DE69401607D1 - Winkelgeschwindigkeitsmessaufnehmer - Google Patents

Winkelgeschwindigkeitsmessaufnehmer

Info

Publication number: DE69401607D1
Authority: DE; Germany
Prior art keywords: angular velocity; velocity sensor; sensor; angular; velocity
Prior art date: 1993-04-16
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69401607T

Other languages

English (en)

Other versions

DE69401607T2 (de

Inventor

Yoichi Mochida

Katsuhiko Tanaka

Kazufumi Moriya

Tomoyasu Hasegawa

Kennichi Atsuchi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Murata Manufacturing Co Ltd

Original Assignee

Murata Manufacturing Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1993-04-16

Filing date

1994-04-15

Publication date

1997-03-13

1994-04-15 Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd

1997-03-13 Application granted granted Critical

1997-03-13 Publication of DE69401607D1 publication Critical patent/DE69401607D1/de

1997-09-04 Publication of DE69401607T2 publication Critical patent/DE69401607T2/de

2014-04-16 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
General Physics & Mathematics (AREA)
Radar, Positioning & Navigation (AREA)
Remote Sensing (AREA)
Gyroscopes (AREA)
Micromachines (AREA)

DE69401607T 1993-04-16 1994-04-15 Winkelgeschwindigkeitsmessaufnehmer Expired - Lifetime DE69401607T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP05113910A JP3123301B2 (ja)	1993-04-16	1993-04-16	角速度センサ

Publications (2)

Publication Number	Publication Date
DE69401607D1 true DE69401607D1 (de)	1997-03-13
DE69401607T2 DE69401607T2 (de)	1997-09-04

Family

ID=14624254

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69401607T Expired - Lifetime DE69401607T2 (de)	1993-04-16	1994-04-15	Winkelgeschwindigkeitsmessaufnehmer

Country Status (4)

Country	Link
US (1)	US5488863A (de)
EP (1)	EP0620415B1 (de)
JP (1)	JP3123301B2 (de)
DE (1)	DE69401607T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6467345B1 (en)	1993-10-18	2002-10-22	Xros, Inc.	Method of operating micromachined members coupled for relative rotation
KR100374803B1 (ko) *	1995-05-25	2003-05-12	삼성전자주식회사	튜닝포크형자이로스코프
US5962786A (en) *	1995-09-26	1999-10-05	Onera (Office National D'eudes Et De Recheres Aerospatiales)	Monolithic accelerometric transducer
FR2739190B1 (fr) *	1995-09-26	1997-11-28	Onera (Off Nat Aerospatiale)	Transducteur monolithique d'acceleration
US5747961A (en) *	1995-10-11	1998-05-05	The Charles Stark Draper Laboratory, Inc.	Beat frequency motor position detection scheme for tuning fork gyroscope and other sensors
US5914801A (en) *	1996-09-27	1999-06-22	Mcnc	Microelectromechanical devices including rotating plates and related methods
EP1012890A1 (de) *	1997-04-01	2000-06-28	Xros, Inc.	Einstellen von betriebsgrössen eines mikrogefertigten torsionsoszillators
JPH112526A (ja) *	1997-06-13	1999-01-06	Mitsubishi Electric Corp	振動型角速度センサ
US6230563B1 (en)	1998-06-09	2001-05-15	Integrated Micro Instruments, Inc.	Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
US7051590B1 (en)	1999-06-15	2006-05-30	Analog Devices Imi, Inc.	Structure for attenuation or cancellation of quadrature error
US6461962B1 (en) *	1999-09-01	2002-10-08	Tokyo Electron Limited	Etching method
US6275320B1 (en)	1999-09-27	2001-08-14	Jds Uniphase, Inc.	MEMS variable optical attenuator
US6373682B1 (en)	1999-12-15	2002-04-16	Mcnc	Electrostatically controlled variable capacitor
US6485273B1 (en)	2000-09-01	2002-11-26	Mcnc	Distributed MEMS electrostatic pumping devices
US6590267B1 (en)	2000-09-14	2003-07-08	Mcnc	Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6377438B1 (en)	2000-10-23	2002-04-23	Mcnc	Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
US6396620B1 (en)	2000-10-30	2002-05-28	Mcnc	Electrostatically actuated electromagnetic radiation shutter
JP4262574B2 (ja)	2003-10-30	2009-05-13	オリンパス株式会社	光偏向器
US7043985B2 (en) *	2004-01-13	2006-05-16	Georgia Tech Research Corporation	High-resolution in-plane tuning fork gyroscope and methods of fabrication
US7485485B2 (en) *	2004-02-09	2009-02-03	Microvision, Inc.	Method and apparatus for making a MEMS scanner
US7442918B2 (en)	2004-05-14	2008-10-28	Microvision, Inc.	MEMS device having simplified drive
US7753072B2 (en) *	2004-07-23	2010-07-13	Afa Controls Llc	Valve assemblies including at least three chambers and related methods
US7636101B2 (en)	2005-02-09	2009-12-22	Microvision, Inc.	MEMS scanner adapted to a laser printer
JP4702942B2 (ja) *	2005-10-14	2011-06-15	Ｎｅｃトーキン株式会社	振動ジャイロ用素子及び振動ジャイロ
KR100766600B1 (ko) *	2006-07-18	2007-10-12	삼성전자주식회사	스캐너
US8061201B2 (en) *	2007-07-13	2011-11-22	Georgia Tech Research Corporation	Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope
JP4626858B2 (ja) *	2008-03-31	2011-02-09	Ｔｄｋ株式会社	角速度センサ素子
JP4868027B2 (ja)	2009-05-26	2012-02-01	株式会社デンソー	加速度角速度センサ
WO2011026100A1 (en)	2009-08-31	2011-03-03	Georgia Tech Research Corporation	Bulk acoustic wave gyroscope with spoked structure
US20150270477A1 (en) *	2012-10-31	2015-09-24	Panasonic Intellectual Property Management Co.	Actuator

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4654663A (en) *	1981-11-16	1987-03-31	Piezoelectric Technology Investors, Ltd.	Angular rate sensor system
US4538461A (en) *	1984-01-23	1985-09-03	Piezoelectric Technology Investors, Inc.	Vibratory angular rate sensing system
US4598585A (en) *	1984-03-19	1986-07-08	The Charles Stark Draper Laboratory, Inc.	Planar inertial sensor
US4930351A (en) *	1988-03-24	1990-06-05	Wjm Corporation	Vibratory linear acceleration and angular rate sensing system
DE4032559C2 (de) *	1990-10-13	2000-11-23	Bosch Gmbh Robert	Drehratensensor und Verfahren zur Herstellung
ATE143489T1 (de) *	1991-03-12	1996-10-15	New Sd Inc	Stimmgabelinertialsensor mit einem ende und verfahren

1993
- 1993-04-16 JP JP05113910A patent/JP3123301B2/ja not_active Expired - Lifetime
1994
- 1994-04-15 US US08/227,946 patent/US5488863A/en not_active Expired - Lifetime
- 1994-04-15 DE DE69401607T patent/DE69401607T2/de not_active Expired - Lifetime
- 1994-04-15 EP EP94302706A patent/EP0620415B1/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JPH06300570A (ja)	1994-10-28
US5488863A (en)	1996-02-06
DE69401607T2 (de)	1997-09-04
EP0620415B1 (de)	1997-01-29
JP3123301B2 (ja)	2001-01-09
EP0620415A1 (de)	1994-10-19

Publication	Publication Date	Title
DE69401607D1 (de)	1997-03-13	Winkelgeschwindigkeitsmessaufnehmer
DE69618042D1 (de)	2002-01-31	Drehgeschwindigkeitssensor
DE69727756D1 (de)	2004-04-01	Drehgeschwindigkeitssensor
DE69637287D1 (de)	2007-11-22	Winkelgeschwindigkeitssensor
DE69726631D1 (de)	2004-01-22	Winkelgeschwindigkeitsaufnehmer
DE59405047D1 (de)	1998-02-19	Sensorsystem
DE69406823D1 (de)	1998-01-02	Geschwindigkeitssensor
DE69323618D1 (de)	1999-04-01	Pyrheliometrischer sensor
DE69409386D1 (de)	1998-05-07	Sensorsystem
DE59207342D1 (de)	1996-11-14	Drehmomentsensor
DE59509790D1 (de)	2001-12-13	Winkelsensor
DE69426710D1 (de)	2001-03-29	Aufprallsensor
BR9306194A (pt)	1998-06-23	Sensor de rotaçao
DE59408094D1 (de)	1999-05-12	Drehratensensor
DE69425270D1 (de)	2000-08-17	Aufprallsensor
DE69009314D1 (de)	1994-07-07	Winkelgeschwindigkeitssensor.
DE69712121D1 (de)	2002-05-29	Drehgeschwindigkeitssensor
DE69322873D1 (de)	1999-02-11	Mehrachsen-winkelgeschwindigkeits-messaufnehmer
DE69412199D1 (de)	1998-09-10	Weggeber
DE69420481D1 (de)	1999-10-14	Winkelgeschwindigkeitsmessaufnehmer
DE59308671D1 (de)	1998-07-16	Fühler
DE69319138D1 (de)	1998-07-16	Drehmesswertaufnehmer
DE69310315D1 (de)	1997-06-05	Vibratordrehungsmessaufnehmer
DE69426585D1 (de)	2001-02-22	Sensorsystem
DE69311236D1 (de)	1997-07-10	Drehmoment-Sensor

Legal Events

Date	Code	Title	Description
1998-02-26	8364	No opposition during term of opposition