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FR2774811B1 - Procede de formation de lignes conductrices sur des circuits integres - Google Patents

Procede de formation de lignes conductrices sur des circuits integres

Info

Publication number
FR2774811B1
FR2774811B1 FR9801792A FR9801792A FR2774811B1 FR 2774811 B1 FR2774811 B1 FR 2774811B1 FR 9801792 A FR9801792 A FR 9801792A FR 9801792 A FR9801792 A FR 9801792A FR 2774811 B1 FR2774811 B1 FR 2774811B1
Authority
FR
France
Prior art keywords
integrated circuits
formation process
conductive lines
lines formation
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9801792A
Other languages
English (en)
Other versions
FR2774811A1 (fr
Inventor
Yvon Gris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
STMicroelectronics lnc USA
Original Assignee
SGS Thomson Microelectronics SA
SGS Thomson Microelectronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGS Thomson Microelectronics SA, SGS Thomson Microelectronics Inc filed Critical SGS Thomson Microelectronics SA
Priority to FR9801792A priority Critical patent/FR2774811B1/fr
Priority to US09/245,003 priority patent/US6258720B1/en
Publication of FR2774811A1 publication Critical patent/FR2774811A1/fr
Priority to US09/865,634 priority patent/US6614114B2/en
Application granted granted Critical
Publication of FR2774811B1 publication Critical patent/FR2774811B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
FR9801792A 1998-02-10 1998-02-10 Procede de formation de lignes conductrices sur des circuits integres Expired - Fee Related FR2774811B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR9801792A FR2774811B1 (fr) 1998-02-10 1998-02-10 Procede de formation de lignes conductrices sur des circuits integres
US09/245,003 US6258720B1 (en) 1998-02-10 1999-02-04 Method of formation of conductive lines on integrated circuits
US09/865,634 US6614114B2 (en) 1998-02-10 2001-05-25 Conductive line formed on integrated circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9801792A FR2774811B1 (fr) 1998-02-10 1998-02-10 Procede de formation de lignes conductrices sur des circuits integres

Publications (2)

Publication Number Publication Date
FR2774811A1 FR2774811A1 (fr) 1999-08-13
FR2774811B1 true FR2774811B1 (fr) 2003-05-09

Family

ID=9522975

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9801792A Expired - Fee Related FR2774811B1 (fr) 1998-02-10 1998-02-10 Procede de formation de lignes conductrices sur des circuits integres

Country Status (2)

Country Link
US (2) US6258720B1 (fr)
FR (1) FR2774811B1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2823374A1 (fr) * 2001-04-06 2002-10-11 St Microelectronics Sa Inductance integree
US6740956B1 (en) * 2002-08-15 2004-05-25 National Semiconductor Corporation Metal trace with reduced RF impedance resulting from the skin effect
US6703710B1 (en) 2002-08-15 2004-03-09 National Semiconductor Corporation Dual damascene metal trace with reduced RF impedance resulting from the skin effect
US6853079B1 (en) 2002-08-15 2005-02-08 National Semiconductor Corporation Conductive trace with reduced RF impedance resulting from the skin effect
US6864581B1 (en) 2002-08-15 2005-03-08 National Semiconductor Corporation Etched metal trace with reduced RF impendance resulting from the skin effect
FR2861299B1 (fr) * 2003-10-28 2006-01-27 Pf Medicament Compositions pharmaceutiques a base de derives d'idasoxan sous formes polymorphes
US7339274B2 (en) * 2004-08-17 2008-03-04 Agere Systems Inc. Metallization performance in electronic devices
US9111935B2 (en) * 2013-03-12 2015-08-18 International Business Machines Corporation Multiple-patterned semiconductor device channels
US9099471B2 (en) 2013-03-12 2015-08-04 International Business Machines Corporation Semiconductor device channels
US9076848B2 (en) 2013-03-12 2015-07-07 International Business Machines Corporation Semiconductor device channels
CN105742228B (zh) * 2014-12-09 2019-04-19 中国科学院微电子研究所 半导体器件制造方法
CN105633012A (zh) * 2015-03-31 2016-06-01 中国科学院微电子研究所 互连结构及其制造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2542920B1 (fr) * 1983-03-18 1986-06-06 Commissariat Energie Atomique Procede de positionnement d'une ligne d'interconnexion sur un trou de contact electrique d'un circuit integre
US4926236A (en) * 1986-02-12 1990-05-15 General Electric Company Multilayer interconnect and method of forming same
US5063175A (en) * 1986-09-30 1991-11-05 North American Philips Corp., Signetics Division Method for manufacturing a planar electrical interconnection utilizing isotropic deposition of conductive material
JPH0199239A (ja) * 1987-10-13 1989-04-18 Hitachi Ltd 半導体装置
JPH03142934A (ja) * 1989-10-30 1991-06-18 Mitsubishi Electric Corp 半導体集積回路装置の配線接続構造
EP0459690A1 (fr) * 1990-05-31 1991-12-04 AT&T Corp. Interconnection pour circuit intégré
US5268329A (en) * 1990-05-31 1993-12-07 At&T Bell Laboratories Method of fabricating an integrated circuit interconnection
US5270254A (en) * 1991-03-27 1993-12-14 Sgs-Thomson Microelectronics, Inc. Integrated circuit metallization with zero contact enclosure requirements and method of making the same
JP3391933B2 (ja) * 1995-04-27 2003-03-31 沖電気工業株式会社 半導体素子とその製造方法
US5641992A (en) * 1995-08-10 1997-06-24 Siemens Components, Inc. Metal interconnect structure for an integrated circuit with improved electromigration reliability
JPH09172072A (ja) * 1995-12-18 1997-06-30 Nec Corp 半導体装置及びその製造方法
US6096636A (en) * 1996-02-06 2000-08-01 Micron Technology, Inc. Methods of forming conductive lines
JP3149352B2 (ja) * 1996-02-29 2001-03-26 インターナショナル・ビジネス・マシーンズ・コーポレ−ション 基板の導体層の形成方法
US6448108B1 (en) * 2000-10-02 2002-09-10 Charles W. C. Lin Method of making a semiconductor chip assembly with a conductive trace subtractively formed before and after chip attachment

Also Published As

Publication number Publication date
US6258720B1 (en) 2001-07-10
FR2774811A1 (fr) 1999-08-13
US6614114B2 (en) 2003-09-02
US20010036734A1 (en) 2001-11-01

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Legal Events

Date Code Title Description
CD Change of name or company name
ST Notification of lapse

Effective date: 20091030