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DE3881978D1 - Duennschichttransistoren-matrix. - Google Patents

Duennschichttransistoren-matrix.

Info

Publication number
DE3881978D1
DE3881978D1 DE8888112325T DE3881978T DE3881978D1 DE 3881978 D1 DE3881978 D1 DE 3881978D1 DE 8888112325 T DE8888112325 T DE 8888112325T DE 3881978 T DE3881978 T DE 3881978T DE 3881978 D1 DE3881978 D1 DE 3881978D1
Authority
DE
Germany
Prior art keywords
thick layer
transistor matrix
layer transistor
matrix
thick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888112325T
Other languages
English (en)
Other versions
DE3881978T2 (de
Inventor
Hirohisa Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of DE3881978D1 publication Critical patent/DE3881978D1/de
Application granted granted Critical
Publication of DE3881978T2 publication Critical patent/DE3881978T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6729Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/6737Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
    • H10D30/6739Conductor-insulator-semiconductor electrodes
DE88112325T 1987-07-30 1988-07-29 Duennschichttransistoren-matrix. Expired - Fee Related DE3881978T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62193351A JPH061314B2 (ja) 1987-07-30 1987-07-30 薄膜トランジスタアレイ

Publications (2)

Publication Number Publication Date
DE3881978D1 true DE3881978D1 (de) 1993-07-29
DE3881978T2 DE3881978T2 (de) 1993-11-04

Family

ID=16306457

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88112325T Expired - Fee Related DE3881978T2 (de) 1987-07-30 1988-07-29 Duennschichttransistoren-matrix.

Country Status (3)

Country Link
EP (1) EP0301571B1 (de)
JP (1) JPH061314B2 (de)
DE (1) DE3881978T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6484668A (en) * 1987-09-26 1989-03-29 Casio Computer Co Ltd Thin film transistor
JPH0640585B2 (ja) * 1987-11-02 1994-05-25 沖電気工業株式会社 薄膜トランジスタ
JPH0810299B2 (ja) * 1988-03-11 1996-01-31 株式会社精工舎 薄膜トランジスタアレイ
JPH0210330A (ja) * 1988-06-29 1990-01-16 Hitachi Ltd アクティブマトリクス基板とその製造方法及びこれを用いた液晶表示素子
JP2778712B2 (ja) * 1988-12-05 1998-07-23 株式会社東芝 薄膜トランジスタアレイ
JPH02240636A (ja) * 1989-03-15 1990-09-25 Hitachi Ltd アクティブマトリクス基板とこれを用いた液晶表示素子
JPH0828517B2 (ja) * 1989-07-04 1996-03-21 シャープ株式会社 薄膜トランジスタアレイ
JP2807496B2 (ja) * 1989-08-11 1998-10-08 シャープ株式会社 アクティブマトリクス基板
JPH03118520A (ja) * 1989-09-29 1991-05-21 Sharp Corp 薄膜トランジスタアレイ
US5367179A (en) * 1990-04-25 1994-11-22 Casio Computer Co., Ltd. Thin-film transistor having electrodes made of aluminum, and an active matrix panel using same
US5243202A (en) * 1990-04-25 1993-09-07 Casio Computer Co., Ltd. Thin-film transistor and a liquid crystal matrix display device using thin-film transistors of this type
EP0476701B1 (de) * 1990-09-21 1995-12-13 Casio Computer Company Limited Dünnfilmtransistor und eine Dünnfilmtransistorpanele, die solche Transistoren verwendet
JPH04280637A (ja) * 1991-03-08 1992-10-06 Nippondenso Co Ltd 薄膜トランジスタの製造方法
GB2255443B (en) * 1991-04-30 1995-09-13 Samsung Electronics Co Ltd Fabricating a metal electrode of a semiconductor device
JPH0793363B2 (ja) * 1991-09-25 1995-10-09 株式会社半導体エネルギー研究所 半導体集積回路およびその作製方法
JPH05152573A (ja) * 1991-11-29 1993-06-18 Nec Corp 薄膜トランジスタ及びその製造方法
EP0545327A1 (de) * 1991-12-02 1993-06-09 Matsushita Electric Industrial Co., Ltd. Dünnschichttransistoranordnung für den Gebrauch in einer Flüssigkristallanzeige
JPH06188419A (ja) * 1992-12-16 1994-07-08 Matsushita Electric Ind Co Ltd 薄膜トランジスタの製造方法
DE69635239T2 (de) * 1995-11-21 2006-07-06 Samsung Electronics Co., Ltd., Suwon Verfahren zur Herstellung einer Flüssigkristall-Anzeige
US5731232A (en) * 1996-11-08 1998-03-24 Taiwan Semiconductor Manufacturing Company, Ltd. Method for concurrently making thin-film-transistor (TFT) gate electrodes and ohmic contacts at P/N junctions for TFT-static random
GB2338105B (en) * 1997-03-04 2000-04-12 Lg Electronics Inc Method of making a thin film transistor
KR100248123B1 (ko) * 1997-03-04 2000-03-15 구본준 박막트랜지스터및그의제조방법
US6333518B1 (en) 1997-08-26 2001-12-25 Lg Electronics Inc. Thin-film transistor and method of making same
CN104701326A (zh) * 2015-03-19 2015-06-10 京东方科技集团股份有限公司 阵列基板及其制造方法和显示装置
CN108819909A (zh) * 2018-08-01 2018-11-16 苏州培星智能装备科技有限公司 汽车后挡风玻璃防尘装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59141271A (ja) * 1983-01-31 1984-08-13 Sharp Corp 薄膜トランジスタ
JPS5932069A (ja) * 1982-08-17 1984-02-21 Mitsubishi Electric Corp 光学文字読取装置
JPS609167A (ja) * 1983-06-28 1985-01-18 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法
JPS6054478A (ja) * 1983-09-06 1985-03-28 Toshiba Corp 表示装置用駆動回路基板の製造方法
JPS61166173A (ja) * 1985-01-18 1986-07-26 Matsushita Electric Ind Co Ltd 薄膜トランジスタ装置

Also Published As

Publication number Publication date
JPH061314B2 (ja) 1994-01-05
EP0301571A3 (en) 1990-01-03
DE3881978T2 (de) 1993-11-04
JPS6435421A (en) 1989-02-06
EP0301571A2 (de) 1989-02-01
EP0301571B1 (de) 1993-06-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee