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CN210487650U - An automatic loading and unloading system - Google Patents

An automatic loading and unloading system Download PDF

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Publication number
CN210487650U
CN210487650U CN201921112163.3U CN201921112163U CN210487650U CN 210487650 U CN210487650 U CN 210487650U CN 201921112163 U CN201921112163 U CN 201921112163U CN 210487650 U CN210487650 U CN 210487650U
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sample
adjusting mechanism
loading
tray
manipulator
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CN201921112163.3U
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洪春霞
边风刚
周平
缪夏然
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Shanghai Institute of Applied Physics of CAS
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Shanghai Institute of Applied Physics of CAS
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Abstract

The utility model provides an automatic loading and unloading appearance system, include: a system base; the manipulator, the sampling table and the five-dimensional sample table are respectively and independently arranged on the system base; the five-dimensional sample stage comprises: the X-direction adjusting mechanism, the Z-direction adjusting mechanism, the grazing incidence angle Pitch adjusting mechanism, the rolling angle Roll adjusting mechanism and the swing angle Yaw adjusting mechanism are vertically stacked; further comprising: a plurality of sample trays placed on the sampling table; the sample tray mounting seat is provided with a through hole which vertically penetrates through the sample tray mounting seat, and the through hole is connected with a compressed air device through a pipeline; the manipulator can automatically perform sample loading and changing work of the sample tray between the sampling platform and the sample tray mounting seat, X rays are irradiated onto a sample to be detected through automatic adjustment of the five-dimensional sample platform, and detection of a plurality of samples is automatically completed. According to the utility model discloses, an automatic sample loading and unloading system that degree of automation is high, improve experimental efficiency, reduce equipment harm rate is provided.

Description

Automatic sample loading and unloading system
Technical Field
The utility model relates to an automatic loading device field, more specifically relate to an automatic loading and unloading system.
Background
The grazing incidence X-ray experiment technology is a technology for testing a thin film, X-rays are incident on the surface of a sample at a small angle during testing, and the technology can be used for testing information such as density, thickness, roughness, crystallite dimension, grain orientation and the like of the thin film. The BL16B1 laboratory station grazing incidence experiment adopts the mode of manually loading and changing samples and carrying out the experiment one sample at a time, but the mode needs to frequently enter and exit the laboratory shed, the experiment preparation work takes about 20 minutes, the experiment time is only a few seconds, and the experiment efficiency is not high.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an automatic system of loading and unloading to glancing over the incident X ray experiment among the solution prior art needs the artifical manual problem that the work efficiency is low that the appearance leads to of loading and changing.
In order to solve the technical problem, the utility model discloses a following technical scheme:
there is provided an automatic sample loading and unloading system comprising: a system base; the manipulator, the sampling table and the five-dimensional sample table are respectively and independently arranged on the system base; wherein, five-dimensional sample platform includes: the X-direction adjusting mechanism, the Z-direction adjusting mechanism, the grazing incidence angle Pitch adjusting mechanism, the rolling angle Roll adjusting mechanism and the swing angle Yaw adjusting mechanism are vertically stacked; the automatic sample loading and unloading system further comprises: a plurality of sample trays placed on the sampling table; the sample tray mounting seat is arranged above the five-dimensional sample table, a through hole which vertically penetrates through the sample tray mounting seat is formed in the sample tray mounting seat, and the through hole is connected with a compressed air device through a pipeline; the manipulator can automatically perform sample loading and sample changing work of the sample tray provided with the sample to be detected between the sampling platform and the sample tray mounting seat, and X rays are irradiated onto the sample to be detected through automatic adjustment of the five-dimensional sample platform, so that detection of a plurality of samples is automatically completed.
The rear end of the manipulator is installed on the system base through a manipulator installation base, and the front end of the manipulator is connected with the double-finger pneumatic gripper.
Preferably, the five-dimensional sample stage is mounted on the system base through a five-dimensional sample stage mounting base.
Preferably, the X-direction adjusting mechanism, the Z-direction adjusting mechanism, the grazing incidence angle Pitch adjusting mechanism, the rolling angle Roll adjusting mechanism and the swing angle Yaw adjusting mechanism are sequentially connected from bottom to top through fasteners.
Preferably, the sample tray has a substantially strip-shaped structure, the two opposite ends of the sample tray in the length direction are provided with clamping grooves for being grabbed by a manipulator, and the middle of the upper surface of the sample tray is provided with a sample groove for placing a sample to be measured.
Preferably, the sampling platform is provided with a plurality of tray placing grooves which are recessed downwards from the upper surface, and when the sample tray is placed in the tray placing grooves, the edges of the sample grooves of the sample tray protrude out of the plane of the upper surface of the sampling platform.
Preferably, a groove consistent with the strip-shaped outline of the sample tray is formed in the sample tray mounting seat, and the through hole is formed in the bottom surface of the groove.
Preferably, the manipulator is a five-axis joint manipulator.
The five-dimensional sample stage is controlled by a motor controller and a driver.
The system base is installed on an experiment platform of an experiment station through a fastener.
According to the utility model provides an automatic system of getting ready is the device that can replace artifical automatic sample of accomplishing of getting ready and the function of changing a kind, mainly uses under the experimental conditions that has big batch sample and repeatability is strong. This appearance system on desk-top manipulator adopts manipulator programming, motor drive and compressed air drive, and the manipulator has advantages such as location is accurate, simple structure, high reliability, high efficiency, easy to maintain, and manipulator anchor clamps can be changed, and it is simple to change moreover. The manipulator control software adopts man-machine operation software integrated with the synchrotron radiation experiment station, and is friendly to users. Sample equipment has reduced experimenter's working strength on the desk-top manipulator, has improved experimental efficiency. The utility model provides a sample system about desk-top manipulator can be general in the automatic sample system about of each laboratory bench of synchrotron radiation, carries out the automation for future laboratory bench experiment and does the technical reserve.
According to the utility model provides an automatic sample loading and unloading system, the sample tray that the manipulator can be equipped with the sample that awaits measuring automatically is in the sample loading and the work of changing patterns between sample platform and sample tray mount pad, the grazing incidence experiment of a plurality of samples is accomplished in the automation, 20 minutes control that the time of preparation working time that will experiment needs from prior art within 3 minutes, and can once only realize the automation of a plurality of samples grazing incidence experiment, a large amount of experimental time has been practiced thrift, the experimental efficiency is greatly improved, the probability of causing the equipment to damage because of manual operation has also been reduced. The utility model provides an automatic system of getting ready not only can realize glancing at the incident experiment to the X ray of sample, still can be used to conventional X ray scattering experiment, is the internal first automatic system of getting ready and changing a design that realizes that X ray grazes incident experiment and conventional X ray scattering experiment.
In a word, the utility model provides an automatic sample loading and unloading system that degree of automation is high, improve experimental efficiency, reduce equipment harm rate, be applicable to X ray grazing incidence experiment and conventional X ray scattering experiment simultaneously.
Drawings
Fig. 1 is a schematic diagram of the overall structure of an automatic sample loading and unloading system according to a preferred embodiment of the present invention;
fig. 2 is a schematic view of the structure of the sample stage and the sample tray in the automatic sample loading and unloading system shown in fig. 1.
Detailed Description
The present invention will be further described with reference to the following specific embodiments. It should be understood that the following examples are illustrative of the present invention only and are not intended to limit the scope of the present invention.
As shown in fig. 1, an automatic sample loading and unloading system 100 according to a preferred embodiment of the present invention is provided, the automatic sample loading and unloading system 100 includes: a system base 1; the manipulator 2, the sampling table 3 and the five-dimensional sample table 4 are respectively and independently arranged on the system base 1; a plurality of sample trays 5 placed on the sampling stage 3; and a sample tray mounting seat 6 arranged above the five-dimensional sample table 4.
Wherein, system base 1 passes through the fastener, for example four fixed clamps 11 are installed on the experiment platform of laboratory bench, prevent that the system from rocking.
The rear end of the manipulator 2 is installed on the system base 1 through a manipulator installation base 7, the front end of the manipulator 2 is connected with a double-finger pneumatic paw 8, grabbing work is achieved through loosening and grabbing, rigid positioning is strong, and independent modules are convenient to replace.
According to the preferred embodiment, referring to fig. 2, the sample tray 5 has a substantially elongated structure, the sample tray 5 has clamping grooves 51 at opposite ends in the length direction for the double-finger pneumatic gripper 8 to grasp, and a sample groove 52 for placing a sample to be measured is provided in the middle of the upper surface of the sample tray 5.
According to the preferred embodiment, the sampling platform 3 is horizontally arranged on the system base 1, the sampling platform 3 is provided with a plurality of tray placing grooves 31 which are recessed downwards from the upper surface and are used for placing the sample trays 5, and when the sample trays 5 are placed in the tray placing grooves 31, the edges of the sample grooves 52 of the sample trays 5 protrude out of the plane of the upper surface of the sampling platform 3.
It should be understood that the sample tray 5 may be arranged in a vertical direction, and the sample to be measured is fixed to the sample tray 5 by using a double-sided adhesive tape.
The five-dimensional sample stage 4 includes: the X-direction adjusting mechanism 41, the Z-direction adjusting mechanism 42, the grazing incidence angle Pitch adjusting mechanism 43, the Roll angle Roll adjusting mechanism 44 and the swing angle Yaw adjusting mechanism 45 are sequentially stacked from bottom to top in the vertical direction. Optionally, the adjustment mechanisms are connected in series by fasteners, such as screws.
It should be understood, however, that the X-direction adjustment mechanism 41, the Z-direction adjustment mechanism 42, the grazing incidence angle Pitch adjustment mechanism 43, the Roll angle Roll adjustment mechanism 44, and the Yaw angle Yaw adjustment mechanism 45 are not limited to such an arrangement in the present embodiment, and may be stacked in other sequences according to actual situations.
According to a preferred embodiment of the present invention, the five-dimensional sample stage used in the present invention is a japanese Kohzu electric stage, wherein the model adopted by the X-direction adjusting mechanism 41 is XA10A-R102, the model adopted by the Z-direction adjusting mechanism 42 is ZA10A-W201, the model adopted by the grazing incidence angle Pitch adjusting mechanism 43 and the Roll angle Roll adjusting mechanism 44 is SA10A-RL, and comprises a two-axis motor, and the model adopted by the swing angle Yaw adjusting mechanism 45 is RA 07A-W01.
The sample tray mounting seat 6 is provided with a groove 61 which is consistent with the elongated outline of the sample tray 5, the bottom surface of the groove 61 is provided with a through hole 62 which vertically penetrates through, and the through hole is connected with a compressed air device (not shown) through a pipeline 63, so that the sample tray 5 is fixed in an air suction mode.
According to the utility model discloses a preferred embodiment, because the height of five dimension sample platform 4 is not enough, five dimension sample platform still install on system base 1 through five dimension sample platform installation bases 9, the X ray of being convenient for can pass the sample that awaits measuring.
According to the utility model discloses a preferred embodiment, manipulator 2 is five joint manipulators, adopts novel alternating current motor, has compact structure, responds fast, the repeated positioning accuracy is high and the characteristics of high reliability.
According to the utility model discloses a preferred embodiment, five-dimensional sample platform 4 uses general machine controller and the driver control of laboratory bench, has characteristics such as network communication, adjustment are simple, the programming is swift, reliable and stable.
In the embodiment, the program of the manipulator is written by EPICS software based on the Linux operating system. EPICS adopts a distributed structure, equipment is shared in a network by writing a server-side program, and a client only needs to access PV (process variable) shared by the server side, so that distributed control over the equipment can be realized.
The drive under EPICS of the manipulator can control the grabbing path, state access, fault alarm and the like of the manipulator.
According to the utility model provides a such automatic system 100 of getting ready is an automatic system that mainly comprises manipulator subassembly, sample platform, five dimension sample platforms and tray mount pad for to a plurality of samples sweep the appearance of getting ready and trade the appearance work before incident X ray scattering experiment test, the whole system considers ease for use and mobility, and total weight is no longer than 20 kg.
According to the above preferred embodiment of the present invention, the automatic sample loading and unloading system 100 is provided, and the using method thereof is described as follows:
before the test begins, operating personnel installs entire system base 1 on laboratory bench experiment platform rather than integrated as an organic whole through four fixed clamps 11, and manipulator 2 snatchs a sample tray 5 of placing the sample that awaits measuring from sample platform 3 through two pneumatic hand claws 8, then places sample tray 5 on sample tray mount pad 6, opens the compressed air valve in the pipeline 63 this moment, and compressed air tightly holds sample tray 5, and manipulator 2 moves back to next door position.
The experimental shed is communicated with X rays, grazing incidence experiment automatic light cutting programs are called to realize automatic light focusing and light cutting, then different grazing incidence angles are changed to ensure that the X rays can penetrate through a sample to be detected, wherein the X direction adjusting mechanism 41 is used for adjusting X direction displacement, the Z direction adjusting mechanism 42 is used for adjusting Z direction displacement, the grazing incidence angle Pitch adjusting mechanism 43 is used for adjusting the grazing incidence angle Pitch of the sample to be detected, the rolling angle Roll adjusting mechanism 44 is used for adjusting the rolling angle Roll of the sample to be detected, and the swing angle Yaw adjusting mechanism 45 is used for adjusting the swing angle Yaw of the sample to be detected. The X-ray irradiates a sample to be measured with a certain grazing incidence angle through an X-ray transmitting end, and a grazing incidence scattering signal enters a large vacuum pipeline of the experiment station through an X-ray receiving end and is finally received by a detector at the tail end of the experiment station to obtain grazing incidence signal data of the specific sample.
The manipulator 2 obtains a starting signal, automatically puts the detected sample and the sample tray 5 back on the sampling platform 3, and the manipulator 2 returns to the original position to wait for the next detection command.
According to the utility model provides an automatic sample loading and unloading system 100, the sample tray that the manipulator can be equipped with the sample that awaits measuring automatically is in the sample loading and the work of changing a design between sample platform and sample tray mount pad, the grazing incidence experiment of a plurality of samples is accomplished in the automation, 20 minutes from prior art needs with the experiment preparation operating time control within 3 minutes, and can once only realize the automatic experiment of a plurality of samples, a large amount of experimental time has been practiced thrift, the experimental efficiency is greatly improved, the probability that causes the equipment to damage because of manual operation has also been reduced.
What has been described above is only the preferred embodiment of the present invention, not for limiting the scope of the present invention, but various changes can be made to the above-mentioned embodiment of the present invention. All the simple and equivalent changes and modifications made according to the claims and the content of the specification of the present invention fall within the scope of the claims of the present invention. The present invention is not described in detail in the conventional technical content.

Claims (10)

1. An automatic sample loading and unloading system, comprising: a system base; the manipulator, the sampling table and the five-dimensional sample table are respectively and independently arranged on the system base; wherein, five-dimensional sample platform includes: the X-direction adjusting mechanism, the Z-direction adjusting mechanism, the grazing incidence angle Pitch adjusting mechanism, the rolling angle Roll adjusting mechanism and the swing angle Yaw adjusting mechanism are vertically stacked; the automatic sample loading and unloading system further comprises:
a plurality of sample trays placed on the sampling table; and
the sample tray mounting seat is arranged above the five-dimensional sample table, a through hole which vertically penetrates through the sample tray mounting seat is formed in the sample tray mounting seat, and the through hole is connected with a compressed air device through a pipeline;
the manipulator can automatically perform sample loading and sample changing work of the sample tray provided with the sample to be detected between the sampling platform and the sample tray mounting seat, and X rays are irradiated onto the sample to be detected through automatic adjustment of the five-dimensional sample platform, so that detection of a plurality of samples is automatically completed.
2. The automated sample loading and unloading system of claim 1, wherein the back end of the manipulator is mounted on the system base by a manipulator mounting base, and the front end of the manipulator is connected with a double-finger pneumatic gripper.
3. The automated sample loading and unloading system of claim 1, wherein the five-dimensional sample stage is mounted on the system base by a five-dimensional sample stage mounting base.
4. The automatic sample loading and unloading system according to claim 1, wherein the X-direction adjusting mechanism, the Z-direction adjusting mechanism, the grazing incidence angle Pitch adjusting mechanism, the Roll angle Roll adjusting mechanism and the swing angle Yaw adjusting mechanism are sequentially connected from bottom to top through fasteners.
5. The automated sample loading and unloading system according to claim 1, wherein the sample tray has a substantially elongated structure, the sample tray has clamping grooves at opposite ends in a length direction for being grasped by a robot, and a sample groove for placing a sample to be measured is provided in a middle portion of an upper surface of the sample tray.
6. The automated sample loading and unloading system according to claim 5, wherein the sample stage is provided with a plurality of tray placement grooves recessed downward from the upper surface, and when the sample tray is placed in the tray placement grooves, the edges of the sample grooves of the sample tray protrude out of the plane of the upper surface of the sample stage.
7. The automatic sample loading and unloading system of claim 6, wherein the sample tray mounting seat is provided with a groove which is consistent with the elongated profile of the sample tray, and the through hole is formed in the bottom surface of the groove.
8. The automated sample loading and unloading system of claim 1, wherein the robot is a five axis articulated robot.
9. The automated sample loading and unloading system of claim 1, wherein the five-dimensional sample stage is controlled by a motor controller and drive.
10. The automated sample loading and unloading system of claim 1, wherein the system base is mounted on a laboratory platform of a laboratory station by fasteners.
CN201921112163.3U 2019-07-16 2019-07-16 An automatic loading and unloading system Active CN210487650U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921112163.3U CN210487650U (en) 2019-07-16 2019-07-16 An automatic loading and unloading system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921112163.3U CN210487650U (en) 2019-07-16 2019-07-16 An automatic loading and unloading system

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CN210487650U true CN210487650U (en) 2020-05-08

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110346388A (en) * 2019-07-16 2019-10-18 中国科学院上海应用物理研究所 A kind of automatic sample system up and down

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110346388A (en) * 2019-07-16 2019-10-18 中国科学院上海应用物理研究所 A kind of automatic sample system up and down

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