DE69607666D1 - Laminiertes piezoelektrisches Element und Vibrationswellenantrieb - Google Patents

Laminiertes piezoelektrisches Element und Vibrationswellenantrieb

Info

Publication number: DE69607666D1
Authority: DE; Germany
Prior art keywords: piezoelectric element; vibration wave; laminated piezoelectric; wave drive; drive
Prior art date: 1995-01-31
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69607666T

Other languages

English (en)

Other versions

DE69607666T2 (de

Inventor

Toru Ezaki

Takahiro Yamakawa

Yutaka Maruyama

Nobuyuki Kojima

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Canon Inc

Taiheiyo Cement Corp

Original Assignee

Canon Inc

Taiheiyo Cement Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-01-31

Filing date

1996-01-25

Publication date

2000-05-18

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=12410597&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69607666(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

1996-01-25 Application filed by Canon Inc, Taiheiyo Cement Corp filed Critical Canon Inc

2000-05-18 Publication of DE69607666D1 publication Critical patent/DE69607666D1/de

2000-08-31 Application granted granted Critical

2000-08-31 Publication of DE69607666T2 publication Critical patent/DE69607666T2/de

2016-01-26 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/106—Langevin motors
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
- H10N30/063—Forming interconnections, e.g. connection electrodes of multilayered piezoelectric or electrostrictive parts
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
- H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
- H10N30/874—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices embedded within piezoelectric or electrostrictive material, e.g. via connections

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Compositions Of Oxide Ceramics (AREA)

DE69607666T 1995-01-31 1996-01-25 Laminiertes piezoelektrisches Element und Vibrationswellenantrieb Expired - Lifetime DE69607666T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP03431095A JP3432321B2 (ja)	1995-01-31	1995-01-31	積層セラミックス圧電体素子

Publications (2)

Publication Number	Publication Date
DE69607666D1 true DE69607666D1 (de)	2000-05-18
DE69607666T2 DE69607666T2 (de)	2000-08-31

Family

ID=12410597

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69607666T Expired - Lifetime DE69607666T2 (de)	1995-01-31	1996-01-25	Laminiertes piezoelektrisches Element und Vibrationswellenantrieb

Country Status (5)

Country	Link
US (1)	US5770916A (de)
EP (1)	EP0725450B1 (de)
JP (1)	JP3432321B2 (de)
KR (1)	KR100239285B1 (de)
DE (1)	DE69607666T2 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0661764B1 (de) *	1993-12-27	1999-03-10	Canon Kabushiki Kaisha	Vibrationswellenantrieb
JP4026885B2 (ja)	1997-05-16	2007-12-26	キヤノン株式会社	圧電素子および振動型駆動装置
US6628046B2 (en)	1997-05-27	2003-09-30	Canon Kabushiki Kaisha	Vibration type actuator
US6404104B1 (en)	1997-11-27	2002-06-11	Canon Kabushiki Kaisha	Vibration type actuator and vibration type driving apparatus
US6291932B1 (en)	1998-02-17	2001-09-18	Canon Kabushiki Kaisha	Stacked piezoelectric element and producing method therefor
US6643906B2 (en)	1998-12-09	2003-11-11	Canon Kabushiki Kaisha	Friction member, and vibration wave device and apparatus using friction member
DE19909482A1 (de) *	1999-03-04	2000-09-07	Bosch Gmbh Robert	Piezoelektrischer Aktor
JP4328412B2 (ja)	1999-05-14	2009-09-09	キヤノン株式会社	振動型アクチュエータおよび振動型駆動装置
US6664714B2 (en)	2000-03-23	2003-12-16	Elliptec Resonant Actuator Ag	Vibratory motors and methods of making and using same
JP2001352768A (ja)	2000-06-05	2001-12-21	Canon Inc	積層電気−機械エネルギー変換素子および振動波駆動装置
US6930436B2 (en) *	2001-01-22	2005-08-16	Canon Kabushiki Kaisha	Vibration element and vibration wave driving apparatus
JP4726167B2 (ja) *	2001-03-12	2011-07-20	キヤノン株式会社	振動波駆動装置
JP4878691B2 (ja) *	2001-03-30	2012-02-15	キヤノン株式会社	積層電気−機械エネルギー変換素子
JP5062927B2 (ja) *	2001-05-22	2012-10-31	キヤノン株式会社	振動波駆動装置
US6933657B2 (en)	2001-03-30	2005-08-23	Canon Kabushiki Kaisha	Stacked electro-mechanical energy conversion element and method of manufacturing the same
JP4731723B2 (ja) *	2001-05-24	2011-07-27	キヤノン株式会社	振動波駆動装置の製造方法
JP2003009555A (ja) *	2001-06-25	2003-01-10	Canon Inc	積層電気−機械エネルギー変換素子および振動波駆動装置
JP5031153B2 (ja) *	2001-07-31	2012-09-19	キヤノン株式会社	積層電気−機械エネルギー変換素子および振動波駆動装置
DE10141820A1 (de) *	2001-08-27	2003-03-20	Elliptec Resonant Actuator Ag	Piezomotor mit Kupferelektroden
DE10146703A1 (de)	2001-09-21	2003-04-10	Elliptec Resonant Actuator Ag	Piezomotor mit Führung
DE10146704A1 (de) *	2001-09-21	2003-04-10	Elliptec Resonant Actuator Ag	Piezomotoren mit Piezoelementen, hergestellt nach dem Keramikkondensatorverfahren
JP4027090B2 (ja) *	2001-12-27	2007-12-26	キヤノン株式会社	振動体および振動波駆動装置
ATE378724T1 (de)	2002-02-06	2007-11-15	Elliptec Resonant Actuator Ag	Steuerung eines piezoelektrischen motors
US7368853B2 (en)	2002-04-22	2008-05-06	Elliptec Resonant Actuator Aktiengesellschaft	Piezoelectric motors and methods for the production and operation thereof
JP2004297951A (ja) *	2003-03-27	2004-10-21	Olympus Corp	超音波振動子及び超音波モータ
JP4697929B2 (ja) *	2003-11-13	2011-06-08	キヤノン株式会社	積層圧電素子及び振動波駆動装置
JP2006004980A (ja)	2004-06-15	2006-01-05	Canon Inc	積層電気−機械エネルギー変換素子及び振動波駆動装置
JP4756916B2 (ja) *	2005-05-31	2011-08-24	キヤノン株式会社	振動波モータ
JP5074674B2 (ja) *	2005-07-04	2012-11-14	キヤノン株式会社	積層圧電素子および振動波モータ
JP4881062B2 (ja)	2006-05-15	2012-02-22	キヤノン株式会社	積層圧電素子、その製造方法および振動波駆動装置
JP5786224B2 (ja) *	2011-03-10	2015-09-30	キヤノン株式会社	圧電素子、圧電素子を有する圧電アクチュエータおよび振動波モータ
JP6091712B1 (ja) *	2015-04-27	2017-03-08	オリンパス株式会社	超音波振動子の製造方法および超音波振動子
CN107134944A (zh) *	2017-05-09	2017-09-05	中国工程物理研究院材料研究所	一种新型压电陶瓷驱动器及由其构成的超声电机
JP7013151B2 (ja)	2017-07-13	2022-01-31	キヤノン株式会社	積層圧電素子、振動子、振動波モータ、光学機器および電子機器
USD1049063S1 (en) *	2019-12-23	2024-10-29	Tdk Corporation	Vibration element for an actuator

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0094078B1 (de) *	1982-05-11	1988-11-02	Nec Corporation	Elektrostriktives Vielschichtelement welches wiederholter Pulsanwendung widersteht
JPS5943356A (ja) *	1982-09-06	1984-03-10	Kureha Chem Ind Co Ltd	超音波探触子
JPS61139112A (ja) *	1984-12-10	1986-06-26	Murata Mfg Co Ltd	周波数調整可能な積層型圧電素子
KR920005610B1 (ko) *	1985-04-11	1992-07-09	도오요오 쓰으신끼 가부시끼가이샤	오버톤 발진용 압전 공진자
JP2567046B2 (ja) *	1987-09-25	1996-12-25	日立金属株式会社	積層型変位素子
JP2935504B2 (ja) *	1989-07-05	1999-08-16	キヤノン株式会社	モータ
JPH03117384A (ja) *	1989-09-28	1991-05-20	Canon Inc	超音波モータの摩擦材
US5356500A (en) *	1992-03-20	1994-10-18	Rutgers, The State University Of New Jersey	Piezoelectric laminate films and processes for their manufacture
DE69315767T2 (de) *	1992-08-25	1998-05-07	Canon Kk	Verfahren zur Herstellung einer laminierten piezoelektrischen Anordnung und Polarisationsverfahren und vibrationswellengetriebener Motor
US5271133A (en) *	1992-09-21	1993-12-21	Caterpillar Inc.	Method for making a piezoelectric stack
JP3241129B2 (ja) *	1992-11-20	2001-12-25	太平洋セメント株式会社	振動波モータ用の積層型圧電素子及びその製造方法

1995
- 1995-01-31 JP JP03431095A patent/JP3432321B2/ja not_active Expired - Lifetime
1996
- 1996-01-24 US US08/592,859 patent/US5770916A/en not_active Expired - Lifetime
- 1996-01-25 EP EP96300503A patent/EP0725450B1/de not_active Expired - Lifetime
- 1996-01-25 DE DE69607666T patent/DE69607666T2/de not_active Expired - Lifetime
- 1996-01-30 KR KR1019960002054A patent/KR100239285B1/ko active IP Right Grant

Also Published As

Publication number	Publication date
US5770916A (en)	1998-06-23
KR100239285B1 (ko)	2000-01-15
EP0725450B1 (de)	2000-04-12
JPH08213664A (ja)	1996-08-20
JP3432321B2 (ja)	2003-08-04
DE69607666T2 (de)	2000-08-31
EP0725450A1 (de)	1996-08-07

Publication	Publication Date	Title
DE69607666D1 (de)	2000-05-18	Laminiertes piezoelektrisches Element und Vibrationswellenantrieb
DE69502210D1 (de)	1998-06-04	Piezoelektrischer und/oder elektrostriktiver Antrieb
DE69511996D1 (de)	1999-10-14	Piezoelektrische Motoreinheit
DE69520931D1 (de)	2001-06-21	Piezoelektrischer rotierender Antriebapparat
DE59602003D1 (de)	1999-07-01	Ultraschallantriebselement
FI940014L (fi)	1994-07-06	IIDT-tyyppinen pintaääniaaltolaite
DE69840784D1 (de)	2009-06-10	Akustisches Volumenwellenfilter
DE69513904D1 (de)	2000-01-20	Akustische Oberflächenwellenanordnung
DE69403281D1 (de)	1997-06-26	Akustisches Oberflächenwellenfilter
DE69424737D1 (de)	2000-07-06	Akustisches Oberflächenwellenfilter
DE69408048D1 (de)	1998-02-26	Akustisches Oberflächenwellenfilter
DE69118484D1 (de)	1996-05-09	Laminierter piezoelektrischer Antrieb
DE69412424D1 (de)	1998-09-17	Akustisches Oberflächenwellenfilter
DE69634797D1 (de)	2005-07-07	Laminierter piezoelektrischer Antrieb und Verfahren
DE69426789D1 (de)	2001-04-12	Akustische Oberflächenwellenanordnung und Herstellungsverfahren dafür
EP0740411A4 (de)	1997-11-12	Akustisches wellenfilter
DK0764387T3 (da)	1999-06-07	Akustisk transducer
EP1029393A4 (de)	2001-12-19	Mikromechanisch hergestelltes piezoelektrisches kristallelement mit akustischenoberflächenwellen
DE69522066D1 (de)	2001-09-13	Akustische Oberflächenwellenanordnung
DE69628881D1 (de)	2003-08-07	Vibrationswellengetriebene Anordnung und Vibrationselement
DE69522134D1 (de)	2001-09-20	Piezoelektrischer Vibrator
DE69819072D1 (de)	2003-11-27	Ultraschallwellenmotoranordnung und elektronisches Gerät mit Ultraschallwellenmotoranordnung
DE69411820D1 (de)	1998-08-27	Ultraschallmotor und ultraschallwellenantrieb
DE69405833D1 (de)	1997-10-30	Akustischer Oberflächenwellenmotor
DE69432134D1 (de)	2003-03-27	Akustisches Oberflächenwellenfilter

Legal Events

Date	Code	Title	Description
2001-05-03	8364	No opposition during term of opposition