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JP1737181S - 半導体処理装置用シャワーヘッド - Google Patents

半導体処理装置用シャワーヘッド

Info

Publication number
JP1737181S
JP1737181S JP2022006567F JP2022006567F JP1737181S JP 1737181 S JP1737181 S JP 1737181S JP 2022006567 F JP2022006567 F JP 2022006567F JP 2022006567 F JP2022006567 F JP 2022006567F JP 1737181 S JP1737181 S JP 1737181S
Authority
JP
Japan
Prior art keywords
semiconductor processing
processing equipment
shower head
article
showerhead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022006567F
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English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Application granted granted Critical
Publication of JP1737181S publication Critical patent/JP1737181S/ja
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Links

Abstract

本願に係る物品（以下、「本物品」という。）は、例えば、半導体の製造に用いられる半導体処理装置において処理ガスを放出するためのシャワーヘッドである。
JP2022006567F 2021-09-30 2022-03-29 半導体処理装置用シャワーヘッド Active JP1737181S (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/789,575 USD1038900S1 (en) 2021-09-30 2021-09-30 Showerhead for semiconductor processing

Publications (1)

Publication Number Publication Date
JP1737181S true JP1737181S (ja) 2023-02-17

Family

ID=85198457

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022006567F Active JP1737181S (ja) 2021-09-30 2022-03-29 半導体処理装置用シャワーヘッド
JP2022006566F Active JP1737180S (ja) 2021-09-30 2022-03-29 半導体処理装置用シャワーヘッド

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2022006566F Active JP1737180S (ja) 2021-09-30 2022-03-29 半導体処理装置用シャワーヘッド

Country Status (3)

Country Link
US (1) USD1038900S1 (ja)
JP (2) JP1737181S (ja)
TW (2) TWD229458S (ja)

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USD535673S1 (en) 2004-01-16 2007-01-23 Thermal Dynamics Corporation Gas distributor for a plasma arc torch
JP2005340251A (ja) 2004-05-24 2005-12-08 Shin Etsu Chem Co Ltd プラズマ処理装置用のシャワープレート及びプラズマ処理装置
USD524600S1 (en) 2004-08-26 2006-07-11 Maytag Corporation Convection cover for cooking appliance
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USD724701S1 (en) * 2014-02-04 2015-03-17 ASM IP Holding, B.V. Shower plate
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USD829306S1 (en) * 2016-07-06 2018-09-25 Asm Ip Holding B.V. Shower plate
USD834686S1 (en) * 2016-12-15 2018-11-27 Asm Ip Holding B.V. Shower plate
CA176724S (en) 2017-03-02 2018-07-03 Ebm Papst Landshut Gmbh Engine cap
JP1624794S (ja) 2018-07-24 2019-02-18
USD923756S1 (en) 2019-02-22 2021-06-29 Robert William Aiken Shear gate
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USD948658S1 (en) * 2020-08-03 2022-04-12 Lam Research Corporation High density hole pattern dual plenum hole showerhead assembly

Also Published As

Publication number Publication date
JP1737180S (ja) 2023-02-17
TWD229457S (zh) 2024-01-11
TWD229458S (zh) 2024-01-11
USD1038900S1 (en) 2024-08-13

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