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DE69834673D1 - Verfahren zur Herstellung einer Elektronenemittierenden Quelle - Google Patents

Verfahren zur Herstellung einer Elektronenemittierenden Quelle

Info

Publication number
DE69834673D1
DE69834673D1 DE69834673T DE69834673T DE69834673D1 DE 69834673 D1 DE69834673 D1 DE 69834673D1 DE 69834673 T DE69834673 T DE 69834673T DE 69834673 T DE69834673 T DE 69834673T DE 69834673 D1 DE69834673 D1 DE 69834673D1
Authority
DE
Germany
Prior art keywords
electron
producing
emitting source
emitting
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69834673T
Other languages
English (en)
Other versions
DE69834673T2 (de
Inventor
Sashiro Uemura
Takeshi Nagasako
Junko Yotani
Mitsuaki Morikawa
Yahachi Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Noritake Co Ltd
Original Assignee
Noritake Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP27162597A external-priority patent/JP3792859B2/ja
Priority claimed from JP20324998A external-priority patent/JP3790047B2/ja
Application filed by Noritake Co Ltd filed Critical Noritake Co Ltd
Publication of DE69834673D1 publication Critical patent/DE69834673D1/de
Application granted granted Critical
Publication of DE69834673T2 publication Critical patent/DE69834673T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/05Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/304Field-emissive cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30446Field emission cathodes characterised by the emitter material
    • H01J2201/30453Carbon types
    • H01J2201/30469Carbon nanotubes (CNTs)
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/902Specified use of nanostructure
    • Y10S977/932Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/939Electron emitter, e.g. spindt emitter tip coated with nanoparticles

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cold Cathode And The Manufacture (AREA)
DE69834673T 1997-09-30 1998-09-25 Verfahren zur Herstellung einer Elektronenemittierenden Quelle Expired - Lifetime DE69834673T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP26694797 1997-09-30
JP26694797 1997-09-30
JP27162597A JP3792859B2 (ja) 1997-10-03 1997-10-03 電子銃
JP27162597 1997-10-03
JP20324998 1998-07-17
JP20324998A JP3790047B2 (ja) 1998-07-17 1998-07-17 電子放出源の製造方法

Publications (2)

Publication Number Publication Date
DE69834673D1 true DE69834673D1 (de) 2006-06-29
DE69834673T2 DE69834673T2 (de) 2006-10-26

Family

ID=27328209

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69834673T Expired - Lifetime DE69834673T2 (de) 1997-09-30 1998-09-25 Verfahren zur Herstellung einer Elektronenemittierenden Quelle
DE69823441T Expired - Lifetime DE69823441T2 (de) 1997-09-30 1998-09-25 Elektronen emittierende Quelle

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69823441T Expired - Lifetime DE69823441T2 (de) 1997-09-30 1998-09-25 Elektronen emittierende Quelle

Country Status (4)

Country Link
US (1) US6239547B1 (de)
EP (2) EP0905737B1 (de)
KR (2) KR100363005B1 (de)
DE (2) DE69834673T2 (de)

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* Cited by examiner, † Cited by third party
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DE69823441T2 (de) 2004-09-23
KR19990030320A (ko) 1999-04-26
US6239547B1 (en) 2001-05-29
DE69823441D1 (de) 2004-06-03
KR20020072520A (ko) 2002-09-16
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