CN110346388A - A kind of automatic sample system up and down - Google Patents

Abstract

The invention provides an automatic sample loading and unloading system, comprising: a system base; a manipulator, a sampling table and a five-dimensional sample table independently installed on the system base; the five-dimensional sample table includes: an X-direction adjustment stacked along the vertical direction Mechanism, Z direction adjustment mechanism, grazing incidence angle Pitch adjustment mechanism, roll angle Roll adjustment mechanism and swing angle Yaw adjustment mechanism; the system also includes: a number of sample trays placed on the sampling table; A vertical through hole, the through hole is connected to the compressed air device through the pipeline; wherein, the manipulator can automatically carry out the sample loading and changing work of the sample tray between the sampling platform and the sample tray mounting seat, through the five-dimensional sample platform Automatically adjusts to irradiate X-rays on the sample to be tested, and automatically completes the detection of multiple samples. According to the present invention, an automatic sample loading and unloading system with high degree of automation, improved experiment efficiency and reduced equipment damage rate is provided.

Description

An automatic loading and unloading system

technical field

The invention relates to the field of automatic sample loading devices, in particular to an automatic sample loading and unloading system.

Background technique

The grazing incidence X-ray experiment technique is a technique for testing thin films. During the test, X-rays are incident on the surface of the sample at a small angle, which can be used to test the density, thickness, roughness, crystallite size and grain orientation of the film. The grazing incidence experiment at the BL16B1 experimental station currently adopts the method of manually loading and changing samples, and conducting experiments one sample at a time, but this method requires frequent entry and exit of the experimental shed, and the experimental preparation takes about 20 minutes, and the experimental time is only A few seconds, the experiment efficiency is not high.

Contents of the invention

The purpose of the present invention is to provide an automatic sample loading and unloading system, so as to solve the problem of low work efficiency caused by manual sample loading and sample changing in the prior art in grazing incidence X-ray experiments.

In order to solve the above technical problems, the present invention adopts the following technical solutions:

An automatic loading and unloading system is provided, comprising: a system base; a manipulator, a sampling table and a five-dimensional sample table independently installed on the system base; wherein, the five-dimensional sample table includes: vertically stacked X-direction adjustment mechanism, Z-direction adjustment mechanism, grazing incidence angle Pitch adjustment mechanism, roll angle Roll adjustment mechanism and swing angle Yaw adjustment mechanism; the automatic sample loading and unloading system also includes: several sample trays placed on the sampling platform; and installation On the sample tray mounting seat above the five-dimensional sample stage, there is a vertical through hole on the sample tray mounting seat, and the through hole is connected to a compressed air device through a pipeline; wherein, the manipulator can automatically Carry out the sample loading and sample changing work of the sample tray with the sample to be tested between the sampling table and the sample tray mounting seat, through the automatic adjustment of the five-dimensional sample table, X-rays are irradiated on the sample to be tested, and multiple testing of samples.

The rear end of the manipulator is installed on the system base through the manipulator mounting base, and the front end of the manipulator is connected with a two-finger pneumatic gripper.

Preferably, the five-dimensional sample stage is installed on the system base through a five-dimensional sample stage mounting base.

Preferably, the X-direction adjustment mechanism, the Z-direction adjustment mechanism, the grazing incidence angle Pitch adjustment mechanism, the roll angle Roll adjustment mechanism and the swing angle Yaw adjustment mechanism are sequentially connected and arranged through fasteners from bottom to top.

Preferably, the sample tray has a substantially elongated structure, the opposite ends of the sample tray in the length direction have slots for the manipulator to grab, and the middle part of the upper surface of the sample tray has slots for placing the sample to be tested. The sample holder for the sample.

Preferably, the sampling table is provided with a plurality of tray placement slots recessed from the upper surface, when the sample tray is placed in the tray placement slots, the edge of the sample slot of the sample tray protrudes from the sampling tray. The plane on which the upper surface of the platform lies.

Preferably, a groove consistent with the elongated contour of the sample tray is opened on the sample tray mounting base, and the through hole is opened on the bottom surface of the groove.

Preferably, the manipulator is a five-axis articulated manipulator.

The five-dimensional sample stage is controlled by a motor controller and a driver.

The system base is installed on the experimental platform of the experimental station through fasteners.

The automatic sample loading and unloading system provided by the present invention is a device that can replace manual and automatic sample loading and sample changing functions, and is mainly used in the case of a large number of samples and highly repeatable experiments. The desktop manipulator loading and unloading system adopts manipulator programming, motor drive and compressed air drive. The manipulator has the advantages of accurate positioning, simple structure, high reliability, high efficiency, and easy maintenance. The manipulator fixture can be replaced, and the replacement is simple. The manipulator control software adopts the man-machine operation software integrated in the synchrotron radiation experiment station, which is user-friendly. The tabletop manipulator loading and unloading equipment reduces the work intensity of the experimenters and improves the efficiency of experiments. The table-top manipulator sample loading and unloading system in the present invention can be universally used in the automatic sample loading and unloading systems of various synchrotron radiation experiment stations, and serves as a technical reserve for future experiment station automation.

According to the automatic sample loading and unloading system provided by the present invention, the manipulator can automatically load and change the sample tray containing the sample to be tested between the sampling table and the sample tray mounting seat, and automatically complete the grazing incidence experiment of multiple samples. The experimental preparation time is controlled from 20 minutes required by the existing technology to less than 3 minutes, and the automatic grazing incidence experiment of multiple samples can be realized at one time, which saves a lot of experimental time, greatly improves the experimental efficiency, and reduces the cost of The probability of equipment damage caused by manual operation. The automatic sample loading and unloading system provided by the invention can not only realize X-ray grazing incidence experiments on samples, but also can be used in conventional X-ray scattering experiments. It is the first domestic automatic sample loading and Sample change system.

In a word, the present invention provides an automatic sample loading and unloading system that is highly automated, improves experimental efficiency, reduces equipment damage rate, and is applicable to both X-ray grazing incidence experiments and conventional X-ray scattering experiments.

Description of drawings

Fig. 1 is the overall structure schematic diagram of the automatic sample loading and unloading system according to a preferred embodiment of the present invention;

FIG. 2 is a schematic structural view of a sampling platform and a sample tray in the automatic loading and unloading system shown in FIG. 1 .

Detailed ways

The present invention will be further described below in conjunction with specific embodiments. It should be understood that the following examples are only used to illustrate the present invention but not to limit the scope of the present invention.

As shown in Figure 1, it is an automatic loading and unloading system 100 provided according to a preferred embodiment of the present invention, the automatic loading and unloading system 100 includes: a system base 1; a manipulator 2 and a sampling table 3 independently installed on the system base 1 And the five-dimensional sample stage 4; several sample trays 5 placed on the sampling stage 3; the sample tray mounting seat 6 installed above the five-dimensional sample stage 4.

Wherein, the system base 1 is installed on the experimental platform of the experimental station through fasteners, such as four fixing clips 11, to prevent the system from shaking.

The rear end of the manipulator 2 is installed on the system base 1 through the manipulator mounting base 7. The front end of the manipulator 2 is connected to the two-finger pneumatic gripper 8, and the grasping work is realized by loosening and grasping. The rigid positioning is strong, and the independent module is easy to replace.

According to this preferred embodiment, referring to Fig. 2, the sample tray 5 has a substantially elongated structure, and the opposite ends of the sample tray 5 in the length direction have draw-in grooves 51 for grabbing by the two-finger pneumatic gripper 8, the sample tray 5 The middle part of the upper surface has a sample groove 52 for placing the sample to be tested.

According to this preferred embodiment, the sampling platform 3 is horizontally arranged on the system base 1, and the sampling platform 3 is provided with a plurality of tray placement grooves 31 sunken downward from the upper surface for placing the sample tray 5. When the sample tray 5 is placed on the When the tray is placed in the slot 31 , the edge of the sample slot 52 of the sample tray 5 protrudes beyond the plane where the upper surface of the sampling platform 3 is located.

However, it should be understood that the sample tray 5 can also be arranged vertically, and the sample to be tested and the sample tray 5 are fixed with double-sided adhesive tape.

The five-dimensional sample stage 4 includes: an X-direction adjustment structure 41, a Z-direction adjustment mechanism 42, a grazing incidence angle Pitch adjustment mechanism 43, a roll angle Roll adjustment mechanism 44, and a swing angle Yaw adjustment mechanism stacked vertically from bottom to top. Agency45. Optionally, the adjustment mechanisms are sequentially connected by fasteners, such as screws.

However, it should be understood that the above-mentioned X-direction adjustment mechanism 41, Z-direction adjustment mechanism 42, grazing incidence angle Pitch adjustment mechanism 43, roll angle Roll adjustment mechanism 44 and swing angle Yaw adjustment mechanism 45 are not limited to the one in this embodiment. According to the actual situation, they can also be stacked in other orders.

According to a preferred embodiment of the present invention, the five-dimensional sample stage used in the present invention adopts a Japanese Kohzu electric stage, wherein the model adopted by the X-direction adjustment structure 41 is XA10A-R102, and the model adopted by the Z-direction adjustment mechanism 42 is ZA10A- W201, the grazing incidence angle Pitch adjustment mechanism 43 and the roll angle Roll adjustment mechanism 44 jointly adopt the model SA10A-RL, including two-axis motors, and the swing angle Yaw adjustment mechanism 45 adopts the model RA07A-W01.

A groove 61 consistent with the elongated profile of the sample tray 5 is provided on the sample tray mounting base 6, and a through hole 62 vertically penetrating is provided on the bottom surface of the groove 61, and the through hole passes through a pipeline 63 and compressed air A device (not shown in the figure) is connected, so that the fixation of the sample tray 5 is realized by means of air suction.

According to a preferred embodiment of the present invention, since the height of the five-dimensional sample stage 4 is not enough, the five-dimensional sample stage is also installed on the system base 1 through the five-dimensional sample stage mounting base 9, so that X-rays can pass through the sample to be tested.

According to a preferred embodiment of the present invention, the manipulator 2 is a five-axis articulated manipulator, which adopts a new type of AC motor and has the characteristics of compact structure, fast response, high repeat positioning accuracy and high reliability.

According to a preferred embodiment of the present invention, the five-dimensional sample stage 4 is controlled by the common motor controller and driver of the experimental station, and has the characteristics of network communication, simple adjustment, quick programming, stability and reliability.

In this embodiment, the program of the manipulator is written based on the EPICS software of the Linux operating system. EPICS adopts a distributed structure. By writing the server-side program, the device is shared in the network, and the client only needs to access the PV (process variable) shared by the server-side to realize the distributed control of the device.

The drive under the EPICS of the manipulator can control the grasping path, status access and fault alarm of the manipulator.

Such an automatic sample loading and unloading system 100 provided according to the present invention is an automatic system mainly composed of a manipulator assembly, a sampling table, a five-dimensional sample table, and a tray mounting seat, and is used for grazing incidence X-ray scattering on multiple samples. For sample loading and sample change before the experimental test, the whole system considers ease of use and mobility, and the overall weight does not exceed 20kg.

According to the automatic sample loading and unloading system 100 provided by the above-mentioned preferred embodiment of the present invention, its usage method is described as follows:

Before the test starts, the operator installs the entire system base 1 on the experimental platform of the experimental station through four fixed clamps 11 and integrates it with it. The manipulator 2 grabs one from the sampling platform 3 through the two-finger pneumatic gripper 8 and places it to be tested. The sample tray 5 of the sample, and then the sample tray 5 is placed on the sample tray mounting seat 6, at this time, the compressed air valve in the pipeline 63 is opened, the compressed air tightly sucks the sample tray 5, and the manipulator 2 retreats to the side position.

X-rays are passed through the experimental shed, and the automatic light cutting program for grazing incidence experiments is called to realize automatic light alignment and light cutting, and then different grazing incidence angles are changed to ensure that X-rays can pass through the sample to be tested, wherein the X-direction adjustment structure 41 is used to adjust X-direction displacement, Z-direction adjustment mechanism 42 is used to adjust Z-direction displacement, grazing incidence angle Pitch adjustment mechanism 43 is used to adjust the grazing incidence angle Pitch of the sample to be measured, and roll angle Roll adjustment mechanism 44 is used to adjust the roll angle of the sample to be measured Roll, the swing angle Yaw adjustment mechanism 45 is used to adjust the swing angle Yaw of the sample to be tested. X-rays irradiate the sample to be tested with a certain grazing incidence angle through the X-ray emitting end, and the grazing incidence scattering signal enters the large vacuum pipeline of the experimental station through the X-ray receiving end, and is finally received by the detector at the end of the experimental station to obtain a specific sample grazing incidence signal data.

The manipulator 2 receives the start signal, automatically puts the tested sample and the sample tray 5 back on the sampling platform 3, and the manipulator 2 returns to the original position, waiting for the next test order.

According to the automatic sample loading and unloading system 100 provided by the present invention, the manipulator can automatically load and change the sample tray containing the sample to be tested between the sampling platform and the sample tray mounting seat, and automatically complete the grazing incidence experiment of multiple samples , the experimental preparation time is controlled from 20 minutes required by the existing technology to less than 3 minutes, and the automatic experiment of multiple samples can be realized at one time, which saves a lot of experimental time, greatly improves the experimental efficiency, and reduces the labor cost. Probability of operation causing damage to equipment.

What is described above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Various changes can also be made to the above embodiments of the present invention. All simple and equivalent changes and modifications made according to the claims and description of the application for the present invention fall within the protection scope of the claims of the patent of the present invention. What is not described in detail in the present invention is conventional technical contents.

Claims (10)

1. An automatic sample loading and unloading system, characterized in that it comprises: a system base; a manipulator, a sampling table and a five-dimensional sample table independently installed on the system base; wherein, the five-dimensional sample table includes: The vertically stacked X-direction adjustment mechanism, Z-direction adjustment mechanism, grazing incidence angle Pitch adjustment mechanism, roll angle Roll adjustment mechanism and swing angle Yaw adjustment mechanism; the automatic loading and unloading system also includes: a number of sample trays placed on the sampling table; and Installed on the sample tray mounting base above the five-dimensional sample stage, the sample tray mounting base is provided with a vertical through hole, and the through hole is connected to a compressed air device through a pipeline; Wherein, the manipulator can automatically load and change the sample tray with the sample to be tested between the sampling platform and the sample tray mounting seat, and the X-rays can be irradiated to the sample tray through the automatic adjustment of the five-dimensional sample platform. On the test sample, the detection of multiple samples is automatically completed. 2. The automatic sample loading and unloading system according to claim 1, wherein the rear end of the manipulator is installed on the system base through the manipulator mounting base, and the front end of the manipulator is connected with a two-finger pneumatic gripper. 3. The automatic sample loading and unloading system according to claim 1, wherein the five-dimensional sample stage is installed on the system base through a five-dimensional sample stage mounting base. 4. The automatic sample loading and unloading system according to claim 1, characterized in that, the X-direction adjustment mechanism, the Z-direction adjustment mechanism, the grazing incidence angle Pitch adjustment mechanism, the rolling angle Roll adjustment mechanism and the swing angle Yaw adjustment mechanism The firmware connects the settings sequentially from bottom to top. 5. The automatic sample loading and unloading system according to claim 1, wherein the sample tray has a roughly elongated structure, and the opposite ends of the sample tray in the length direction have draw-in slots for manipulators to grab, so The middle part of the upper surface of the sample tray has a sample groove for placing the sample to be tested. 6. The automatic sample loading and unloading system according to claim 5, wherein the sampling table is provided with a plurality of tray placement grooves sunken downward from the upper surface, when the sample tray is placed in the tray placement groove , the edge of the sample groove of the sample tray protrudes beyond the plane where the upper surface of the sampling platform is located. 7. The automatic sample loading and unloading system according to claim 6, wherein a groove consistent with the elongated profile of the sample tray is provided on the sample tray mounting base, and the through hole is provided in the bottom of the groove. 8. The automatic sample loading and unloading system according to claim 1, wherein the manipulator is a five-axis articulated manipulator. 9. The automatic sample loading and unloading system according to claim 1, wherein the five-dimensional sample stage is controlled by a motor controller and a driver. 10. The automatic sample loading and unloading system according to claim 1, wherein the system base is installed on the experimental platform of the experimental station through fasteners.