JP2003212518A - Ozone containing water feeder - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ozone containing water feeder which enables long- distance transfer of high concentration ozone containing water without dissolving other components. <P>SOLUTION: The ozone containing water feeder 1 possesses a cooling means 16 for cooling pure water, an ozone containing water-producing means 2 which produces ozone containing water by dissolving ozone into cooled pure water and an ozone containing water feed pipe 4 for transferring ozone containing water. The ozone containing water feed pipe 4 consists of thermally insulated piping. The temperature of the ozone containing water which is discharged from the tip of the pipe under an ordinary temperature atmosphere is in the range of 5-20°C. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone water supply apparatus, and more particularly to an ozone water supply apparatus suitable for use in cleaning and resist stripping in the manufacturing process of electronic parts and the like.

[0002]

2. Description of the Related Art Ozone water has been conventionally used for wet cleaning of electronic parts and the like, and resist stripping in a photo process. Ozone water is produced by dissolving ozone in ultrapure water. The dissolved ozone undergoes rapid self-decomposition, so the ozone concentration decreases during the transfer of ozone water. For this reason, conventionally, an ozone water producing apparatus has been installed near the point of use to make the transfer distance as short as possible.

However, in this method, if there are a plurality of points of use, an ozone water producing apparatus must be installed for each point of use, so that there is a problem that the equipment cost increases. For example, in a series of electronic component manufacturing processes, since there are generally about 10 use points, there is an increasing need to manufacture ozone water at one place and distribute it to each use point. . In this case, the transfer distance is inevitably long, and thus prevention of a decrease in ozone concentration during transfer becomes a major issue.

Therefore, in Japanese Patent Laid-Open No. 2000-37695, carbon dioxide or an organic compound is dissolved in ozone water to suppress self-decomposition of ozone water and prevent a decrease in ozone concentration in ozone water being transferred. It has been proposed that this enables long-distance transport of ozone water.

[0005]

However, if components other than ozone, such as carbon dioxide or organic compounds, are dissolved in ozone water, the cleaning effect may be reduced when used for cleaning electronic parts and the like. . As is clear from the fact that it is preferable to use ultrapure water with extremely high purity for the production of ozone water, it is necessary to avoid even the inclusion of a slight amount of impurities, for example, trace amounts of impurities contained in carbon dioxide gas. May adversely affect the cleaning effect. Furthermore, when an organic compound is dissolved in ozone water, it is necessary to decompose the organic substances contained in the ozone water in the wastewater treatment after use, so the advantage of ozone water that the wastewater treatment is extremely easy is lost. Problems also arise.

The present invention has been made to solve such a problem, and an object of the present invention is to provide an ozone water supply apparatus which enables long-distance transfer of highly concentrated ozone water without dissolving other components. And

[0007]

The object of the present invention is to provide a cooling means for cooling pure water, an ozone water producing means for producing ozone water by dissolving ozone in the cooled pure water, and the ozone water. And an ozone water supply pipe for transporting the ozone water, the ozone water supply pipe being an adiabatic pipe, and the temperature of the ozone water discharged from the tip in a normal temperature atmosphere is in the range of 5 ° C to 20 ° C. This is achieved by the ozone water supply device.

In this ozone water supply apparatus, the ozone water supply pipe may be branched in the middle to have a plurality of tip portions. In this case, it is preferable that the temperature of the ozone water discharged from each tip in the normal temperature atmosphere is in the range of 5 ° C to 20 ° C.

The temperature of the ozone water discharged from the tip of the ozone water supply pipe rises to near the ambient temperature if left undisturbed. However, if necessary, the ozone water may be added to the tip of the ozone water supply pipe. You may provide the heating means which heats. As a result, the cleaning effect of ozone water can be further enhanced.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION The actual mode of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a block diagram showing a schematic configuration of an ozone water supply device according to an embodiment of the present invention. As shown in the figure, the ozone water supply device 1
The ozone water producing apparatus 2 is provided.

The ozone water producing apparatus 2 includes a pure water introducing pipe 12,
The ozone gas introduction pipe 13 and the ozone water supply pipe 4 are connected, and the ozone water introduced from the ozone gas introduction pipe 13 is dissolved in the pure water introduced from the pure water introduction pipe 12 to produce ozone water, and then the ozone water The ozone water can be transferred through the supply pipe 4.

The pure water and ozone gas to be introduced can be manufactured by a known pure water manufacturing device and ozone gas generator, respectively. As the pure water producing apparatus, for example, a reverse osmosis pure water producing apparatus can be used, and it is preferable to provide a cartridge of ion exchange resin or the like so that highly pure ultrapure water can be produced. As an ozone gas generator,
For example, an electrolytic ozone generator that electrolyzes pure water to generate high-concentration ozone gas can be used.

The ozone water producing apparatus 2 can also have a known structure. For example, ozone water is introduced into a porous tube made of fluororesin, and ozone gas flowing along the outer surface of this porous tube is It is possible to adopt a configuration in which suction is performed into the tube by the flow of pure water. Excess ozone gas is discharged through the ozone gas discharge pipe 14 and processed in a processing device (not shown).

A cooling device 16 is provided in the pure water introducing pipe 12. The cooling device 16 includes a heat exchanger made of quartz glass and can cool the pure water passing through it by heat exchange with the low temperature chiller water.

The ozone water supply pipe 4 is provided with a plurality of tip portions 4a, 4b, 4c by branching into a plurality on the way, and the tip portions 4a to 4c are respectively arranged at a plurality of use points. The ozone water supply pipe 4 is a heat insulating pipe, and it is preferable to use one made of fluororesin in consideration of corrosion resistance and the like. In addition, when the distance to the point of use is very long or the ambient temperature is high, for example, use resin or metal piping with an organic heat insulating material (polyethylene foam, polystyrene foam, polyurethane foam, etc.) or inorganic It is possible to use those covered with a heat insulating material (glass wool, rock wool, a foamed molded product containing calcium silicate as a main component).

A heating device 6 is provided at each of the tip ends 4a to 4c of the ozone water supply pipe 4. This heating device 6
For example, it is composed of an electric heater and can heat the supplied ozone water to a desired temperature.

Next, the operation of the ozone water supply device having the above construction will be described. First, ozone water production device 2
Then, pure water (preferably ultrapure water) and ozone gas are supplied to the ozone water producing apparatus 2 to produce ozone water. Since the cooling device 16 is interposed in the pure water introduction pipe 12, the pure water after passing through the cooling device 16 is sufficiently cooled. Thus, by dissolving ozone gas in low temperature pure water, the solubility can be increased as compared with the case where pure water is at room temperature (25 ° C.), and high concentration ozone water can be produced.

The produced ozone water is supplied to the ozone water supply pipe 4.
It is transferred to each use point via. In the present embodiment, since the ozone water supply pipe 4 is an adiabatic pipe, it is necessary to transfer the ozone water to a plurality of use points, so that the temperature rise of the ozone water is suppressed even if the ozone water transfer distance is long. You can The temperature of the ozone water discharged from each tip of the ozone water supply pipe 4 is preferably maintained in the range of 5 ° C to 20 ° C in a normal temperature (25 ° C) atmosphere, and more preferably in the range of 10 ° C to 15 ° C. . By keeping the temperature of the ozone water during transfer always low, it is possible to maintain the ozone decomposition rate in a slow state even with the ozone water transferred to each use point. As a result,
It is possible to prevent a decrease in ozone concentration during transfer, and it is possible to supply ozone water having a high ozone concentration to each use point.

The ozone water supply pipe 4 is a heat insulating pipe, but if the transfer distance becomes long (for example, 100 m or more), some heat insulating loss cannot be avoided. Therefore, in consideration of such adiabatic loss, the cooling temperature of the pure water by the cooling device 16 may be determined so that the temperature of the ozone water supplied from the tip portion falls within the above range.

At each point of use, the heating device 6 is operated as necessary to heat the ozone water. For example, when ozone water is used for cleaning electronic parts and the like, it is preferably heated to 40 to 50 ° C. This is because the cleaning ability of ozone water improves as the temperature increases, while the ozone decomposition problem occurs if the temperature is too high. In this way, by heating the ozone water just before using it, the cleaning ability can be enhanced while maintaining the ozone concentration at a high level.

[0021]

EXAMPLES The present invention will be described in more detail with reference to Examples and Comparative Examples.

(Example) By setting the flow rate of pure water passing through the pure water introducing pipe 12 to 5 L / min and setting the temperature of the chiller water of the cooling device 16 to 5 ° C., the ozone water producing device 2
The pure water introduced into was cooled to 12 ° C. Further, the flow rate of the ozone gas passing through the ozone gas introduction pipe 13 is set to 12 g / h.
And The ozone concentration of the ozone water produced by the ozone water producing apparatus 2 was 28 ppm, and the dissolution efficiency was 70%. An ultraviolet absorption monitor was used to measure the ozone concentration.

The ozone water supply pipe 4 is made of a fluororesin and has three tip portions 4a, 4b and 4c branched in the middle thereof. In this embodiment, the distances from the ozone water producing device 2 to the respective tip portions 4a to 4c are 50 m, 100 m, 200.
m. In a normal temperature atmosphere, each of these tips 4a
The temperature of the ozone water discharged from ~ 4c was about 12 ° C, and the low temperature during the production of ozone water could be almost maintained. As a result, the ozone concentration of the ozone water discharged from each tip is 27 ppm, 26 ppm, and 25 ppm in order from the one with the shortest distance from the ozone water producing device 2, and the concentration is sufficiently high even if the transfer distance becomes long. I was able to maintain.

(Comparative Example) Ozone water was supplied under the same conditions as in Example except that pure water was introduced into the ozone water producing apparatus 2 without operating the cooling device 16. The water temperature introduced into the ozone water producing device 2 is 28 ° C., the ozone concentration of the ozone water produced by the ozone water producing device 2 is 21 ppm, and the dissolution efficiency is 53%.
Met.

In this case, the temperature of the ozone water discharged from each tip of the ozone water supply pipe 4 was about 28 ° C. As a result, the ozone concentration of the ozone water discharged from each tip was 18 ppm, 15 ppm, and 11 ppm in order from the one with the shortest distance from the ozone water producing apparatus 2, and drastically decreased as the transfer distance became longer.

[0026]

As is apparent from the above description, according to the ozone water supply apparatus of the present invention, it is possible to transfer high concentration ozone water over a long distance without dissolving other components.

[Brief description of drawings]

FIG. 1 is a block diagram showing a schematic configuration of an ozone water supply device according to an embodiment of the present invention.

[Explanation of symbols]

1 Ozone supply device 2 Ozone water production equipment 4 Ozone water supply pipe 6 heating device 12 Pure water introduction tube 13 Ozone gas introduction tube 16 Cooling system

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Claims (3)

[Claims] 1. A cooling means for cooling pure water, an ozone water producing means for producing ozone water by dissolving ozone in the cooled pure water, and an ozone water supply pipe for transferring the ozone water, The ozone water supply pipe is an adiabatic pipe, and the temperature of the ozone water discharged from the tip is 5 ° C. to 2 ° C. in a normal temperature atmosphere.
An ozone water supply device characterized by being in the range of 0 ° C. 2. The ozone water supply pipe is branched midway and has a plurality of tips, and the temperature of the ozone water discharged from each tip is 5 ° C. to 20 ° C. in a normal temperature atmosphere.
The ozone water supply device according to claim 1, wherein the ozone water supply device is in the range of ° C. 3. The ozone water supply apparatus according to claim 1, wherein a heating means for heating the ozone water is provided at the tip of the ozone water supply pipe.