DE3881978D1 - Duennschichttransistoren-matrix. - Google Patents
Duennschichttransistoren-matrix.Info
- Publication number
- DE3881978D1 DE3881978D1 DE8888112325T DE3881978T DE3881978D1 DE 3881978 D1 DE3881978 D1 DE 3881978D1 DE 8888112325 T DE8888112325 T DE 8888112325T DE 3881978 T DE3881978 T DE 3881978T DE 3881978 D1 DE3881978 D1 DE 3881978D1
- Authority
- DE
- Germany
- Prior art keywords
- thick layer
- transistor matrix
- layer transistor
- matrix
- thick
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
- H10D30/6739—Conductor-insulator-semiconductor electrodes
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62193351A JPH061314B2 (ja) | 1987-07-30 | 1987-07-30 | 薄膜トランジスタアレイ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3881978D1 true DE3881978D1 (de) | 1993-07-29 |
DE3881978T2 DE3881978T2 (de) | 1993-11-04 |
Family
ID=16306457
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE88112325T Expired - Fee Related DE3881978T2 (de) | 1987-07-30 | 1988-07-29 | Duennschichttransistoren-matrix. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0301571B1 (de) |
JP (1) | JPH061314B2 (de) |
DE (1) | DE3881978T2 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6484668A (en) * | 1987-09-26 | 1989-03-29 | Casio Computer Co Ltd | Thin film transistor |
JPH0640585B2 (ja) * | 1987-11-02 | 1994-05-25 | 沖電気工業株式会社 | 薄膜トランジスタ |
JPH0810299B2 (ja) * | 1988-03-11 | 1996-01-31 | 株式会社精工舎 | 薄膜トランジスタアレイ |
JPH0210330A (ja) * | 1988-06-29 | 1990-01-16 | Hitachi Ltd | アクティブマトリクス基板とその製造方法及びこれを用いた液晶表示素子 |
JP2778712B2 (ja) * | 1988-12-05 | 1998-07-23 | 株式会社東芝 | 薄膜トランジスタアレイ |
JPH02240636A (ja) * | 1989-03-15 | 1990-09-25 | Hitachi Ltd | アクティブマトリクス基板とこれを用いた液晶表示素子 |
JPH0828517B2 (ja) * | 1989-07-04 | 1996-03-21 | シャープ株式会社 | 薄膜トランジスタアレイ |
JP2807496B2 (ja) * | 1989-08-11 | 1998-10-08 | シャープ株式会社 | アクティブマトリクス基板 |
JPH03118520A (ja) * | 1989-09-29 | 1991-05-21 | Sharp Corp | 薄膜トランジスタアレイ |
US5367179A (en) * | 1990-04-25 | 1994-11-22 | Casio Computer Co., Ltd. | Thin-film transistor having electrodes made of aluminum, and an active matrix panel using same |
US5243202A (en) * | 1990-04-25 | 1993-09-07 | Casio Computer Co., Ltd. | Thin-film transistor and a liquid crystal matrix display device using thin-film transistors of this type |
EP0476701B1 (de) * | 1990-09-21 | 1995-12-13 | Casio Computer Company Limited | Dünnfilmtransistor und eine Dünnfilmtransistorpanele, die solche Transistoren verwendet |
JPH04280637A (ja) * | 1991-03-08 | 1992-10-06 | Nippondenso Co Ltd | 薄膜トランジスタの製造方法 |
GB2255443B (en) * | 1991-04-30 | 1995-09-13 | Samsung Electronics Co Ltd | Fabricating a metal electrode of a semiconductor device |
JPH0793363B2 (ja) * | 1991-09-25 | 1995-10-09 | 株式会社半導体エネルギー研究所 | 半導体集積回路およびその作製方法 |
JPH05152573A (ja) * | 1991-11-29 | 1993-06-18 | Nec Corp | 薄膜トランジスタ及びその製造方法 |
EP0545327A1 (de) * | 1991-12-02 | 1993-06-09 | Matsushita Electric Industrial Co., Ltd. | Dünnschichttransistoranordnung für den Gebrauch in einer Flüssigkristallanzeige |
JPH06188419A (ja) * | 1992-12-16 | 1994-07-08 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタの製造方法 |
DE69635239T2 (de) * | 1995-11-21 | 2006-07-06 | Samsung Electronics Co., Ltd., Suwon | Verfahren zur Herstellung einer Flüssigkristall-Anzeige |
US5731232A (en) * | 1996-11-08 | 1998-03-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for concurrently making thin-film-transistor (TFT) gate electrodes and ohmic contacts at P/N junctions for TFT-static random |
GB2338105B (en) * | 1997-03-04 | 2000-04-12 | Lg Electronics Inc | Method of making a thin film transistor |
KR100248123B1 (ko) * | 1997-03-04 | 2000-03-15 | 구본준 | 박막트랜지스터및그의제조방법 |
US6333518B1 (en) | 1997-08-26 | 2001-12-25 | Lg Electronics Inc. | Thin-film transistor and method of making same |
CN104701326A (zh) * | 2015-03-19 | 2015-06-10 | 京东方科技集团股份有限公司 | 阵列基板及其制造方法和显示装置 |
CN108819909A (zh) * | 2018-08-01 | 2018-11-16 | 苏州培星智能装备科技有限公司 | 汽车后挡风玻璃防尘装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59141271A (ja) * | 1983-01-31 | 1984-08-13 | Sharp Corp | 薄膜トランジスタ |
JPS5932069A (ja) * | 1982-08-17 | 1984-02-21 | Mitsubishi Electric Corp | 光学文字読取装置 |
JPS609167A (ja) * | 1983-06-28 | 1985-01-18 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
JPS6054478A (ja) * | 1983-09-06 | 1985-03-28 | Toshiba Corp | 表示装置用駆動回路基板の製造方法 |
JPS61166173A (ja) * | 1985-01-18 | 1986-07-26 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタ装置 |
-
1987
- 1987-07-30 JP JP62193351A patent/JPH061314B2/ja not_active Expired - Fee Related
-
1988
- 1988-07-29 EP EP88112325A patent/EP0301571B1/de not_active Expired - Lifetime
- 1988-07-29 DE DE88112325T patent/DE3881978T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH061314B2 (ja) | 1994-01-05 |
EP0301571A3 (en) | 1990-01-03 |
DE3881978T2 (de) | 1993-11-04 |
JPS6435421A (en) | 1989-02-06 |
EP0301571A2 (de) | 1989-02-01 |
EP0301571B1 (de) | 1993-06-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |