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EP2671044A1 - Method and device for determining optical properties by simultaneous measurement of intensities at thin layers using light of several wavelengths - Google Patents

Method and device for determining optical properties by simultaneous measurement of intensities at thin layers using light of several wavelengths

Info

Publication number
EP2671044A1
EP2671044A1 EP11706152.3A EP11706152A EP2671044A1 EP 2671044 A1 EP2671044 A1 EP 2671044A1 EP 11706152 A EP11706152 A EP 11706152A EP 2671044 A1 EP2671044 A1 EP 2671044A1
Authority
EP
European Patent Office
Prior art keywords
light
thin layer
optical properties
intensities
determining optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP11706152.3A
Other languages
German (de)
French (fr)
Inventor
Günther PROLL
Florian PRÖLL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Biocopy Holding AG
Original Assignee
Biametrics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Biametrics GmbH filed Critical Biametrics GmbH
Publication of EP2671044A1 publication Critical patent/EP2671044A1/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02024—Measuring in transmission, i.e. light traverses the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mathematical Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

In a method for determining optical properties by measuring intensities at a thin layer, light is directed into the thin layer and passes through a beam splitter, which directs a first part of the light onto the thin layer and a second part of the light onto a reference detector. Interference of the first part of the light in the thin layer is detected via a high-resolution detector and forwarded to an evaluating unit, which determines the reflection and/or transmission coefficients, which are correlated with the optical layer thickness through a comparison using at least one database stored in the evaluating unit. The optical layer thickness is obtained as a gray value modification by way of a gray scale value analysis and a conversion factor stored in the at least one data base. A corresponding device and intended uses of the method and device are also described.
EP11706152.3A 2011-01-31 2011-01-31 Method and device for determining optical properties by simultaneous measurement of intensities at thin layers using light of several wavelengths Ceased EP2671044A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2011/000419 WO2012103897A1 (en) 2011-01-31 2011-01-31 Method and device for determining optical properties by simultaneous measurement of intensities at thin layers using light of several wavelengths

Publications (1)

Publication Number Publication Date
EP2671044A1 true EP2671044A1 (en) 2013-12-11

Family

ID=44625266

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11706152.3A Ceased EP2671044A1 (en) 2011-01-31 2011-01-31 Method and device for determining optical properties by simultaneous measurement of intensities at thin layers using light of several wavelengths

Country Status (4)

Country Link
US (1) US9733063B2 (en)
EP (1) EP2671044A1 (en)
JP (1) JP2014508921A (en)
WO (1) WO2012103897A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113534129A (en) * 2021-06-29 2021-10-22 中国人民解放军93209部队 Method and system for evaluating high-speed target detection performance of foundation broadband radar

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10914037B2 (en) 2012-10-09 2021-02-09 Michael Gorden Yankee dryer profiler and control
ES2677975T3 (en) 2013-03-27 2018-08-07 Nano Temper Technologies GmbH (100%) Procedure and device for non-contact mixing of liquids
KR102287272B1 (en) * 2014-12-04 2021-08-06 삼성전자주식회사 Test Apparatus and Control Method thereof
EP3139147B1 (en) * 2015-09-02 2020-11-25 Trioptics GmbH Apparatus and method for measuring a wavelength dependent optical characteristic of an optical system
EP3299799A1 (en) * 2016-09-27 2018-03-28 Berthold Technologies GmbH & Co. KG Method and measuring system for measuring molecular interactions in a thin layer
JP6766995B2 (en) * 2016-11-09 2020-10-14 株式会社ミツトヨ Phase shift interferometer
KR102515833B1 (en) * 2018-08-01 2023-03-29 삼성전자주식회사 Apparatus and method for analyzing substance of object, and image sensor
CN114487046A (en) * 2022-01-29 2022-05-13 中国科学技术大学 An imaging method for determining the surface charge density distribution of two-dimensional materials
CN115046921B (en) * 2022-08-11 2022-12-02 四川至臻光电有限公司 Testing method and testing device for representing film adhesion of plastic optical element
DE102022134504A1 (en) 2022-12-22 2024-06-27 Technische Universität Dresden, Körperschaft des öffentlichen Rechts METHOD AND DEVICE FOR DETERMINING THE LAYER THICKNESS OF HISTOLOGICAL SECTIONS AND DETERMINING THE CONCENTRATION OF BIOLOGICAL SUBSTANCES IN HISTOLOGICAL SUBSTANCES

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7615752B2 (en) * 2005-02-25 2009-11-10 Nanometrics Incorporated Apparatus and method for enhanced critical dimension scatterometry

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01132936A (en) * 1987-11-18 1989-05-25 Kawasaki Steel Corp Method and apparatus for analyzing film
JPH01132935A (en) * 1987-11-18 1989-05-25 Kawasaki Steel Corp Method and apparatus for analyzing film
US5220403A (en) * 1991-03-11 1993-06-15 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
EP0598341B1 (en) * 1992-11-17 1998-09-23 Hoechst Aktiengesellschaft Optical sensor for detecting chemical species
JP3001357B2 (en) * 1992-11-17 2000-01-24 アヴェンティス・リサーチ・ウント・テクノロジーズ・ゲーエムベーハー・ウント・コー・カーゲー Optical sensor for chemical substance detection
DE4410603C1 (en) * 1994-03-26 1995-06-14 Jenoptik Technologie Gmbh Detecting faults during inspection of masks, LCDs, circuit boards and semiconductor wafers
JPH09189525A (en) * 1996-01-09 1997-07-22 Olympus Optical Co Ltd Ellipsometer
JPH09269296A (en) * 1996-03-29 1997-10-14 Ishizuka Glass Co Ltd Coating defect inspecting device for sheet
DE19615366B4 (en) 1996-04-19 2006-02-09 Carl Zeiss Jena Gmbh Method and device for detecting physical, chemical, biological or biochemical reactions and interactions
JPH1047926A (en) * 1996-08-07 1998-02-20 Dainippon Screen Mfg Co Ltd Device for measuring film thickness and method therefor
US6248988B1 (en) 1998-05-05 2001-06-19 Kla-Tencor Corporation Conventional and confocal multi-spot scanning optical microscope
US6236459B1 (en) * 1998-11-05 2001-05-22 University Of Miami Thin film measuring device and method
US6049506A (en) * 1999-01-29 2000-04-11 Lucent Technology Inc. Optical fiber Sagnac interferometer which identifies harmonically related nulls in the detected spectrum
EP1176431B1 (en) * 1999-03-09 2008-01-02 Central Research Institute Of Electric Power Industry Measuring method and device for radioactivity, radioactive concentration and radioactivity surface concentration
US7324214B2 (en) * 2003-03-06 2008-01-29 Zygo Corporation Interferometer and method for measuring characteristics of optically unresolved surface features
DE102005026839A1 (en) 2005-06-10 2006-12-21 Universität Tübingen Method and device for the quantitative determination of analytes in liquid samples
US7391520B2 (en) * 2005-07-01 2008-06-24 Carl Zeiss Meditec, Inc. Fourier domain optical coherence tomography employing a swept multi-wavelength laser and a multi-channel receiver
US7522282B2 (en) 2006-11-30 2009-04-21 Purdue Research Foundation Molecular interferometric imaging process and apparatus
JP2008139065A (en) * 2006-11-30 2008-06-19 Nikon Corp Film evaluation apparatus and film evaluation method
JP2009075044A (en) * 2007-09-25 2009-04-09 Toppan Printing Co Ltd Film thickness defective inspection device for conductive polymer layer of organic el panel substrate, and method for inspecting film thickness defective using the same
US8989890B2 (en) * 2008-11-07 2015-03-24 Applied Materials, Inc. GST film thickness monitoring
DE102009019476A1 (en) 2009-05-04 2010-11-11 Biametrics Marken Und Rechte Gmbh Recognizable carrier for optical measuring methods
DE102009019711A1 (en) 2009-05-05 2010-11-18 Biametrics Marken Und Rechte Gmbh Method and device for determining reflection coefficients on thin-film filter arrangement
WO2012040554A2 (en) * 2010-09-23 2012-03-29 Stryker Corporation Video monitoring system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7615752B2 (en) * 2005-02-25 2009-11-10 Nanometrics Incorporated Apparatus and method for enhanced critical dimension scatterometry

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"Grauwert", WIKIPEDIA, 21 January 2011 (2011-01-21), XP055255020, Retrieved from the Internet <URL:https://de.wikipedia.org/w/index.php?title=Spezial:Buch&bookcmd=download&collection_id=5d975a3ca0363b8cf4c956afee6ff0960b55a906&writer=rdf2latex&return_to=Grauwert> [retrieved on 20160303] *
See also references of WO2012103897A1 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113534129A (en) * 2021-06-29 2021-10-22 中国人民解放军93209部队 Method and system for evaluating high-speed target detection performance of foundation broadband radar

Also Published As

Publication number Publication date
US20130314712A1 (en) 2013-11-28
US9733063B2 (en) 2017-08-15
JP2014508921A (en) 2014-04-10
WO2012103897A1 (en) 2012-08-09

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