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DE3786917D1 - Ein- oder mehrstufige zweiwellenvakuumpumpe. - Google Patents

Ein- oder mehrstufige zweiwellenvakuumpumpe.

Info

Publication number
DE3786917D1
DE3786917D1 DE8787107090T DE3786917T DE3786917D1 DE 3786917 D1 DE3786917 D1 DE 3786917D1 DE 8787107090 T DE8787107090 T DE 8787107090T DE 3786917 T DE3786917 T DE 3786917T DE 3786917 D1 DE3786917 D1 DE 3786917D1
Authority
DE
Germany
Prior art keywords
vacuum pump
stage
housing ring
shaft vacuum
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787107090T
Other languages
English (en)
Inventor
Ralf Steffens
Hans-Peter Dr Kabelitz
Hanns-Peter Dr Berges
Hartmut Kriehn
Wolfgang Leier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE3786917D1 publication Critical patent/DE3786917D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE8787107090T 1987-05-15 1987-05-15 Ein- oder mehrstufige zweiwellenvakuumpumpe. Expired - Fee Related DE3786917D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP87107090A EP0290663B1 (de) 1987-05-15 1987-05-15 Ein- oder mehrstufige Zweiwellenvakuumpumpe

Publications (1)

Publication Number Publication Date
DE3786917D1 true DE3786917D1 (de) 1993-09-09

Family

ID=8196997

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787107090T Expired - Fee Related DE3786917D1 (de) 1987-05-15 1987-05-15 Ein- oder mehrstufige zweiwellenvakuumpumpe.

Country Status (4)

Country Link
US (1) US4983107A (de)
EP (1) EP0290663B1 (de)
JP (1) JP2650041B2 (de)
DE (1) DE3786917D1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0497995A1 (de) * 1991-02-01 1992-08-12 Leybold Aktiengesellschaft Trockenlaufende Vakuumpumpe
EP0569455B1 (de) * 1991-02-01 1994-08-03 Leybold Aktiengesellschaft Trockenlaufende zweiwellenvakuumpumpe
DE4233142A1 (de) * 1992-10-02 1994-04-07 Leybold Ag Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durchführung dieses Betriebsverfahrens geeignete Klauenvakuumpumpe
GB9604486D0 (en) * 1996-03-01 1996-05-01 Boc Group Plc Improvements in vacuum pumps
DE19736017A1 (de) * 1997-08-20 1999-02-25 Peter Frieden Trockenverdichtende Vakuumpumpe oder Kompressor
DE19820523A1 (de) * 1998-05-08 1999-11-11 Peter Frieden Schraubenspindel-Vakuumpumpe mit Rotorkühlung
US7077159B1 (en) * 1998-12-23 2006-07-18 Applied Materials, Inc. Processing apparatus having integrated pumping system
DE19963171A1 (de) * 1999-12-27 2001-06-28 Leybold Vakuum Gmbh Gekühlte Schraubenvakuumpumpe
DE19963172A1 (de) 1999-12-27 2001-06-28 Leybold Vakuum Gmbh Schraubenpumpe mit einem Kühlmittelkreislauf
DE10040482A1 (de) * 2000-08-18 2002-02-28 Univ Ilmenau Tech Zweiwellenklauenpumpe
JP3673743B2 (ja) * 2001-09-27 2005-07-20 大晃機械工業株式会社 スクリュー式真空ポンプ
GB0223769D0 (en) * 2002-10-14 2002-11-20 Boc Group Plc A pump
GB2426036A (en) * 2005-05-10 2006-11-15 Bernard Whicher Vertical Northey compressor
DE102014101113A1 (de) * 2014-01-30 2015-07-30 Pfeiffer Vacuum Gmbh Vakuumpumpe
WO2018132019A2 (en) * 2017-01-10 2018-07-19 John Fleming Improvements in rotary claw pumps
CN111594439A (zh) * 2020-04-23 2020-08-28 浙江佳成机械有限公司 一种三级螺杆压缩机
JP7008955B1 (ja) * 2021-07-16 2022-01-25 オリオン機械株式会社 クローポンプ

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US901539A (en) * 1905-06-14 1908-10-20 John George Leyner Multiple-stage air-compressor.
US1653814A (en) * 1926-01-02 1927-12-27 William E Mild Rotary compressor
US2014932A (en) * 1933-03-17 1935-09-17 Gen Motors Corp Roots blower
GB525761A (en) * 1939-02-28 1940-09-04 Milo Ab Improvements in or relating to rotary compressors
US2367463A (en) * 1939-03-18 1945-01-16 Heimbach Bruno Rotary blower
DE758120C (de) * 1939-03-19 1953-10-05 Bosch Gmbh Robert Drehkolbengeblaese
GB529059A (en) * 1939-05-11 1940-11-13 James Pontus Johnson Improvements in or relating to air pumps
US2708548A (en) * 1953-10-12 1955-05-17 Hosdreg Company Inc Blower
US2938664A (en) * 1955-01-17 1960-05-31 Leybold S Nachfolger Fa E Pump
CH365821A (de) * 1959-03-17 1962-11-30 Balzers Hochvakuum Verfahren zum Betrieb von mechanischen Vakuumpumpen und Vakuumpumpe zur Durchführung dieses Verfahrens
US3150593A (en) * 1961-04-24 1964-09-29 Waukesha Foundry Co Metering pump
DE1425080A1 (de) * 1962-05-04 1969-03-13 Ohe Ernst Von Der Hohlzylinder-Rotor nach Baukastensystem in Typnormung
DE2007880A1 (de) * 1970-02-20 1971-09-02 Brown, Arthur Corning N Y (VStA) Rotationsverdrangungsmaschine
JPS4857706U (de) * 1971-10-29 1973-07-23
US4035112A (en) * 1974-02-20 1977-07-12 Outboard Marine Corporation Rotary engine cooling and exhaust system
FR2389784B1 (de) * 1977-05-06 1984-02-24 Siebec Filtres
GB2088957B (en) * 1980-12-05 1984-12-12 Boc Ltd Rotary positive-displacement fluidmachines
DE3124247C1 (de) * 1981-06-19 1983-06-01 Boge Kompressoren Otto Boge Gmbh & Co Kg, 4800 Bielefeld Schraubenverdichter
JPS58160585A (ja) * 1982-03-19 1983-09-24 Hitachi Ltd スクリユ−ロ−タ
US4504201A (en) * 1982-11-22 1985-03-12 The Boc Group Plc Mechanical pumps
DE3321718A1 (de) * 1983-06-16 1984-12-20 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Waelzkolbenpumpe
IT1179911B (it) * 1984-04-16 1987-09-16 Gilardini Spa Compressore volumetrico per l alimentazione a motori endotermici di veicoli
JPS61152991A (ja) * 1984-12-26 1986-07-11 Hitachi Ltd スクリユ−流体機械
DE3545821A1 (de) * 1985-12-23 1987-07-02 Wankel Gmbh Fluessigkeitsgekuehltes gehaeuse einer rotationskolbenbrennkraftmaschine

Also Published As

Publication number Publication date
EP0290663B1 (de) 1993-08-04
JP2650041B2 (ja) 1997-09-03
JPS63302193A (ja) 1988-12-09
US4983107A (en) 1991-01-08
EP0290663A1 (de) 1988-11-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee