[go: up one dir, main page]

CN221979451U - Chip packaging structure of memory and memory device - Google Patents

Chip packaging structure of memory and memory device Download PDF

Info

Publication number
CN221979451U
CN221979451U CN202323323846.2U CN202323323846U CN221979451U CN 221979451 U CN221979451 U CN 221979451U CN 202323323846 U CN202323323846 U CN 202323323846U CN 221979451 U CN221979451 U CN 221979451U
Authority
CN
China
Prior art keywords
substrate
chip
memory
chip device
package structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202323323846.2U
Other languages
Chinese (zh)
Inventor
孙成思
何瀚
王灿
庞丽春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong Tailai Fengce Technology Co ltd
Biwin Storage Technology Co Ltd
Original Assignee
Guangdong Tailai Fengce Technology Co ltd
Biwin Storage Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Tailai Fengce Technology Co ltd, Biwin Storage Technology Co Ltd filed Critical Guangdong Tailai Fengce Technology Co ltd
Priority to CN202323323846.2U priority Critical patent/CN221979451U/en
Application granted granted Critical
Publication of CN221979451U publication Critical patent/CN221979451U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Wire Bonding (AREA)

Abstract

本实用新型公开一种存储器的芯片封装结构及存储装置,其中芯片封装结构包括第一基板、第二基板和柔性连接板,第一基板与第二基板通过柔性连接板电连接,第一基板为刚性基板,第一基板朝向第二基板的一侧设置有若干芯片器件。本实用新型存储器的芯片封装结构实现有效节省芯片封装结构的布局面积,且实现了高密封装的小型化,有效降低键合线互连线路感抗。

The utility model discloses a memory chip packaging structure and a storage device, wherein the chip packaging structure comprises a first substrate, a second substrate and a flexible connection board, the first substrate and the second substrate are electrically connected through the flexible connection board, the first substrate is a rigid substrate, and a plurality of chip devices are arranged on the side of the first substrate facing the second substrate. The memory chip packaging structure of the utility model effectively saves the layout area of the chip packaging structure, realizes the miniaturization of the high-sealing package, and effectively reduces the inductance of the bonding wire interconnection line.

Description

存储器的芯片封装结构及存储装置Chip packaging structure of memory and storage device

技术领域Technical Field

本实用新型涉及芯片封测技术领域,特别涉及一种存储器的芯片封装结构及应用该芯片封装结构的存储装置。The utility model relates to the technical field of chip packaging and testing, and in particular to a chip packaging structure of a memory and a storage device using the chip packaging structure.

背景技术Background Art

随着人们生活水准的不断提高,人们对物质生活的要求也不断提高,作为人们物质生活中重要一环的电子产品也需应对人们不同的要求作出改变,例如更轻和更薄等各种要求,这对于电子产品中微电子封装的技术提出了挑战。As people's living standards continue to improve, their requirements for material life are also increasing. Electronic products, as an important part of people's material life, also need to change to meet people's different requirements, such as lighter and thinner. This poses a challenge to the technology of microelectronic packaging in electronic products.

多芯片堆叠技术是应用在存储器的三维立体封装中的基本技术,多芯片堆叠技术影响着电子产品多元件的集成程度,从而直接或间接影响了电子产品的尺寸,应用多芯片堆叠技术的载体通常成为封装基板,可为芯片提供电连接、保护、支撑、散热等功效。Multi-chip stacking technology is a basic technology used in three-dimensional packaging of memory. Multi-chip stacking technology affects the integration level of multiple components of electronic products, thereby directly or indirectly affecting the size of electronic products. The carrier using multi-chip stacking technology is usually a packaging substrate, which can provide electrical connection, protection, support, heat dissipation and other functions for the chip.

在现有的存储器的芯片封装结构中,封装载体一般为刚性基板,通过至少两个刚性基板之间设置多种芯片器件,而两刚性基板之间采用键合线进行互连,键合线线径较小,感抗较大,容易影响电源和信号的完整性。In the existing memory chip packaging structure, the packaging carrier is generally a rigid substrate, and a variety of chip devices are arranged between at least two rigid substrates. The two rigid substrates are interconnected by bonding wires. The bonding wires have a small wire diameter and a large inductance, which can easily affect the integrity of the power supply and signal.

实用新型内容Utility Model Content

本实用新型的主要目的在于提出一种存储器的芯片封装结构,旨在解决现有技术中存储器的芯片封装结构中两刚性基板之间采用键合线进行互连,键合线线径较小,感抗较大,容易影响电源和信号的完整性的技术问题。The main purpose of the utility model is to propose a chip packaging structure of a memory, aiming to solve the technical problem that in the chip packaging structure of the memory in the prior art, two rigid substrates are interconnected by bonding wires, the bonding wires have a small wire diameter and a large inductance, which easily affects the integrity of the power supply and the signal.

为实现上述目的,本实用新型提出一种存储器的芯片封装结构,包括第一基板、第二基板和柔性连接板,其中:To achieve the above object, the utility model provides a memory chip packaging structure, comprising a first substrate, a second substrate and a flexible connecting board, wherein:

所述第一基板与所述第二基板通过所述柔性连接板电连接,所述第一基板为刚性基板,所述第一基板朝向所述第二基板的一侧设置有若干芯片器件。The first substrate is electrically connected to the second substrate through the flexible connecting board. The first substrate is a rigid substrate. A plurality of chip devices are arranged on a side of the first substrate facing the second substrate.

在一些实施例中,所述第二基板与相邻的所述芯片器件电连接。In some embodiments, the second substrate is electrically connected to the adjacent chip devices.

在一些实施例中,所述第二基板与相邻的所述芯片器件通过键合线连接。In some embodiments, the second substrate is connected to the adjacent chip device via bonding wires.

在一些实施例中,与所述第二基板相邻的所述芯片器件远离所述第二基板的一侧设置有FOW层。In some embodiments, a FOW layer is disposed on a side of the chip device adjacent to the second substrate away from the second substrate.

在一些实施例中,与所述第二基板相邻的所述芯片器件靠近所述第二基板的一侧设置有重布线层,所述第二基板通过重布线层与所述芯片器件电连接。In some embodiments, a redistribution layer is provided on a side of the chip device adjacent to the second substrate close to the second substrate, and the second substrate is electrically connected to the chip device through the redistribution layer.

在一些实施例中,所述芯片器件上具有通孔,所述第二基板通过通孔与所述芯片器件电连接。In some embodiments, the chip device has a through hole, and the second substrate is electrically connected to the chip device through the through hole.

所述第二基板为柔性基板,所述柔性连接板与所述第二基板一体成型。The second substrate is a flexible substrate, and the flexible connecting plate is integrally formed with the second substrate.

在一些实施例中,所述芯片器件通过SMT回流焊贴装扇出信号。In some embodiments, the chip device fans out signals via SMT reflow soldering.

在一些实施例中,所述芯片器件通过金线键合技术键合扇出信号。In some embodiments, the chip device bonds the fan-out signal by gold wire bonding technology.

进一步地,本实用新型还提出一种存储装置,包括前述记载的所述的存储器的芯片封装结构。Furthermore, the utility model also provides a storage device, comprising the chip packaging structure of the memory described above.

本实用新型方案中,通过第一基板、第二基板和柔性连接板的设置,若干芯片器件竖直堆叠设置于第一基板朝向第二基板的一侧,该设置方式代替了传统的平铺设置的芯片封装的设置方式,竖直堆叠设置于第一基板上的芯片器件比平铺与第一基板上的芯片器件的设置方式占用的平面空间小,节省大量平面空间。实现了芯片封装的高密封装和小型化,且利用柔性电路板代替原有的键合线将第一基板和第二基板电性互连,本实用新型存储器的芯片封装结构有效降低了键合线两者互连的线路感抗,有效保护了电源和信号的完整性。In the scheme of the utility model, through the arrangement of the first substrate, the second substrate and the flexible connecting board, a plurality of chip devices are vertically stacked and arranged on the side of the first substrate facing the second substrate. This arrangement replaces the arrangement of the traditional flat chip package. The chip devices vertically stacked on the first substrate occupy less plane space than the arrangement of the chip devices flat on the first substrate, saving a lot of plane space. The high sealing and miniaturization of the chip package are achieved, and the first substrate and the second substrate are electrically interconnected by using a flexible circuit board instead of the original bonding wire. The chip packaging structure of the memory of the utility model effectively reduces the line inductance of the bonding wire interconnecting the two, and effectively protects the integrity of the power supply and signal.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为本实用新型一实施例中的存储器的芯片封装结构的结构示意图;FIG1 is a schematic structural diagram of a chip packaging structure of a memory in an embodiment of the present invention;

图2为本实用新型又一实施例中的存储器的芯片封装结构的结构示意图。FIG. 2 is a schematic structural diagram of a chip packaging structure of a memory in yet another embodiment of the present invention.

本实用新型目的实现、功能特点及优点将结合实施例,参照附图做进一步说明。The purpose, features and advantages of the present invention will be further described in conjunction with the embodiments and with reference to the accompanying drawings.

具体实施方式DETAILED DESCRIPTION

下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本实用新型的一部分实施例,而不是全部的实施例。基于本实用新型中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本实用新型保护的范围。The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

需要说明,本实用新型实施例中所有方向性指示(诸如上、下、左、右、前、后……)仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等,如果该特定姿态发生改变时,则该方向性指示也相应地随之改变。It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back...) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

还需要说明的是,当元件被称为“固定于”或“设置于”另一个元件上时,它可以直接在另一个元件上或者可能同时存在居中元件。当一个元件被称为是“连接”另一个元件,它可以是直接连接另一个元件或者可能同时存在居中元件。It should also be noted that when an element is referred to as being "fixed on" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element at the same time. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element at the same time.

另外,在本实用新型中涉及“第一”、“第二”等的描述仅用于描述目的,而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。另外,各个实施例之间的技术方案可以相互结合,但是必须是以本领域普通技术人员能够实现为基础,当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在,也不在本实用新型要求的保护范围之内。In addition, the descriptions of "first", "second", etc. in the present utility model are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

参照图1和图2,本实用新型提出一种存储器的芯片封装结构,包括第一基板1、第二基板2和柔性连接板3,其中:1 and 2 , the present invention provides a memory chip packaging structure, including a first substrate 1, a second substrate 2 and a flexible connecting board 3, wherein:

第一基板1与第二基板2通过柔性连接板3电连接,第一基板1为刚性基板,第一基板1朝向第二基板的一侧设置有若干芯片器件4。The first substrate 1 is electrically connected to the second substrate 2 via a flexible connecting plate 3. The first substrate 1 is a rigid substrate. A plurality of chip devices 4 are arranged on a side of the first substrate 1 facing the second substrate.

本实施例中,芯片封装结构中的第一基板1是刚性基板,若干芯片器件4沿竖直方向堆叠设置于第一基板1上,第一基板1作为基底,承载若干芯片器件4,第二基板2与第一基板1沿竖直方向间隔设置,若干芯片器件4堆叠设置于第一基板1和第二基板2之间,第一基板1与第二基板2之间通过柔性连接板3电性互连,第一基板1、第二基板2和柔性连接板3物理连接,电路相连。柔性连接板3连接于第一基板1的一侧,且与第二基板2连接的位置与连接第一基板1的一侧为同侧。In this embodiment, the first substrate 1 in the chip packaging structure is a rigid substrate, and a plurality of chip devices 4 are stacked on the first substrate 1 in the vertical direction. The first substrate 1 serves as a base and carries a plurality of chip devices 4. The second substrate 2 is spaced apart from the first substrate 1 in the vertical direction, and a plurality of chip devices 4 are stacked between the first substrate 1 and the second substrate 2. The first substrate 1 and the second substrate 2 are electrically interconnected through a flexible connection board 3. The first substrate 1, the second substrate 2 and the flexible connection board 3 are physically connected and connected in circuit. The flexible connection board 3 is connected to one side of the first substrate 1, and the position where it is connected to the second substrate 2 is the same side as the side connected to the first substrate 1.

在一些实施例中,第二基板2还可以设置于沿竖直方向堆叠于第一基板1的若干芯片器件4之间。In some embodiments, the second substrate 2 may also be disposed between a plurality of chip devices 4 stacked on the first substrate 1 along the vertical direction.

在一些实施例中,第一基板1、第二基板2和柔性连接板3的电路层数不限。In some embodiments, the number of circuit layers of the first substrate 1 , the second substrate 2 , and the flexible connecting board 3 is not limited.

在一些实施例中,芯片器件4的堆叠层数不限,柔性连接板3根据芯片器件4的堆叠层数设置,达到连接第一基板1和第二基板2的效果即可。In some embodiments, the number of stacked layers of the chip device 4 is not limited, and the flexible connecting board 3 is arranged according to the number of stacked layers of the chip device 4 to achieve the effect of connecting the first substrate 1 and the second substrate 2 .

在一些实施例中,本实用新型实施例所提出的第二基板、柔性连接板、芯片器件的周侧填充有塑封材料。In some embodiments, the second substrate, the flexible connecting board, and the peripheral sides of the chip device proposed in the embodiments of the present utility model are filled with plastic packaging materials.

在一些实施例中,本实用新型实施例所提出的塑封材料包括但不限于以下:环氧树脂、硅树脂和聚酰亚胺树脂。In some embodiments, the molding materials provided in the embodiments of the present invention include but are not limited to the following: epoxy resin, silicone resin and polyimide resin.

除第一基板1的底部以外,塑封材料应当包裹图1或图2中的第二基板、柔性连接板、芯片器件,设置的塑封材料为芯片的密封封装材料,目的是为了保护芯片不受外部环境中的particles(颗粒或微粒)或化学污染的影响;塑封材料有很好的电气绝缘效果,塑封材料可提供良好的电气绝缘性能,防止芯片器件4上的导电部位短路;部分塑封材料能提供一定的抗击穿效果,以提高封装的抗击穿电压强度;部分塑封材料能为芯片器件4提供散热性能,由于塑封材料性能具备良好的导热性,可以帮助芯片器件4很好地进行散热;塑封材料同样可以为芯片器件4提供一定的机械支撑强度;部分塑封材料具备很好的抗腐蚀性,采用高抗腐蚀性的塑封材料可以提高封装的使用寿命。Except for the bottom of the first substrate 1, the plastic encapsulation material should wrap the second substrate, the flexible connecting board, and the chip device in Figure 1 or 2. The plastic encapsulation material is a sealing packaging material for the chip, and the purpose is to protect the chip from particles (particles or microparticles) or chemical pollution in the external environment; the plastic encapsulation material has a good electrical insulation effect, and the plastic encapsulation material can provide good electrical insulation performance to prevent short circuits in the conductive parts of the chip device 4; some plastic encapsulation materials can provide a certain anti-breakthrough effect to improve the anti-breakthrough voltage strength of the package; some plastic encapsulation materials can provide heat dissipation performance for the chip device 4. Since the plastic encapsulation material has good thermal conductivity, it can help the chip device 4 to dissipate heat well; the plastic encapsulation material can also provide a certain mechanical support strength for the chip device 4; some plastic encapsulation materials have good corrosion resistance, and the use of highly corrosion-resistant plastic encapsulation materials can increase the service life of the package.

需要说明的是,环氧树脂为应用较为广泛的芯片级封装材料,加工性能好且成本低,抗湿性和绝缘性能优异;硅树脂为应用于有较高环保和抗热要求的封装产品,绝缘性好且耐高温;聚酰亚胺树脂为应用于高频高速数字产品的封装产品,具有优异的介电性能,高频信号完整性好,亦可用作粘结层。It should be noted that epoxy resin is a widely used chip-level packaging material with good processing performance, low cost, excellent moisture resistance and insulation properties; silicone resin is used for packaging products with high environmental protection and heat resistance requirements, with good insulation and high temperature resistance; polyimide resin is a packaging product used for high-frequency and high-speed digital products, with excellent dielectric properties, good high-frequency signal integrity, and can also be used as a bonding layer.

本实用新型芯片封装结构通过第一基板1、第二基板2与柔性连接板3的设置,若干芯片器件4堆叠设置于第一基板1朝向第二基板的一侧,该设置方式代替了传统的平铺设置的芯片封装的设置方式,竖直堆叠设置于第一基板1上的芯片器件4比平铺与第一基板1上的芯片器件4的设置方式占用的平面空间小,节省大量平面空间。实现了芯片封装的高密封装和小型化,且利用柔性电路板代替原有的键合线将第一基板1和第二基板2电性互连,有效降低了键合线两者互连的线路感抗,有效保护了电源和信号的完整性。The chip packaging structure of the utility model is provided with a first substrate 1, a second substrate 2 and a flexible connecting board 3, and a plurality of chip devices 4 are stacked and arranged on the side of the first substrate 1 facing the second substrate. This arrangement replaces the traditional arrangement of flat chip packaging. The chip devices 4 stacked vertically on the first substrate 1 occupy less plane space than the arrangement of the chip devices 4 flat on the first substrate 1, saving a lot of plane space. High sealing and miniaturization of chip packaging are achieved, and the first substrate 1 and the second substrate 2 are electrically interconnected by using a flexible circuit board instead of the original bonding wire, which effectively reduces the line inductance of the bonding wire interconnecting the two, and effectively protects the integrity of the power supply and signal.

在一些实施例中,本实用新型实施例所提出的所述第二基板与相邻的所述芯片器件电连接。In some embodiments, the second substrate provided in the embodiments of the present invention is electrically connected to the adjacent chip device.

本实施例中,第二基板2与相邻的芯片器件4电连接。第二基板2可以向外部引出芯片器件4内部的电信号,实现芯片器件4与外部电路的连接交互。In this embodiment, the second substrate 2 is electrically connected to the adjacent chip device 4. The second substrate 2 can lead the electrical signals inside the chip device 4 to the outside, thereby realizing the connection and interaction between the chip device 4 and the external circuit.

第二基板2上的导电布线可以重新分配芯片器件4内部焊盘的高密度布局,实现扇出效果。第二基板2还可能承载控制芯片器件4操作的部分关键电路。电连接令芯片器件4可接收控制信号。The conductive wiring on the second substrate 2 can redistribute the high-density layout of the pads inside the chip device 4 to achieve a fan-out effect. The second substrate 2 may also carry some key circuits that control the operation of the chip device 4. The electrical connection allows the chip device 4 to receive control signals.

在一些实施例中,第二基板也承载了芯片器件4运行所需的电源转换与调整电路。电连接对电源传递也是不可或缺的。In some embodiments, the second substrate also carries power conversion and regulation circuits required for the operation of the chip device 4. Electrical connection is also indispensable for power transmission.

综上,为保证信号引出、电路控制和电源供应等功能的实现,第二基板2与芯片器件4的稳定电连接是具有封装结构的基本需求。In summary, in order to ensure the realization of functions such as signal extraction, circuit control and power supply, stable electrical connection between the second substrate 2 and the chip device 4 is a basic requirement of the packaging structure.

参照图1和图2,在一些实施例中,本实用新型实施例所提出的第二基板2与相邻的芯片器件4通过键合线连接。1 and 2 , in some embodiments, the second substrate 2 provided in the embodiments of the present invention is connected to the adjacent chip device 4 via bonding wires.

本实施例中,键合线连接可以是通过在芯片器件4的出线焊盘位置,布设扇出导线,与芯片焊盘进行超声波焊接;在第二基板2对应区域布设匹配的螺柱焊盘,用于后续与扇出线焊接;使用金属键合线,一端与芯片器件4上的扇出导线焊盘钎合,另一端与第二基板2上的焊盘钎合;通过键合线工艺,依次连接每个芯片导线;加工完毕后,进行去除氧化层、打净孔等后处理,提高导线连接可靠性。In this embodiment, the bonding wire connection can be achieved by laying out a fan-out wire at the wire output pad position of the chip device 4 and ultrasonically welding it to the chip pad; laying out a matching stud pad in the corresponding area of the second substrate 2 for subsequent welding with the fan-out wire; using a metal bonding wire, one end is brazed with the fan-out wire pad on the chip device 4, and the other end is brazed with the pad on the second substrate 2; each chip wire is connected in turn through a bonding wire process; after processing, post-processing such as removing the oxide layer and drilling holes is performed to improve the reliability of the wire connection.

第二基板2与相邻的芯片器件4电连接还可以是锡球连接,具体的,锡球连接为:在芯片器件4的出线焊盘位置开设通孔,沉积UDL(微球底垫层)和UBM(钝化层),形成经过表面处理的铜焊盘;The second substrate 2 and the adjacent chip device 4 can also be electrically connected by solder ball connection. Specifically, the solder ball connection is as follows: a through hole is opened at the position of the lead-out pad of the chip device 4, and a UDL (microball bottom layer) and a UBM (passivation layer) are deposited to form a copper pad after surface treatment;

在第二基板2对应区域置入掩膜,开沟位置与焊盘匹配,然后电镀镍/金layer层;A mask is placed in the corresponding area of the second substrate 2, the groove position matches the pad, and then a nickel/gold layer is electroplated;

将芯片翻转正置于第二基板2上方,使用机器视觉系统精确对位;Flip the chip over and place it on the second substrate 2, and use a machine vision system to accurately align the chip;

经过回流炉中的热压焊接,锡球与第二基板2的焊盘完成可靠的电连接;After hot pressing welding in the reflow oven, the solder balls and the solder pads of the second substrate 2 are reliably electrically connected;

取下热压板,进行电学测试以确认锡球连接的质量;Remove the hot press plate and perform electrical testing to confirm the quality of solder ball connection;

注入并固化底部填充化合物,以提高连接的可靠性;Inject and cure underfill compound to improve connection reliability;

进行封装,完成芯片与第二基板2之间的锡球电连接工艺。The chip is packaged and the solder ball electrical connection process between the chip and the second substrate 2 is completed.

参照图2,在一些实施例中,本实用新型实施例所提出的与第二基板2相邻的芯片器件4远离第二基板2的一侧设置有FOW层。2 , in some embodiments, a FOW layer is disposed on a side of the chip device 4 adjacent to the second substrate 2 away from the second substrate 2 according to the embodiment of the present invention.

本实施例中,FOW层指的film over wire层,是芯片上的薄膜翻转封装技术,设置FOW层的具体操作为:在芯片器件4的电极焊盘侧准备滤膜层,该滤膜层含有环绕焊盘的再分配电路层;In this embodiment, the FOW layer refers to the film over wire layer, which is a thin film flip packaging technology on a chip. The specific operation of setting the FOW layer is: preparing a filter membrane layer on the electrode pad side of the chip device 4, and the filter membrane layer contains a redistribution circuit layer surrounding the pad;

在滤膜层上沉积垫块焊球;depositing spacer solder balls on the filter membrane layer;

将芯片器件4翻转,焊球朝下,与第二基板上的焊盘对齐;Turn the chip device 4 over, with the solder balls facing downward, and aligning them with the solder pads on the second substrate;

进行热压焊接,滤膜层中的再分配电路实现芯片器件4焊盘到焊球的扇出连接;Perform hot pressing welding, and the redistribution circuit in the filter membrane layer realizes the fan-out connection from the chip device 4 pads to the solder balls;

完成薄膜翻转工艺,滤膜层起到扇出连接和芯片器件4保护的作用。After the film flipping process is completed, the filter membrane layer plays the role of fan-out connection and chip device 4 protection.

封装与测试,完成扇出线层的制作。Packaging and testing complete the production of the fan-out line layer.

在一些实施例中,参照图2,wirebond die指的是采用金线键合(wire bonding)技术来封装和连接的裸芯片。需要注意的是,wirebond die层为裸片,为未经过密封保护的芯片状态,然后利用金属微线(gold wire)将芯片表面焊盘与第二基板2进行电连接。In some embodiments, referring to FIG2 , a wirebond die refers to a bare chip that is packaged and connected using a gold wire bonding technique. It should be noted that the wirebond die layer is a bare chip that is not sealed and protected, and then the chip surface pads are electrically connected to the second substrate 2 using a gold wire.

参照图1,在一些实施例中,本实用新型实施例所提出的与所述第二基板2相邻的所述芯片器件4靠近所述第二基板2的一侧设置有重布线层,所述第二基板2通过重布线层与所述芯片器件4电连接。1 , in some embodiments, a redistribution layer is provided on a side of the chip device 4 adjacent to the second substrate 2 close to the second substrate 2 proposed in the embodiment of the utility model, and the second substrate 2 is electrically connected to the chip device 4 through the redistribution layer.

本实施例中,芯片器件4表面焊盘的扇出和重新布线可以使用再分配布线层(Redistribution Layer)工艺,简称RDL工艺。RDL工艺可以用于为键合线连接准备芯片表面焊盘。具体为RDL层上开窗激光钻孔,形成焊盘,然后进行锡球焊接,方便后续的键合线连接;RDL工艺实现芯片表面焊盘的扇出和重新布线,与金线键合的扇出焊盘位置相匹配,使高密度芯片可与低密度载板可靠连接。采用RDL工艺后,可以降低芯片与载板之间的尺寸差距,有利于减少键合线长度,提高线路速度。RDL工艺也可以在导线框型载板上制作,取代金属框架,与芯片键合实现电连接。总体而言,RDL工艺通过改变焊盘布局,有利于优化键合线连接,实现高密度芯片与载板的可靠互连。In this embodiment, the fan-out and rewiring of the surface pads of the chip device 4 can use the redistribution wiring layer (Redistribution Layer) process, referred to as the RDL process. The RDL process can be used to prepare the chip surface pads for bonding wire connections. Specifically, the RDL layer is laser drilled to form pads, and then solder balls are welded to facilitate subsequent bonding wire connections; the RDL process realizes the fan-out and rewiring of the chip surface pads, which matches the fan-out pad position of the gold wire bonding, so that the high-density chip can be reliably connected to the low-density carrier. After adopting the RDL process, the size gap between the chip and the carrier can be reduced, which is conducive to reducing the length of the bonding wire and increasing the line speed. The RDL process can also be made on a wire frame type carrier, replacing the metal frame, and bonding with the chip to achieve electrical connection. In general, the RDL process is conducive to optimizing the bonding wire connection and realizing reliable interconnection between high-density chips and carriers by changing the pad layout.

所述芯片器件上具有通孔,所述第二基板通过通孔与所述芯片器件电连接。The chip device has a through hole, and the second substrate is electrically connected to the chip device through the through hole.

本实施例中,设置通孔使得所述第二基板通过通孔与所述芯片器件电连接,其可称为硅通孔垂直互连技术连接,具体为:在芯片器件4对应的区域蚀刻出贯穿硅的通孔,直达芯片器件4内部的铜焊盘;In this embodiment, a through hole is provided so that the second substrate is electrically connected to the chip device through the through hole, which can be called a through silicon via vertical interconnection technology connection, specifically: a through hole penetrating silicon is etched in the area corresponding to the chip device 4, directly reaching the copper pad inside the chip device 4;

在通孔侧壁通过热氧化生成电绝缘层,然后依照标准工艺沉积导电种子层;An electrical insulating layer is formed on the sidewalls of the through-hole by thermal oxidation, and then a conductive seed layer is deposited according to standard processes;

采用表面平整化技术,形成填充TSV的导电垫,实现垂直方向的导电通路;Surface flattening technology is used to form conductive pads that fill TSVs to achieve vertical conductive paths;

在芯片器件4的TSV出口位置构建小规模的再分配布线,与TSV电连接;Constructing a small-scale redistribution wiring at the TSV exit position of the chip device 4, electrically connected to the TSV;

在第二基板2上对应TSV阵列布设焊盘;Arrange pads on the second substrate 2 corresponding to the TSV array;

将芯片器件4翻转置于第二基板2,精准对位后进行热压焊;The chip device 4 is turned over and placed on the second substrate 2, and hot-pressed and welded after precise alignment;

TSV与第二基板焊盘形成可靠的金属扩散键合,从而实现芯片器件4的高密度电性连接。The TSV forms a reliable metal diffusion bond with the second substrate pad, thereby achieving high-density electrical connection of the chip device 4 .

在一些实施例中,本实用新型实施例所提出的所述第二基板为柔性基板,所述柔性连接板与所述第二基板一体成型。In some embodiments, the second substrate provided in the embodiments of the present invention is a flexible substrate, and the flexible connecting plate and the second substrate are integrally formed.

本实施例中,第二基板2为柔性基板时,柔性连接板3和第二基板2可以是一体化的同一基板,进一步简化本实用新型芯片封装结构的布置结构。当柔性连接板3和第二基板2是一体化设置的时候,第二基板2可以设置于任意堆叠的芯片器件4之间。In this embodiment, when the second substrate 2 is a flexible substrate, the flexible connecting plate 3 and the second substrate 2 can be an integrated substrate, further simplifying the arrangement structure of the chip packaging structure of the utility model. When the flexible connecting plate 3 and the second substrate 2 are integrated, the second substrate 2 can be arranged between any stacked chip devices 4.

在一些实施例中,本实用新型实施例所提出的芯片器件4通过SMT回流焊贴装扇出信号。In some embodiments, the chip device 4 provided in the embodiments of the present invention fans out signals through SMT reflow soldering.

本实施例中,SMT(表面贴装技术)回流焊贴装扇出信号具体操作为:在芯片器件4的焊盘布置出线引脚,进行图案化设计,匹配PCB(printed circuit board)板上的焊盘布局;In this embodiment, the specific operation of the SMT (surface mount technology) reflow soldering fan-out signal is as follows: arranging the outgoing pins on the pads of the chip device 4, performing pattern design, and matching the pad layout on the PCB (printed circuit board);

将芯片器件4置于PCB板上,通过点胶机器人进行胶水点胶;Place the chip device 4 on the PCB board and dispense glue using a dispensing robot;

运送入回流炉,经过预热、回流以及冷却的工艺曲线;Transported to the reflow oven, and goes through the process curve of preheating, reflow and cooling;

芯片器件4焊盘与PCB板焊盘完成表面贴装(SMT)融焊,实现电性连接;The chip device 4 pads and the PCB board pads complete the surface mount (SMT) fusion welding to achieve electrical connection;

进行电测试,验证芯片器件4碱性引脚与PCB扇出线的连接质量。Conduct electrical testing to verify the connection quality between the chip device 4 alkaline pins and the PCB fan-out lines.

经过清洗、烘干,去除焊接工艺中的杂质。After cleaning and drying, impurities in the welding process are removed.

完成芯片器件4的表面贴装焊接,实现扇出引线的电性连接。The surface mounting welding of the chip device 4 is completed to realize the electrical connection of the fan-out leads.

在一些实施例中,本实用新型实施例所提出的芯片器件4通过金线键合技术键合扇出信号。In some embodiments, the chip device 4 provided in the embodiments of the present invention bonds the fan-out signal through gold wire bonding technology.

本实施例中,芯片器件4通过金线键合技术(Wirebond)键合扇出信号的具体操作为:在芯片器件4的焊盘位置开启通孔,曝光芯片内部的铜焊盘;In this embodiment, the specific operation of bonding the fan-out signal of the chip device 4 through the gold wire bonding technology (Wirebond) is as follows: opening a through hole at the pad position of the chip device 4 to expose the copper pad inside the chip;

准备引线框,表面预镀镍/金层,提高键合线黏附力;Prepare the lead frame and pre-plating the surface with nickel/gold to improve the adhesion of the bonding wire;

将芯片置于引线框上,焊盘与引线框的引脚位置对齐;Place the chip on the lead frame, aligning the pads with the pins of the lead frame;

通过超声波金属键合,使用金属微线将芯片焊盘与引线框引脚连接;Ultrasonic metal bonding is used to connect the chip pads to the lead frame pins using metal microwires;

逐个焊盘完成键合线的钎合,形成扇出引线;Solder the bonding wires one pad at a time to form fan-out leads;

进行电测试,确认键合线连接的电性能;Conduct electrical testing to confirm the electrical performance of the bond wire connections;

封装与防潮,完成芯片器件4与引线框之间的金线键合。Packaging and moisture-proofing complete the gold wire bonding between the chip device 4 and the lead frame.

在一些实施例中,本实用新型进一步提出一种存储装置,包括前述实施例所记载的存储器的芯片封装结构,该存储器的芯片封装结构的具体结构参照上述实施例,由于存储装置采用了上述所有实施例的所有技术方案,因此至少具有上述实施例的技术方案所带来的全部技术效果,在此不再一一赘述。In some embodiments, the utility model further proposes a storage device, including the chip packaging structure of the memory described in the aforementioned embodiments. The specific structure of the chip packaging structure of the memory refers to the aforementioned embodiments. Since the storage device adopts all the technical solutions of all the aforementioned embodiments, it at least has all the technical effects brought by the technical solutions of the aforementioned embodiments, which will not be described one by one here.

以上所述的仅为本实用新型的部分或优选实施例,无论是文字还是附图都不能因此限制本实用新型保护的范围,凡是在与本实用新型一个整体的构思下,利用本实用新型说明书及附图内容所作的等效结构变换,或直接/间接运用在其他相关的技术领域均包括在本实用新型保护的范围内。The above description is only a partial or preferred embodiment of the present invention. Neither the text nor the drawings can limit the scope of protection of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the overall concept of the present invention, or direct/indirect application in other related technical fields are included in the scope of protection of the present invention.

Claims (10)

1. The chip packaging structure of the memory is characterized by comprising a first substrate, a second substrate and a flexible connecting plate, wherein:
The first substrate and the second substrate are electrically connected through the flexible connecting plate, the first substrate is a rigid substrate, and a plurality of chip devices are arranged on one side of the first substrate, which faces the second substrate.
2. The chip package structure of claim 1, wherein the second substrate is electrically connected to the adjacent chip device.
3. The chip package structure of a memory according to claim 2, wherein the second substrate is connected to the adjacent chip device by a bonding wire.
4. A chip package structure of a memory according to claim 3, wherein a side of the chip device adjacent to the second substrate remote from the second substrate is provided with a FOW layer.
5. The chip package structure of a memory according to claim 3, wherein a rewiring layer is provided on a side of the chip device adjacent to the second substrate, which is adjacent to the second substrate, the second substrate being electrically connected to the chip device through the rewiring layer.
6. The chip package structure of a memory according to claim 2, wherein the chip device has a via hole thereon, and the second substrate is electrically connected to the chip device through the via hole.
7. The memory chip package structure of claim 2, wherein the second substrate is a flexible substrate, and the flexible connection board is integrally formed with the second substrate.
8. The chip package structure of the memory of claim 1, wherein the chip device is attached with fan-out signals by SMT reflow soldering.
9. The chip package structure of the memory of claim 1, wherein the chip device bonds the fan-out signal by a gold wire bonding technique.
10. A memory device characterized by a chip package structure comprising the memory according to any one of claims 1 to 9.
CN202323323846.2U 2023-12-05 2023-12-05 Chip packaging structure of memory and memory device Active CN221979451U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202323323846.2U CN221979451U (en) 2023-12-05 2023-12-05 Chip packaging structure of memory and memory device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202323323846.2U CN221979451U (en) 2023-12-05 2023-12-05 Chip packaging structure of memory and memory device

Publications (1)

Publication Number Publication Date
CN221979451U true CN221979451U (en) 2024-11-08

Family

ID=93328374

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202323323846.2U Active CN221979451U (en) 2023-12-05 2023-12-05 Chip packaging structure of memory and memory device

Country Status (1)

Country Link
CN (1) CN221979451U (en)

Similar Documents

Publication Publication Date Title
JP5420505B2 (en) Manufacturing method of semiconductor device
CN102456677B (en) Packaging structure for ball grid array and manufacturing method for same
KR102198858B1 (en) Semiconductor package stack structure having interposer substrate
US8952551B2 (en) Semiconductor package and method for fabricating the same
KR20090039411A (en) Semiconductor package, module, system having a structure in which solder balls and chip pads are bonded, and a method of manufacturing the same
US8022558B2 (en) Semiconductor package with ribbon with metal layers
JP2004228323A (en) Semiconductor apparatus
CN102543935A (en) Printed circuit board for semiconductor package and semiconductor package having same
US8008765B2 (en) Semiconductor package having adhesive layer and method of manufacturing the same
CN102456648B (en) Method for manufacturing package substrate
US7696618B2 (en) POP (package-on-package) semiconductor device
CN101425510A (en) Laminated packaging structure of semiconductor element and method thereof
TW579560B (en) Semiconductor device and its manufacturing method
CN100524741C (en) Stacked package structure
TW200421587A (en) Multi-chip module
US20080179726A1 (en) Multi-chip semiconductor package and method for fabricating the same
CN221979451U (en) Chip packaging structure of memory and memory device
CN108400218A (en) A kind of LED encapsulation method based on CSP patterns
KR101089647B1 (en) Single layer package substrate and manufacturing method thereof
CN221783207U (en) Chip packaging structure and electronic equipment
KR0173932B1 (en) Multichip package
CN221947145U (en) Packaging structure and electronic equipment
CN102376666B (en) A kind of ball grid array package structure and manufacture method thereof
CN101527292B (en) Chip packaging structure
CN117715442A (en) Chip packaging structure of memory and memory device

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant