CN1398428A - Tilting fluid cutout device - Google Patents
Tilting fluid cutout device Download PDFInfo
- Publication number
- CN1398428A CN1398428A CN 01804684 CN01804684A CN1398428A CN 1398428 A CN1398428 A CN 1398428A CN 01804684 CN01804684 CN 01804684 CN 01804684 A CN01804684 A CN 01804684A CN 1398428 A CN1398428 A CN 1398428A
- Authority
- CN
- China
- Prior art keywords
- substrate
- fluid
- liquid
- tilting
- treatment fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
A tilting fluid cutout device capable of eliminating treating fluid from a substrate by the inclination of the substrate (10), whereby the treatment fluid can be eliminated efficiently from the surface of the substrate without increasing the inclination angle of the substrate (10) even when the viscosity of the treatment fluid is high. The device comprises a fluid cutout promoting means (43) installed above one side of a fluid cutout device body (42) for tilting the substrate (10) on a feed roller (41) to the side of the feeding direction, the fluid cutout promoting means (43) further comprising a large number of contact members (43a) disposed at specified intervals in the feeding direction of the substrate (10), wherein, when the substrate (10) is tilted sideways to a specified angle, the contact members (43a) are brought into contact with the treatment fluid accumulated at the side edge part of the substrate (10) on the downstream side in the tilting direction to remove the treatment fluid from the side edge part.
Description
Technical field
The present invention relates to the middle transfer type substrate treating devices that use such as manufacturing of liquid crystal indicator, particularly in this substrate board treatment, tilt, get rid of the tilting fluid cutout device of treatment fluid from the surface of substrate by making substrate with glass substrate.
Background technology
The glass substrate that uses in the liquid crystal indicator is by chemical treatment is made to implementing that burn into is peeled off repeatedly as the surface of the glass substrate of base material etc.This processing unit roughly is divided into dry type and wet type; Wet type is divided into the formula of making a gesture of measuring and vane type again; Vane type is divided into rotary again and based on the conveying type of roller transmission etc.
In these substrate board treatments, the device of conveying type has substrate is transmitted the basic structure of simultaneously surface of this substrate being supplied with treatment fluid to horizontal direction, because the efficient height, so be used to corrosion treatment and lift-off processing.
The transfer type substrate treating device that uses in the corrosion treatment is jet etching liquid from a plurality of injection nozzles of rectangular configuration above the substrate conveyer line, passes through in this corrosive liquid by making substrate, supplies with corrosive liquid to the whole surface of substrate.Handle by this spray, except the part that has applied mask material, the surface of substrate is corroded selectively.
After the corrosion, by coming the cleaning base plate surface from the rinse water of identical nozzle ejection, but with the pollution that suppresses the stopping rapidly of corrosion treatment, the initial stage rinse water in cleaning, the discarded amount that reduces the initial stage rinse water etc. is purpose, before cleaning the residual corrosive liquid of substrate surface is carried out physical removal.As one of liquid removing device, substrate is temporarily stopped transmitting midway, tilt to the side, get rid of the tilting device of corrosive liquid from the surface to the side.The substrate board treatment that lift-off processing is used carries out soup too and handles, removes liquid, washing.
But with in the glass substrate, in the maximization of substrate, the height of circuit becomes more meticulous and is also going deep at liquid crystal indicator.As the wiring material that on this substrate, uses, used Cr in the past mostly, but, turning to and using little Al or the Al/Mo of resistivity value along with present height becomes more meticulous.Therefore, even the transfer type substrate treating device of corrosion usefulness is also brought into use the Al corrosive liquid, but, find to produce following problem along with using this corrosive liquid.
Al corrosive liquid and Cr corrosive liquid be the specific viscosity height mutually.Therefore, when corrosion hypsokinesis inclined liquid removing device tilts substrate, remove fluidity and worsen.That is, because the surface tension of Al corrosive liquid is big, so even the inclination by substrate, lip-deep corrosive liquid also accumulates in side edge part in a large number, and when making substrate turn back to level, this corrosive liquid enlarges once more from the teeth outwards.
The angle of inclination that increases substrate is the direction that addresses this problem, but in the present situation that substrate maximizes, because the interference of equipment room, so be difficult to increase the angle of inclination of substrate, and, because of increasing the angle of inclination, on tilting, it needs the time, it is elongated to be used in the substrate dwell time of removing liquid, so there is the restriction at the angle of inclination that can not increase substrate.Because the deterioration that removes fluidity under the Al corrosive liquid situation is unavoidably used in this restriction, its result, generation can not be carried out from the rapidly liquid displacement of corrosive liquid to rinse water, or increases the problem of the discarded amount of initial stage rinse water.
Summary of the invention
The object of the present invention is to provide a kind of tilting fluid cutout device,, also do not increase the angle of inclination of substrate, can get rid of treatment fluid expeditiously from its surface even under the high situation of treatment fluid viscosity.
To achieve these goals, tilting fluid cutout device of the present invention comprises: the liquid removing device main body, be configured in and substrate is supplied with treatment fluid to the surface of this substrate handle in the processing substrate conveyer line of conveying type of this substrate surface when horizontal direction transmits, by substrate is tilted, treatment fluid is got rid of from substrate; And fluid cutout promoting means, be configured in the incline direction downstream of substrate, by on the whole length of the side edge part of substrate, contacting or approaching a plurality of liquid contacting part spares with predetermined distance, promote to get rid of treatment fluid, so that contact with the treatment fluid that is tilted on the substrate that flow to be detained in the incline direction downstream along with substrate from substrate.
In tilting fluid cutout device of the present invention, the treatment fluid that the inclination by substrate will accumulate in side edge part is sent on the whole length of this side edge part with predetermined distance contact or approaching a plurality of liquid contacting part spares, gets rid of expeditiously from this side edge part.
From the discharge opeing aspect, the treatment fluid that accumulates on the side edge part of described liquid contacting part spare and the substrate of inclination carry out that line contacts or the some contact better, specifically, the needle-like member of approximate vertical preferably.In addition,, cutting side edge part and the danger that produces foreign matter are arranged then if liquid contacting part spare contacts with the side edge part of the substrate of inclination, thus with the side edge part of the substrate that tilts approaching contactless better.
Tilting fluid cutout device of the present invention is particularly suitable for the high Al corrosive liquid of viscosity, but also effective for the treatment fluid beyond other corrosive liquid and the corrosion, just has some difference on the effect.
Description of drawings
Fig. 1 is to use the vertical view of transfer type substrate treating device of the tilting fluid cutout device of one embodiment of the invention;
Fig. 2 is the vertical view of this tilting fluid cutout device;
Fig. 3 is the figure shown in the X-X arrow line among Fig. 2.
Embodiment
Below, embodiments of the invention are described with reference to the accompanying drawings.
The transfer type substrate treating device that uses the tilting fluid cutout device of present embodiment is to carry out the device of liquid crystal indicator with the Al corrosion treatment of glass substrate 10 (being designated hereinafter simply as substrate 10).As shown in Figure 1, this substrate board treatment the 2nd conveyer line B, right angle of adopting the 1st conveyer line A, right angle with linearity to be connected to the 1st conveyer line A is connected to the 2nd conveyer line B and the layout of the U rotary type that combines with the 1st conveyer line A the 3rd conveyer line C arranged side by side.
The 1st conveyer line A linearity links acceptance division 1, blocking solution portion 2, corrosion portion 3 and removes liquid portion 4 and constitutes.3 assemblings of corrosion portion are used for the spray unit 31 of the water of Al corrosion from the surface dispersion of last direction substrate 10.Remove the tilting fluid cutout device 40 of liquid portion 4 assembling present embodiments, relevant its structure will describe in detail in the back.
At the 2nd conveyer line B is washing portion 5, and assembling disperses the spray unit 51 of rinse water from the surface of last direction substrate 10.The 3rd conveyer line C linearity ground links shifting apparatus 6, rotary dryer 7, and shifting apparatus 8 and taking-up portion 9 constitute.
The 1st conveyer line A and the 2nd conveyer line B comprise a plurality of delivery rollers that are arranged side by side with predetermined distance along direction of transfer, so that transmit substrate 10 along the conveyer line length direction.Each delivery roller is and the rectangular horizontal roller of direction of transfer.Inlet portion in the 2nd conveyer line B, i.e. washing portion 5 is provided with the steering mechanism 52 that the direct of travel that makes substrate 10 changes 90 degree.
The substrate 10 of accepting the Al corrosion treatment is sent to acceptance division 1 by conveyer 11.Transmit by roller, this substrate 10 enters corrosion portion 3 from blocking solution portion 2, accepts corrosion during by corrosion portion.Transmit by follow-up roller, the tilting fluid cutout device 40 of substrate 10 through removing in the liquid portion 4 that has passed through corrosion portion 3 moves to washing portion 5, and with direct of travel change 90 degree.Then, accepting washing in during moving in washing portion 5 handles.
The substrate 10 that moves to the export department of washing portion 5 is sent to rotary dryer 7 by shifting apparatus 6 from washing portion 5.Be sent to taking-up portion 9 by shifting apparatus 8 from rotary dryer 7 with the be through with substrate 10 of dried of rotary dryer 7, be sent to the device outside by conveyer 11 once more.
As shown in Figures 2 and 3, the tilting fluid cutout device 40 of present embodiment comprises: along continuous straight runs transmits a plurality of delivery rollers 41 of substrate 10; The liquid removing device main body 42 that substrate 10 on the delivery roller 41 is tilted to the direction of transfer side; And the fluid cutout promoting means 43 that on a sidepiece of liquid removing device main body 42, is provided with.
Liquid removing device main body 42 has: at a plurality of base plate supports crossbeam 42a of a plurality of positions of direction of transfer upper support substrate 10; And a pair of lowering or hoisting gear 42b in both sides, 42c that a plurality of base plate supports crossbeam 42a are tilted to the direction of transfer of substrate 10.A plurality of base plate supports crossbeam 42a be between delivery roller 41 configured in parallel with the rectangular crossbeam of direction of transfer, a plurality of binding parts 42d of the direction of transfer by being parallel to substrate 10 and integrated.And under the level that does not tilt, a plurality of base plate supports crossbeam 42a are in the below slightly of substrate transmission plane.
The a pair of lowering or hoisting gear 42b in both sides, 42c here are the electric motor type ground jacks, tilt by the base plate supports crossbeam 42a that makes central authorities, and a plurality of base plate supports crossbeam 42a are tilted synchronously.Promptly, the lowering or hoisting gear 42b that is in the incline direction downstream makes the support component 42e lifting that can rotate freely an end of supporting a plurality of base plate supports crossbeam 42a, rise by it, make the top position slightly that is in the substrate transmission plane above the end of a plurality of base plate supports crossbeam 42a.The lowering or hoisting gear 42c that is in the incline direction upstream side makes the top slightly that rises to the substrate transmission plane above the other end of the other end of a plurality of base plate supports crossbeam 42a by bar 42f, carrying out the rising of follow-up predetermined stroke, is middle mind-set one distolateral inclination thereby make a plurality of base plate supports crossbeam 42a with the pivot point of an end.
Thus, with 10 transfers of the substrate on the delivery roller 41 to base plate supports crossbeam 42a, and, tilt with predetermined angular to direction of transfer.In order not produce delivery roller 41 and to link the interference of parts 42d, link parts 42d and below delivery roller 41 enough, link substrate supporting traverse 42a because of the inclination of base plate supports crossbeam 42a.In the end of base plate supports crossbeam 42a, be provided for preventing the retainer 42g of the transversion malposition that the inclination of substrate 10 causes.
Fluid cutout promoting means 43 has a plurality of contact component 43a that arrange with predetermined distance along the direction of transfer of substrate 10.A plurality of contact component 43a are thin metal needles of vertical pole shape, and each upper end is fixed on the horizontal support member 43b of top, and each lower end is open as free end.And when the side tilted with predetermined angular, side edge part and a plurality of contact component 43a in the incline direction downstream of substrate 10 separated on small gap and the opposed position, and this fluid cutout promoting means 43 is set at substrate 10.
Have, contact component 43a is basically equidistantly arranging again, and relevant its spacing back will be described in detail, but with base plate supports crossbeam 42a on the interference position of the retainer 42g that is provided with, contact component 43a is omitted.
The following describes the function of the tilting fluid cutout device 40 of present embodiment.
The substrate 10 of the corrosion treatment in the corrosion portion 3 of being through with enters except that liquid portion 4, stops at the assigned position on the liquid removing device main body 42.At this moment, the base plate supports crossbeam 42a of liquid removing device main body 42 waits for level below the substrate transmission plane.If substrate 10 stops at the assigned position on the liquid removing device main body 42, then rise a bit on the end of base plate supports crossbeam 42a, and greatly rise in the other end.Thus, substrate 10 from the delivery roller 41 by transfer to base plate supports crossbeam 42a, and tilt with predetermined angular to the side.
Inclination by substrate 10, corrosive liquid residual on the surface of substrate 10 flows to the side, get rid of from the surface of substrate 10, but because corrosive liquid is the corrosive liquid that is used for the high viscosity of Al, so just the inclination of predetermined angular remains in the side edge part in incline direction downstream because of surface tension makes many corrosive liquids.But the tilting fluid cutout device 40 of present embodiment makes a plurality of contact component 43a of the side edge part in incline direction downstream of substrate 10 and fluid cutout promoting means 43 approaching, makes the corrosive liquid that is detained on the side edge part contact a plurality of contact component 43a.Its result can get rid of corrosive liquid expeditiously by each contact component 43a transmission and from the side edge part in incline direction downstream.Therefore, residual corrosive liquid is seldom in the side edge part.
If finish based on the liquid that removes that tilts, then base plate supports crossbeam 42a turns back to original level.Thus, substrate 10 is gone up transfer to delivery roller 41 from base plate supports crossbeam 42a, by driving delivery roller 41 again, substrate is sent to washing portion 5 from removing liquid portion 4.
Remove that liquid portion 4 removes liquid expeditiously by tilting fluid cutout device 40 and the angle of inclination that do not increase substrate 10, so can avoid prolongation except that the liquid required time.In addition, can avoid the maximization of equipment.5 pairs of substrates of washing portion 10 initial stage of carrying out cleans, and this initial stage rinse water significantly goes out of use because of contaminated, but has reduced the corrosive liquid that is brought into washing portion 5, so reduced the initial stage rinse water that goes out of use.
The angle of inclination of the substrate of tilting fluid cutout device 40 is that 5～20 degree are better, is that 8～15 degree are better.If this angle of inclination is too small, then can not fully remove liquid, and under the excessive situation in angle of inclination, there is the problem of the increase of interference on the equipment and inclination required time.The arrangement pitch of contact component 43a is that 2～15mm is better, is that 3～8mm is better.If this interval too small then becomes the reason that liquid accumulates, and under excessive situation, then is difficult to remove liquid between adjacent contact component, all make discharge opeing decline.The size of contact component 43a is that the external diameter of pole is that 1～8mm is better, is that 2～4mm is better.If this external diameter is too small, then be difficult to processing, and under excessive situation, because of the increase of arrangement pitch makes the discharge opeing reduction.
Utilize possibility on the industry
As described above, tilting fluid cutout device of the present invention is by the substrate that will tilt The side edge part in incline direction downstream connects with a plurality of contact components of arranging along this side edge part Touch or approach, thereby even in the high situation of the viscosity for the treatment of fluid, also do not increase substrate The angle of inclination, can from its surface, get rid of expeditiously treatment fluid. Thus, can subtract Gently continue except the load in the washing of liquid, reduce the water cost. In addition, can avoid prolonging Except the liquid required time, avoid increasing device length.
Claims (3)
1. tilting fluid cutout device, it is characterized in that, comprise: the liquid removing device main body, be configured in and substrate is supplied with treatment fluid to the surface of this substrate handle in the processing substrate conveyer line of conveying type of this substrate surface when horizontal direction transmits, by substrate is tilted, treatment fluid is got rid of from substrate; And fluid cutout promoting means, be configured in the incline direction downstream of substrate, by on the whole length of the side edge part of substrate, contacting or approaching a plurality of liquid contacting part spares with predetermined distance, promote to get rid of treatment fluid, so that contact with the treatment fluid that is tilted on the substrate that flow to be detained in the incline direction downstream along with substrate from substrate.
2. tilting fluid cutout device as claimed in claim 1, wherein, described liquid contacting part spare is the needle-like member of approximate vertical.
3. tilting fluid cutout device as claimed in claim 1, wherein, described treatment fluid is the Al corrosive liquid.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP375978/2000 | 2000-12-11 | ||
| JP2000375978A JP3579348B2 (en) | 2000-12-11 | 2000-12-11 | Inclined drainer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1398428A true CN1398428A (en) | 2003-02-19 |
Family
ID=18844904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01804684 Pending CN1398428A (en) | 2000-12-11 | 2001-12-07 | Tilting fluid cutout device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3579348B2 (en) |
| CN (1) | CN1398428A (en) |
| TW (1) | TWI254341B (en) |
| WO (1) | WO2002049096A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011026295A1 (en) * | 2009-09-03 | 2011-03-10 | 东莞宏威数码机械有限公司 | Vacuum substrate conveying system |
| CN103358412A (en) * | 2012-04-09 | 2013-10-23 | 株式会社迪思科 | Cutting device |
| CN104923535A (en) * | 2015-06-17 | 2015-09-23 | 高金建 | Glass washing device |
| CN107262437A (en) * | 2017-07-31 | 2017-10-20 | 京东方科技集团股份有限公司 | A kind of cleaning device |
| CN109733885A (en) * | 2019-01-21 | 2019-05-10 | 彩虹（合肥）液晶玻璃有限公司 | Conveying equipment |
| CN112657921A (en) * | 2020-12-23 | 2021-04-16 | 上海集成电路研发中心有限公司 | Cleaning device and cleaning method for deep hole and deep groove |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100687499B1 (en) * | 2004-08-23 | 2007-02-27 | 세메스 주식회사 | Substrate Transfer Device |
| JP5842484B2 (en) * | 2011-09-07 | 2016-01-13 | 日本電気硝子株式会社 | Sheet glass positioning device and positioning method therefor |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3766193B2 (en) * | 1997-11-27 | 2006-04-12 | 芝浦メカトロニクス株式会社 | Etching device |
| JP2000031111A (en) * | 1998-07-13 | 2000-01-28 | Toshiba Corp | Wet etching method |
| JP3638456B2 (en) * | 1998-12-22 | 2005-04-13 | 大日本スクリーン製造株式会社 | Substrate attitude changing device |
-
2000
- 2000-12-11 JP JP2000375978A patent/JP3579348B2/en not_active Expired - Fee Related
-
2001
- 2001-12-07 WO PCT/JP2001/010764 patent/WO2002049096A1/en active Application Filing
- 2001-12-07 CN CN 01804684 patent/CN1398428A/en active Pending
- 2001-12-11 TW TW90130615A patent/TWI254341B/en not_active IP Right Cessation
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011026295A1 (en) * | 2009-09-03 | 2011-03-10 | 东莞宏威数码机械有限公司 | Vacuum substrate conveying system |
| CN101648649B (en) * | 2009-09-03 | 2012-10-10 | 东莞宏威数码机械有限公司 | Vacuum substrate transport system |
| CN103358412A (en) * | 2012-04-09 | 2013-10-23 | 株式会社迪思科 | Cutting device |
| CN104923535A (en) * | 2015-06-17 | 2015-09-23 | 高金建 | Glass washing device |
| CN107262437A (en) * | 2017-07-31 | 2017-10-20 | 京东方科技集团股份有限公司 | A kind of cleaning device |
| CN109733885A (en) * | 2019-01-21 | 2019-05-10 | 彩虹（合肥）液晶玻璃有限公司 | Conveying equipment |
| CN112657921A (en) * | 2020-12-23 | 2021-04-16 | 上海集成电路研发中心有限公司 | Cleaning device and cleaning method for deep hole and deep groove |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI254341B (en) | 2006-05-01 |
| WO2002049096A1 (en) | 2002-06-20 |
| JP2002184832A (en) | 2002-06-28 |
| JP3579348B2 (en) | 2004-10-20 |
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| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |