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FR2955204B1 - Cellule memoire dram disposant d'un injecteur bipolaire vertical - Google Patents

Cellule memoire dram disposant d'un injecteur bipolaire vertical

Info

Publication number
FR2955204B1
FR2955204B1 FR1050241A FR1050241A FR2955204B1 FR 2955204 B1 FR2955204 B1 FR 2955204B1 FR 1050241 A FR1050241 A FR 1050241A FR 1050241 A FR1050241 A FR 1050241A FR 2955204 B1 FR2955204 B1 FR 2955204B1
Authority
FR
France
Prior art keywords
memory cell
dram memory
vertical bipolar
injector
bipolar injector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1050241A
Other languages
English (en)
Other versions
FR2955204A1 (fr
Inventor
Carlos Mazure
Richard Ferrant
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec SA filed Critical Soitec SA
Priority to FR1050241A priority Critical patent/FR2955204B1/fr
Priority to EP10187682A priority patent/EP2346077A1/fr
Priority to TW99136090A priority patent/TWI470771B/zh
Priority to SG2010077832A priority patent/SG173247A1/en
Priority to CN201010521914.4A priority patent/CN102130128B/zh
Priority to KR1020100106017A priority patent/KR101135826B1/ko
Priority to JP2010242316A priority patent/JP5420517B2/ja
Priority to US12/942,754 priority patent/US8305803B2/en
Publication of FR2955204A1 publication Critical patent/FR2955204A1/fr
Application granted granted Critical
Publication of FR2955204B1 publication Critical patent/FR2955204B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/711—Insulated-gate field-effect transistors [IGFET] having floating bodies
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/403—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh
    • G11C11/404—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh with one charge-transfer gate, e.g. MOS transistor, per cell
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/20—DRAM devices comprising floating-body transistors, e.g. floating-body cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149—Source or drain regions of field-effect devices
    • H10D62/151—Source or drain regions of field-effect devices of IGFETs 
    • H10D62/152—Source regions of DMOS transistors
    • H10D62/153—Impurity concentrations or distributions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/101—Integrated devices comprising main components and built-in components, e.g. IGBT having built-in freewheel diode
    • H10D84/121—BJTs having built-in components
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/40—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
    • H10D84/401—Combinations of FETs or IGBTs with BJTs
    • H10D84/403—Combinations of FETs or IGBTs with BJTs and with one or more of diodes, resistors or capacitors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2211/00—Indexing scheme relating to digital stores characterized by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C2211/401—Indexing scheme relating to cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C2211/4016—Memory devices with silicon-on-insulator cells

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Memories (AREA)
  • Dram (AREA)
  • Thin Film Transistor (AREA)
FR1050241A 2010-01-14 2010-01-14 Cellule memoire dram disposant d'un injecteur bipolaire vertical Active FR2955204B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR1050241A FR2955204B1 (fr) 2010-01-14 2010-01-14 Cellule memoire dram disposant d'un injecteur bipolaire vertical
EP10187682A EP2346077A1 (fr) 2010-01-14 2010-10-15 Cellule mémoire DRAM disposant d'un injecteur bipolaire vertical et son procédé de contrôle
SG2010077832A SG173247A1 (en) 2010-01-14 2010-10-22 Dram memory cell having a vertical bipolar injector
TW99136090A TWI470771B (zh) 2010-01-14 2010-10-22 具有一垂直雙載子注射器之動態隨機存取記憶體胞元
CN201010521914.4A CN102130128B (zh) 2010-01-14 2010-10-25 具有垂直双极注入器的dram存储器单元
KR1020100106017A KR101135826B1 (ko) 2010-01-14 2010-10-28 수직 바이폴라 인젝터를 갖는 ｄｒａｍ 메모리 셀
JP2010242316A JP5420517B2 (ja) 2010-01-14 2010-10-28 縦型バイポーラインジェクタを有するｄｒａｍメモリセル
US12/942,754 US8305803B2 (en) 2010-01-14 2010-11-09 DRAM memory cell having a vertical bipolar injector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1050241A FR2955204B1 (fr) 2010-01-14 2010-01-14 Cellule memoire dram disposant d'un injecteur bipolaire vertical

Publications (2)

Publication Number Publication Date
FR2955204A1 FR2955204A1 (fr) 2011-07-15
FR2955204B1 true FR2955204B1 (fr) 2012-07-20

Family

ID=42289816

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1050241A Active FR2955204B1 (fr) 2010-01-14 2010-01-14 Cellule memoire dram disposant d'un injecteur bipolaire vertical

Country Status (8)

Country Link
US (1) US8305803B2 (fr)
EP (1) EP2346077A1 (fr)
JP (1) JP5420517B2 (fr)
KR (1) KR101135826B1 (fr)
CN (1) CN102130128B (fr)
FR (1) FR2955204B1 (fr)
SG (1) SG173247A1 (fr)
TW (1) TWI470771B (fr)

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US10340276B2 (en) 2010-03-02 2019-07-02 Zeno Semiconductor, Inc. Method of maintaining the state of semiconductor memory having electrically floating body transistor
KR102084954B1 (ko) 2013-05-02 2020-03-05 삼성전자주식회사 반도체 장치 및 이의 제조 방법
US9281022B2 (en) 2013-07-10 2016-03-08 Zeno Semiconductor, Inc. Systems and methods for reducing standby power in floating body memory devices
US9548119B2 (en) * 2014-01-15 2017-01-17 Zeno Semiconductor, Inc Memory device comprising an electrically floating body transistor
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US8012814B2 (en) 2008-08-08 2011-09-06 International Business Machines Corporation Method of forming a high performance fet and a high voltage fet on a SOI substrate
US8120110B2 (en) 2008-08-08 2012-02-21 International Business Machines Corporation Semiconductor structure including a high performance FET and a high voltage FET on a SOI substrate
KR101623958B1 (ko) 2008-10-01 2016-05-25 삼성전자주식회사 인버터 및 그의 동작방법과 인버터를 포함하는 논리회로
KR101522400B1 (ko) 2008-11-10 2015-05-21 삼성전자주식회사 인버터 및 그를 포함하는 논리소자

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CN102130128B (zh) 2014-01-08
SG173247A1 (en) 2011-08-29
TWI470771B (zh) 2015-01-21
JP2011146685A (ja) 2011-07-28
US8305803B2 (en) 2012-11-06
KR101135826B1 (ko) 2012-04-16
KR20110083470A (ko) 2011-07-20
US20110170343A1 (en) 2011-07-14
EP2346077A1 (fr) 2011-07-20
CN102130128A (zh) 2011-07-20
TW201126699A (en) 2011-08-01
FR2955204A1 (fr) 2011-07-15

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