CN115602688A - Heterogeneous substrate structure and manufacturing method thereof - Google Patents

Abstract

The invention relates to a heterogeneous substrate structure and a manufacturing method thereof. The heterogeneous substrate structure includes a glass substrate, an electrode layer, a first sub-circuit board and a first redistribution layer. The electrode layer is on the glass substrate. The first sub-circuit board is located on the glass substrate and the electrode layer. The first sub-circuit board has conductive vias. The conductive vias are located in the first sub-circuit board and on the electrode layer. The first redistribution layer is located on the first sub-circuit board and the conductive vias. The conductive vias are electrically connected to the electrode layer and the first redistribution layer.

Description

Heterogeneous substrate structure and fabrication method thereof

technical field

The disclosure relates to a heterogeneous substrate structure and a manufacturing method of the heterogeneous substrate structure.

Background technique

In the manufacturing process of Micro LED displays, when the thin film transistor is to be bonded to the LED chip (such as a pixel unit), the electrode layer of the thin film transistor and the metal of the chip will have a problem of low bonding force, resulting in insufficient structural reliability. In addition, the thickness of the electrode layer of the thin film transistor is relatively thin, which is several times different from the thickness of the chip's electroplating pad, which will cause uneven stress distribution during bonding, making the chip less stable.

Contents of the invention

One technical aspect of the present disclosure is a heterogeneous substrate structure.

According to an embodiment of the present disclosure, a heterogeneous substrate structure includes a glass substrate, an electrode layer, a first sub-circuit board, and a first redistribution layer. The electrode layer is on the glass substrate. The first sub-circuit board is located on the thin film transistor layer and the electrode layer. The first sub-circuit board has conductive vias. The conductive vias are located in the first sub-circuit board and on the electrode layer. The first redistribution layer is located on the first sub-circuit board and the conductive vias. The conductive vias are electrically connected to the electrode layer and the first redistribution layer.

In an embodiment of the present disclosure, the heterogeneous substrate structure further includes an anti-oxidation layer, a pixel unit, and a molding material. The anti-oxidation layer is located on the first redistribution layer. The anti-oxidation layer is made of gold. The pixel unit is located on the anti-oxidation layer. The molding material is located on the pixel unit, the anti-oxidation layer and the first sub-circuit board.

In an embodiment of the present disclosure, the heterogeneous substrate structure further includes a dielectric layer, a second redistribution layer, an anti-oxidation layer, a pixel unit, and a molding material. The dielectric layer is located on the first sub-circuit board and the first redistribution layer. The second redistribution layer is located on the dielectric layer and extends to the first redistribution layer. The anti-oxidation layer is located on the second redistribution layer. The anti-oxidation layer is made of gold. The pixel unit is located on the anti-oxidation layer. The molding material is located on the pixel unit, the anti-oxidation layer and the dielectric layer.

In an embodiment of the present disclosure, the heterogeneous substrate structure further includes a thin film transistor layer. The thin film transistor layer is located between the glass substrate and the electrode layer.

One technical aspect of the present disclosure is a method for fabricating a heterogeneous substrate structure.

According to an embodiment of the present disclosure, a method for manufacturing a heterogeneous substrate structure includes: forming a glass substrate, wherein the glass substrate has an electrode layer, and the electrode layer is located on the glass substrate; forming a first sub-circuit board, wherein the first sub-circuit board has conducting vias; and laminating the glass substrate, the first sub-circuit board, and the first redistribution layer so that the first sub-circuit board is located between the glass substrate and the first redistribution layer, wherein the conductive vias are electrically connected to the electrode layer and the first redistribution layer The first redistribution layer.

In an embodiment of the present disclosure, before the glass substrate, the first sub-circuit board and the first redistribution layer are laminated, the first sub-circuit board is in a semi-cured soft state. The above method further includes applying heat treatment to cure the first sub-circuit board after laminating the glass substrate, the first sub-circuit board and the first redistribution layer.

In an embodiment of the present disclosure, the above method further includes: patterning the first redistribution layer; forming an anti-oxidation layer on the first redistribution layer by electroless plating, wherein the anti-oxidation layer is made of gold; A pixel unit is arranged on the layer; and a molding material is formed on the pixel unit, the anti-oxidation layer and the first sub-circuit board.

In an embodiment of the present disclosure, before laminating the glass substrate, the first sub-circuit board, and the redistribution layer, the method further includes: patterning the first redistribution layer; forming a dielectric layer on the first redistribution layer; forming an opening in the dielectric layer; and forming a second redistribution layer on the dielectric layer, wherein the second redistribution layer extends to the first redistribution layer in the opening.

In an embodiment of the present disclosure, the above method further includes: forming an anti-oxidation layer on the second redistribution layer by electroless plating, wherein the anti-oxidation layer is made of gold; disposing pixel units on the anti-oxidation layer; and A molding material is formed on the pixel unit, the anti-oxidation layer and the dielectric layer.

In an embodiment of the present disclosure, the above step of forming the first sub-circuit board includes: laser drilling the first sub-circuit board so that the first sub-circuit board has a through hole; and filling the through hole with conductive metal glue to Conductive vias are formed in the first sub-circuit board.

In the above embodiments of the present disclosure, the first sub-circuit board of the heterogeneous substrate structure can join the electrode layer and the first redistribution layer, that is to say, the first sub-circuit board can be regarded as a connection structure for joining the electrodes layer and the first redistribution layer to improve the bonding force between interfaces. Moreover, since the conductive through holes of the first sub-circuit board only need to be filled with conductive metal glue to connect with the electrode layer and the first redistribution layer, there is no need to fill the holes through the electroplating process, and the use of electroplating equipment can be omitted Manufacturing cost and more environmentally friendly. In addition, the conductive via holes of the first sub-circuit board are connected to the electrode layer and the first redistribution layer by filling conductive metal glue, rather than filling the holes through the electroplating process, so the first sub-circuit board and the first sub-circuit board can be reduced. Stress when the electrode layer and the first redistribution layer are bonded to avoid bending of the glass substrate. The first sub-circuit board and the first redistribution layer can serve as welding pads for stabilizing the pixel unit. Compared with the conventional technology, the bonding force of the first redistribution layer to metal is better, and the first redistribution layer can be used as a welding pad, so the structural reliability between the first redistribution layer and the pixel unit can be increased.

Description of drawings

One embodiment of the present disclosure is best understood from the following detailed description when read in conjunction with the accompanying figures. It is emphasized that, in accordance with the standard practice in the industry, various features are not drawn to scale and are used for illustration purposes only. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.

FIG. 1 illustrates a cross-sectional view of a heterogeneous substrate structure according to an embodiment of the present disclosure.

FIG. 2 is a cross-sectional view of a heterogeneous substrate structure according to another embodiment of the disclosure.

FIG. 3 is a flowchart illustrating a method for fabricating a heterogeneous substrate structure according to an embodiment of the present disclosure.

4 to 6 illustrate cross-sectional views at different stages of a method for fabricating a heterogeneous substrate structure according to an embodiment of the present disclosure.

7 to 8 illustrate cross-sectional views at different stages of a method for fabricating a heterogeneous substrate structure according to another embodiment of the present disclosure.

9 to 13 illustrate cross-sectional views at different stages of a method for fabricating a heterogeneous substrate structure according to yet another embodiment of the present disclosure.

FIG. 14 illustrates a cross-sectional view of a heterogeneous substrate structure according to yet another embodiment of the present disclosure.

FIG. 15 illustrates a cross-sectional view of a heterogeneous substrate structure according to yet another embodiment of the present disclosure.

FIG. 16 illustrates a cross-sectional view of a heterogeneous substrate structure according to yet another embodiment of the present disclosure.

[Description of main component symbols]

100, 100a, 100b, 100c, 100d, 100e: heterogeneous substrate structure

110: thin film transistor substrate

112: glass substrate

114: thin film transistor layer

116: electrode layer

120: The first sub-circuit board

122: Conductive Via

130: The first rewiring layer

130a: second redistribution layer

140,140a: anti-oxidation layer

150,150a: pixel unit

160: molded wood

170: dielectric layer

200: pressure sensitive adhesive layer

210: PET adhesive layer

O: open

S1: step

S2: step

S3: step

V: through hole

detailed description

The embodiments disclosed below provide many different implementations, or examples, for implementing different features of the provided subject matter. Specific examples of components and arrangements are described below to simplify the present case. Of course, the examples described are examples only and are not intended to be limiting. In addition, the present case may repeat element symbols and/or letters in various instances. This repetition is for brevity and clarity and does not in itself dictate a relationship between the various implementations and/or configurations discussed.

Spatially relative terms such as "below", "beneath", "lower", "above", "upper", etc. may be used herein for the purpose of description, to describe The relationship of one element or feature to another element or feature as shown in the drawings. Spatially relative terms are intended to encompass different orientations of the device in a method of use or making in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

FIG. 1 shows a cross-sectional view of a heterogeneous substrate structure 100 according to an embodiment of the present disclosure. The heterogeneous substrate structure 100 includes a glass substrate 112 , an electrode layer 116 , a first sub-circuit board 120 and a first redistribution layer 130 . For example, the material of the glass substrate 112 may include silicon, ceramics or sapphire, but not limited thereto. The electrode layer 116 is located on the glass substrate 112 . The material of the electrode layer 116 may include a transparent conductive film (Indium Tin Oxide, ITO), copper or aluminum, but not limited thereto. The heterogeneous substrate structure 100 also includes a thin film transistor layer 114 . The TFT layer 114 is located between the glass substrate 112 and the electrode layer 116 . In the present disclosure, the combination of the glass substrate 112 , the TFT layer 114 and the electrode layer 116 can be regarded as the TFT substrate 110 . The first sub-circuit board 120 is located on the TFT layer 114 and the electrode layer 116 , and the first sub-circuit board 120 has a conductive via 122 . The conductive via 122 is located in the first sub-circuit board 120 and located on the electrode layer 116 . In this embodiment, the material of the first sub-circuit board 120 may include insulating materials, such as film (Prepreg, PP), Ajinomoto Buildup Film (Ajinomoto Buildup Film, ABF), BT (Bimaleimide Triazine) resin, photosensitive Dielectric (Photosensitive dielectric, PID), or any semi-cured (B-Stage) polymer, but this disclosure is not limited thereto.

The material of the conductive via hole 122 of the first sub-circuit board 120 can be conductive metal glue, which is manufactured by transient liquid phase sintering (Transient Liquid Phase Sintering, TLPS). The conductive via hole 122 can conduct electricity and heat, and is suitable for bonding with metal materials, and will not change back to a liquid state due to heat. The first redistribution layer 130 is located on the first sub-circuit board 120 and the conductive via 122 , and the conductive via 122 is electrically connected to the electrode layer 116 and the first redistribution layer 130 . The material of the first redistribution layer 130 may be copper. In detail, the first redistribution layer 130 can be copper foil, which can be etched by a subtractive process (Tenting process) to form the first redistribution layer 130 as shown in FIG. 1 .

Specifically, the first sub-circuit board 120 of the heterogeneous substrate structure 100 can bond the electrode layer 116 and the first redistribution layer 130, that is, the first sub-circuit board 120 can be regarded as a connection structure for bonding The electrode layer 116 and the first redistribution layer 130 are used to enhance the bonding force between the interfaces. Moreover, since the conductive vias 122 of the first sub-circuit board 120 only need to be filled with conductive metal glue to connect with the electrode layer 116 and the first redistribution layer 130, there is no need to fill the holes through the electroplating process, which saves It reduces the manufacturing cost of electroplating equipment and is more environmentally friendly. Moreover, the conductive vias 122 of the first sub-circuit board 120 are connected to the electrode layer 116 and the first redistribution layer 130 by filling conductive metal glue, instead of filling the holes through an electroplating process, so the first The stress when the sub-circuit board 120 is bonded with the electrode layer 116 and the first redistribution layer 130 is used to avoid bending caused by the glass substrate 112 . The first sub-circuit board 120 and the first redistribution layer 130 can be used as solder pads for stabilizing the pixel unit 150 . Compared with the conventional technology, the bonding force of the first redistribution layer 130 to metal is better, and the first redistribution layer 130 can be used as a pad, so the structural reliability between the first redistribution layer 130 and the pixel unit 150 can be increased .

In this embodiment, the heterogeneous substrate structure 100 further includes an anti-oxidation layer 140 , a pixel unit 150 and a molding material (Molding) 160 . The anti-oxidation layer 140 is located on the first redistribution layer 130 , and the material of the anti-oxidation layer 140 can be gold. The anti-oxidation layer 140 covers the top surface of the first redistribution layer 130 to provide an anti-oxidation effect. The pixel unit 150 is located on the anti-oxidation layer 140 , and the pixel unit 150 can be electrically connected to the first redistribution layer 130 and the anti-oxidation layer 140 . The molding material 160 is located on the first sub-circuit board 120 , the anti-oxidation layer 140 and the pixel unit 150 . The molding material 160 covers the first sub-circuit board 120 , the anti-oxidation layer 140 and the pixel unit 150 to provide insulation and protection effects.

It should be understood that the connection relationship and functions of the components that have been described will not be repeated, and will be described first. In the following description, other forms of heterogeneous substrate structures will be described.

FIG. 2 is a cross-sectional view of a heterogeneous substrate structure 100a according to another embodiment of the present disclosure. The heterogeneous substrate structure 100 a includes a glass substrate 112 , an electrode layer 116 , a first sub-circuit board 120 and a first redistribution layer 130 . The heterogeneous substrate structure 100 a also includes a thin film transistor layer 114 . The combination of the glass substrate 112 , the TFT layer 114 and the electrode layer 116 can be regarded as the TFT substrate 110 . The first sub-circuit board 120 has conductive vias 122 . The difference from the embodiment shown in FIG. 1 is that the heterogeneous substrate structure 100a further includes a dielectric layer 170 and a second redistribution layer 130a. The dielectric layer 170 is located on the first sub-circuit board 120 and the first redistribution layer 130 . For example, the material of the dielectric layer 170 may include a dielectric material. The second redistribution layer 130a is located on the dielectric layer 170, and the second redistribution layer 130a extends to the first redistribution layer 130 in the opening O, that is, the conductive via 122, the first redistribution layer 130 and the second redistribution layer 130. The double wiring layers 130a are electrically connected to each other. For example, the first redistribution layer 130 and the second redistribution layer 130a can be made of the same material.

The heterogeneous substrate structure 100a further includes an anti-oxidation layer 140a , a pixel unit 150a and a molding material 160 . The anti-oxidation layer 140a is located on the second redistribution layer 130a, and the material of the anti-oxidation layer 140a can be gold. The anti-oxidation layer 140a can be formed on the second redistribution layer 130a by electroless plating. The pixel unit 150a is located on the anti-oxidation layer 140a. The molding material 160 is located on the anti-oxidation layer 140 a , the pixel unit 150 a and the dielectric layer 170 . The first sub-circuit board 120 of the heterogeneous substrate structure 100a can bond the electrode layer 116 and the first redistribution layer 130 to improve the bonding force between the interfaces, and the conductive vias 122 of the first sub-circuit board 120, the first redistribution layer The wiring layer 130 and the second rewiring layer 130a can form a multilayer connection structure. The conductive via 122 of the first sub-circuit board 120 is electrically connected to the electrode layer 116 , the first redistribution layer 130 and the second redistribution layer 130a.

In the following description, the fabrication methods of the heterogeneous substrate structure 100 (see FIG. 1 ) and the heterogeneous substrate structure 100 a (see FIG. 2 ) will be described. The described component connection relationship and materials will not be repeated, but will be described first.

FIG. 3 is a flowchart illustrating a method for fabricating a heterogeneous substrate structure according to an embodiment of the present disclosure. The manufacturing method of the heterogeneous substrate structure includes the following steps. Firstly, in step S1, a glass substrate is formed, wherein the glass substrate has an electrode layer, and the electrode layer is located on the glass substrate. Next in step S2, a first sub-circuit board is formed, wherein the first sub-circuit board has conductive vias. Then in step S3, the glass substrate, the first sub-circuit board, and the first redistribution layer are laminated so that the first sub-circuit board is located between the glass substrate and the redistribution layer, wherein the conductive vias are electrically connected to the electrode layer and the redistribution layer. wiring layer. In the following description, each of the above-mentioned steps will be described in detail.

4 to 6 illustrate cross-sectional views at different stages of a method for fabricating a heterogeneous substrate structure according to an embodiment of the present disclosure. Referring to FIG. 4 , a glass substrate 112 and a TFT layer 114 are formed, wherein the glass substrate 112 has an electrode layer 116 , the TFT layer 114 is located on the glass substrate 112 , and the electrode layer 116 is located on the TFT layer 114 . In the present disclosure, the combination of the glass substrate 112 , the TFT layer 114 and the electrode layer 116 can be regarded as the TFT substrate 110 . Next, the first sub-circuit board 120 is formed. Before heat treatment, the first sub-circuit board 120 is in a semi-cured and soft state, and holes can be drilled in the first sub-circuit board 120 and filled with conductive metal glue to form conductive vias 122 .

Next, the first redistribution layer 130 is formed. In some embodiments, the material of the first redistribution layer 130 may be copper. In detail, the first redistribution layer 130 can be copper foil, so the first redistribution layer 130 has high coplanarity. Because before laminating the glass substrate 112, the first sub-circuit board 120 and the first redistribution layer 130, the first sub-circuit board 120 is in a semi-cured soft state and has flexibility and viscosity, so the first sub-circuit board 120 It can be used to bond the TFT substrate 110 and the first redistribution layer 130 .

Referring to FIG. 5, then, the glass substrate 112, the first sub-circuit board 120 and the first redistribution layer 130 are laminated so that the first sub-circuit board 120 is located between the thin film transistor substrate 110 and the first redistribution layer 130, wherein The conductive via 122 is electrically connected to the electrode layer 116 and the first redistribution layer 130 . Next, after laminating the glass substrate 112 , the first sub-circuit board 120 and the first redistribution layer 130 , heat treatment may be applied to cure the first sub-circuit board 120 . In this way, the first sub-circuit board 120 is firmly connected to the TFT substrate 110 and the first redistribution layer 130 to increase structural reliability.

Referring to FIG. 6, in some embodiments, the method further includes patterning the first redistribution layer 130, and forming an anti-oxidation layer 140 on the patterned first redistribution layer 130 by electroless plating, wherein the anti-oxidation layer 140 is made of gold. The anti-oxidation layer 140 covers the top surface of the first redistribution layer 130 to provide an anti-oxidation effect.

Next, returning to FIG. 1, the method further includes disposing a pixel unit 150 on the anti-oxidation layer 140, and forming a molding material 160 on the pixel unit 150, the anti-oxidation layer 140, and the first sub-circuit board 120, so that a heterogeneous Substrate structure 100. The molding material 160 covers the first sub-circuit board 120 , the anti-oxidation layer 140 and the pixel unit 150 to provide insulation and protection effects, and increase the structural reliability of the heterogeneous substrate structure 100 . Specifically, the manufacturing method of this embodiment does not need to use solder and primer, which can effectively reduce the manufacturing cost of the heterogeneous substrate structure 100 . In addition, since no solder is used, the bonding yield between the thin film transistor substrate 110 , the first sub-circuit board 120 and the first redistribution layer 130 can be effectively improved, thereby improving the structural reliability of the heterogeneous substrate structure 100 .

7 to 8 illustrate cross-sectional views at different stages of a method for fabricating a heterogeneous substrate structure according to another embodiment of the present disclosure. Referring to FIG. 7 , the difference from the embodiment shown in FIG. 4 is that before laminating the glass substrate 112 , the first sub-circuit board 120 and the first redistribution layer 130 , the method further includes patterning the first redistribution layer 130 , A dielectric layer 170 is formed on the first redistribution layer 130, an opening O is formed in the dielectric layer 170, and a second redistribution layer 130a is formed on the dielectric layer 170, wherein the second redistribution layer 130a extends to the second redistribution layer 130a in the opening O. A redistribution layer 130 . Moreover, the method further includes forming an anti-oxidation layer 140a on the second redistribution layer 130a by electroless plating, wherein the anti-oxidation layer 140a is made of gold. The anti-oxidation layer 140a covers the top surface of the second redistribution layer 130a to provide an anti-oxidation effect.

Next, referring to FIG. 8, the glass substrate 112, the first sub-circuit board 120, and the first redistribution layer 130 are laminated so that the first sub-circuit board 120 is located between the thin film transistor substrate 110 and the first redistribution layer 130, wherein The conductive via 122 is electrically connected to the electrode layer 116 , the first redistribution layer 130 and the second redistribution layer 130 a to form a multilayer connection structure. Since the first sub-circuit board 120 is in a semi-cured soft state with flexibility and adhesiveness, the first sub-circuit board 120 can bond the TFT substrate 110 and the first redistribution layer 130 .

Next, returning to FIG. 2 , in some embodiments, the method further includes disposing a pixel unit 150a on the anti-oxidation layer 140a , and forming a molding material 160 on the anti-oxidation layer 140a , the pixel unit 150a and the dielectric layer 170 . In this way, a heterogeneous substrate structure 100a as shown in FIG. 2 can be obtained. Specifically, the manufacturing method of the heterogeneous substrate structure 100a does not need to use solder and primer, which can effectively reduce the manufacturing cost of the heterogeneous substrate structure 100a. In addition, since no solder is used, the bonding yield between the TFT substrate 110 , the first sub-circuit board 120 and the first redistribution layer 130 can be effectively improved, thereby improving the structural reliability of the heterogeneous substrate structure 100 a.

In this embodiment, the first sub-circuit board 120 of the heterogeneous substrate structure 100a can bond the electrode layer 116 and the first redistribution layer 130 to improve the bonding force between the interfaces, and the electrical connection of the first sub-circuit board 120 The hole 122 is electrically connected to the electrode layer 116 , the first redistribution layer 130 and the second redistribution layer 130a, so the heterogeneous substrate structure 100a has a multilayer connection structure.

In the following description, another fabrication method of the heterogeneous substrate structure will be described. The described component connection relationship and materials will not be repeated, but will be described first.

9 to 13 illustrate cross-sectional views at different stages of a method for fabricating a heterogeneous substrate structure according to yet another embodiment of the present disclosure. Referring to FIG. 9 , a first redistribution layer 130 and a pressure sensitive adhesive (PSA) layer 200 are respectively formed on opposite sides of the first sub-circuit board 120 . Next, a PET glue (Polyethylene terephthalate, PET) layer 210 is pasted on the pressure-sensitive glue layer 200 of the first sub-circuit board 120 . Next, the first sub-circuit board 120 , the pressure-sensitive adhesive layer 200 and the PET adhesive layer 210 are laser drilled, so that the first sub-circuit board 120 has a through hole V to form a structure as shown in FIG. 9 .

Referring to FIG. 9 and FIG. 10 at the same time, conductive metal glue is filled in the through hole V to form a conductive through hole 122 in the first sub-circuit board 120 . After the conductive vias 122 are formed, the PET adhesive layer 210 can be removed to form the structure shown in FIG. 10 .

Referring to FIG. 11 , next, a glass substrate 112 is formed, wherein the glass substrate 112 has an electrode layer 116 located on the glass substrate 112 . Next, the structure shown in FIG. 10 is turned upside down by 90 degrees, so that the conductive via 122 is closer to the electrode layer 116 than the first redistribution layer 130 .

Referring to FIG. 11 and FIG. 12 at the same time, after removing the pressure-sensitive adhesive layer 200 of the first sub-circuit board 120, the glass substrate 112, the first sub-circuit board 120 and the first redistribution layer 130 are laminated, so that the first sub-circuit board 120 Located between the glass substrate 112 and the first redistribution layer 130 , wherein the conductive via 122 is electrically connected to the electrode layer 116 and the first redistribution layer 130 .

Referring to FIG. 13 , next, the first redistribution layer 130 is etched to form lines. After the wiring is formed in the first redistribution layer 130 , a pixel unit 150 is formed on the first redistribution layer 130 to form a heterogeneous substrate structure 100 b as shown in FIG. 13 . Next, the molding material 160 shown in FIG. 1 may be formed on the pixel unit 150 and the first sub-circuit board 120 to cover the pixel unit 150 and the first sub-circuit board 120 .

In the following description, other forms of heterogeneous substrate structures will be described. The described component connection relationship and materials will not be repeated, but will be described first.

FIG. 14 illustrates a cross-sectional view of a heterogeneous substrate structure 100c according to yet another embodiment of the present disclosure. Referring to FIG. 14 , the difference from the embodiment shown in FIG. 1 is that the thin film transistor layer 114 has a thin film transistor structure for active driving, and the conductive via 122 is not only electrically connected to the electrode layer 116 and the first redistribution layer 130 In addition, it also extends into the TFT layer 114 to electrically connect the TFT layer 114 for active driving. The combination of the glass substrate 112 , the TFT layer 114 and the electrode layer 116 can be regarded as the TFT substrate 110 . In addition, the manufacturing process of the heterogeneous substrate structure 100c is similar to that of FIGS. 4-6 except that the manufacturing process of the glass substrate 112 and the TFT layer 114 is different.

FIG. 15 is a cross-sectional view of a heterogeneous substrate structure 100d according to yet another embodiment of the present disclosure. Referring to FIG. 15 , the difference from the embodiment shown in FIG. 2 is that the thin film transistor layer 114 has a thin film transistor structure for active driving, and the conductive via 122 is not only electrically connected to the electrode layer 116 and the first redistribution layer 130 In addition, it also extends to the thin film transistor layer 114, wherein the conductive via 122 electrically connects the thin film transistor layer 114, the electrode layer 116, the first redistribution layer 130 and the second redistribution layer 130a to form a multilayer connection. structure. In addition, the manufacturing process of the heterogeneous substrate structure 100d is similar to that of FIG. 7 and FIG. 8 except that the manufacturing process of the glass substrate 112 and the TFT layer 114 are different.

Specifically, because the conductive vias 122 of the first sub-circuit board 120 only need to be filled with conductive metal glue to be connected to the thin film transistor layer 114, the electrode layer 116 and the first redistribution layer 130, the first sub-circuit board The 120 does not need to use electroplating process for hole filling, which can save the manufacturing cost of using electroplating equipment and is more environmentally friendly.

FIG. 16 illustrates a cross-sectional view of a heterogeneous substrate structure 100e according to yet another embodiment of the present disclosure. Referring to FIG. 16 , the difference from the embodiment shown in FIG. 2 is that the glass substrate 112 does not have a TFT layer 114 (see FIG. 2 ), and the electrode layer 116 is a multilayer structure, which can be regarded as a rewiring structure. The heterogeneous substrate structure 100e can be applied in passive driving circuits. In addition, the manufacturing process of the heterogeneous substrate structure 100 e is similar to that of FIG. 7 and FIG. 8 except that the manufacturing process of the glass substrate 112 and the electrode layer 116 are different.

Specifically, the conductive vias 122 of the first sub-circuit board 120 are connected to the thin film transistor layer 114, the electrode layer 116, and the first redistribution layer 130 by filling conductive metal glue, rather than by an electroplating process. The holes are filled, so the stress when the first sub-circuit board 120 is bonded with the thin film transistor layer 114 , the electrode layer 116 and the first redistribution layer 130 can be reduced, so as to avoid bending caused by the glass substrate 112 .

The foregoing outlines features of several embodiments so that those skilled in the art may better understand aspects of the present disclosure. It should be appreciated by those skilled in the art that they may readily use the present disclosure as a basis for designing or modifying other processes and structures, so as to achieve the same purposes and/or achieve the same advantages as the embodiments described herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they can make various changes, substitutions and alterations herein without departing from the spirit and scope of the present disclosure.

Claims (10)

1. A heterogeneous substrate structure, characterized in that, comprising: Glass base board; an electrode layer located on the glass substrate; a first sub-circuit board located on the glass substrate and the electrode layer, wherein the first sub-circuit board has a conductive via hole located in the first sub-circuit board and on the electrode layer; and The first redistribution layer is located on the first sub-circuit board and the conductive via, wherein the conductive via is electrically connected to the electrode layer and the first redistribution layer. 2. The heterogeneous substrate structure according to claim 1, further comprising: an anti-oxidation layer located on the first redistribution layer, wherein the material of the anti-oxidation layer is gold; a pixel unit on the anti-oxidation layer; and The molding material is located on the pixel unit, the anti-oxidation layer and the first sub-circuit board. 3. The heterogeneous substrate structure according to claim 1, further comprising: a dielectric layer located on the first sub-circuit board and the first redistribution layer; a second redistribution layer located on the dielectric layer and extending to the first redistribution layer; an anti-oxidation layer located on the second redistribution layer, wherein the material of the anti-oxidation layer is gold; a pixel unit on the anti-oxidation layer; and The molding material is located on the pixel unit, the anti-oxidation layer and the dielectric layer. 4. The heterogeneous substrate structure according to claim 1, further comprising: The thin film transistor layer is located between the glass substrate and the electrode layer. 5. A method for manufacturing a heterogeneous substrate structure, comprising: forming a glass substrate, wherein the glass substrate has an electrode layer on the glass substrate; forming a first sub-circuit board, wherein the first sub-circuit board has conductive vias; and pressing the glass substrate, the first sub-circuit board, and the first redistribution layer so that the first sub-circuit board is located between the glass substrate and the first redistribution layer, wherein the conductive vias are electrically connected to the electrodes layer and the first redistribution layer. 6. The method for manufacturing a heterogeneous substrate structure according to claim 5, wherein before bonding the glass substrate, the first sub-circuit board and the first redistribution layer, the first sub-circuit board is Semi-cured soft state, the method further includes: After laminating the glass substrate, the first sub-circuit board and the first redistribution layer, heat treatment is applied to cure the first sub-circuit board. 7. The method for manufacturing a heterogeneous substrate structure according to claim 5, further comprising: patterning the first redistribution layer; forming an anti-oxidation layer on the first redistribution layer by electroless plating, wherein the anti-oxidation layer is made of gold; disposing pixel units on the anti-oxidation layer; and A molding material is formed on the pixel unit, the anti-oxidation layer and the first sub-circuit board. 8. The method for manufacturing a heterogeneous substrate structure according to claim 5, further comprising: before laminating the glass substrate, the first sub-circuit board and the redistribution layer: patterning the first redistribution layer; forming a dielectric layer on the first redistribution layer; forming openings in the dielectric layer; and A second redistribution layer is formed on the dielectric layer, wherein the second redistribution layer extends to the first redistribution layer in the opening. 9. The method for manufacturing a heterogeneous substrate structure according to claim 8, further comprising: forming an anti-oxidation layer on the second rewiring layer by electroless plating, wherein the anti-oxidation layer is made of gold; disposing pixel units on the anti-oxidation layer; and A molding material is formed on the pixel unit, the anti-oxidation layer and the dielectric layer. 10. The method for manufacturing a heterogeneous substrate structure according to claim 5, wherein forming the first sub-circuit board comprises: laser drilling the first sub-circuit board so that the first sub-circuit board has through holes; and Filling the conductive metal paste into the through hole to form the conductive through hole in the first sub-circuit board.

Images