[go: up one dir, main page]

DE60220850D1 - Tertiäre Amine mit einer Esterstruktur und Verfahren zu deren Herstellung - Google Patents

Tertiäre Amine mit einer Esterstruktur und Verfahren zu deren Herstellung

Info

Publication number
DE60220850D1
DE60220850D1 DE60220850T DE60220850T DE60220850D1 DE 60220850 D1 DE60220850 D1 DE 60220850D1 DE 60220850 T DE60220850 T DE 60220850T DE 60220850 T DE60220850 T DE 60220850T DE 60220850 D1 DE60220850 D1 DE 60220850D1
Authority
DE
Germany
Prior art keywords
preparation
tertiary amines
ester structure
ester
amines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60220850T
Other languages
English (en)
Other versions
DE60220850T2 (de
Inventor
Takeru Watanabe
Koji Hasegawa
Takeshi Kinsho
Jun Hatakeyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of DE60220850D1 publication Critical patent/DE60220850D1/de
Application granted granted Critical
Publication of DE60220850T2 publication Critical patent/DE60220850T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C219/00Compounds containing amino and esterified hydroxy groups bound to the same carbon skeleton
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D307/00Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom
    • C07D307/02Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom not condensed with other rings
    • C07D307/26Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom not condensed with other rings having one double bond between ring members or between a ring member and a non-ring member
    • C07D307/30Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom not condensed with other rings having one double bond between ring members or between a ring member and a non-ring member with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to ring carbon atoms
    • C07D307/32Oxygen atoms
    • C07D307/33Oxygen atoms in position 2, the oxygen atom being in its keto or unsubstituted enol form
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C229/00Compounds containing amino and carboxyl groups bound to the same carbon skeleton
    • C07C229/02Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton
    • C07C229/04Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated
    • C07C229/06Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton
    • C07C229/10Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton the nitrogen atom of the amino group being further bound to acyclic carbon atoms or to carbon atoms of rings other than six-membered aromatic rings
    • C07C229/12Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton the nitrogen atom of the amino group being further bound to acyclic carbon atoms or to carbon atoms of rings other than six-membered aromatic rings to carbon atoms of acyclic carbon skeletons
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C229/00Compounds containing amino and carboxyl groups bound to the same carbon skeleton
    • C07C229/02Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton
    • C07C229/04Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated
    • C07C229/06Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton
    • C07C229/10Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton the nitrogen atom of the amino group being further bound to acyclic carbon atoms or to carbon atoms of rings other than six-membered aromatic rings
    • C07C229/16Compounds containing amino and carboxyl groups bound to the same carbon skeleton having amino and carboxyl groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being acyclic and saturated having only one amino and one carboxyl group bound to the carbon skeleton the nitrogen atom of the amino group being further bound to acyclic carbon atoms or to carbon atoms of rings other than six-membered aromatic rings to carbon atoms of hydrocarbon radicals substituted by amino or carboxyl groups, e.g. ethylenediamine-tetra-acetic acid, iminodiacetic acids
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D307/00Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom
    • C07D307/02Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom not condensed with other rings
    • C07D307/04Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom not condensed with other rings having no double bonds between ring members or between ring members and non-ring members
    • C07D307/10Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom not condensed with other rings having no double bonds between ring members or between ring members and non-ring members with substituted hydrocarbon radicals attached to ring carbon atoms
    • C07D307/12Radicals substituted by oxygen atoms
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D309/00Heterocyclic compounds containing six-membered rings having one oxygen atom as the only ring hetero atom, not condensed with other rings
    • C07D309/02Heterocyclic compounds containing six-membered rings having one oxygen atom as the only ring hetero atom, not condensed with other rings having no double bonds between ring members or between ring members and non-ring members
    • C07D309/08Heterocyclic compounds containing six-membered rings having one oxygen atom as the only ring hetero atom, not condensed with other rings having no double bonds between ring members or between ring members and non-ring members with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to ring carbon atoms
    • C07D309/10Oxygen atoms
    • C07D309/12Oxygen atoms only hydrogen atoms and one oxygen atom directly attached to ring carbon atoms, e.g. tetrahydropyranyl ethers
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D317/00Heterocyclic compounds containing five-membered rings having two oxygen atoms as the only ring hetero atoms
    • C07D317/08Heterocyclic compounds containing five-membered rings having two oxygen atoms as the only ring hetero atoms having the hetero atoms in positions 1 and 3
    • C07D317/10Heterocyclic compounds containing five-membered rings having two oxygen atoms as the only ring hetero atoms having the hetero atoms in positions 1 and 3 not condensed with other rings
    • C07D317/14Heterocyclic compounds containing five-membered rings having two oxygen atoms as the only ring hetero atoms having the hetero atoms in positions 1 and 3 not condensed with other rings with substituted hydrocarbon radicals attached to ring carbon atoms
    • C07D317/18Radicals substituted by singly bound oxygen or sulfur atoms
    • C07D317/24Radicals substituted by singly bound oxygen or sulfur atoms esterified
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C2601/00Systems containing only non-condensed rings
    • C07C2601/12Systems containing only non-condensed rings with a six-membered ring
    • C07C2601/14The ring being saturated
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/039Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/039Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0397Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Materials For Photolithography (AREA)
DE60220850T 2001-04-23 2002-04-23 Tertiäre Amine mit einer Esterstruktur und Verfahren zu deren Herstellung Expired - Lifetime DE60220850T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001123927 2001-04-23
JP2001123927 2001-04-23

Publications (2)

Publication Number Publication Date
DE60220850D1 true DE60220850D1 (de) 2007-08-09
DE60220850T2 DE60220850T2 (de) 2008-03-06

Family

ID=18973406

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60220850T Expired - Lifetime DE60220850T2 (de) 2001-04-23 2002-04-23 Tertiäre Amine mit einer Esterstruktur und Verfahren zu deren Herstellung

Country Status (5)

Country Link
US (2) US7084303B2 (de)
EP (1) EP1253138B1 (de)
KR (1) KR100823815B1 (de)
DE (1) DE60220850T2 (de)
TW (1) TW588032B (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020142304A1 (en) * 2001-03-09 2002-10-03 Anderson Daniel G. Uses and methods of making microarrays of polymeric biomaterials
TWI300165B (en) * 2003-08-13 2008-08-21 Tokyo Ohka Kogyo Co Ltd Resin for resist, positive resist composition and resist pattern formation method
WO2005121193A1 (ja) * 2004-06-08 2005-12-22 Tokyo Ohka Kogyo Co., Ltd. 重合体、ポジ型レジスト組成物およびレジストパターン形成方法
US20060003271A1 (en) * 2004-06-30 2006-01-05 Clark Shan C Basic supercritical solutions for quenching and developing photoresists
WO2006067814A1 (en) * 2004-12-22 2006-06-29 Telecom Italia S.P.A. . Tridimensional structures for an ink jet printhead and relevant manufacturing process
EP2476756A1 (de) 2005-06-15 2012-07-18 Massachusetts Institute of Technology Aminhaltige Lipide und ihre Verwendungen
CN104910025B (zh) 2008-11-07 2019-07-16 麻省理工学院 氨基醇类脂质和其用途
EP3403647A1 (de) 2009-12-01 2018-11-21 Translate Bio, Inc. Ausgabe von mrna zur vermehrung von proteinen und enzymen bei humangenetischen erkrankungen
US8927190B2 (en) 2010-01-25 2015-01-06 Rohm And Haas Electronic Materials Llc Photoresist comprising nitrogen-containing compound
WO2012027675A2 (en) 2010-08-26 2012-03-01 Massachusetts Institute Of Technology Poly(beta-amino alcohols), their preparation, and uses thereof
JP5527236B2 (ja) 2011-01-31 2014-06-18 信越化学工業株式会社 ポジ型化学増幅レジスト材料、パターン形成方法及び酸分解性ケトエステル化合物
DK2691443T3 (da) 2011-03-28 2021-05-03 Massachusetts Inst Technology Konjugerede lipomerer og anvendelser af disse
DE102011102177A1 (de) * 2011-05-20 2012-11-22 Airbus Operations Gmbh Anordnung zum Erzeugen und Aufbereiten von Wasser, Verfahren zum Erzeugen und Aufbereiten von Wasser sowie Luftfahrzeug mit einer solchen Anordnung
KR20220025112A (ko) 2011-06-08 2022-03-03 샤이어 휴먼 지네틱 테라피즈 인크. Mrna 전달을 위한 지질 나노입자 조성물 및 방법
WO2013185067A1 (en) 2012-06-08 2013-12-12 Shire Human Genetic Therapies, Inc. Nuclease resistant polynucleotides and uses thereof
EP2882706A1 (de) 2012-08-13 2015-06-17 Massachusetts Institute of Technology Aminhaltige lipoide und ihre verwendungen
TR201901310T4 (tr) 2013-03-14 2019-02-21 Translate Bio Inc Mesajcı RNA'nın saflaştırılması yöntemleri.
SMT201800546T1 (it) 2013-03-14 2019-01-11 Translate Bio Inc Composizioni di mrna di cftr e metodi e usi correlati
WO2014179562A1 (en) 2013-05-01 2014-11-06 Massachusetts Institute Of Technology 1,3,5-triazinane-2,4,6-trione derivatives and uses thereof
MX2016005239A (es) 2013-10-22 2016-08-12 Shire Human Genetic Therapies Tratamiento con acido ribonucleico mensajero para la fenilcetonuria.
JP6608815B2 (ja) 2013-10-22 2019-11-20 トランスレイト バイオ, インコーポレイテッド アルギニノコハク酸合成酵素欠損症のmRNA治療
BR112016009077A2 (pt) 2013-10-22 2017-09-19 Shire Human Genetic Therapies Formulações lipídicas para fornecimento de rna mensageiro
EA201691696A1 (ru) 2014-04-25 2017-03-31 Шир Хьюман Дженетик Терапис, Инк. Способы очистки матричной рнк
US10022455B2 (en) 2014-05-30 2018-07-17 Translate Bio, Inc. Biodegradable lipids for delivery of nucleic acids
KR102387898B1 (ko) 2014-06-24 2022-04-15 샤이어 휴먼 지네틱 테라피즈 인크. 핵산의 전달용 입체화학적으로 풍부한 조성물
US9840479B2 (en) 2014-07-02 2017-12-12 Massachusetts Institute Of Technology Polyamine-fatty acid derived lipidoids and uses thereof
WO2017100744A1 (en) * 2015-12-11 2017-06-15 Preceres Inc. Aminolipidoids and uses thereof
EA201991747A1 (ru) 2017-02-27 2020-06-04 Транслейт Био, Инк. НОВАЯ КОДОН-ОПТИМИЗИРОВАННАЯ мРНК CFTR
AU2018268859B2 (en) 2017-05-16 2024-07-25 Translate Bio, Inc. Treatment of cystic fibrosis by delivery of codon-optimized mrna encoding CFTR
US10738241B2 (en) * 2018-01-23 2020-08-11 Shenzhen China Star Optoelectronics Technology Co., Ltd. Resin composition, cured photoresist and display panel
CA3108544A1 (en) 2018-08-24 2020-02-27 Translate Bio, Inc. Methods for purification of messenger rna
AU2019384557B2 (en) 2018-11-21 2025-07-17 Translate Bio, Inc. Treatment of cystic fibrosis by delivery of nebulized mRNA encoding CFTR
WO2022140239A1 (en) * 2020-12-21 2022-06-30 Beam Therapeutics Inc. Nanomaterials comprising carbonates
WO2022207938A1 (en) * 2021-04-02 2022-10-06 Universiteit Gent Ionizable lipids and lipid nanoparticles comprising said ionizable lipids for delivery of therapeutic agents

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2729622A (en) * 1952-04-11 1956-01-03 Du Pont Polycarboxyl- and polycarbalkoxyl-containing polymerizable quaternary ammonium monomes and their polymers
US4001304A (en) * 1974-05-02 1977-01-04 Rohm And Haas Company Acrylic acid esters
US4491628A (en) * 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
EP0249139B2 (de) 1986-06-13 1998-03-11 MicroSi, Inc. (a Delaware corporation) Lackzusammensetzung und -anwendung
JPS63149640A (ja) 1986-12-12 1988-06-22 Konica Corp 感光性組成物および感光性平版印刷版
DE3784880T2 (de) * 1986-12-24 1993-08-05 Ciba Geigy Ag N,n-bis(hydroxyaethyl)hydroxylaminester-stabilisatoren.
US5023283A (en) * 1986-12-24 1991-06-11 Ciba-Geigy Corporation N,N-bis(acyloxyethyl)hydroxylamine derivatives
US5202217A (en) 1989-08-08 1993-04-13 Tosoh Corporation Solubilization-inhibitor and positive resist composition
EP0537524A1 (de) 1991-10-17 1993-04-21 Shipley Company Inc. Strahlungsempfindliche Zusammensetzungen und Verfahren
JPH05113666A (ja) 1991-10-21 1993-05-07 Nippon Zeon Co Ltd レジスト組成物
JP3010607B2 (ja) 1992-02-25 2000-02-21 ジェイエスアール株式会社 感放射線性樹脂組成物
US5580695A (en) * 1992-02-25 1996-12-03 Japan Synthetic Rubber Co., Ltd. Chemically amplified resist
US5609989A (en) * 1995-06-06 1997-03-11 International Business Machines, Corporation Acid scavengers for use in chemically amplified photoresists
WO1998037458A1 (fr) 1997-02-20 1998-08-27 Nippon Zeon Co., Ltd. Composition d'un agent de reserve
JP3905257B2 (ja) * 1999-08-24 2007-04-18 独立行政法人科学技術振興機構 新規なジオール化合物及びその製造法
TWI269940B (en) * 1999-10-29 2007-01-01 Shinetsu Chemical Co Resist composition
JP3751518B2 (ja) 1999-10-29 2006-03-01 信越化学工業株式会社 化学増幅レジスト組成物

Also Published As

Publication number Publication date
EP1253138B1 (de) 2007-06-27
TW588032B (en) 2004-05-21
KR20020082150A (ko) 2002-10-30
US7084303B2 (en) 2006-08-01
KR100823815B1 (ko) 2008-04-21
US7378548B2 (en) 2008-05-27
EP1253138A3 (de) 2003-09-24
EP1253138A2 (de) 2002-10-30
DE60220850T2 (de) 2008-03-06
US20060217570A1 (en) 2006-09-28
US20020193622A1 (en) 2002-12-19

Similar Documents

Publication Publication Date Title
DE60220850D1 (de) Tertiäre Amine mit einer Esterstruktur und Verfahren zu deren Herstellung
DE60207327D1 (de) Spuleneinheit und Verfahren zu deren Herstellung
DE60219839D1 (de) Abbildungsvorrichtung und Verfahren zu deren Herstellung
DE60131745D1 (de) Filtervorrichtung und verfahren zu deren herstellung
DE60136793D1 (de) Elektrostatisches spannfutterglied und verfahren zu seiner herstellung
DE60220704D1 (de) Mit löchern versehene faservliesverbunde und verfahren zu deren herstellung
DE60134016D1 (de) Wabenstruktur und wabenfilter und verfahren zu deren herstellung
DE60039438D1 (de) Elektrostatischer ultraschallwandler und verfahren zu dessen herstellung
DE50212077D1 (de) Piezoelektrisches bauelement und verfahren zu dessen herstellung
DE60042666D1 (de) Halbleiterbauelement und Verfahren zu dessen Herstellung
ATA10852001A (de) Bauelement und verfahren zu seiner herstellung
DE60223026D1 (de) Vernetzte pulpe und verfahren zu deren herstellung
DE60200749D1 (de) Süssungsmittel und Verfahren zu deren Herstellung
DE50214717D1 (de) Und verfahren zu seiner herstellung
DE10192100T1 (de) Abtastkarte und Verfahren zu deren Herstellung
DE60113215D1 (de) Halbleitervorrichtung und Verfahren zu dessen Herstellung
DE60231938D1 (de) Partikel auf Basis von Polyhydroxyalkanoat und Verfahren zu deren Herstellung
DE60221201D1 (de) Polyoxyalkylen-derivate und Verfahren zu ihrer Herstellung
DE60239464D1 (de) Piezoelektrisches porzellan und verfahren zu seiner herstellung
DE69818644D1 (de) Silikonzusammensetzungen und verfahren zu deren herstellung
DE60124428T8 (de) Lüftungsvorrichtung und verfahren zu dessen herstellung
DE60208523D1 (de) Spulenbauteil und verfahren zu seiner herstellung
DE602004024468D1 (de) Polytetrafluorethylenfaser und Verfahren zu deren Herstellung
DE50107925D1 (de) Hochvolt-diode und verfahren zu deren herstellung
DE60101760D1 (de) Durchführungshülse und verfahren zu deren Herstelllung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition