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EP3775558B1 - Trockenlaufende vakuumpumpe - Google Patents

Trockenlaufende vakuumpumpe Download PDF

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Publication number
EP3775558B1
EP3775558B1 EP19712244.3A EP19712244A EP3775558B1 EP 3775558 B1 EP3775558 B1 EP 3775558B1 EP 19712244 A EP19712244 A EP 19712244A EP 3775558 B1 EP3775558 B1 EP 3775558B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pumping
oil sump
volume
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19712244.3A
Other languages
English (en)
French (fr)
Other versions
EP3775558A1 (de
Inventor
Laurent SAXOD
Patrick Pilotti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Publication of EP3775558A1 publication Critical patent/EP3775558A1/de
Application granted granted Critical
Publication of EP3775558B1 publication Critical patent/EP3775558B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/809—Lubricant sump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/21—Pressure difference
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible

Definitions

  • the document USA57816409 describes a scroll compressor comprising a pressurized oil lubrication device in which pressure balancing means are provided.
  • the expansion device comprises for example at least one deformable and gas-tight membrane.
  • the expansion device comprises for example a single membrane for a shaft passage or a plurality of membranes arranged in parallel.
  • the pumping stage adjacent to the oil pan is configured to deliver the pumped gases at atmospheric pressure.
  • the vacuum pump is therefore a primary vacuum pump.
  • the volume on the pumping side 11 is located between the at least one sealing device 6a, 6b and an outlet of the pumping stage located after the rotors 5, considering the direction of flow of the gases pumped in the pump vacuum 1 and the case where the oil sump 2 is located on the discharge side of the vacuum pump 1.
  • a second tap 17 made in the pump body 16 opens into the volume of the oil pan 2, for example in the upper part of the oil pan 2.
  • This second tap 17 is connected to the second orifice 14 of the shell 13, the first and the second orifice 14 being formed on either side of the membrane of the expansion device 12.
  • the membrane may deform when pressure differences occur on either side of the membrane, between the volume on the pumping side 24 and the volume of the oil sump 2. These deformations make it possible to balance the pressure. the pressure between the volume between the pumping side 24 included between the sealing devices 6a, 6b and the pressure prevailing in the oil sump 2.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (11)

  1. Vakuumpumpe (1) vom trockenen Typ, die aufweist:
    - mindestens eine Ölwanne (2),
    - mindestens eine Pumpstufe (3e),
    - zwei drehende Wellen (4), die je mindestens einen Rotor (5) tragen, der sich in der mindestens einen Pumpstufe (3e) erstreckt, wobei die Rotoren (5) konfiguriert sind, synchronisiert in Gegenrichtung zu drehen, um ein zu pumpendes Gas zwischen einer Saugseite (7) und einer Förderseite (8) der Vakuumpumpe (1) anzutreiben, wobei die Wellen (4) von Lagern getragen werden, die mit einem Schmiermittel geschmiert sind, das in der mindestens einen Ölwanne (2) enthalten ist, und
    - mindestens eine Dichtungsvorrichtung (6a) gegenüber den Schmiermitteln, die zwischen der mindestens einen Ölwanne (2) und einer Pumpstufe (3e) im Bereich jedes Wellendurchgangs eingefügt ist,
    dadurch gekennzeichnet, dass die Vakuumpumpe (1) außerdem mindestens eine Expansionsvorrichtung (12) aufweist, die konfiguriert ist, die Druckschwankungen zwischen einem Volumen auf der Pumpseite (11; 24) und der mindestens einen Ölwanne (2) zu reduzieren.
  2. Vakuumpumpe (1) nach Anspruch 1, dadurch gekennzeichnet, dass die Pumpstufe (3e) konfiguriert ist, die gepumpten Gase auf Atmosphärendruck zu fördern.
  3. Vakuumpumpe (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Expansionsvorrichtung (12) zwischen einerseits dem pumpseitigen Volumen (11), das sich zwischen der mindestens einen Dichtungsvorrichtung (6a, 6b) und der Pumpstufe (3e) befindet, und andererseits dem Volumen der Ölwanne (2) eingefügt ist.
  4. Vakuumpumpe (1) nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, dass die Expansionsvorrichtung (12) das Volumen der Ölwanne (2) von einem pumpseitigen Volumen (24) trennt, das zwischen eine erste und eine zweite Dichtungsvorrichtung (6a, 6b) eingefügt ist, die in Reihe auf jeder Welle (4) angeordnet sind.
  5. Vakuumpumpe (1) nach Anspruch 2, dadurch gekennzeichnet, dass die Expansionsvorrichtung (12) das pumpseitige Volumen (11; 24) von der Außenatmosphäre trennt, wobei der in der Ölwanne (2) herrschende Druck der Atmosphärendruck ist.
  6. Vakuumpumpe (1) nach Anspruch 5, dadurch gekennzeichnet, dass das pumpseitige Volumen (11) zwischen einem Ausgang der Pumpstufe (3e) und der mindestens einen Dichtungsvorrichtung (6b) eingefügt ist.
  7. Vakuumpumpe (1) nach Anspruch 5, dadurch gekennzeichnet, dass das pumpseitige Volumen (24) zwischen einer ersten und einer zweiten Dichtungsvorrichtung (6a, 6b) eingefügt ist, die in Reihe auf jeder Welle (4) angeordnet sind.
  8. Vakuumpumpe (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Expansionsvorrichtung (12) mindestens eine verformbare und gasdichte Membran aufweist, die zum Beispiel in der Ruhestellung eine allgemeine Form einer Scheibe oder einer Schale aufweist.
  9. Vakuumpumpe (1) nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, dass die mindestens eine Membran in eine steife Schutzkappe (13; 19) montiert ist.
  10. Vakuumpumpe (1) nach einem der Ansprüche 8 oder 9, dadurch gekennzeichnet, dass die mindestens eine Membran (12) aus Elastomermaterial ist.
  11. Vakuumpumpe (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie mindestens eine erste und eine zweite Dichtungsvorrichtung (6a, 6b) aufweist, wie Reibdichtungen, die in Reihe auf jeder Welle (4) angeordnet sind.
EP19712244.3A 2018-04-05 2019-03-27 Trockenlaufende vakuumpumpe Active EP3775558B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1852940A FR3079886B1 (fr) 2018-04-05 2018-04-05 Pompe a vide de type seche
PCT/EP2019/057792 WO2019192913A1 (fr) 2018-04-05 2019-03-27 Pompe à vide de type sèche

Publications (2)

Publication Number Publication Date
EP3775558A1 EP3775558A1 (de) 2021-02-17
EP3775558B1 true EP3775558B1 (de) 2021-12-29

Family

ID=62528675

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19712244.3A Active EP3775558B1 (de) 2018-04-05 2019-03-27 Trockenlaufende vakuumpumpe

Country Status (7)

Country Link
US (1) US11499556B2 (de)
EP (1) EP3775558B1 (de)
KR (1) KR20200140839A (de)
CN (1) CN111902632A (de)
FR (1) FR3079886B1 (de)
TW (1) TW201943963A (de)
WO (1) WO2019192913A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202021100874U1 (de) * 2021-02-23 2022-05-30 Marlina Hamm Wälzkolbengebläse zur Entspannung eines dampfförmigen Mediums bei hohem Druck und guter Dichtigkeit

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4617615B2 (ja) 2001-07-05 2011-01-26 株式会社豊田自動織機 真空ポンプにおける油洩れ防止構造
EP2137412B1 (de) 2007-04-17 2012-12-05 Spinnler Engineering Verdrängermaschine nach dem spiralprinzip
JP4365443B1 (ja) * 2008-07-29 2009-11-18 株式会社神戸製鋼所 無給油式スクリュ圧縮機
GB0922564D0 (en) * 2009-12-24 2010-02-10 Edwards Ltd Pump
DE202015007606U1 (de) * 2015-11-03 2017-02-06 Leybold Gmbh Trockenvakuumpumpe

Also Published As

Publication number Publication date
CN111902632A (zh) 2020-11-06
US11499556B2 (en) 2022-11-15
WO2019192913A1 (fr) 2019-10-10
FR3079886A1 (fr) 2019-10-11
KR20200140839A (ko) 2020-12-16
US20210108638A1 (en) 2021-04-15
FR3079886B1 (fr) 2020-04-24
EP3775558A1 (de) 2021-02-17
TW201943963A (zh) 2019-11-16

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