[go: up one dir, main page]

DE69712121D1 - Drehgeschwindigkeitssensor - Google Patents

Drehgeschwindigkeitssensor

Info

Publication number
DE69712121D1
DE69712121D1 DE69712121T DE69712121T DE69712121D1 DE 69712121 D1 DE69712121 D1 DE 69712121D1 DE 69712121 T DE69712121 T DE 69712121T DE 69712121 T DE69712121 T DE 69712121T DE 69712121 D1 DE69712121 D1 DE 69712121D1
Authority
DE
Germany
Prior art keywords
angular velocity
velocity sensor
sensor
angular
velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69712121T
Other languages
English (en)
Other versions
DE69712121T2 (de
Inventor
Kazufumi Moriya
Tomoyasu Hasegawa
Eiichi Takata
Tomio Shibano
Tetsuo Osawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE69712121D1 publication Critical patent/DE69712121D1/de
Application granted granted Critical
Publication of DE69712121T2 publication Critical patent/DE69712121T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
DE69712121T 1996-01-22 1997-01-22 Drehgeschwindigkeitssensor Expired - Lifetime DE69712121T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08027294A JP3090024B2 (ja) 1996-01-22 1996-01-22 角速度センサ

Publications (2)

Publication Number Publication Date
DE69712121D1 true DE69712121D1 (de) 2002-05-29
DE69712121T2 DE69712121T2 (de) 2002-12-19

Family

ID=12217077

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69712121T Expired - Lifetime DE69712121T2 (de) 1996-01-22 1997-01-22 Drehgeschwindigkeitssensor

Country Status (4)

Country Link
US (1) US5895852A (de)
EP (1) EP0785413B1 (de)
JP (1) JP3090024B2 (de)
DE (1) DE69712121T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09318649A (ja) * 1996-05-30 1997-12-12 Texas Instr Japan Ltd 複合センサ
US6223598B1 (en) * 1997-06-18 2001-05-01 Analog Devices, Inc. Suspension arrangement for semiconductor accelerometer
EP0911606A1 (de) 1997-10-23 1999-04-28 STMicroelectronics S.r.l. Integrierter Winkelgeschwindigkeitssensor und Verfahren zu seiner Herstellung
KR100459887B1 (ko) * 1999-01-11 2004-12-03 삼성전자주식회사 삼차원 빗살 가진 구조물 및 이를 채용한 관성 감지 센서와 액츄
JP4126833B2 (ja) * 1999-03-12 2008-07-30 株式会社デンソー 角速度センサ装置
JP3525862B2 (ja) * 2000-05-22 2004-05-10 トヨタ自動車株式会社 センサ素子及びセンサ装置
JP2002131331A (ja) * 2000-10-24 2002-05-09 Denso Corp 半導体力学量センサ
US6742389B2 (en) 2001-01-24 2004-06-01 The Regents Of The University Of Michigan Filter-based method and system for measuring angular speed of an object
US6823733B2 (en) * 2002-11-04 2004-11-30 Matsushita Electric Industrial Co., Ltd. Z-axis vibration gyroscope
US6892578B2 (en) * 2002-11-29 2005-05-17 Hitachi Metals Ltd. Acceleration sensor
JP3861813B2 (ja) * 2003-01-14 2006-12-27 株式会社デンソー 静電振動型デバイス
JP4123044B2 (ja) * 2003-05-13 2008-07-23 ソニー株式会社 マイクロマシンおよびその製造方法
US7464590B1 (en) * 2004-03-12 2008-12-16 Thomson Licensing Digitally programmable bandwidth for vibratory rate gyroscope
DE112007000303A5 (de) * 2006-03-10 2008-10-30 Conti Temic Microelectronic Gmbh Mikromechanischer Drehratensensor
JP2007298408A (ja) * 2006-04-28 2007-11-15 Matsushita Electric Works Ltd 静電容量式センサ
US20080182344A1 (en) * 2007-01-30 2008-07-31 Steffen Mueller Method and system for determining deformations on a substrate
US7832948B1 (en) 2007-09-13 2010-11-16 Tessera MEMS Technologies, Inc. Impulse actuated MEMS devices
FI119895B (fi) * 2007-10-05 2009-04-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
JP5247182B2 (ja) * 2008-02-19 2013-07-24 キヤノン株式会社 角速度センサ
FR2983575B1 (fr) * 2011-12-02 2015-03-06 Commissariat Energie Atomique Micro-capteur inertiel de mouvements de rotation
JP5935901B2 (ja) * 2012-12-11 2016-06-15 株式会社村田製作所 角速度検出素子
CN113932706A (zh) * 2021-11-15 2022-01-14 武汉大洋义天科技股份有限公司 一种基于Coriolis效应的旋转传感器及转轴旋转角度测量方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4022464C2 (de) * 1990-07-14 2000-12-28 Bosch Gmbh Robert Beschleunigungssensor
US5377544A (en) * 1991-12-19 1995-01-03 Motorola, Inc. Rotational vibration gyroscope
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5734105A (en) * 1992-10-13 1998-03-31 Nippondenso Co., Ltd. Dynamic quantity sensor
US5465620A (en) * 1993-06-14 1995-11-14 Rensselaer Polytechnic Institute Micromechanical vibratory gyroscope sensor array
FR2726361B1 (fr) * 1994-10-28 1997-01-17 Sextant Avionique Microgyrometre
DE19519488B4 (de) * 1995-05-27 2005-03-10 Bosch Gmbh Robert Drehratensensor mit zwei Beschleunigungssensoren

Also Published As

Publication number Publication date
JP3090024B2 (ja) 2000-09-18
EP0785413A2 (de) 1997-07-23
US5895852A (en) 1999-04-20
EP0785413B1 (de) 2002-04-24
DE69712121T2 (de) 2002-12-19
EP0785413A3 (de) 2000-12-06
JPH09196687A (ja) 1997-07-31

Similar Documents

Publication Publication Date Title
DE69727756D1 (de) Drehgeschwindigkeitssensor
DE69618042D1 (de) Drehgeschwindigkeitssensor
DE69934169D1 (de) Drehgeschwindigkeitssensor
DE69726631D1 (de) Winkelgeschwindigkeitsaufnehmer
DE69915919D1 (de) Drehgeschwindigkeitssensor
DE59509790D1 (de) Winkelsensor
DE59812495D1 (de) Winkelsensor
DE69637287D1 (de) Winkelgeschwindigkeitssensor
DE69904551D1 (de) Drehgeschwindigkeitssensorvorrichtung
DE59704257D1 (de) Mikromechanischer sensor
BR9608046A (pt) Sensor
DE69401607D1 (de) Winkelgeschwindigkeitsmessaufnehmer
DE69511542D1 (de) Positionsgeber
DE59506466D1 (de) Drehwinkelsensor
FI974019A0 (fi) Virtausanturi
DE69712121D1 (de) Drehgeschwindigkeitssensor
DE69714112D1 (de) Oxidsensor
DE59605586D1 (de) Winkelsensor
BR9801582A (pt) Sensor de velocidade angular
DE59505604D1 (de) Drehratensensor
DE69420481D1 (de) Winkelgeschwindigkeitsmessaufnehmer
DE69525935D1 (de) Beschleunigungssensor
DE59503052D1 (de) Inertialsensor-Einheit
DE59603812D1 (de) Beschleunigungsgrenzwertsensor
DE69504428D1 (de) Beschleunigungssensor

Legal Events

Date Code Title Description
8364 No opposition during term of opposition