IT8319487A0 - Pompa turbomolecolare sopportata magneticamente. - Google Patents

Pompa turbomolecolare sopportata magneticamente.

Info

Publication number: IT8319487A0
Authority: IT; Italy
Prior art keywords: turbomolecular pump; magnetically supported; magnetically; supported; turbomolecular
Prior art date: 1982-02-11

Application number

IT8319487A

Other languages

English (en)

Other versions

IT8319487A1 (it

IT1161570B (it

Inventor

Willi Becker

Original Assignee

Pfeiffer Vakuumtechnik

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1982-02-11

Filing date

1983-02-09

Publication date

1983-02-09

1983-02-09 Application filed by Pfeiffer Vakuumtechnik filed Critical Pfeiffer Vakuumtechnik

1983-02-09 Publication of IT8319487A0 publication Critical patent/IT8319487A0/it

1984-08-09 Publication of IT8319487A1 publication Critical patent/IT8319487A1/it

1987-03-18 Application granted granted Critical

1987-03-18 Publication of IT1161570B publication Critical patent/IT1161570B/it

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Electromagnetism (AREA)
Non-Positive Displacement Air Blowers (AREA)
Magnetic Bearings And Hydrostatic Bearings (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)

IT19487/83A 1982-02-11 1983-02-09 Pompa turbonolecolare sopportata magneticamente IT1161570B (it)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE3204750A DE3204750C2 (de)	1982-02-11	1982-02-11	Magnetisch gelagerte Turbomolekularpumpe

Publications (3)

Publication Number	Publication Date
IT8319487A0 true IT8319487A0 (it)	1983-02-09
IT8319487A1 IT8319487A1 (it)	1984-08-09
IT1161570B IT1161570B (it)	1987-03-18

Family

ID=6155379

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT19487/83A IT1161570B (it)	1982-02-11	1983-02-09	Pompa turbonolecolare sopportata magneticamente

Country Status (8)

Country	Link
US (1)	US4502832A (it)
JP (1)	JPS58148296A (it)
BE (1)	BE895866A (it)
DE (1)	DE3204750C2 (it)
FR (1)	FR2521230B1 (it)
GB (1)	GB2114663B (it)
IT (1)	IT1161570B (it)
NL (1)	NL8300105A (it)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3410905A1 (de) *	1984-03-24	1985-10-03	Leybold-Heraeus GmbH, 5000 Köln	Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
DE3931661A1 (de) *	1989-08-25	1991-04-04	Leybold Ag	Magnetgelagerte vakuumpumpe
US5290769A (en) *	1989-09-27	1994-03-01	Asta Pharma Aktiengesellschaft	Use of hexadecylphosphocholine for the treatment of psoriasis
DE4114566C2 (de) *	1991-05-04	1999-07-08	Randolf Paul Rolff	Verfahren zur Inbetriebnahme einer mit einem magnetgelagerten Rotor ausgerüsteten Maschine sowie Schaltung zur Durchführung dieses Verfahrens
FR2683277B1 (fr) *	1991-11-04	1995-01-13	Cit Alcatel	Entretoise a epaisseur ajustable.
WO1994007033A1 (en) *	1992-09-23	1994-03-31	United States Of America As Represented By The Secretary Of The Air Force	Turbo-molecular blower
US5739607A (en) *	1994-03-04	1998-04-14	Cincinnati Milacron Inc.	Hybrid spindle bearing
DE4427154A1 (de) *	1994-08-01	1996-02-08	Balzers Pfeiffer Gmbh	Reibungspumpe mit Magnetlagerung
US6332752B2 (en)	1997-06-27	2001-12-25	Ebara Corporation	Turbo-molecular pump
DE19846189A1 (de) *	1998-10-07	2000-04-13	Leybold Vakuum Gmbh	Reibungsvakuumpumpe
DE19846188A1 (de)	1998-10-07	2000-04-13	Leybold Vakuum Gmbh	Reibungsvakuumpumpe mit Stator und Rotor
US6508631B1 (en)	1999-11-18	2003-01-21	Mks Instruments, Inc.	Radial flow turbomolecular vacuum pump
JP2003129991A (ja) *	2001-10-24	2003-05-08	Boc Edwards Technologies Ltd	分子ポンプ
FR2831621B1 (fr) *	2001-10-25	2004-02-13	Cit Alcatel	Utilisation des billes en zircone pour les roulements d'atterrissage des pompes turbomoleculaires sur palier magnetique
US7392713B2 (en) *	2002-09-30	2008-07-01	United Technologies Corporation	Monitoring system for turbomachinery
KR100610012B1 (ko) *	2004-08-16	2006-08-09	삼성전자주식회사	터보 펌프
DE102006050565A1 (de) *	2006-10-26	2008-04-30	Pfeiffer Vacuum Gmbh	Statorscheibe für eine Turbomolekularpumpe
DE102013113986A1 (de) *	2013-12-13	2015-06-18	Pfeiffer Vacuum Gmbh	Rotierendes System
DE202016003991U1 (de) *	2016-06-29	2017-10-02	Leybold Gmbh	Vakuumpumpe
GB2556913B (en) *	2016-11-25	2019-09-25	Edwards Ltd	Vacuum pump bearing holders
CN118706652B (zh) *	2024-08-29	2024-12-17	山东世纪安泰真空设备有限公司	一种用于分子泵的磁轴检测系统及方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB693021A (en) *	1948-10-01	1953-06-17	Licentia Gmbh	A device for the indication of the axial thrust of rotary machines, particularly steam and gas turbines
US2993448A (en) *	1957-08-26	1961-07-25	Us Electrical Motors Inc	Shaft adjusting and testing mechanism
US3399827A (en) *	1967-05-19	1968-09-03	Everett H. Schwartzman	Vacuum pump system
US3828610A (en) *	1970-01-07	1974-08-13	Judson S Swearingen	Thrust measurement
FR2086525A5 (it) *	1970-04-01	1971-12-31	Commissariat Energie Atomique
DE2052120A1 (de) *	1970-10-23	1972-04-27	Pfeiffer Vakuumtechnik	Lageranordnung für Molekularpumpen und Turbomolekularpumpen
DE2337226A1 (de) *	1973-07-21	1975-02-06	Maschf Augsburg Nuernberg Ag	Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer
DE2349033C3 (de) *	1973-09-29	1984-08-30	Leybold-Heraeus Gmbh, 5000 Koeln	Turbomolekularpumpe
US3861818A (en) *	1974-02-14	1975-01-21	Gen Electric	Thrust wear detector
CH583856A5 (it) *	1974-09-27	1977-01-14	Balzers Patent Beteilig Ag
DE2457783C2 (de) *	1974-12-06	1986-10-09	Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar	Magnetische Lagerung
DE2524061C3 (de) *	1975-05-30	1980-04-30	Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar	Magnetisch gelagerte Turbovakuumpumpe mit Fanglager
DE2554995A1 (de) *	1975-12-06	1977-06-16	Pfeiffer Vakuumtechnik	Turbomolekularpumpe
US4116592A (en) *	1976-08-20	1978-09-26	Viktor Yakovlevich Cherny	Turbomolecular high-vacuum pulp
DE2825551C3 (de) *	1978-06-10	1982-06-09	Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar	Magnetische Lagerung
US4312628A (en) *	1979-05-21	1982-01-26	Cambridge Thermionic Corporation	Turbomolecular vacuum pump having virtually zero power magnetic bearing assembly with single axis servo control
US4302963A (en) *	1980-05-12	1981-12-01	General Electric Company	Thrust bearing wear detector positioner

1982
- 1982-02-11 DE DE3204750A patent/DE3204750C2/de not_active Expired
- 1982-12-22 GB GB08236397A patent/GB2114663B/en not_active Expired
1983
- 1983-01-12 NL NL8300105A patent/NL8300105A/nl not_active Application Discontinuation
- 1983-01-18 FR FR8300681A patent/FR2521230B1/fr not_active Expired
- 1983-02-09 IT IT19487/83A patent/IT1161570B/it active
- 1983-02-10 US US06/465,564 patent/US4502832A/en not_active Expired - Fee Related
- 1983-02-10 JP JP58021384A patent/JPS58148296A/ja active Granted
- 1983-02-10 BE BE1/10722A patent/BE895866A/fr not_active IP Right Cessation

Also Published As

Publication number	Publication date
JPS58148296A (ja)	1983-09-03
IT8319487A1 (it)	1984-08-09
FR2521230B1 (fr)	1986-08-08
DE3204750A1 (de)	1983-08-25
BE895866A (fr)	1983-05-30
IT1161570B (it)	1987-03-18
JPH0436278B2 (it)	1992-06-15
GB2114663B (en)	1985-09-18
DE3204750C2 (de)	1984-04-26
FR2521230A1 (fr)	1983-08-12
NL8300105A (nl)	1983-09-01
US4502832A (en)	1985-03-05
GB2114663A (en)	1983-08-24

Publication	Publication Date	Title
NO833617L (no)	1984-04-12	Sentrifugalpumpe.
IT8322779A0 (it)	1983-09-06	Pompa turbomolecolare sopportata magneticamente con smorzamenti delle vibrazioni.
IT8319487A0 (it)	1983-02-09	Pompa turbomolecolare sopportata magneticamente.
DE69109398D1 (de)	1995-06-08	Turbomolekularpumpe.
FR2525698B1 (fr)	1986-04-11	Pompe turbomoleculaire
DE68901783D1 (de)	1992-07-23	Tauchmotorpumpe.
DE3669356D1 (de)	1990-04-12	Vakuumpumpe.
FI894271A0 (fi)	1989-09-11	Turbomolekular vakuumpump.
DE3770367D1 (de)	1991-07-04	Turbomolekularpumpe.
DE68903355D1 (de)	1992-12-10	Vakuumpumpen.
DE3862374D1 (de)	1991-05-16	Schlauchpumpe.
IT9067163A0 (it)	1990-03-09	Pompa turbomolecolare perfezionata.
FI843886A0 (fi)	1984-10-03	Peristaltisk pump.
IT8320201A0 (it)	1983-03-22	Pompa dosatrice.
DE3768593D1 (de)	1991-04-18	Hochvakuumpumpe.
DE68906929D1 (de)	1993-07-15	Turbomolekularpumpe.
IT8320671A0 (it)	1983-04-19	Riscaldamento per una pompa turbomolecolare.
IT8122450A0 (it)	1981-06-19	Struttura di pompa di circolazione.
DE59106391D1 (de)	1995-10-12	Kreiselpumpe.
DE69021285D1 (de)	1995-09-07	Tauchmotorpumpe.
IT1237338B (it)	1993-05-31	Pompa autoadescante.
IT8421846A0 (it)	1984-07-11	Pompa per vuoto.
DE3770757D1 (de)	1991-07-18	Induktionspumpe.
IT8422050V0 (it)	1984-06-04	Pompa centrifuga.
FI843610A0 (fi)	1984-09-14	Elektrokemiskt skydd foer pump.

Legal Events

Date	Code	Title	Description
1999-10-27	TA	Fee payment date (situation as of event date), data collected since 19931001	Effective date: 19950227