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FR3079886B1 - Pompe a vide de type seche - Google Patents

Pompe a vide de type seche Download PDF

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Publication number
FR3079886B1
FR3079886B1 FR1852940A FR1852940A FR3079886B1 FR 3079886 B1 FR3079886 B1 FR 3079886B1 FR 1852940 A FR1852940 A FR 1852940A FR 1852940 A FR1852940 A FR 1852940A FR 3079886 B1 FR3079886 B1 FR 3079886B1
Authority
FR
France
Prior art keywords
vacuum pump
oil pan
dry type
pumping stage
type vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1852940A
Other languages
English (en)
Other versions
FR3079886A1 (fr
Inventor
Patrick Pilotti
Laurent Saxod
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1852940A priority Critical patent/FR3079886B1/fr
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to KR1020207030841A priority patent/KR20200140839A/ko
Priority to US17/044,615 priority patent/US11499556B2/en
Priority to PCT/EP2019/057792 priority patent/WO2019192913A1/fr
Priority to CN201980021782.8A priority patent/CN111902632A/zh
Priority to EP19712244.3A priority patent/EP3775558B1/fr
Priority to TW108111512A priority patent/TW201943963A/zh
Publication of FR3079886A1 publication Critical patent/FR3079886A1/fr
Application granted granted Critical
Publication of FR3079886B1 publication Critical patent/FR3079886B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/809—Lubricant sump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/21—Pressure difference
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention a pour objet une pompe à vide (1) de type sèche comportant : - au moins un carter d'huile (2), - au moins un étage de pompage (3e), - deux arbres (4) rotatifs portant respectivement au moins un rotor (5) s'étendant dans le au moins un étage de pompage (3e), les rotors (5) étant configurés pour tourner de façon synchronisée en sens inverse pour entrainer un gaz à pomper entre une aspiration (7) et un refoulement (8) de la pompe à vide (1), les arbres (4) étant supportés par des paliers lubrifiés par un lubrifiant contenu dans le au moins un carter d'huile (2), et - au moins un dispositif d'étanchéité (6a) aux lubrifiants interposé entre le au moins un carter d'huile (2) et un étage de pompage (3e) au niveau du passage d'arbre, caractérisée en ce que la pompe à vide (1) comporte en outre au moins un dispositif d'expansion (12) configuré pour réduire les variations de pression entre un volume côté pompage (11 ; 24) et le au moins un carter d'huile (2).
FR1852940A 2018-04-05 2018-04-05 Pompe a vide de type seche Expired - Fee Related FR3079886B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR1852940A FR3079886B1 (fr) 2018-04-05 2018-04-05 Pompe a vide de type seche
US17/044,615 US11499556B2 (en) 2018-04-05 2019-03-27 Dry vacuum pump with a pressure variation reducing expansion device between a pumping side volume and an oil sump
PCT/EP2019/057792 WO2019192913A1 (fr) 2018-04-05 2019-03-27 Pompe à vide de type sèche
CN201980021782.8A CN111902632A (zh) 2018-04-05 2019-03-27 干式真空泵
KR1020207030841A KR20200140839A (ko) 2018-04-05 2019-03-27 건식 진공 펌프
EP19712244.3A EP3775558B1 (fr) 2018-04-05 2019-03-27 Pompe à vide de type sèche
TW108111512A TW201943963A (zh) 2018-04-05 2019-04-01 乾式真空泵

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1852940A FR3079886B1 (fr) 2018-04-05 2018-04-05 Pompe a vide de type seche
FR1852940 2018-04-05

Publications (2)

Publication Number Publication Date
FR3079886A1 FR3079886A1 (fr) 2019-10-11
FR3079886B1 true FR3079886B1 (fr) 2020-04-24

Family

ID=62528675

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1852940A Expired - Fee Related FR3079886B1 (fr) 2018-04-05 2018-04-05 Pompe a vide de type seche

Country Status (7)

Country Link
US (1) US11499556B2 (fr)
EP (1) EP3775558B1 (fr)
KR (1) KR20200140839A (fr)
CN (1) CN111902632A (fr)
FR (1) FR3079886B1 (fr)
TW (1) TW201943963A (fr)
WO (1) WO2019192913A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202021100874U1 (de) * 2021-02-23 2022-05-30 Marlina Hamm Wälzkolbengebläse zur Entspannung eines dampfförmigen Mediums bei hohem Druck und guter Dichtigkeit

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4617615B2 (ja) 2001-07-05 2011-01-26 株式会社豊田自動織機 真空ポンプにおける油洩れ防止構造
EP2137412B1 (fr) 2007-04-17 2012-12-05 Spinnler Engineering Machine de refoulement construite selon le principe de la spirale
JP4365443B1 (ja) * 2008-07-29 2009-11-18 株式会社神戸製鋼所 無給油式スクリュ圧縮機
GB0922564D0 (en) * 2009-12-24 2010-02-10 Edwards Ltd Pump
DE202015007606U1 (de) * 2015-11-03 2017-02-06 Leybold Gmbh Trockenvakuumpumpe

Also Published As

Publication number Publication date
CN111902632A (zh) 2020-11-06
US11499556B2 (en) 2022-11-15
WO2019192913A1 (fr) 2019-10-10
FR3079886A1 (fr) 2019-10-11
KR20200140839A (ko) 2020-12-16
US20210108638A1 (en) 2021-04-15
EP3775558B1 (fr) 2021-12-29
EP3775558A1 (fr) 2021-02-17
TW201943963A (zh) 2019-11-16

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Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20191011

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