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EP1714298B1 - Modulare röntgenröhre und verfahren zu ihrer herstellung - Google Patents

Modulare röntgenröhre und verfahren zu ihrer herstellung Download PDF

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Publication number
EP1714298B1
EP1714298B1 EP03773415A EP03773415A EP1714298B1 EP 1714298 B1 EP1714298 B1 EP 1714298B1 EP 03773415 A EP03773415 A EP 03773415A EP 03773415 A EP03773415 A EP 03773415A EP 1714298 B1 EP1714298 B1 EP 1714298B1
Authority
EP
European Patent Office
Prior art keywords
ray tube
anode
acceleration
electrons
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP03773415A
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German (de)
English (en)
French (fr)
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EP1714298A1 (de
Inventor
Mark Mildner
Kurt Holm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Comet Holding AG
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Comet Holding AG
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Publication date
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor

Definitions

  • the present invention relates to an X-ray tube for high dose rates, a corresponding method for generating high dose rates with X-ray tubes and a method for producing corresponding X-ray devices, in which an anode and a cathode in a vacuumized interior are arranged opposite to each other, wherein electrons by means of applying high voltage the anode will be accelerated.
  • X-ray tubes are widely used in scientific and technical applications. X-ray tubes are found not only in medicine, e.g. in diagnostic systems or in therapeutic systems for irradiation of diseased tissue use, but they are e.g. also used for the sterilization of substances such as blood or food or for sterilization (infertility) of living things such as insects. Other applications are further found in traditional x-ray technology, such as e.g. the scanning of luggage and / or transport containers or the non-destructive inspection of workpieces, e.g. Concrete reinforcements, etc. Various methods and devices for X-ray tubes are described in the prior art.
  • FIG. 1 shows schematically an example of such a conventional X-ray tube from a glass composite.
  • FIG. 2 and 3 show conventional x-ray tubes made of metal-ceramic composites.
  • x-ray tubes In the X-ray tubes, electrons pass through an electric field in a vacuumized tube. They are thereby accelerated to their final energy and convert them to a target surface in X-radiation. That is to say, x-ray tubes comprise an anode and a cathode, which are arranged opposite one another in a vacuumized interior, and which in the metal-ceramic tubes are arranged opposite a cylindrical metal part (FIG.
  • FIG. 1 Figure 2/3 ) and glass tubes of a glass cylinder ( FIG. 1 ) are enclosed.
  • the glass acts as an insulator.
  • the anode and / or cathode are usually electrically insulated by means of a ceramic insulator, the ceramic insulator (s) being arranged axially to the metal cylinder behind the anode and / or cathode and closing the vacuum space at the respective end.
  • the ceramic insulators are typically disk-shaped (annular) or conical. In principle, any type of insulator geometry would be possible with this type of tube, with field peaks being taken into account at high voltages.
  • the ceramic insulators have in their middle an opening in which a high voltage supply to the anode or the cathode, are used vacuum-tight.
  • These types of x-ray tubes are also referred to in the art as bipolar or bipolar x-ray tubes ( FIG. 3 ).
  • unipolar devices FIG. 2
  • the electron source cathode
  • HV negative high voltage
  • the target anode
  • HV positive high voltage
  • the secondary electron emission is known for the impairment of the X-ray tube operation.
  • secondary electron emission when the electron beam impinges on the anode, in addition to the X-rays, undesired but unavoidable secondary electrons propagate in the interior of the X-ray tube on tracks corresponding to the field lines. These secondary electrons can reach the insulator surface through various scattering and impact processes and there reduce the HV insulation properties.
  • secondary electrons also result from the fact that the insulators are hit at the anode and / or cathode during operation of unavoidable field emission electrons and trigger secondary electrons there.
  • the electric field is generated when the high voltage is switched on at the anode and cathode, ie: during operation of the x-ray tube, in the interior and the interior facing surfaces. This also includes the surfaces of the insulator.
  • the shielding electrodes can be used, for example, in pairs, wherein they are usually arranged coaxially at a certain distance in a rotationally symmetrical shape of the x-ray tube in order to optimally prevent the propagation of the secondary electrons. As has been shown, however, such devices can no longer be used at very high voltage. In addition, the material and manufacturing costs in such structures is greater than in X-ray tubes with only insulators. Another possibility of the prior art is eg in DE6946926 shown. In order to reduce the attack surface, a conical ceramic insulator is used in these solutions. The ceramic insulator has a substantially constant wall thickness and is coated, for example, with a vulcanized rubber layer. The layer should contribute to the fact that secondary electrons occur less strongly.
  • the electric field inside the vacuum space also senses the surfaces of the insulators.
  • the field accelerates an electron impinging on the insulators or a scattered electron triggered by an impinging electron away from the surface in the direction of the anode.
  • the insulation cones are shaped such that the normal vector of the electric field accelerates the electrons away from the insulator surface. If the anode-side insulator, like the cathode-side insulator, is designed as a truncated cone protruding into the interior, then an electron impinging on the insulator (for example an electron triggered from the metal piston) is likewise accelerated towards the anode.
  • the anode-side cone of the insulator is shaped so that the normal vector faces away from the surface.
  • the electron moves along the insulator surface, because no electric field acting on the insulator surface acts on the electron.
  • the significant disruption possibly even gas eruptions or even a breakdown of the insulator can cause.
  • the higher the voltage the more significant this effect becomes. At very high voltages, this type of insulators can therefore no longer be used.
  • the geometric length increases with increasing applied electric field.
  • an X-ray source is to be proposed which allows several times higher electrical powers than conventional X-ray sources.
  • the tubes should be built modular and easy and inexpensive to manufacture. Further, any defective parts of the X-ray tube should be interchangeable without having to replace the whole X-ray tube.
  • an X-ray tube an anode and a cathode are arranged opposite each other in a vacuumized interior, wherein at the cathode electrons are generated, are accelerated by means of applying high voltage to the anode and X-rays at the anode means
  • the x-ray tube comprises a plurality of complementary acceleration modules, the acceleration modules each comprising at least one potential-carrying electrode, wherein the first acceleration module comprises the cathode with primary electron generation and the last acceleration module comprises the anode with the x-ray generation, and wherein the x-ray tube at least one further acceleration module comprising a potential-carrying electrode, which acceleration module for the acceleration of electrons is repeatedly reproducible in series switchable, and wherein the x-ray tube is modular buildable.
  • the anode may comprise a target for X-ray generation with an exit window or be formed as a transmission anode, which closes the vacuumized interior of the X-ray tube to the outside.
  • At least one of the electrodes may include spherically shaped ends for reducing or minimizing the field enhancement at the respective electrode.
  • the electrodes can be connected, for example, by means of potential connections, for example, to a high-voltage cascade.
  • One advantage of the invention is, inter alia, that very high power X-ray radiation can be generated, with the geometrical size of the X-ray tube being small, especially with tubes of the prior art.
  • the invention enables an X-ray tube which is stably operable over a very wide electric potential range without changing performance characteristics.
  • Another advantage of the invention is, inter alia, a much lower load on the insulator by the E field. This is especially true in comparison to the conventional disk insulators.
  • the inventive X-ray tube can be produced, for example, in a single-stage vacuum brazing process. This has the particular advantage that the subsequent evacuation of the X-ray tube can be omitted by means of high vacuum pumps. It is a further advantage that the X-ray tubes according to the invention are particularly suitable for the one-shot method due to their simple and modular construction, since the fields inside the tube are much smaller than in conventional tubes and the tube according to the invention is therefore less susceptible to contamination and / or leaks.
  • the potential difference between each two potential-carrying electrodes of adjacent acceleration modules is chosen to be constant for all acceleration modules, the final energy of the accelerating electrons being an integer multiple of the energy of an acceleration module.
  • At least one of the acceleration modules has a resealable vacuum valve.
  • the acceleration modules can be provided on one or both sides with a vacuum seal to allow an air-tight closure between the individual acceleration modules.
  • This variant has u.a. the advantage that by means of the vacuum valve, individual parts of the X-ray tube can be replaced without, as in conventional X-ray tubes, the same whole tube must be replaced. Since the tube has a modular design, the tube can also be subsequently easily adapted to changing operating conditions by using additional acceleration modules or removing existing modules. This is not possible with any of the prior art tubes.
  • the acceleration modules comprise a cylindrical insulating ceramic.
  • This variant has u.a. the advantage that the mechanical design effort at moderate load through the electric field is low, exceptionally high performance characteristics can be achieved.
  • the insulation ceramic has a high-resistance inner coating.
  • This variant has u.a. the advantage that disturbing charges by scattered electrons, caused on the one hand by field-related processes in the insulator material, on the other hand by the backscattered by the anode target secondary electrons and by field emission electrons, is avoided.
  • the life of the X-ray tubes and / or the potential differences between the individual acceleration electrodes can be additionally increased.
  • the insulation ceramic 53 comprises a rib-shaped outer structure. Due to the shape of the insulation ceramic 53, the insulation distance on the outside (atmosphere side) of the insulator can be extended. This variant has the advantage, among other things, that it has a high-voltage correspondingly shaped external structure. This exterior structure additionally allows for improved efficient cooling of the x-ray tube.
  • the electrodes of the acceleration modules comprise a shield for suppressing the scattered electron flow to the insulating ceramic.
  • At least one of the shields may include spherically shaped ends for reducing or minimizing field elevation at the respective shield.
  • the x-ray tube according to the invention is produced by the one-shot method.
  • This has u.a. the advantage that the subsequent evacuation of the X-ray tube 10 can be omitted by means of high vacuum pumps.
  • Another advantage of the one-shot method i.
  • the one-step manufacturing process is therefore more economically efficient, time-saving and cheaper. At the same time, contamination of the tube can be minimized in this process with suitable process control.
  • the tube is already largely free of impurities, which minimizes the dielectric strength of the insulating ceramics in the rule.
  • Vacuum tightness requirements for the tubes 10 are the same in most cases in the one-shot process as in multi-stage manufacturing processes.
  • the present invention relates not only to the method according to the invention but also to a device for carrying out this method and to a method for producing such a device.
  • it also relates to irradiation systems which comprise at least one X-ray tube according to the invention with one or more high-voltage cascades for supplying voltage to the at least one X-ray tube.
  • FIGS. 4 to 10 illustrate architectures that can be used to implement the invention.
  • an anode 20 and a cathode 30 are placed in a vacuumized interior 40 opposite one another.
  • the electrons e - are generated at the cathode 30, wherein the cathode 30 serves as an electron emitter.
  • the cathode 30 thus serves on the one hand for generating the electric field E, on the other hand also for electron generation. Therefore, all materials are in principle suitable for this application, the electrons e - can emit. This process can be achieved by thermal emission, but also by field emission (cold emitter).
  • any type of microtiparrays with mostly diamond-like structures or, for example, also nanotubes can be used.
  • the cold emission in this tube type can also be exploited by utilizing the Penning effect on suitably shaped metals.
  • thermal emitters which can also be used in this emitter concept, for example tungsten (W), lanthanum hexaboride (LaB 6 ), dispenser cathodes (La in W) and / or oxide cathodes (for example ZrO).
  • the electrons e - are accelerated by means of applying high voltage to the anode 20 and generate x-rays ⁇ On an object surface of the anode 20.
  • the anodes 20 perform two functions in the X-ray tubes 10. First, they serve as a positive electrode 20 for generating an electric field E for accelerating the electrons e - .
  • the anodes 20 or the target material embedded in the anodes 20 serve as a location where the electron energy is converted into X-radiation ⁇ . This conversion depends on the one hand on the particle energy, but also on the atomic number of the target material. Firstly, according to the Bethe formula, the energy loss of the particles is quadratic with the atomic number Z of the target material / dW dx ⁇ Z 2
  • the anode 20 is thermally stressed.
  • the anode or the target material must therefore be able to survive this thermal stress.
  • the vapor pressure of the target material at the operating temperature of the target should be sufficiently small so as not to negatively influence the vacuum necessary for the operation of the X-ray tube 10. Therefore, for example, target materials can be preferably used which are resistant to high temperatures or can be cooled well.
  • the target material for example, be embedded in a good heat conductive material (eg copper), which can be well cooled ie good thermal conductivity.
  • a good heat conductive material eg copper
  • the characteristic lines (K ⁇ ) are suitable for the specific application.
  • the x-ray tube 10 further comprises a plurality of complementary acceleration modules 41, ..., 45.
  • Each acceleration module 41,..., 45 comprises at least one potential-carrying electrode 20/30/423/433/443 with the corresponding potential connections 421/431/441.
  • a first acceleration module 41 comprises the cathode 30 with the electron production e - , ie with the electron emitter.
  • a second acceleration module 45 comprises the anode 20 with the X-radiation ⁇ .
  • the x-ray tube comprises at least one further acceleration module 42,..., 44 with a potential-carrying electrode 423/433/443.
  • the vacuumized interior 40 may be closed, for example, by means of insulating ceramic 51 to the outside.
  • the insulating materials should also be suitable for producing a metal-ceramic connection.
  • the ceramic should be applicable for Hochvaku umananden. Suitable materials are thus, for example, pure oxide ceramics, such as aluminum, magnesium, beryllium and zirconium oxide. Also monocrystalline Al 2 O 3 (sapphire) is suitable in principle. Furthermore, so-called glass ceramics, such as Macor, or similar materials are conceivable. In particular, mixed ceramics (eg doped Al 2 O 3 ) are of course suitable if they have the appropriate properties.
  • the insulation ceramics 51 may be designed, for example, outward in rib shape or the like, in order to extend insulating distance of the insulation jacket 51, which is not vacuum-side, that is, for example, is located in insulating oil. In the same way, however, any other embodiment, for example, a pure cylindrical shape, the insulating ceramic 51 conceivable without the core of the invention would be affected.
  • the insulation ceramic 51 may, for example, also have a high-resistance inner coating in order to dissipate possible charges that can be caused by various electronic processes, at the same time ensuring that the acceleration voltage can be applied.
  • FIG. 8 shows the basic structure of a modular metal-ceramic tube of two such further acceleration modules 42/43 with insulation ceramic 51, acceleration electrodes 423/433 and potential terminals 421/431.
  • the principle described here for the construction of X-ray tubes 10, which for example consists of a metal-ceramic composite can according to the invention are switched as often repeatable in series and so to accelerate electrons e.
  • the last potential-carrying electrode of the acceleration structure is the anode 20 required for the production.
  • the cathode 30 necessary for electron generation constitutes the first electrode of the acceleration structure This is in the embodiments of the FIGS. 4 to 9 shown.
  • X-ray tubes 10 can be built with a total energy up to 800 kilovolts or more (eg FIG. 5 ).
  • conventional X-ray tubes have been produced with a maximum total energy of 200 to 450 kilovolts.
  • An essential advantage of this concept is that it achieves very high energies with small designs at the same time.
  • Another advantage over existing concepts is the almost homogeneous loading of the segments of the insulating ceramics 51 by the electric field. This has the advantage, inter alia, that the X-ray tube 10 can be configured by segmentation so that the field-moderate loading of the insulating ceramics 51 remains below a limit value necessary for high-voltage flashovers.
  • FIG. 9 schematically shows the potential distribution in an inventive modular X-ray tube 10 of an embodiment with an 800kV tube.
  • the X-ray tubes used in the prior art there is a strong radial stress on the insulating ceramics because the tubes are constructed substantially similar to a cylindrical capacitor.
  • These radial fields lead to very high field strengths at the interface between the insulator inner radius and the axially arranged acceleration electrodes (anode, cathode).
  • This enormous field elevation at the so-called triple point (insulator-electrode-vacuum) leads to field emissions of electrons, which generate high-voltage flashovers and can lead to the destruction of the tube, as already described above.
  • FIG. 12 schematically shows an architecture of such a conventional X-ray tube 10 of the prior art.
  • electrons e- from an electron emitter that is a cathode 20
  • a hot tungsten filament emitted accelerated by an applied high voltage to a target, wherein X-rays ⁇ from the target, ie the anode 30 is emitted through a window 301.
  • Triple points field increases the to field emission of electrons e - lead) incurred while both the cathode side and the anode side.
  • the potential difference between in each case two potential-carrying electrodes 20/30/423/433/443 of adjacent acceleration modules 41,..., 45 may, for example, also be constant for all acceleration modules 41,. wherein the final energy of the accelerated electrons e - is an integer multiple of the energy of an acceleration module 41, ..., 45.
  • At least one of the acceleration modules 41,..., 45 may further comprise a resealable vacuum valve 531.
  • This has the advantage that by means of the vacuum valve 531 individual parts of the X-ray tube 10 can be replaced without, as in conventional X-ray tubes, the same whole tube must be replaced. Since the tube 10 according to the invention has a modular design, the tube 10 can subsequently also be easily adapted to changed operating conditions by using further acceleration modules or by removing existing modules. This is not possible with any of the prior art tubes.
  • the increase of the beam energy of X-ray tubes 10 can be achieved by adding one or more acceleration segments 41, ..., 45 or acceleration modules 41, ..., 45 ,
  • at least one of the acceleration modules 41,..., 45 can be designed such that it carries a resealable vacuum valve 531.
  • the acceleration modules 41,..., 45 could additionally comprise vacuum seals on one or both sides.
  • the life of the X-ray tubes and / or the potential differences between the individual acceleration electrodes 20/30/423/433/443 can be additionally increased.
  • the simple and modular construction of the x-ray tube 10 according to the invention is particularly suitable for production processes in the one-shot method, or this construction allows the one-shot process only efficiently.
  • the soldering of the entire tube 10 takes place in a single-stage vacuum brazing process. This has the advantage, inter alia, that the subsequent evacuation of the x-ray tube 10 by means of high-vacuum pumps can be dispensed with.
  • Another advantage of the one-shot process ie the one-step production process by the total soldering of the tube in vacuum (one-shot method), is, among other things, that one has a single manufacturing process and not three as usual: 2. Assemble assemblies (eg soldering or welding) / 3. Evacuate tube by means of vacuum pump.
  • the one-step manufacturing process is therefore more economically efficient, time-saving and cheaper.
  • the contamination of the tube can be minimized.
  • the tube is already largely free of impurities, which minimizes the dielectric strength of the insulating ceramics in the rule.
  • Vacuum tightness requirements for the tubes 10 are the same in most cases in the one-shot process as in multi-stage manufacturing processes.
  • the inventive tube 10 is less susceptible to contamination and / or leaks.
  • the X-ray tube 10 according to the invention can also be used excellently for producing entire radiation systems and / or individual radiation devices 60 (see FIG. 12 ).
  • the tube 10 may be mounted in a housing 65, for example, in insulating oil.
  • the shielding housing 65 may include an exit window 61 for X-radiation ⁇ .
  • the radiation device 60 comprises for the tube 10 a corresponding high-voltage cascade 62, for example with an associated high-voltage transformer 63 and voltage terminals 64 to the outside.
  • Such radiation devices 60 or monobloc 60 can then be used, for example, to produce larger radiation systems.
  • inventive tube 10 without a target or transmission anode is also outstandingly suitable as an electron emitter and / or electron gun with the corresponding industrial fields of application due to its simple, modular construction and its high powers.
  • the shields 422/432/442 are shaped so that the electron beam does not "see" an insulator surface 51 (FIG. FIG. 13 ).
  • Charging effects of the ceramic insulators 51 may occur, which need not necessarily be caused by scattered and secondary electron emission.
  • FIG. 13 illustrated geometry or a similar geometry such charging effects can be prevented or minimized.
  • a coating of the insulation ceramic can also be used, in particular, to supply the potential if, for example, a suitable conductive layer is attached to the outside of the insulators, so that the layer acts as a voltage divider.
  • a suitable coating could also replace the metallic electrodes 423/433/443 against the vacuumized interior.

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  • X-Ray Techniques (AREA)
  • Radiation-Therapy Devices (AREA)
  • Peptides Or Proteins (AREA)
EP03773415A 2003-12-02 2003-12-02 Modulare röntgenröhre und verfahren zu ihrer herstellung Expired - Lifetime EP1714298B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CH2003/000796 WO2005055270A1 (de) 2003-12-02 2003-12-02 Modulare röntgenröhre sowie verfahren zur herstellung einer solchen modularen röntgenröhre

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EP1714298A1 EP1714298A1 (de) 2006-10-25
EP1714298B1 true EP1714298B1 (de) 2008-11-19

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US (1) US7424095B2 (zh)
EP (1) EP1714298B1 (zh)
CN (1) CN1879187B (zh)
AT (1) ATE414987T1 (zh)
AU (1) AU2003281900A1 (zh)
DE (1) DE50310817D1 (zh)
WO (1) WO2005055270A1 (zh)

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CN1879187B (zh) 2010-04-28
DE50310817D1 (de) 2009-01-02
CN1879187A (zh) 2006-12-13
WO2005055270A1 (de) 2005-06-16
US7424095B2 (en) 2008-09-09
ATE414987T1 (de) 2008-12-15
EP1714298A1 (de) 2006-10-25
AU2003281900A1 (en) 2005-06-24
US20070121788A1 (en) 2007-05-31

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