DE68912932D1 - Glas-Keramik-Gegenstand und Verfahren zu dessen Herstellung. - Google Patents
Glas-Keramik-Gegenstand und Verfahren zu dessen Herstellung.Info
- Publication number
- DE68912932D1 DE68912932D1 DE89108540T DE68912932T DE68912932D1 DE 68912932 D1 DE68912932 D1 DE 68912932D1 DE 89108540 T DE89108540 T DE 89108540T DE 68912932 T DE68912932 T DE 68912932T DE 68912932 D1 DE68912932 D1 DE 68912932D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacture
- glass
- ceramic article
- ceramic
- article
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4867—Applying pastes or inks, e.g. screen printing
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
- C03C14/004—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix the non-glass component being in the form of particles or flakes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/486—Via connections through the substrate with or without pins
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49866—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
- H01L23/49883—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials the conductive materials containing organic materials or pastes, e.g. for thick films
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4053—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
- H05K3/4061—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques for via connections in inorganic insulating substrates
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2214/00—Nature of the non-vitreous component
- C03C2214/04—Particles; Flakes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2214/00—Nature of the non-vitreous component
- C03C2214/08—Metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2214/00—Nature of the non-vitreous component
- C03C2214/20—Glass-ceramics matrix
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/08—Treatments involving gases
- H05K2203/086—Using an inert gas
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/08—Treatments involving gases
- H05K2203/087—Using a reactive gas
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
- H05K2203/1126—Firing, i.e. heating a powder or paste above the melting temperature of at least one of its constituents
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1283—After-treatment of the printed patterns, e.g. sintering or curing methods
- H05K3/1291—Firing or sintering at relative high temperatures for patterns on inorganic boards, e.g. co-firing of circuits on green ceramic sheets
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
- H05K3/4629—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Ceramic Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Dispersion Chemistry (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Inorganic Chemistry (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP89108540A EP0396806B1 (de) | 1989-05-12 | 1989-05-12 | Glas-Keramik-Gegenstand und Verfahren zu dessen Herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68912932D1 true DE68912932D1 (de) | 1994-03-17 |
DE68912932T2 DE68912932T2 (de) | 1994-08-11 |
Family
ID=8201349
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68912932T Expired - Fee Related DE68912932T2 (de) | 1989-05-12 | 1989-05-12 | Glas-Keramik-Gegenstand und Verfahren zu dessen Herstellung. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5029242A (de) |
EP (1) | EP0396806B1 (de) |
JP (1) | JP2531830B2 (de) |
DE (1) | DE68912932T2 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5245136A (en) * | 1989-10-06 | 1993-09-14 | International Business Machines Corporation | Hermetic package for an electronic device |
JPH04234147A (ja) * | 1990-12-28 | 1992-08-21 | Sony Corp | 多層配線構造体 |
JPH05116985A (ja) * | 1991-05-22 | 1993-05-14 | Ngk Spark Plug Co Ltd | セラミツク基板 |
US5306874A (en) * | 1991-07-12 | 1994-04-26 | W.I.T. Inc. | Electrical interconnect and method of its manufacture |
DE69329357T2 (de) * | 1992-05-14 | 2001-04-26 | Matsushita Electric Industrial Co., Ltd. | Verfahren zur Herstellung von Leitern in Kontaktlöcher in vielschichtigen Keramiksubstraten |
US5260519A (en) * | 1992-09-23 | 1993-11-09 | International Business Machines Corporation | Multilayer ceramic substrate with graded vias |
US5293504A (en) * | 1992-09-23 | 1994-03-08 | International Business Machines Corporation | Multilayer ceramic substrate with capped vias |
JP3015621B2 (ja) * | 1993-05-10 | 2000-03-06 | 松下電器産業株式会社 | 導体ペ−スト組成物 |
US5459923A (en) * | 1993-07-28 | 1995-10-24 | E-Systems, Inc. | Method of marking hermetic packages for electrical device |
JP2783751B2 (ja) * | 1993-12-21 | 1998-08-06 | 富士通株式会社 | 多層セラミック基板の製造方法 |
US5618611A (en) * | 1994-06-30 | 1997-04-08 | Lucent Technologies Inc. | Metallization of ferrites through surface reduction |
JPH11506183A (ja) * | 1995-06-06 | 1999-06-02 | デイヴィッド サーノフ リサーチ センター,インコーポレイテッド | 電気運動量輸送式ポンプ |
US6388272B1 (en) * | 1996-03-07 | 2002-05-14 | Caldus Semiconductor, Inc. | W/WC/TAC ohmic and rectifying contacts on SiC |
US5700549A (en) * | 1996-06-24 | 1997-12-23 | International Business Machines Corporation | Structure to reduce stress in multilayer ceramic substrates |
US5937514A (en) * | 1997-02-25 | 1999-08-17 | Li; Chou H. | Method of making a heat-resistant system |
US6270601B1 (en) * | 1998-11-02 | 2001-08-07 | Coorstek, Inc. | Method for producing filled vias in electronic components |
US6303500B1 (en) * | 1999-02-24 | 2001-10-16 | Micron Technology, Inc. | Method and apparatus for electroless plating a contact pad |
US6284079B1 (en) | 1999-03-03 | 2001-09-04 | International Business Machines Corporation | Method and structure to reduce low force pin pull failures in ceramic substrates |
US6402156B1 (en) * | 1999-04-16 | 2002-06-11 | Eltron Research, Inc. | Glass-ceramic seals for ceramic membrane chemical reactor application |
US6136419A (en) * | 1999-05-26 | 2000-10-24 | International Business Machines Corporation | Ceramic substrate having a sealed layer |
JP4270792B2 (ja) * | 2002-01-23 | 2009-06-03 | 富士通株式会社 | 導電性材料及びビアホールの充填方法 |
JP3945446B2 (ja) * | 2003-04-24 | 2007-07-18 | 株式会社デンソー | セラミック担体とその製造方法 |
US8569142B2 (en) * | 2003-11-28 | 2013-10-29 | Blackberry Limited | Multi-level thin film capacitor on a ceramic substrate and method of manufacturing the same |
JP4518885B2 (ja) * | 2004-09-09 | 2010-08-04 | 京セラ株式会社 | セラミック電子部品及びその製造方法 |
JP4778444B2 (ja) * | 2004-11-25 | 2011-09-21 | 日本電気株式会社 | 半導体装置及びその製造方法、配線基板及びその製造方法、半導体パッケージ並びに電子機器 |
AT503706B1 (de) * | 2006-06-07 | 2011-07-15 | Mikroelektronik Ges Mit Beschraenkter Haftung Ab | Schaltungsträger |
US7736544B2 (en) * | 2007-04-26 | 2010-06-15 | E. I. Du Pont De Nemours And Company | Electrically conductive composition for via-holes |
WO2008133612A1 (en) * | 2007-04-26 | 2008-11-06 | E. I. Du Pont De Nemours And Company | Electrically conductive composition for via-holes |
JP5501745B2 (ja) * | 2009-12-01 | 2014-05-28 | 株式会社ニデック | 視覚再生補助装置 |
US9337060B1 (en) * | 2011-11-01 | 2016-05-10 | Triton Microtechnologies | Filling materials and methods of filling through holes for improved adhesion and hermeticity in glass substrates and other electronic components |
US9374892B1 (en) * | 2011-11-01 | 2016-06-21 | Triton Microtechnologies | Filling materials and methods of filling through holes for improved adhesion and hermeticity in glass substrates and other electronic components |
US9236274B1 (en) * | 2011-11-01 | 2016-01-12 | Triton Microtechnologies | Filling materials and methods of filling through holes for improved adhesion and hermeticity in glass substrates and other electronic components |
CN105377479B (zh) * | 2013-03-15 | 2018-07-31 | 肖特公司 | 玻璃-金属复合材料和制造方法 |
KR102093157B1 (ko) * | 2014-12-01 | 2020-03-25 | 삼성전기주식회사 | 다층 세라믹 기판 |
CN107535048B (zh) * | 2015-04-27 | 2019-10-18 | 京瓷株式会社 | 电路基板以及具备该电路基板的电子装置 |
WO2018140972A1 (en) * | 2017-01-30 | 2018-08-02 | TBT Group, Inc. | Multilayer devices and methods of manufacturing |
US12009225B2 (en) | 2018-03-30 | 2024-06-11 | Samtec, Inc. | Electrically conductive vias and methods for producing same |
JP7280059B2 (ja) * | 2018-05-29 | 2023-05-23 | 日本特殊陶業株式会社 | 電極埋設部材の製造方法 |
IT201800020944A1 (it) * | 2018-12-21 | 2020-06-21 | Luca Toncelli | Metodo per la produzione di manufatti colorati in lastra vetroceramica a partire da un impasto base, fritta vetrosa per la realizzazione dellimpasto base e manufatto colorato in lastra vetroceramica così ottenuto |
US12100647B2 (en) * | 2019-09-30 | 2024-09-24 | Samtec, Inc. | Electrically conductive vias and methods for producing same |
JP7535005B2 (ja) * | 2021-03-31 | 2024-08-15 | Tdk株式会社 | 積層電子部品 |
CN114171479B (zh) * | 2022-02-14 | 2022-05-24 | 潮州三环(集团)股份有限公司 | 一种陶瓷封装基座及其制备方法和应用 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR996899A (fr) * | 1949-07-21 | 1951-12-27 | Nouveaux produits de céramique | |
US3640906A (en) * | 1969-06-16 | 1972-02-08 | Owens Illinois Inc | Electroconductive sintered glass |
FR2296988A1 (fr) * | 1974-12-31 | 1976-07-30 | Ibm France | Perfectionnement aux procedes de fabrication d'un module de circuits multicouches en ceramique |
JPS5484270A (en) * | 1977-12-16 | 1979-07-05 | Fujitsu Ltd | Method of making ceramic multiilayer circuit base board |
US4301324A (en) * | 1978-02-06 | 1981-11-17 | International Business Machines Corporation | Glass-ceramic structures and sintered multilayer substrates thereof with circuit patterns of gold, silver or copper |
US4293325A (en) * | 1978-05-22 | 1981-10-06 | Corning Glass Works | Method of forming hermetic seals |
US4234367A (en) * | 1979-03-23 | 1980-11-18 | International Business Machines Corporation | Method of making multilayered glass-ceramic structures having an internal distribution of copper-based conductors |
US4799983A (en) * | 1987-07-20 | 1989-01-24 | International Business Machines Corporation | Multilayer ceramic substrate and process for forming therefor |
US4806188A (en) * | 1988-03-04 | 1989-02-21 | E. I. Du Pont De Nemours And Company | Method for fabricating multilayer circuits |
-
1989
- 1989-05-12 EP EP89108540A patent/EP0396806B1/de not_active Expired - Lifetime
- 1989-05-12 DE DE68912932T patent/DE68912932T2/de not_active Expired - Fee Related
-
1990
- 1990-05-10 US US07/522,338 patent/US5029242A/en not_active Expired - Fee Related
- 1990-05-10 JP JP2118855A patent/JP2531830B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2531830B2 (ja) | 1996-09-04 |
DE68912932T2 (de) | 1994-08-11 |
EP0396806B1 (de) | 1994-02-02 |
EP0396806A1 (de) | 1990-11-14 |
US5029242A (en) | 1991-07-02 |
JPH0319295A (ja) | 1991-01-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |