the small-diameter portion to the enlarged diameter portion and the outlet portion, and the first inlet flow is formed in an end portion of the small-diameter portion And an exit flow path of the second inlet flow path; the swirl flow generation means for generating a swirling flow in at least one of the first inlet flow path and the second inlet flow path. The ozone water producing apparatus according to claim 11, further comprising: a main body in which a concave portion having a truncated cone shape is formed; and a nozzle member in which a convex portion fitted to the concave portion is formed; the first inlet flow a path formed in the inside of the nozzle member; the second inlet flow path being formed between an inner circumferential surface of the concave portion and an outer circumferential surface of the convex portion, and an end of the main body in which the concave portion is formed The surface is formed between the end surface of the nozzle member in which the convex portion is formed; the outlet flow path is formed inside the main body; and the swirling flow generation means is formed on the inner circumferential surface of the concave portion and the outer circumferential surface of the convex portion At least one of the end faces and/or at least one of the end faces of the main body and the end faces of the nozzle members are formed in a plurality of groove portions provided in the circumferential direction. The ozone water producing apparatus according to claim 12, wherein the groove portion is provided on at least one of an inner circumferential surface of the concave portion and an outer circumferential surface of the convex portion; and the concave portion and the convex portion are configured to be When the convex portion is fitted into the concave portion, the inner circumferential surface of the concave portion and the outer circumferential surface of the convex portion have the same inclination angle, and at least a part of the inner circumferential surface of the concave portion and the outer circumferential surface of the convex portion abut each other. The groove portion is provided from an upstream end portion of at least one of the concave portion and the convex portion to an intermediate portion, and an inner circumferential surface of the concave portion and an outer circumferential surface of the convex portion on a downstream side of the intermediate portion A flow path having a constant cross-sectional area of the flow path is formed between them. The ozone water producing apparatus according to claim 12, wherein the main body has a casing portion and a flow path portion, and the casing portion is provided with a circle having a female thread portion on an inner circumferential surface of both end portions a tubular portion, and a connecting portion protruding from a side surface of the cylindrical portion and having the second inlet portion at an end portion; In the flow path portion, a male screw portion that is screwed to the female screw portion on one end side of the outer casing portion is provided at one end portion, and the recess portion is provided at the other end portion to form the outlet flow path therein. The nozzle member includes: The convex portion formed at one end portion on the first inlet flow path side, the other end portion formed on the opposite side of the first inlet flow path, and the female thread portion provided on the outer peripheral surface on the other end side of the outer casing portion a cylindrical portion of the male screw portion of the screw and an intermediate portion formed in a substantially cylindrical shape between the convex portion and the cylindrical portion; an outer diameter of the intermediate portion is smaller than an outer diameter of the cylindrical portion and intermediate to the middle The outer diameter of the end portion of the convex portion connected to the portion is small, and the second inlet flow path is formed between the inner circumferential surface of the concave portion and the outer circumferential surface of the convex portion, and around the intermediate portion.