EP2206136B1 - Röntgen-drehanodenteller und verfahren zu seiner herstellung - Google Patents
Röntgen-drehanodenteller und verfahren zu seiner herstellung Download PDFInfo
- Publication number
- EP2206136B1 EP2206136B1 EP08836274A EP08836274A EP2206136B1 EP 2206136 B1 EP2206136 B1 EP 2206136B1 EP 08836274 A EP08836274 A EP 08836274A EP 08836274 A EP08836274 A EP 08836274A EP 2206136 B1 EP2206136 B1 EP 2206136B1
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- European Patent Office
- Prior art keywords
- ray
- anode plate
- rotating anode
- plate according
- carbon nanotubes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Not-in-force
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- 238000000034 method Methods 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 8
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- 239000010937 tungsten Substances 0.000 claims description 9
- 229910052721 tungsten Inorganic materials 0.000 claims description 9
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- 238000009826 distribution Methods 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 6
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- 150000001247 metal acetylides Chemical class 0.000 claims description 5
- 229910052758 niobium Inorganic materials 0.000 claims description 5
- 239000010955 niobium Substances 0.000 claims description 5
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 5
- -1 borides Chemical class 0.000 claims description 4
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- 238000003825 pressing Methods 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052796 boron Inorganic materials 0.000 claims description 2
- 229910052735 hafnium Inorganic materials 0.000 claims description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims description 2
- 229910021332 silicide Inorganic materials 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000007858 starting material Substances 0.000 claims 4
- 239000000654 additive Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 55
- 239000000463 material Substances 0.000 description 15
- 229910002804 graphite Inorganic materials 0.000 description 14
- 239000010439 graphite Substances 0.000 description 14
- 239000000835 fiber Substances 0.000 description 6
- 229920000049 Carbon (fiber) Polymers 0.000 description 5
- 239000004917 carbon fiber Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000010290 vacuum plasma spraying Methods 0.000 description 4
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- 239000002109 single walled nanotube Substances 0.000 description 3
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 3
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910001182 Mo alloy Inorganic materials 0.000 description 2
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- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 description 2
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- 239000000126 substance Substances 0.000 description 2
- 229910003468 tantalcarbide Inorganic materials 0.000 description 2
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000691 Re alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- VXYAXARSCYHTTI-UHFFFAOYSA-N [Ta].[Re].[W] Chemical compound [Ta].[Re].[W] VXYAXARSCYHTTI-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
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- 238000006243 chemical reaction Methods 0.000 description 1
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- 230000008018 melting Effects 0.000 description 1
- UNASZPQZIFZUSI-UHFFFAOYSA-N methylidyneniobium Chemical compound [Nb]#C UNASZPQZIFZUSI-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000011858 nanopowder Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
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- 239000002994 raw material Substances 0.000 description 1
- 150000003282 rhenium compounds Chemical class 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
- H01J35/108—Substrates for and bonding of emissive target, e.g. composite structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
Definitions
- the invention relates to an x-ray rotary anode plate and a method for its production, wherein the x-ray rotary anode plate has a base body.
- This base body which carries an applied layer or an inserted body of X-ray active material with the focal path, for example of a tungsten-rhenium alloy with 5 to 10 mass% rhenium, has the function to give the overall structure the necessary strength and the derive heat energy arising in the energetic conversion of electron radiation into X-ray radiation.
- the material of the base body depends above all on such characteristic values as heat capacity, thermal conductivity, heat transfer and adaptation of the thermal expansion between or from X-ray-active material and base body.
- the requirements for the thermal and mechanical load capacity of the X-ray rotary anode plates are constantly increasing.
- high power x-ray tubes can experience temperatures of over 3000 ° C in the electronic focal spot.
- For better energy distribution of the plate rotates at 9,000 min -1; are planned speed of 15,000 min -1 and more.
- the diameter of the rotary anode plate is already at 200 mm and planned 300 mm! The strength of the base body material must take this fact into account.
- X-ray rotary anode plates having a base body made of a molybdenum alloy, such as molybdenum with additions of titanium, zirconium and carbon (“TZM”) have been known ( DE 33 03 529 A1 ). At high rotational speeds of the rotary anode plate, this disturbs the high density of the main component molybdenum of 10.2 g / cm 3 in the base body. Such X-ray rotary anode plates can reach a mass of more than 5 kg.
- a molybdenum alloy such as molybdenum with additions of titanium, zirconium and carbon
- base body for the application mentioned of fiber-reinforced graphite have become known.
- Carbon fibers are preferably used, wherein, via the spatial arrangement of the fibers or fiber braids, for example, an adaptation of the thermal expansion coefficient of the base body to that of the applied X-ray-active material (US Pat. DE 103 01 069 A1 ) or a high thermal expansion in the radial direction associated with a high thermal conductivity in the axial direction to be achieved ( DE 196 50 061 A1 ).
- Kohtenstoffmaschinen in the fiber direction have good thermal conductivity and very good strength properties, but perpendicular to these properties are orders of magnitude worse.
- this anisotropy has been attempted to be limited by a three-dimensional weaving of the carbon fibers, but the material nevertheless remains anisotropic in the two-digit micrometer range.
- carbon nanotubes carbon nanotubes
- CNT carbon nanotubes
- the bulk density of these carbon nanotubes according to the manufacturer is in the order of 0.15 g / cm 3 , the material density is given as 1.3 g / cm 3 to 1.4 g / cm 3 , which is significantly lower than that of graphite.
- the strength is called a theoretical value of 45 GPa, which would be about 20 times that of steel and 200 times the above-mentioned base body material TZM.
- the theoretical thermal conductivity is 6000 W / mK and thus exceeds that of diamond by twice and that of metallic heat conductors by at least one order of magnitude.
- a cathode for an X-ray tube in which to achieve a cathode surface of small dimensions, the carbon nanotubes are arranged on a plate with a negative potential and emit electrons as emitter to an opposite target of copper (Japanese Patent Kurz IS 2005166565).
- cathode ray tube cathode they are arranged behind a control grid and serve to realize a cathode with adjustable emission surface (Japanese Patent Abbreviation 2006086001).
- an X-ray anode is known, on the anode impact surface of which carbon nanotubes are preferably arranged in the form of a tissue in order to suppress the formation of secondary electrons and the formation of a plasma or the release of neutral gases ( WO 03/043036 A1 ).
- base bodies for X-ray rotary anodes are known in which carbon fibers are preferably carbon nanotubes in copper ( DE 102005039187 ) or titanium ( DE 102005039188 ) are incorporated to improve heat dissipation.
- Copper has the disadvantage that its melting point is too low for high heat dissipation performance; Titanium, like copper, has the disadvantage that it tends to carbide at the operating temperature with the carbon present.
- carbon nanoparticles with graphite structure and substantially spherical shape having a mean grain size of, for example 55 nm have become known (company publication of the company Auer-Remy GmbH, Hamburg “Nanopowders", position “C 1249YD 7440-44-0").
- properties of carbon nanoparticles prepares for spherical particles with their dimensions in all axial dimensions the achievement of a substantially isotropic properties of the base body securing spatial distribution naturally less procedural difficulties in the preparation of raw materials for the shaping of the base body than in carbon nanotubes their axial extent.
- Tantalum carbide among other compounds, has been proposed as the backside coating of the rotating anode plate to improve the heat radiation ( DE 2 805 154 ).
- molybdenum carbide and tungsten carbide have become known in arrangements having a plurality of layers for adjusting the coefficient of thermal expansion between the X-ray active layer and the base body (FIG. DE 10 2005 015 920 ).
- the invention has for its object to provide an X-ray Rotary anode plate with a base body, which the above-mentioned requirements with respect to the temperature of the focal spot and the target speeds of X-ray machines Rotanodentellern by a lower mass, a corresponding thermal conductivity and a sufficient high temperature strength at least the same or to meet the lowest possible material costs of the base body and thereby able to remedy the deficiencies of the prior art.
- the object of the invention is furthermore to provide a rational production method for such an X-ray rotary anode plate consisting of the base body with X-ray active layer with necessary or advantageous intermediate layers between the two.
- a fundamental prerequisite for achieving the desired effects with respect to high-temperature strength, thermal conductivity and thermal expansion is the quasi-homogeneous distribution of the carbon nanotubes in the component in order to obtain a base body that is essentially isotropic in the submaxoscopic region, ie. an anisotropy degree of, for example, ⁇ 1.2 (ratio of the maximum value to the minimum value when measured in the three spatial dimensions) in terms of strength, thermal conductivity and thermal expansion to achieve.
- Particularly favorable is a slightly angled shape of the individual carbon nanotubes.
- the macroflexibility of the base material may be enhanced by the addition of high strength compounds such as oxides, nitrides, borides, carbides, silicides of tantalum, niobium, chromium, silicon, molybdenum, hafnium, boron and / or tungsten or mixtures thereof and fibers of these materials be increased. Also, mixtures of these compounds are conceivable.
- high strength compounds such as oxides, nitrides, borides, carbides, silicides of tantalum, niobium, chromium, silicon, molybdenum, hafnium, boron and / or tungsten or mixtures thereof and fibers of these materials be increased. Also, mixtures of these compounds are conceivable.
- the proportion of these substances in the axial direction can be varied, it is also advantageous if the optionally present proportion of graphite or graphite fibers to the X-ray active layer in favor of the proportion of Kohlenstoffnano tube and said strength-increasing substances decreases.
- the base body can be provided with the X-ray-active layer according to the usual coating method, wherein for controlling the harmful carbon diffusion per se known diffusion barrier layers of rhenium, molybdenum, tantalum, niobium, zirconium, titanium or compounds and combinations of these metals as well as in more advantageous Embodiment of the invention, a binding layer, for example, by introducing rhenium or rhenium compounds, or carbides in the surface region of the base body, are arranged.
- a leveling layer preferably of molybdenum or a molybdenum alloy between the diffusion barrier layer and the X-ray active layer. It serves, for example, to compensate for differences between the two aforementioned layers in terms of thermal expansion and / or ductility.
- a particularly quickly realizable technical solution is the joining of a conventional X-ray rotating anode plate made of metal with the base body, the plate can be performed much thinner because of the better strength properties of the base body according to the invention as in the prior art, which helps to save mass and cost, in principle It should be noted that the reduced mass is advantageous not only in terms of material costs but also because of the lower centrifugal forces.
- the advantageous effects of the invention as a result of the production method according to the invention lie in the saving of expensive coating or confectioning process and the necessary investments, in minimizing the use of materials and in an increase in strength of the entire component.
- the in Fig. 1 X-ray rotary anode plate shown in section consists of a base body 1.1 with 60% by mass of carbon nanotubes and 40% by mass of nano-graphite powder particles, to which a diffusion barrier layer 3.1 made of tungsten-rhenium tantalum, known per se, is used as a bonding layer 4.1 by vacuum plasma spraying. and the X-ray active layer 2.1 are applied.
- the diameter of the X-ray rotary anode plate is 120 mm, its thickness 15 mm.
- the base body 1.1 is manufactured by the conventional methods of powder metallurgy and graphite processing by mixing the powders, pressing and heat treatment, under circumstances using the hot pressing method, in dimensions close to the final shape and finished by cutting shaping.
- an X-ray rotary anode plate shown in section has a base body 1.2, which consists of commercially available carbon nanotubes with an addition of 20% by volume of tungsten carbide.
- the base body 1.2 is a depression corresponding to the course of the isotherms in the operating state according to patent application no. 10 2005 000 784 A1 introduced, which is filled by the X-ray active layer 2.2 of tungsten with 5 mass% rhenium.
- the diffusion barrier layer 3.2 which is also the bonding layer 4.2, consists in this case of tantalum and has a thickness of 0.2 mm, is adapted to the shape of the depression and, like the X-ray active layer 2.2, corresponds in function to the corresponding layers 2.1; 3.1 and 4.1 of embodiment 1. The same applies to the geometric dimensions of the X-ray rotary anode plate.
- the preparation of the complete component with all the layers mentioned above takes place in this case after filling in a suitable mold in one operation by hot pressing by pulse current at 2400 ° C at a pressure of 40 MPa in a residual gas atmosphere of argon with a slight hydrogen content at a residual pressure of about 2 Pa.
- the final production takes place according to the usual procedures.
- An improvement in quality of the X-ray rotary anode plate produced according to Embodiment 2 is achieved as follows:
- the layer 2.2 is adjusted to the composition tungsten with 1 mass% rhenium.
- the disk bevel is cleanly ground and applied by vacuum plasma spraying an X-ray active layer of the composition tungsten with 5% by mass of rhenium with a thickness of 200 microns.
- the final production takes place according to the usual procedures.
- X-ray rotary anode plate shown in section represents technologically and in terms of the manufacturing process, a transitional shape between a conventional X-ray rotary anode plate made of metal and the inventive solution, of course, all the necessary features of the invention are realized.
- the base body 1.3 beveled at the outer edge towards the axis corresponds in composition and technologically to the base body 1.1 of embodiment 1.
- This base body 1.3 is a finished metal body 5 made of a molybdenum-TZM alloy with an X-ray active layer 2.3 by diffusion bonding to the surface. 6 connected.
- the excellent strength properties of the base body 1.3 with a content of carbon nanotubes make it possible despite the intended high speeds and operating temperatures, the metal body 5 much thinner and easier to perform than in X-ray Drehanodentellem metal with a graphite base body after State of the art.
- the diameter of the X-ray rotary anode plate is, as in the embodiments 1 and 2, also 120 mm; the total thickness is different than in the aforementioned embodiments, a total of 16 mm, namely 6 mm of the metal body 5 plus 10 mm of the base body 1.3.
- FIG. 4 shows a layered base body of an X-ray rotary anode plate according to claims 4 and 5, wherein the cross-sectional shape of the bonding layer 4.4 and the X-ray active layer 2.4, as in the above embodiments 2 and 3 according to claim 19, in turn, an isotherm of the temperature distribution in the vicinity of the X-ray Layer follows during operation.
- the layers of the base body From bottom to top, i. towards the X-ray-active layer, the layers of the base body have the following composition:
- Lower layer 1.41 single-walled carbon nanotubes and on average 30% silicon carbide by volume, the content of which within this layer preferably increasing from top to bottom.
- Upper layer 143 Single-walled carbon nanotubes with an average of 20% by volume of tungsten carbide, the content of which within this layer preferably increasing from top to bottom.
- each 80 micron thick base body bonding layers of molybdenum carbide are each 80 micron thick base body bonding layers of molybdenum carbide.
- a recess corresponding to the mentioned course of an isotherm is incorporated in the region of the focal path.
- a diffusion barrier layer 3.4 of 100 microns thickness of 40% by volume tantalum carbide and 60 volume 5 niobium carbide.
- a bonding layer 4.4 made of molybdenum with 12% by weight of tungsten and finally the depression up to the level of the bevel filling up the half-active layer 2.4 made of tungsten with 6% by mass rhenium is arranged approximately to half the depth of the depression.
- the typical dimensions of such an X-ray rotary anode plate are for example: diameter: 120 mm, thickness of the layers 1.41 and 1.42 per 6 mm and the layer 1.43 8 mm.
- the width of the depression with the layers 3.4 and 4.4 and the X-ray active layer 2.4 is 35 mm and its maximum depth measured from the beveled surface of 6 mm.
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- Battery Electrode And Active Subsutance (AREA)
- X-Ray Techniques (AREA)
- Cell Electrode Carriers And Collectors (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007047544 | 2007-10-02 | ||
DE102008021551 | 2008-04-28 | ||
PCT/DE2008/001629 WO2009043344A1 (de) | 2007-10-02 | 2008-10-01 | Röntgen-drehanodenteller und verfahren zu seiner herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2206136A1 EP2206136A1 (de) | 2010-07-14 |
EP2206136B1 true EP2206136B1 (de) | 2013-03-27 |
Family
ID=40317029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08836274A Not-in-force EP2206136B1 (de) | 2007-10-02 | 2008-10-01 | Röntgen-drehanodenteller und verfahren zu seiner herstellung |
Country Status (6)
Country | Link |
---|---|
US (1) | US8280008B2 (es) |
EP (1) | EP2206136B1 (es) |
JP (1) | JP2010541172A (es) |
DE (1) | DE102008050716A1 (es) |
ES (1) | ES2409579T3 (es) |
WO (1) | WO2009043344A1 (es) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010133189A1 (de) * | 2009-05-19 | 2010-11-25 | Arno Cloos | Werkstoffe, welche kohlenstoffnanoteilchen enthalten und deren verwendung |
DE102009022082A1 (de) | 2009-05-19 | 2010-11-25 | Arno Cloos | Werkstoffe, welche Kohlenstoffnanoteilchen enthalten und deren Verwendung |
RU2598529C2 (ru) | 2010-12-16 | 2016-09-27 | Конинклейке Филипс Электроникс Н.В. | Элемент анодного диска с огнеупорным промежуточным слоем и фокальным путем vps |
US9449782B2 (en) * | 2012-08-22 | 2016-09-20 | General Electric Company | X-ray tube target having enhanced thermal performance and method of making same |
JP2014216290A (ja) * | 2013-04-30 | 2014-11-17 | 株式会社東芝 | X線管及び陽極ターゲット |
US8942353B2 (en) | 2013-06-11 | 2015-01-27 | General Electric Company | Field assisted sintering of X-ray tube components |
AT14991U1 (de) * | 2015-05-08 | 2016-10-15 | Plansee Se | Röntgenanode |
KR102030813B1 (ko) * | 2018-03-28 | 2019-10-10 | 경북대학교 산학협력단 | 엑스선관 타겟, 이를 구비한 엑스선관, 및 상기 엑스선관 타겟의 제조 방법 |
CN110797244B (zh) * | 2019-10-31 | 2022-11-04 | 西北核技术研究院 | 一种长寿命强流二极管复合阳极及其制作方法 |
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US4132916A (en) | 1977-02-16 | 1979-01-02 | General Electric Company | High thermal emittance coating for X-ray targets |
JPS5857247A (ja) * | 1981-09-30 | 1983-04-05 | Toshiba Corp | X線管用回転陽極およびその製造方法 |
AT376064B (de) | 1982-02-18 | 1984-10-10 | Plansee Metallwerk | Roentgenroehren-drehanode |
DE3238352A1 (de) | 1982-10-15 | 1984-04-19 | Siemens AG, 1000 Berlin und 8000 München | Roentgenroehren-drehanode |
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JP3900149B2 (ja) * | 2003-12-17 | 2007-04-04 | 三菱電機株式会社 | 点火コイル |
JP2005276760A (ja) * | 2004-03-26 | 2005-10-06 | Shimadzu Corp | X線発生装置 |
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JP2006164651A (ja) * | 2004-12-06 | 2006-06-22 | Hitachi Zosen Corp | X線発生用ターゲットおよびその製造方法 |
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DE102005039188B4 (de) | 2005-08-18 | 2007-06-21 | Siemens Ag | Röntgenröhre |
JP2007123022A (ja) * | 2005-10-27 | 2007-05-17 | Shimadzu Corp | X線源およびそれに用いられるターゲット |
DE102006010232A1 (de) * | 2006-03-02 | 2007-09-06 | Schunk Kohlenstofftechnik Gmbh | Verfahren zur Herstellung eines Kühlkörpers sowie Kühlkörper |
-
2008
- 2008-10-01 ES ES08836274T patent/ES2409579T3/es active Active
- 2008-10-01 JP JP2010527322A patent/JP2010541172A/ja active Pending
- 2008-10-01 WO PCT/DE2008/001629 patent/WO2009043344A1/de active Application Filing
- 2008-10-01 EP EP08836274A patent/EP2206136B1/de not_active Not-in-force
- 2008-10-01 US US12/681,055 patent/US8280008B2/en not_active Expired - Fee Related
- 2008-10-01 DE DE102008050716A patent/DE102008050716A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
ES2409579T3 (es) | 2013-06-27 |
WO2009043344A1 (de) | 2009-04-09 |
DE102008050716A1 (de) | 2009-04-09 |
JP2010541172A (ja) | 2010-12-24 |
US20100284520A1 (en) | 2010-11-11 |
US8280008B2 (en) | 2012-10-02 |
EP2206136A1 (de) | 2010-07-14 |
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