CN111707616A - Multi-axis motion system and detection method of angle-resolved scattering detection device - Google Patents

Abstract

The invention relates to a multi-axis motion system and a detection method of an angle-resolved scattering detection device. In order to overcome the problems existing in the prior art that the connecting and unloading structure is complex and the running speed of the motion control system is high. The sample holder is fixed on the Y-axis translation stage of the three-dimensional translation stage of the sample stage of the present invention; the upper part of the table surface of the manual rotation stage of the one-dimensional rotation stage is connected with the bottom of the X-axis translation stage; the outer end of the manual rotation stage The adjustable mounting base is fixedly connected with the support plate; a support table is fixed on the table top of the large rotating table of the detector module; the annular plane of the support table is sleeved on the column and clamped between the support plate and the large rotating table. One edge of the flat-shaped plane is integrated to extend the plate structure. When the support table and the large rotating table move at the same time, the size of the scattering angle and the scattering azimuth angle are changed; the end of the plate structure of the support table is vertically arranged with a support rod, and the support rod is equipped with a holder. , The bottom of the small turntable is fixed with the holder, the small table is connected with one end of the detector arm, and the other end of the detector arm is fixed with the detector.

Description

Multi-axis motion system and detection method of angle-resolved scattering detection device

technical field

The invention relates to the technical field of scatterometry, in particular to a multi-axis motion system and a detection method of an angle-resolved scatterometry detection device.

Background technique

With the development of optical technology, optical components, as an indispensable part of optical systems, have been widely used in various fields. In the era of rapid development of optical technology, the processing requirements of optical components are becoming more and more stringent. The evaluation of the quality of optical components mainly includes the surface shape error, waviness and roughness that describe the fluctuation of the surface topography, as well as random distribution on the macro surface, Discrete scratches, pits and other defects. The scattering problem caused by optical surface defects has attracted more and more attention. When the light beam passes through an optical element or optical system with surface defects, scattered light is generated, which may cause diffraction fringes, damage to the film, and deformation of defects, etc. This phenomenon affects the imaging quality, measurement accuracy and life of the optical system, etc., which makes the detection of defects on the optical surface increasingly important. Laser scattering measurement is not only used in the field of optics, but also has a wide range of applications in other fields. In the field of aerospace, the analysis of the characteristics of aerospace materials is an important task. The detection of the growth status of monocotyledonous plants in the agricultural field and the detection of rocks in the field of ground object telemetry are inseparable from the analysis of the surface information of the object. Do not turn on laser scattering measurement.

The multi-axis motion system of the angle-resolved scattering detection device includes the upper computer, the lower computer and hardware equipment, and the motion system part starts from the manual control system at the beginning to manually control the changes of various angles and distances. Participating errors make the measured results deviate, and the entire control process requires a lot of time and energy. It is particularly important to develop an automatic control BRDF measurement device. Nowadays, the emergence and development of motion control technology has become an important branch of automation technology, which covers automobiles, textile machinery, metallurgical machinery, household appliances, industrial robots and other fields. This also brings more opportunities for the development of the control technology of the light scattering measurement system.

Existing motion control system structures include motion control systems based on six-axis manipulator structures, motion control systems based on guide rail structures, and the like. The motion control system based on the six-axis manipulator structure is expensive and difficult to develop. The motion control system based on the guide rail structure is to clamp the detector on the circular guide rail, and drive the circular guide rail to rotate through the guide rail of the displacement stage, so as to realize the measurement of space scattered light. The mechanical structure of such a control system is complex, and the positioning accuracy of the circular rail is not high . Therefore, the motion control system has the problem of complex mechanical structure, and it is necessary to continuously improve the running speed of the motion control system.

SUMMARY OF THE INVENTION

The present invention provides a multi-axis motion system and a detection method of an angle-resolved scattering detection device, so as to overcome the problems of the prior art that the connecting and unloading structure is complex and the running speed of the motion control system is high.

In order to achieve the purpose of the present invention, the technical solution provided by the present invention is: a multi-axis motion system of an angle-resolved scattering detection device, comprising two parts: a sample stage and a detector module:

The sample stage is composed of a three-dimensional translation stage and a one-dimensional rotation stage. The three-dimensional translation stage includes a Z-axis translation stage, a Y-axis translation stage and an X-axis translation stage. A sample holder is fixed on the Y-axis translation stage; The rotary table includes a support plate, a manual rotary table, an adjustable mounting seat and a sample holder. The upper part of the table top of the manual rotary table is connected with the bottom of the X-axis translation stage; even;

The detector module consists of a large rotary table, a small rotary table, a detector arm, a detector, a small rotary table motor, a second photoelectric encoder, a large rotary table motor, a first photoelectric encoder, a support rod, a holder, A support table, a computer, a controller and a column are composed; a support table is fixed on the table top of the large rotary table; the annular plane of the support table is sleeved on the column and clamped between the support plate and the large rotary table. One edge of the plane is integrated to extend the plate structure. When the support table and the large rotating table move at the same time, the size of the scattering angle and the scattering azimuth angle are changed; The bottom of the small turntable is fixed on the holder, one end of the detector arm is connected to the table top of the small turntable, and the detector is fixed on the other end of the detector arm.

The detection method of the multi-axis motion system of the angle-resolved scattering detection device comprises the following steps:

Step 1: Place the sample to be tested on the sample holder, move the sample holder to move the sample holder by moving the X-axis translation stage, the Y-axis translation stage, and the Z-axis translation stage, and move the sample to be tested to the predetermined test point position, The sample to be tested is located at the intersection of the central axis of the large turntable and the small turntable, at the point O ₂ in the center of the sphere in the scanning trajectory diagram;

Step 2: Turn on the power of the controller and the computer, and set the relevant parameters such as the large turntable, the small turntable, and the scanning plan path in the computer program; the detector scans according to the preset scanning plan path: driven by the small turntable The detector scans at an equal rotation angle θ ₂ from point _{A 2} just above the center of the sample to be tested to point B ₂ just below the center of the sample to be tested. The set collection point, where the scattering signal is collected;

Step 3: When the position of the detector reaches point B ₂ directly below the sample to be tested, the large turntable will rotate by an angle of θ ₁ , and the detector will scan from point B ₂ just below the sample to be tested to point A ₂ directly above, The scanned trajectory will be the meridian, and then repeat the above scanning process in sequence until the detector scans the range from the left B1 point of the sample to the right A1 point;

Step 4: The bidirectional reflection distribution function can be obtained by combining the scattering signal value collected by the detector, the receiving area scattering angle, azimuth angle and other parameters of the detector and the calculated solid angle, and the information on the surface of the object can also be obtained.

Compared with the prior art, the advantages of the present invention are:

1. The sample stage and the detector module are separated, and they do not affect each other during the detection process: the sample stage and the detector scanning module are independent structures, which are fixed on the platform respectively. The sample stage is composed of a three-dimensional translation stage and a one-dimensional rotation stage. The adjustment of the sample position is realized; the detector scanning module is a two-dimensional rotation mechanism, and the rotation center is a preset test point, which realizes the spherical motion of the detector. In the process of sample clamping and position adjustment, it has no effect on the detector module; during the scanning movement of the detector module, it does not affect the position and posture of the sample.

2. Large measurement range: the large rotary table can achieve 360 rotations, the small rotary table can achieve 360 rotations in more than half a sphere space, and the detection range of detector scattering distribution exceeds the hemisphere space.

3. Small occlusion area: In the angle-resolved scattering distribution detection, the cantilever structure of the detector can reduce the occlusion area of the detector scanning mechanism to the incident light and reduce the loss of effective measurement data.

4. It is easy to realize the scanning detection of the entire optical surface: in the process of angle-resolved scattering distribution detection, the sample does not need a complex adjustment mechanism. The test point is moved to the preset test point position, so as to obtain the scattering distribution information of the entire surface of the sample to be tested.

5. Change the scanning radius to achieve scattering distribution detection with different resolutions: By changing the length of the detection arm, the scanning radius of the detector can be changed to achieve the acquisition of data with different resolutions under the same detector aperture. When the scanning radius is small, the detection time is short and the resolution is low; when the scanning radius is large, the detection time is long and the resolution is high.

Description of drawings

Fig. 1 is the structural representation of the system of the present invention;

Fig. 2 is the partial structure side view of the system;

Fig. 3 is along the meridian scanning trajectory diagram;

Fig. 4 is a software control flow chart;

FIG. 5 is a schematic view of the structure of the support table.

The reference numerals are explained as follows: 1-Z-axis translation stage, 2-Y-axis translation stage, 3-X-axis translation stage, 4-Support plate, 5-Manual rotation stage, 6-Adjustable mounting base, 7-Large rotation stage , 8-small turntable, 9-detector arm, 10-detector, 11-small turntable motor, 12-sample holder, 13-second photoelectric encoder, 14-large turntable motor, 15-th A photoelectric encoder, 16-support rod, 17-holder, 18-support table, 19-computer, 20-controller, 21-upright column.

Detailed ways

The present invention will be described in detail below with reference to the accompanying drawings and embodiments.

Referring to Figure 1 and Figure 2, a multi-axis motion system of an angle-resolved scatter detection device includes two parts: a sample stage and a detector module:

The sample stage is composed of a three-dimensional translation stage and a one-dimensional rotation stage. The three-dimensional translation stage includes a Z-axis translation stage 1, a Y-axis translation stage 2 and an X-axis translation stage 3, and a sample clamp is fixed on the Y-axis translation stage 2. The one-dimensional rotary table includes a support plate 4, a manual rotary table 5, an adjustable mount 6 and a sample holder 12, and the upper part of the table top of the manual rotary table 5 is connected with the bottom of the X-axis translation stage 3; the manual rotary table 5 The adjustable mounting seat 6 at the outer end of the table is fixedly connected with the support plate 4 .

The sample stage composed of the three-dimensional translation stage and the one-dimensional rotary stage has three-dimensional motion function; the bottom of the Y-axis translation stage 2 is fixed on the table of the Z-axis translation stage 1 through the connecting plate, and the Y-axis translation stage 2 can be moved on the Z-axis translation stage 1. Move up and down; the L-shaped connecting plate connects the side end of the Y-axis translation stage 2 with the X-axis translation stage 3; the manual rotation stage 5 is connected with the bottom of the X-axis translation stage 3; the bottom of the manual rotation stage 5 is provided with a concentric support plate 4 , the manual rotary table 5 is connected with the support plate 4 through three adjustable mounting seats 6 at the outer end of the table; the sample holder 12 is fixed on the table surface of the Y-axis translation table 2, and the sample holder 12 is used to hold the sample to be tested.

The detector module consists of a large turntable 7, a small turntable 8, a detector arm 9, a detector 10, a small turntable motor 11, a second photoelectric encoder 13, a large turntable motor 14, and a first photoelectric encoder 15. , a support rod 16, a holder 17, a support table 18, a computer 19, a controller 20 and a column 21; a support table 18 is fixed on the table top of the large rotary table 7; The upright column 21 is clamped between the support plate 4 and the large rotating table 7, and one edge of the annular plane is integrally extended to form a flat plate structure. When the support table 18 and the large rotating table 7 move at the same time, the size of the scattering angle and the scattering azimuth angle are changed. The end of the plate structure of the support table 18 is vertically provided with a support rod 16, the support rod is equipped with a holder 17, the holder 17 is fixedly connected to the bottom of the small turntable 8, and the surface of the small turntable 8 is connected to the detector arm. One end of the detector arm 9 and the other end of the detector arm 9 are fixed to the detector 10 .

The holder 17 has standard mounting holes, and the table surface of the small turntable 8 is also provided with mounting holes.

2 and 3, the detection method of the multi-axis motion system of the above-mentioned angle-resolved scattering detection device includes the following steps:

Step 1: Place the sample to be tested on the sample holder 12, move the sample holder 12 by moving the X-axis translation stage 3, the Y-axis translation stage 2, and the Z-axis translation stage 1, and move the sample to be tested to a predetermined position. The position of the test point, the sample to be tested is located at the intersection of the central axes of the large turntable 7 and the small turntable 8, at the point O ₂ at the center of the sphere in the scanning trajectory diagram.

Step 2: Turn on the power of the controller 20 and the computer 19, and set relevant parameters such as the large turntable 7, the small turntable 8, and the scanning planning path in the computer program; the detector 10 scans according to the preset scanning planning path: The detector 10 is driven by the small turntable ₈ to scan at an equal rotation angle θ2 from the point A ₂ just above the center of the sample to be tested to the point B ₂ just below the center of the sample. The position after the angle of θ ₂ is the preset collection point, and the scattering signal is collected at this point;

Step 3: When the position of the detector reaches point B ₂ directly below the sample to be tested, the large turntable 7 will rotate by an angle of θ ₁ , and the detector 10 will move from point B ₂ directly below the sample to be tested to point A ₂ directly above Scan, the track after scanning will be longitude 2, and then repeat the above scanning process in turn, until the detector scans the range included from point B1 on the left side of the sample to be tested to point A1 on the right side.

Step 4: The bidirectional reflection distribution function can be obtained by combining the scattering signal value collected by the detector 10, the receiving area scattering angle, azimuth angle and other parameters of the detector 10 and the calculated solid angle, and the information on the surface of the object can also be obtained. .

The bidirectional reflection distribution function is the ratio of the reflected brightness in a certain direction to the incident illuminance. By measuring the light intensity of a certain incident angle incident on the sample to be tested and the scattered light intensity of the sample surface in a certain direction, the bidirectional reflection of the sample can be obtained. distribution function, and then deduce the sample surface information by analyzing the value of the bidirectional reflection distribution function at different angles.

In order to ensure the coordination of actions of various structures, the end of the large rotary table motor 14 is connected to the first photoelectric encoder 15 through a coupling, and the end of the small rotary table motor 11 is connected to the second photoelectric encoder through the coupling. 13 is connected; the first photoelectric encoder 15 and the second photoelectric encoder 13 are connected to the computer 19 through the RS485 serial port line, and the large turntable motor 14 and the small turntable motor 11 are connected to the controller 20 through the RS232 serial port line, and the controller 20 Connect to computer 19.

Claims (2)

1. The multi-axis motion system of the angle-resolved scattering detection device is characterized in that: comprising two parts of a sample stage and a detector module: The sample stage is composed of a three-dimensional translation stage and a one-dimensional rotation stage. The three-dimensional translation stage includes a Z-axis translation stage (1), a Y-axis translation stage (2), an X-axis translation stage (3), and a Y-axis translation stage (2). A sample holder (12) is fixed on the stage; the one-dimensional rotary stage includes a support plate (4), a manual rotary stage (5), an adjustable mounting seat (6) and a sample holder (12), and the manual rotary stage The upper part of the table top of (5) is connected with the bottom of the X-axis translation table (3); the adjustable mounting seat (6) of the outer end of the table top of the manual rotary table (5) is fixedly connected with the support plate (4); The detector module consists of a large rotary table (7), a small rotary table (8), a detector arm (9), a detector (10), a small rotary table motor (11), a second photoelectric encoder (12), A large rotary table motor (13), a first photoelectric encoder (15), a support rod (16), a gripper (17), a support table (18), a computer (19), a controller (20) and a column (21) ); a support table (18) is fixed on the table top of the large rotary table (7); the annular plane of the support table (18) is sleeved on the column (21) and clamped on the support plate (4) and the large Between the rotating tables (7), one edge of the annular plane integrally extends out of a flat plate structure, and the size of the scattering angle and the scattering azimuth angle is changed when the supporting table (18) and the large rotating table (7) move at the same time; the supporting table (18) The end of the flat plate structure is vertically provided with a support rod (16), a holder (17) is installed on the support rod, and the bottom of the small turntable (8) is fixedly connected to the holder (17). One end of the detector arm (9) is connected to the table surface, and the detector (10) is fixed at the other end of the detector arm (9). 2. The detection method of the multi-axis motion system of the angle-resolved scattering detection device as claimed in claim 1, characterized in that: comprising the following steps: Step 1: Place the sample to be tested on the sample holder (12), and drive the sample holder (12) by moving the X-axis translation stage (3), the Y-axis translation stage (2), and the Z-axis translation stage (1). ) movement, the sample to be tested is moved to the predetermined test point position, the sample to be tested is located at the intersection of the central axis of the large turntable (7) and the small turntable (8), and the center of the sphere in the scanning trajectory diagram O ₂ point; Step 2: Turn on the power of the controller (20) and the computer (19), and set the relevant parameters such as the large turntable (7), the small turntable (8), and the scanning planning path in the computer program; Scanning with a preset scanning planning path: The small rotating stage (8) drives the detector ( ₁₀ ) to scan at an equal rotation angle θ2 from point A ₂ just above the center of the sample to be tested to point B ₂ just below the center of the sample. The rear track is the meridian (1), and the position after each rotation of the small turntable (8) by an angle of θ ₂ is a preset collection point, and the scattering signal is collected at this point; Step 3: When the position of the detector reaches point B ₂ directly below the sample to be tested, the large turntable (7) will rotate by an angle of θ ₁ , and the detector (10) will move from point B 2 directly below the sample to be tested to the point B ₂ directly below the sample to be tested. The upper A ₂ point is scanned, and the scanned trajectory will be the meridian (2), and then the above scanning process is repeated in sequence until the detector scans the range from the left B1 point of the sample to be tested to the right A1 point; Step 4: The bidirectional reflection distribution function can be obtained by combining the scattering signal value collected by the detector (10), the receiving area scattering angle, azimuth angle and other parameters of the detector (10) and the calculated solid angle, and then the information on the surface of the object.

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