JP2002012321A - Substrate transfer device - Google Patents

Abstract

(57) [Summary] (Modified) [PROBLEMS] To enable stable and accurate suction and transfer of substrates of various shapes in a manufacturing process of a liquid crystal display or the like. SOLUTION: A suction pad 57e is attached to a beam rail 59c so as to be movable in a longitudinal direction, and the beam rail 59c has a rectangular frame-shaped frame 59 at both ends.
So that it can be fixed at any position while sliding along. As a result, the suction pad 57e and the beam rail 59
c can be positioned accurately in correspondence with the substrate 2 having an arbitrary shape and size, and can stabilize the suction conveyance of the substrate 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to an improvement in a substrate transfer device suitable for transferring a flat panel display represented by a liquid crystal substrate or the like.

[0002]

2. Description of the Related Art In recent years, research and development of electronic equipment has been remarkable, and in conjunction with the advancement and development of information technology (IT) via a network, a wide variety of model products have been provided.

In particular, as electronic devices and the like have become lighter and thinner as the research and development of semiconductor technology has progressed, communication devices equipped with computers have become more mobile.

In television receivers and the like, a liquid crystal display having a high-definition, thin and large screen has been used in place of a color cathode-ray tube due to advances in liquid crystal panel manufacturing technology and the like.

FIG. 4 shows a part of a liquid crystal display manufacturing process. In a storage shelf (magazine) 1, a large number of (glass) substrates 2 on which TFTs (thin film transistors) are arranged in a matrix are stored. The substrates 2 are sequentially taken out one by one by a scalar type take-out robot 3 and placed on a relay table 4.

[0006] The substrate 2 on the relay table 4 is transported to an adhesive bonding device 6 via a first substrate transporting device 5 configured in a linear form, and as shown in FIG. An anisotropic conductive tape (film) 6a is attached to the portion 2a.
Substrate 2 having anisotropic conductive tape 6a adhered on electrode portion 2a
Is transported to a temporary pressure bonding device (not shown) by a second linear substrate transport device 7. In the temporary crimping device, as shown in FIG. 5, TCP (tape carrier pa) is used.
The electronic components 8 such as LSIs, which are made of a package, are thermocompression-bonded sequentially while being positioned from above the anisotropic conductive tape 6a. After that, a plurality of electronic components 8 are collectively thermocompression-bonded and fixed by a permanent bonding device (not shown), and then a liquid crystal display panel is manufactured through connection of a circuit board common to each electronic component 8 by a circuit board mounting device. Is done.

Since the scanning electrodes and the data electrodes are formed in a matrix on the rectangular substrate 2 in the vertical and horizontal directions, as shown in FIG. It is necessary to perform the attachment and the mounting of the electronic component 8, respectively.
It is placed on the θ table and is sequentially subjected to a rotational drive operation.

Of course, in the transfer operation of the substrate 2 by the take-out robot 3 and the first and second substrate transfer devices 5 and 7, interference between adjacent devices is controlled by program control by a control device (not shown). Control is performed so that contact or the like is avoided.

Therefore, the first substrate transfer device 5 is configured as shown in FIGS.

FIG. 6 is an enlarged front view of the first substrate transfer apparatus 5, and FIG. 7 is a right side view thereof. As shown in FIG. The support cross beam 52 suspends and fixes a ball screw mechanism 53 downward.

The ball screw mechanism 53 includes a DC motor 53a
Drives the ball screw 53b, and the transfer arm 54 screwed to the ball screw 53b is guided by the guide beam 53c.
And is movable in the longitudinal direction (left and right directions in the figure) while being guided.

A vertically movable cylinder 55 is attached and fixed to the linearly movable transfer arm 54. The lower end of a plunger 55a of the vertically movable cylinder 55 has a suction support plate 5 attached thereto.
6 is fixedly provided.

FIG. 8 is an enlarged plan view of the suction support plate 56 viewed from the AA plane in FIG. 6 in the direction of the arrow. The suction support plate 56 has a rectangular shape, and one suction pad is provided at one corner (corner). 57 (5
71) is fixedly provided with its suction surface facing downward. The guide slits 56a and 56 are elongated in three directions starting from the one corner of the suction support plate 56, that is, in the directions orthogonal to the X and Y directions and the diagonal directions therebetween.
b, 56c are provided, and the guide slit 56
The other suction pads 57 (572, 573, and 574) are provided at a, 56b, and 56c so as to be movable in the longitudinal direction.

The three suction pads 57 (57) movable while being guided by the guide slits 56a, 56b, 56c.
2, 573, 574) have the same structure, and are cross-sectional views of FIG.
For example, as shown in the cross-sectional view of FIG. 10 as viewed from the line CC in FIG. 9 in the direction of the arrow, the suction pad 572 is fixed by the bolt 57a at an arbitrary position while being adjusted and moved along the slit 56a. It is configured as follows.

Accordingly, as shown by broken lines in FIG. 8, the substrate 2 sucked and conveyed by the first substrate conveying device 5 has four suction pads 57 (571 to 571) positioned at four corners of the substrate 2, respectively. 574), and is conveyed by the operation of the vertical cylinder 55 and the DC motor 53a.

Each suction pad 57 is connected via a pipe 57b to a vacuum source such as a suction pump (not shown) having an electromagnetic valve.
Is greatly shaken by the transfer movement of the substrate 2 in the left-right direction. However, the pipe 57b and the like are configured to be guided and moved by a caterpillar guide 52a provided between the transfer arm 54 and the supporting cross beam 52 so as not to be damaged by the swinging operation. The first substrate transport device 5 has been described above, but the second substrate transport device 7
Are similarly configured.

[0017]

As described above, in the conventional substrate transfer apparatus, the suction pad 57 attached to the suction support plate 56 changes its suction position in accordance with the shape and size of the substrate 2. The guide slits 56a, 56b, and 56c are configured to be movable and fixed by being guided by the three guide slits 56a, 56b, and 56c, respectively.

However, in the conventional apparatus, one of the three suction pads 57 (suction pad 574) moves only along the guide slit 56c formed at a predetermined angle (on a diagonal line). . Accordingly, the suction pads 57 are supported at positions deviated from the four corners of the substrate 2 having a rectangular shape in which the length and width ratios are different and the diagonal line does not coincide with the length direction of the guide slit 56c. In particular, the suction support transfer on the large-sized substrate 2 becomes unstable. The instability of the suction support of the substrate 2 has hindered the speeding up and efficiency of the liquid crystal panel manufacturing process and the like.

Accordingly, the present invention provides a substrate transfer apparatus capable of flexibly adapting to various shapes and sizes of substrates, securely and accurately adsorbing and supporting the substrate, and performing stable transfer. Aim.

[0020]

SUMMARY OF THE INVENTION The present invention relates to a substrate transfer apparatus configured to suction and transfer a substrate by a plurality of suction pads attached to a transfer arm.
A frame which is framed in a rectangular shape by the rail member, a beam rail which is inserted between the mutually opposite rail members of the frame and is movable in the longitudinal direction of the rail member, and which moves in the longitudinal direction along the beam rail And a plurality of freely provided suction pads.

As described above, the beam rail is inserted between the opposed rail members of the rectangular frame, and the plurality of suction pads are movably provided on the beam rail. Therefore, the suction pad has an arbitrary shape and size. Positioning and fixing can be accurately performed corresponding to the substrate, and the suction and transfer of the substrate can be stabilized.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of a substrate transfer apparatus according to the present invention will be described below in detail with reference to FIGS. The same components as those of the conventional substrate transfer device shown in FIGS. 4 to 10 are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 1 is a front view showing an embodiment of the substrate transfer apparatus according to the present invention, and FIG. 2 is a plan view taken along line AA of FIG.

In the apparatus shown in FIG.
The vertical movement cylinder 55 is attached and fixed to the lower end of the plunger 55a.
The frame 59 is mounted and fixed via the support column 58a.

As shown in an enlarged plan view in FIG. 2, the frame 59 is formed in a rectangular shape by connecting four long rail members 59a by connecting members 59b. Rail members 5 facing each other
Three beam rails 59c are arranged side by side between 9a and 59a (right and left rail members in FIG. 2).

As shown in the enlarged cross-sectional view of FIG. 3 as viewed from the direction of arrows from the line BB of FIG. 2, the beam rail 59c has a concave shape formed by bending so that both ends of the cross section face inward. The suction pad 57 (57e) is configured so as to be freely movable in the longitudinal direction of the beam rail 59c and fixed at an arbitrary position by a bolt 59d.

The four rail members 59a constituting the frame 59 also have the same cross-sectional structure as the above-mentioned beam rail 59c. Each of the beam rail members 59c has a rail member at both ends similarly formed by bolts 59d. It can be positioned and fixed appropriately while freely moving in the longitudinal direction of 59a.

Therefore, according to this embodiment, the suction pad 57 can be attached to each rail member 59a so as to be movable in the longitudinal direction and positioned and fixed at any position by the bolt 59d.

Each suction pad 57e is configured to be connected to a vacuum source such as an intake pump for each predetermined set. Specifically, a set of four suction pads 57e corresponding to the substrate 2 indicated by broken lines in FIG. 2 is provided, and a total of six suction pads including the four suction pads 57e and attached to three beam rails 59c are provided. A total of 14 suction pads 57e attached to two sets, three beam rails 59c and four rail members 59a are set to three sets, and the suction pads 57e can be connected to a vacuum source for each set. I do. Here, the connection between the suction pads 57e of each set and the vacuum source may be switched using an electromagnetic switching valve or the like. Thus, even when the dimensions of the substrate 2 are changed, only the suction pads 57e required for suctioning the substrate 2 can be connected to the vacuum source, so that the vacuum pressure from the vacuum source can be used effectively. it can.

Each beam rail 59c has a bolt 59d.
It is necessary to movably connect the rail member 59a to the rail member 59a. However, at both ends of the concave body having a transverse cross section, it is possible to connect the rail member 59a by cutting off the bottom portion while leaving the upper side portion.

As described above, in the substrate transfer apparatus of the above-described embodiment, the plurality of suction pads 57 attached to the beam rail 59c are moved in a direction intersecting with the direction of movement of the beam rail 59c. Can be fixed in position.
Therefore, by attaching two suction pads 57 to at least a pair of beam rails 59c, respectively, as shown by broken lines in FIG. The substrate 2 can be positioned and fixed, and can hold the substrate 2 by suction.

However, for the large substrate 2, FIG.
As shown in FIG. 2, a plurality of beam rails 59c (3 in FIG. 2)
The suction pads 57 are arranged in parallel with each other, not only at the four corners, but also at an intermediate position between each side, so that stable suction conveyance can be performed even for a large and heavy substrate 2. it can.

In this embodiment, as shown in FIG. 1, the connecting mechanism 58 for connecting the transfer arm 54 and the frame 59 connects the frame 59 on the center line of the frame 59, that is, on the vertical line at the position of the center of gravity. Since it is configured to support, the load is balanced with respect to the connecting mechanism 58 and the transfer arm 54 and does not become an uneven load, so that stable suction transfer of the substrate 2 can be realized.

In the above embodiment, the transfer arm 54
Is configured so that the suction pad 57 can transport the substrate 2 in the vertical direction by the vertical movement cylinder 55. However, the vertical movement cylinder 55 is omitted, and the table side on which the substrate 2 is placed can be moved up and down. However, the transfer arm 54 may be configured to simply transfer the substrate 2 in the left-right direction.

Further, in the above-described substrate transfer apparatus, the transfer arm 54 has been described as being attached to the ball screw mechanism and linearly moving in the left-right direction. However, the present invention is not limited to this. It can be replaced with a rotary transfer arm of a SCARA robot.

As described above, the substrate transfer apparatus according to the present invention can flexibly and accurately cope with substrates having different sizes and shapes, and can perform stable suction transfer, and can be applied to, for example, a liquid crystal panel manufacturing line. As a result, a remarkable effect can be exhibited.

[0037]

As described above, according to the substrate transfer apparatus of the present invention, the suction pad is movably provided on the beam rail extending over the framed frame, so that the suction holding can be performed in various shapes and shapes. The substrate can be flexibly adapted to the size, and the substrate can be stably and accurately sucked, held and transported, and the speed and efficiency of the substrate assembling and manufacturing process can be increased.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of a substrate transfer device according to the present invention.

FIG. 2 is an enlarged cross-sectional view taken along line AA in FIG.

FIG. 3 is an enlarged cross-sectional view of a main part as viewed in the direction of arrows from line BB in FIG. 2;

FIG. 4 is a schematic configuration diagram showing a part of a liquid crystal display manufacturing process employing a conventional substrate transfer device.

FIG. 5 is an explanatory view showing a state in which an anisotropic conductive tape 7 is attached on electrodes of a substrate 2 in the manufacturing process shown in FIG. 4, and an electronic component 9 is positioned and mounted on the anisotropic conductive tape 7; It is.

6 is a front view showing the first substrate transfer device shown in FIG.

FIG. 7 is a right side view of the apparatus shown in FIG. 6;

FIG. 8 is an enlarged plan view of the device shown in FIG. 6 as viewed in the direction of arrows from line AA.

9 is an enlarged cross-sectional view of the device shown in FIG. 8 as viewed in the direction of arrows from line BB.

10 is a cross-sectional view of the device shown in FIG. 9 as viewed in the direction of arrows from line CC.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 storage shelf (magazine) 2 (glass) substrate 3 take-out robot 4 relay table 5 first substrate transfer device 54 transfer arm 57 suction pad 58 connecting mechanism 59 frame 59a rail member 59c beam rail 6 adhesive bonding device 6a anisotropic Conductive tape 7 Second substrate transfer device

Claims (3)

[Claims] 1. A substrate transfer apparatus configured to suction and transfer a substrate by a plurality of suction pads attached to a transfer arm, comprising: a frame framed in a rectangular shape by rail members; A beam rail that is inserted between the rail members facing each other and that can move in the longitudinal direction along the extended rail member and can be fixed at an arbitrary position; and a beam rail that is movably provided in the longitudinal direction of the beam rail. And a plurality of suction pads. 2. The substrate transfer apparatus according to claim 1, wherein a plurality of said beam rails are arranged in parallel between said rail members arranged opposite to each other. 3. The transfer arm is connected via a connecting mechanism,
The substrate transfer device according to claim 1, wherein the frame is supported and fixed on a vertical line at the position of the center of gravity of the frame.