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CN114649280B - Micro-channel radiator with gill bionic structure - Google Patents

Micro-channel radiator with gill bionic structure Download PDF

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CN114649280B
CN114649280B CN202210538203.0A CN202210538203A CN114649280B CN 114649280 B CN114649280 B CN 114649280B CN 202210538203 A CN202210538203 A CN 202210538203A CN 114649280 B CN114649280 B CN 114649280B
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comb
fins
channel
radiator
fish gill
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CN114649280A (en
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张健
谢志辉
陆卓群
奚坤
陈华伟
纪祥鲲
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Naval University of Engineering PLA
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids

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  • Microelectronics & Electronic Packaging (AREA)
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  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

The invention discloses a micro-channel radiator with a gill bionic structure, which comprises a shell, an internal flow passage and a cooling working medium flowing through the internal flow passage, wherein the shell is provided with a plurality of grooves; one end of the shell is provided with a cooling working medium inlet, and the other end of the shell is provided with a cooling working medium outlet; at least one gill structure unit is arranged in the internal flow channel, and each gill structure unit at least comprises two comb-shaped fins which are stacked in parallel; the gill structure unit is transversely arranged in the internal flow channel; the comb-shaped fins comprise comb tooth parts facing the cooling working medium outlets and comb body parts located at the roots of the comb tooth parts. On one hand, the mixing of the cooling working media is enhanced by arranging a plurality of fins which are arranged in parallel; on the other hand, by arranging a plurality of tooth grooves and comb teeth, the convection heat exchange area is increased, but the pressure drop is not greatly increased, and the power consumption of the pump is not greatly increased; and moreover, the thickness of the fins along the flowing direction is increased, so that the heat exchange efficiency of the rear half part of the radiator is improved.

Description

一种鱼鳃仿生结构微通道散热器A microchannel radiator with bionic structure of fish gills

技术领域technical field

本发明涉及高热流密度散热问题,具体地指一种鱼鳃仿生结构微通道散热器,能应用于能源动力、电力电子、化工过程等各种应用领域,尤其应用于集成电路领域。The invention relates to the problem of heat dissipation with high heat flux density, in particular to a microchannel radiator with a bionic structure of fish gills, which can be applied to various application fields such as energy power, power electronics, chemical process, etc., especially in the field of integrated circuits.

背景技术Background technique

随着半导体技术的快速进步,芯片的集成度不断提高,导致芯片单位面积上的发热量激增。传统的空冷散热、液冷散热、热管散热和半导体散热等冷却技术已经很难满足高集成化芯片的散热需求。鉴于此,微通道冷却技术应运而生,微通道结构可以通过在芯片硅基层构建使冷却工质直接通过的微小通道,可以绕过芯片封装直接对集成电路表面进行冷却,为芯片散热提供了良好的解决方案。With the rapid progress of semiconductor technology, the integration of chips has been continuously improved, resulting in a surge in the amount of heat generated per unit area of the chip. Traditional cooling technologies such as air cooling, liquid cooling, heat pipe cooling, and semiconductor cooling have been difficult to meet the cooling needs of highly integrated chips. In view of this, the micro-channel cooling technology came into being. The micro-channel structure can bypass the chip package and directly cool the surface of the integrated circuit by constructing tiny channels on the silicon base layer of the chip that allow the cooling medium to pass directly, which provides a good cooling effect for the chip. s solution.

现有平行微管道的主要缺点是冷却能力有限,对于芯片的高功率区域的冷却效果不好,会产生较高的温度梯度,这会引起机械应力并导致薄芯片的局部翘曲。现有的微针肋结构需要大功率泵,从而增加了能耗和成本,并会在半导体器件上产生潜在的破坏性机械应力。The main disadvantage of the existing parallel micro-channels is the limited cooling capacity, poor cooling effect for the high-power regions of the chip, and high temperature gradients, which can cause mechanical stress and lead to local warping of thin chips. Existing microneedle rib structures require high-power pumps, increasing energy consumption and cost, and creating potentially damaging mechanical stress on semiconductor devices.

申请号为CN212810289 U的中国实用新型专利公开了一种具有特殊肋结构的微通道热沉,属于换热器技术领域,其结构包括入流及出流结构、肋排结构和顶部盖板;入流及出流结构一端为入流通道,另一端为出流通道;肋排结构设置在入流通道和出流通道之间,包括间隔排列的Z型肋板和直肋板;顶部盖板上设置有冷却工质入口和冷却工质出口。通过直肋板与Z型肋板间隔排列的微通道,使得冷却工质的边界层不断被破坏,且在局部形成漩涡,有助于提高热沉的换热效率。该实用新型示例的技术方案,通过特殊的入口结构及微通道肋设计,使各微通道间流量均匀分配。但在肋片直角位置形成的涡流区域,阻碍了工质流体的流动,不利于通道的换热。同时,该实用新型结构中包含有众多突扩突缩结构,导致流动阻力很大。结构机械强度有限,有被大功率泵产生的破坏性机械应力破坏的风险。The Chinese utility model patent with the application number CN212810289 U discloses a micro-channel heat sink with a special rib structure, which belongs to the technical field of heat exchangers. One end of the outflow structure is an inflow channel, and the other end is an outflow channel; the rib structure is arranged between the inflow channel and the outflow channel, including Z-shaped rib plates and straight rib plates arranged at intervals; Inlet and outlet of cooling medium. Through the micro-channels arranged at intervals between the straight fins and the Z-shaped fins, the boundary layer of the cooling medium is continuously destroyed, and a vortex is formed locally, which helps to improve the heat exchange efficiency of the heat sink. The technical solution of the example of the utility model, through the special inlet structure and the design of the micro-channel rib, makes the flow between the micro-channels evenly distributed. However, the vortex area formed at the right angle of the fins hinders the flow of the working fluid and is not conducive to the heat exchange of the channel. At the same time, the structure of the utility model includes numerous structures that expand and contract, resulting in high flow resistance. The structure has limited mechanical strength and is at risk of being damaged by the damaging mechanical stresses created by the high-power pump.

发明内容SUMMARY OF THE INVENTION

本发明的目的就是要提供一种结构简单实用、在增大换热面积的前提下,不会大幅增加通道阻力的微通道散热器。The purpose of the present invention is to provide a micro-channel radiator with a simple and practical structure, which does not greatly increase the channel resistance under the premise of increasing the heat exchange area.

为实现上述目的,本发明公开了一种鱼鳃仿生结构微通道散热器,其包括壳体、内部流道和流经所述内部流道的冷却工质,所述壳体的一端设置有冷却工质入口,另一端设置有冷却工质出口;所述内部流道中至少设置有一个鱼鳃结构单元,每个所述鱼鳃结构单元至少由两片平行布置的梳子状的肋片组成;所述鱼鳃结构单元横向布置于内部流道中;所述梳子状的肋片包括朝向所述冷却工质出口的梳齿部分和位于所述梳齿部分根部的梳体部分。In order to achieve the above purpose, the present invention discloses a micro-channel radiator with a bionic structure of fish gills, which includes a shell, an internal flow channel and a cooling medium flowing through the internal flow channel, and one end of the shell is provided with a cooling device. A substance inlet, the other end is provided with a cooling medium outlet; at least one gill structural unit is provided in the internal flow channel, and each gill structural unit is composed of at least two comb-shaped fins arranged in parallel; the The gill structural units are laterally arranged in the internal flow channel; the comb-shaped fins include a comb tooth portion facing the outlet of the cooling medium and a comb body portion located at the root of the comb tooth portion.

进一步地,所述壳体由上层盖板和凹槽状的下层壳体组装而成,所述内部流道为所述下层壳体的凹槽状部分。Further, the casing is assembled from an upper cover plate and a groove-shaped lower casing, and the internal flow channel is a groove-shaped part of the lower casing.

进一步地,多个所述鱼鳃结构单元沿冷却工质流动的方向平行等间距布置。Further, a plurality of the fish gill structural units are arranged in parallel and at equal intervals along the direction of the cooling medium flow.

进一步地,单个所述鱼鳃结构单元上肋片的数量为2到8片。Further, the number of fins on a single fish gill structural unit is 2 to 8.

更进一步地,上下相邻所述肋片之间留有间隙。Further, a gap is left between the upper and lower adjacent ribs.

进一步地,单个所述鱼鳃结构单元的相邻两肋片之间沿冷却工质流动的方向错位排列布置,所述相邻肋片之间错位的距离d2大于梳体部分的宽度d3Further, the adjacent two fins of the single fish gill structural unit are arranged in a dislocation arrangement along the direction of the flow of the cooling medium, and the dislocation distance d 2 between the adjacent fins is greater than the width d 3 of the comb body part .

进一步地,单个所述鱼鳃结构单元的相邻两肋片上的梳齿部分在垂直于冷却工质流动的方向上相互错位布置。Further, the comb tooth portions on the adjacent two fins of the single fish gill structural unit are arranged at a mutual offset in a direction perpendicular to the flow of the cooling medium.

进一步地,每个所述肋片的梳齿部分和梳体部分的横截面积沿冷却工质流动的方向逐渐平顺增大。Further, the cross-sectional area of the comb tooth portion and the comb body portion of each of the fins gradually increases smoothly along the flow direction of the cooling medium.

进一步地,所述内部流道的鱼鳃结构单元中最上层和最下层的肋片分别与所内部流道中的上下内表面抵接。Further, the fins of the uppermost layer and the lowermost layer of the gill structural unit of the inner flow channel are respectively abutted against the upper and lower inner surfaces of the inner flow channel.

进一步地,所述鱼鳃结构单元的左右两端与所述内部流道中的左右内表面抵接。Further, the left and right ends of the fish gill structural unit are in contact with the left and right inner surfaces of the inner flow channel.

相比于现有技术,本发明的有益效果:Compared with the prior art, the beneficial effects of the present invention:

1、本发明的鱼鳃仿生结构微通道散热器,通过设置多片上下平行的肋片,增强了冷却工质的混合,使其能更好地冷却通道内的高温区域,强化了通道的散热能力。同时冷却工质在流经鱼鳃结构时,由于冷却工质受到扰动,破坏了边界层,强化了微通道散热器的换热能力。1. The micro-channel radiator of the fish gill bionic structure of the present invention enhances the mixing of the cooling medium by setting multiple parallel fins up and down, so that it can better cool the high temperature area in the channel and strengthen the heat dissipation of the channel ability. At the same time, when the cooling medium flows through the fish gill structure, because the cooling medium is disturbed, the boundary layer is destroyed, and the heat transfer capacity of the micro-channel radiator is strengthened.

2、本发明的鱼鳃仿生结构微通道散热器,通过设置多个齿槽和梳齿,保证了换热的均匀性,增加了微通道的换热面积,增强了冷却工质的混合,从而强化传热,同时由于设置了沿垂直于冷却工质流动方向贯通的齿槽结构,不会大幅增加通道阻力。2. The micro-channel radiator of the fish gill bionic structure of the present invention ensures the uniformity of heat exchange, increases the heat exchange area of the micro-channel, and enhances the mixing of the cooling medium by setting a plurality of tooth slots and comb teeth. The heat transfer is enhanced, and the channel resistance will not be greatly increased due to the setting of the cogging structure that runs through in the direction perpendicular to the flow direction of the cooling medium.

3、通过逐渐增加沿流动的方向肋片的厚度,可以减小冷却工质流经路径的横截面积,使冷却工质流动的速度逐渐增加,提高散热器后半部分的换热效率,进而使散热器整体温度均匀性提高。3. By gradually increasing the thickness of the fins along the flow direction, the cross-sectional area of the cooling medium flowing through the path can be reduced, the speed of the cooling medium flow can be gradually increased, and the heat exchange efficiency of the second half of the radiator can be improved. Improve the overall temperature uniformity of the radiator.

4、本发明的鱼鳃仿生结构微通道散热器,可以通过增加鱼鳃仿生结构单元及其上梳齿和齿槽的数量和增大肋片的厚度,以获得更优的散热能力,但是这会引起泵耗功率增加。本发明可以通过调节以上结构的尺寸,以满足不同的热源冷却需求,使泵耗功率增加的较少,具有很强的适用性。4. The micro-channel radiator of the bionic structure of fish gills of the present invention can obtain better heat dissipation capacity by increasing the number of bionic structural units of fish gills and their upper comb teeth and tooth slots and increasing the thickness of the fins. It will cause the pump power consumption to increase. The present invention can meet the cooling requirements of different heat sources by adjusting the dimensions of the above structures, so that the power consumption of the pump is less increased and has strong applicability.

附图说明Description of drawings

图1为本发明实施例一的微通道的立体结构示意图;1 is a schematic three-dimensional structure diagram of a microchannel according to Embodiment 1 of the present invention;

图2为本发明实施例一的微通道的肋片的立体结构示意图;2 is a schematic three-dimensional structure diagram of a fin of a microchannel according to Embodiment 1 of the present invention;

图3为本发明实施例一的微通道的右视图;3 is a right side view of the microchannel according to the first embodiment of the present invention;

图4为本发明实施例一的微通道的右视图中A处的局部放大图;Fig. 4 is the partial enlarged view of A in the right view of the microchannel according to the first embodiment of the present invention;

图5为本发明实施例一的微通道的主视图;5 is a front view of the microchannel according to the first embodiment of the present invention;

图6为本发明实施例一的微通道的立体结构示意图;6 is a schematic three-dimensional structure diagram of a microchannel according to Embodiment 1 of the present invention;

图7为本发明实施例一的微通道的俯视图中B处的局部放大图;FIG. 7 is a partial enlarged view of B in the top view of the microchannel according to the first embodiment of the present invention;

图8为本发明实施例二的微通道的立体结构示意图;8 is a schematic three-dimensional structure diagram of a microchannel according to Embodiment 2 of the present invention;

图9为本发明实施例二的微通道的左视图;Fig. 9 is the left side view of the microchannel of the second embodiment of the present invention;

图10为本发明实施例三的微通道的立体结构示意图;10 is a schematic three-dimensional structure diagram of a microchannel according to Embodiment 3 of the present invention;

图11为本发明实施例三的微通道中第一肋片的俯视图;11 is a top view of the first rib in the microchannel according to the third embodiment of the present invention;

图12为本发明实施例三的微通道中第二肋片的俯视图;12 is a top view of the second rib in the microchannel according to the third embodiment of the present invention;

图13为本发明实施例三的微通道的主视图;13 is a front view of a microchannel according to Embodiment 3 of the present invention;

图14为本发明实施例三的微通道的右视图;Fig. 14 is the right side view of the microchannel according to the third embodiment of the present invention;

图15为本发明施例一的微通道的等温线云图;Fig. 15 is the isotherm cloud diagram of the microchannel according to the first embodiment of the present invention;

图16为本发明施例三的微通道的等温线云图。FIG. 16 is an isotherm diagram of the microchannel according to the third embodiment of the present invention.

附图标记:1、壳体;2、内部流道;3、鱼鳃结构单元;3.1、第一肋片;3.2、第二肋片;3.3、第三肋片;3.4、第四肋片;4、梳齿部分;4.1、梳齿;4.2、齿槽;5、梳体部分;6、平直部分;7、冷却工质入口;8、冷却工质出口。Reference signs: 1. Shell; 2. Internal flow channel; 3. Fish gill structural unit; 3.1, First fin; 3.2, Second fin; 3.3, Third fin; 3.4, Fourth fin; 4. Comb tooth part; 4.1. Comb tooth; 4.2. Tooth slot; 5. Comb body part; 6. Straight part; 7. Cooling medium inlet; 8. Cooling medium outlet.

具体实施方式Detailed ways

下面结合具体实施例对本发明进行详细说明。以下实施例将有助于本领域的技术人员进一步理解本发明,但不以任何形式限制本发明。应当指出的是,对本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进。这些都属于本发明的保护范围。The present invention will be described in detail below with reference to specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that, for those skilled in the art, several modifications and improvements can be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

实施例一Example 1

参照图1所示,本发明的肋排仿生结构的冷却微通道散热器包括:壳体1,内部流道2和流经所述内部流道2的冷却工质。Referring to FIG. 1 , the cooling micro-channel radiator of the rib-row bionic structure of the present invention includes: a casing 1 , an inner flow channel 2 and a cooling medium flowing through the inner flow channel 2 .

本发明中各实施例的方向以图1为参照系,所述冷却工质流动的方向即为从冷却工质入口7指向冷却工质出口8的方向,以所述冷却工质入口7与冷却工质出口8的连线方向为纵向方向;横向方向为以所述上层盖板平面为基准,其垂直于所述纵向方向。所述横向方向即为左右端,以所述冷却工质出入口所在的一端为上端,所述壳体1所在的另一端为下端,以靠近所述冷却工质入口7的一端为前端,远离所述冷却工质出口8的另一端为后端,所述前后端即为所述纵向方向。The direction of each embodiment in the present invention takes FIG. 1 as a reference system, and the direction of the cooling medium flow is the direction from the cooling medium inlet 7 to the cooling medium outlet 8, and the cooling medium inlet 7 and the cooling medium flow direction. The connection direction of the working medium outlet 8 is the longitudinal direction; the transverse direction is based on the plane of the upper cover plate, which is perpendicular to the longitudinal direction. The lateral direction is the left and right ends, the end where the cooling medium inlet and outlet are located is the upper end, the other end where the shell 1 is located is the lower end, and the end close to the cooling medium inlet 7 is the front end, away from the The other end of the cooling medium outlet 8 is the rear end, and the front and rear ends are the longitudinal directions.

所述壳体1分为上层盖板、和与其大小配合的下层壳体;所述上层盖板的一端设置有冷却工质入口7,另一端设置有冷却工质出口8。其中,下层壳体具有内凹的容纳空间,在本实施例中,下层壳体为长方形槽体。容纳空间的四边为散热器外壁,内部流道2设置于下层壳体内的上表面。所述冷却工质入口7和冷却工质出口8均设置为圆孔,冷却工质出入口的轴线与下层壳体的底面垂直。The casing 1 is divided into an upper layer cover plate and a lower layer casing whose size is matched with the upper layer cover plate; one end of the upper layer cover plate is provided with a cooling medium inlet 7 , and the other end is provided with a cooling medium outlet 8 . Wherein, the lower shell has a concave accommodating space, and in this embodiment, the lower shell is a rectangular groove body. The four sides of the accommodating space are the outer walls of the radiator, and the inner flow channel 2 is arranged on the upper surface of the lower shell. The cooling medium inlet 7 and the cooling medium outlet 8 are both set as circular holes, and the axis of the cooling medium inlet and outlet is perpendicular to the bottom surface of the lower shell.

本实施例中,如图1~2所示,位于所述冷却工质入口7和冷却工质出口8之间的内部流道2中依次设置有四个平行等间距布置的鱼鳃结构单元3,所述鱼鳃结构单元3以所述内部流道2的水平中心平面为基准面上下对称布置,从上到下依次布置有第一肋片3.1、第二肋片3.2、第三肋片3.3和第四肋片3.4,其中所述第一肋片3.1和第二肋片3.2沿纵向方向错位设置位于所述基准面之上,所述第三肋片3.3和第四肋片3.4沿纵向方向错位设置于所述基准面之下。本实施例中所述第二肋片3.2与第三肋片3.3的上下对齐,第二肋片3.2与第三肋片3.3也可合并为一整片肋片来进行布置。每个所述鱼鳃结构单元3横向布置于内部流道2中。本发明通过设置四个等间距分布的鱼鳃结构单元保证了散热的均匀性,再加上上下错位对称设置的四片肋片,增强了冷却工质的混合,使其能更好地冷却通道内的高温区域,强化了通道的散热能力。同时冷却工质在流经鱼鳃结构时,由于冷却工质受到扰动,破坏了边界层,强化了微通道散热器的换热能力。In this embodiment, as shown in FIGS. 1 to 2 , four gill structural units 3 arranged in parallel and at equal intervals are sequentially arranged in the internal flow channel 2 between the cooling medium inlet 7 and the cooling medium outlet 8 , the fish gill structural unit 3 is symmetrically arranged up and down with the horizontal center plane of the internal flow channel 2 as the reference plane, and the first fins 3.1, the second fins 3.2, and the third fins 3.3 are arranged in order from top to bottom. and a fourth rib 3.4, wherein the first rib 3.1 and the second rib 3.2 are disposed above the reference plane in a longitudinal direction staggered, and the third rib 3.3 and the fourth rib 3.4 are arranged in the longitudinal direction The misalignment is provided below the reference plane. In this embodiment, the second rib 3.2 and the third rib 3.3 are aligned up and down, and the second rib 3.2 and the third rib 3.3 can also be combined into a whole rib for arrangement. Each of the gill structural units 3 is laterally arranged in the inner flow channel 2 . The invention ensures the uniformity of heat dissipation by arranging four fish gill structural units distributed at equal intervals, and the four fins arranged symmetrically at the upper and lower positions enhance the mixing of the cooling medium, so that the cooling channel can be better The high temperature area within the channel strengthens the heat dissipation capacity of the channel. At the same time, when the cooling medium flows through the fish gill structure, because the cooling medium is disturbed, the boundary layer is destroyed, and the heat transfer capacity of the micro-channel radiator is strengthened.

本实施例中,图2所示为单片肋片的立体示意图,单片所述肋片包括梳齿部分4和位于所述梳齿部分根部的梳体部分5。结合图2~5可知,所述梳齿部分4分为多根梳齿4.1和多个沿垂直于冷却工质流动的方向贯通的齿槽4.2,多根所述梳齿4.1与齿槽4.2依次相互交错布置,所述梳齿4.1方向朝向所述冷却工质出口8的一侧。本实施例中上下相邻所述肋片之间沿冷却工质流动的方向错位的距离d2大于梳体部分5的宽度d3,以方便冷却工质能顺利地从所述齿槽4.2流过。所述梳齿4.1和齿槽4.2的个数、位置和具体尺寸可以根据实际需要进行调整布置。本发明通过设置多个齿槽和梳齿,保证了换热的均匀性,增加了微通道的换热面积,增强了冷却工质的混合,从而强化传热,同时由于设置了沿垂直于冷却工质流动方向贯通的齿槽结构,不会大幅增加通道阻力。In this embodiment, FIG. 2 is a schematic perspective view of a single piece of rib, and the single piece of fin includes a comb tooth portion 4 and a comb body portion 5 located at the root of the comb tooth portion. 2 to 5, it can be seen that the comb tooth portion 4 is divided into a plurality of comb teeth 4.1 and a plurality of tooth slots 4.2 passing through in a direction perpendicular to the flow of the cooling medium, and the plurality of the comb teeth 4.1 and the tooth slots 4.2 are in sequence. Arranged in a staggered manner, the comb teeth 4 . 1 are directed toward one side of the cooling medium outlet 8 . In this embodiment, the dislocation distance d 2 between the upper and lower adjacent fins along the flow direction of the cooling medium is greater than the width d 3 of the comb body portion 5 , so that the cooling medium can smoothly flow from the tooth slots 4.2 Pass. The number, position and specific size of the comb teeth 4.1 and the tooth slots 4.2 can be adjusted and arranged according to actual needs. By setting a plurality of tooth slots and comb teeth, the invention ensures the uniformity of heat exchange, increases the heat exchange area of the micro-channel, and enhances the mixing of the cooling medium, thereby enhancing the heat transfer. The cogging structure that runs through the working fluid flow direction will not greatly increase the channel resistance.

本实施例中单个所述鱼鳃结构单元3中肋片的个数为四个,但是也可以采用两到八个中的任意数值以满足实际散热的需要。In this embodiment, the number of fins in a single fish gill structural unit 3 is four, but any value from two to eight can also be used to meet the actual heat dissipation needs.

本实施例中,图3为本实施例微通道的右视图,图4为图3中A处放大图,每个所述肋片的梳齿部分4和梳体部分5的横截面积沿冷却工质流动的方向逐渐平顺增大。本发明通过逐渐增加沿流动的方向肋片的厚度,可以减小冷却工质流经路径的横截面积,使冷却工质流动的速度逐渐增加,提高散热器后半部分的换热效率,进而使散热器整体温度均匀性提高。In this embodiment, FIG. 3 is a right side view of the microchannel of this embodiment, and FIG. 4 is an enlarged view of the position A in FIG. 3 . The direction of working fluid flow gradually increases smoothly. By gradually increasing the thickness of the fins along the flow direction, the present invention can reduce the cross-sectional area of the path through which the cooling medium flows, so that the flow speed of the cooling medium can be gradually increased, thereby improving the heat exchange efficiency of the second half of the radiator, and further Improve the overall temperature uniformity of the radiator.

本实施例中,所述梳体部分5上端部的迎流面为光滑过渡的弧形表面,采用这样的设计可以减少冷却工质流动时遇到的阻力。In this embodiment, the upstream surface of the upper end of the comb body portion 5 is a smooth transition arc surface, and this design can reduce the resistance encountered when the cooling medium flows.

本实施例中,所述冷却工质为水,但也可以采用含纳米金属颗粒的水溶液、氟利昂、碳纳米管的悬浮液或石墨烯的悬浮液中的任意一种。In this embodiment, the cooling medium is water, but any one of an aqueous solution containing nano-metal particles, a freon, a suspension of carbon nanotubes, or a suspension of graphene can also be used.

本实施例中,如图4~7所示,鱼鳃仿生结构微通道散热器的长度L为16.5mm,宽度W为10mm,高度H为1mm, 冷却工质出入口的直径D均为1mm。所述鱼鳃结构单元3到入口处壁面的距离L2和到出口处壁面的距离L1相同。In this embodiment, as shown in FIGS. 4-7 , the length L of the microchannel radiator of the fish gill bionic structure is 16.5 mm, the width W is 10 mm, the height H is 1 mm, and the diameter D of the cooling medium inlet and outlet is 1 mm. The distance L2 from the gill structural unit 3 to the wall at the inlet is the same as the distance L1 from the wall at the outlet.

如图4所示,所述梳齿部分4的宽度d4为梳体部分5宽度d3的四倍。所述第三肋片3.3与第四肋片3.4之间错位的距离d2和相邻两个鱼鳃结构单元3之间的间距d1相同,保证整体的散热性。从图中可以看出,所述第三肋片3.3与第四肋片3.4之间错位的距离d2大于梳体部分5的宽度d3以便冷却工质通过齿槽4.2顺利流经所述鱼鳃结构单元3。As shown in FIG. 4 , the width d 4 of the comb portion 4 is four times the width d 3 of the comb portion 5 . The dislocation distance d 2 between the third fins 3.3 and the fourth fins 3.4 is the same as the distance d 1 between two adjacent gill structural units 3 to ensure the overall heat dissipation. It can be seen from the figure that the dislocation distance d2 between the third fin 3.3 and the fourth fin 3.4 is greater than the width d3 of the comb body part 5 so that the cooling medium can smoothly flow through the fish through the tooth slot 4.2 Gill Structural Unit 3.

从图4可以看出,相邻上下所述肋片之间留有间隙,本实施例中间隙为0.05mm,当然也可以采用小于0.1mm的其他数值,方便冷却剂通过,减小阻力。也可以根据实际情况采取不留间隙的方案。It can be seen from FIG. 4 that there is a gap between the adjacent upper and lower fins. In this embodiment, the gap is 0.05mm. Of course, other values less than 0.1mm can also be used to facilitate the passage of the coolant and reduce the resistance. It is also possible to adopt a plan that does not leave gaps according to the actual situation.

本实施例中,如图6~7所示,所述齿槽4.2的宽度w2与梳齿4.1的宽度w1相同。In this embodiment, as shown in FIGS. 6 to 7 , the width w 2 of the tooth slots 4.2 is the same as the width w 1 of the comb teeth 4.1.

本实施例中,所述第一肋片3.1的上边和第四肋片3.4的下边分别与所述上层盖板和下层壳体的内表面抵接,避免形成狭长窄缝,影响冷却工质对流换热。In this embodiment, the upper side of the first fin 3.1 and the lower side of the fourth fin 3.4 are in contact with the inner surfaces of the upper cover plate and the lower shell respectively, so as to avoid forming long and narrow slits and affecting the convection of the cooling medium heat exchange.

本实施例中,如图5~6所示,单个鱼鳃结构单元3上的四片肋片的左右两端的梳齿4.1和梳体部分5和内部流道2的左右侧壁相抵接,起到固定所述肋片的作用。In this embodiment, as shown in Figures 5 to 6, the comb teeth 4.1 at the left and right ends of the four fins on the single fish gill structural unit 3 and the comb body part 5 are in contact with the left and right side walls of the internal flow channel 2, and to fix the rib.

本实施例中,所述壳体1、冷却工质出入口的壳体厚度相同,保证整体散热的均匀性。In this embodiment, the shell 1 and the shell thickness of the cooling medium inlet and outlet are the same, so as to ensure the uniformity of the overall heat dissipation.

本实施例中,所述壳体1和鱼鳃结构单元3的材料均为硅质。由于硅在自然界中的储量丰富,提纯成本低,相对其他半金属元素在高温下的性质更为稳定,故被广泛用于半导体工业。同时,硅具有良好的导热性,耐腐蚀性和易加工性。但其材料也可以根据实际情况采用铜、铁、银、铝、锌、镍合金、碳化硅、金刚石、石墨烯、碳纳米管、复合材料中的任意一种或两种以上。In this embodiment, the materials of the shell 1 and the gill structural unit 3 are all siliceous. Silicon is widely used in the semiconductor industry due to its abundant reserves in nature, low purification cost, and more stable properties at high temperature than other semi-metallic elements. At the same time, silicon has good thermal conductivity, corrosion resistance and easy processing. However, the material can also be any one or two or more of copper, iron, silver, aluminum, zinc, nickel alloy, silicon carbide, diamond, graphene, carbon nanotube, and composite materials according to the actual situation.

实施例二Embodiment 2

如图8~9所示为本发明第二实施例的鱼鳃仿生结构微通道散热器的立体结构示意图和左视图。本实施例与实施例一的区别在于本实施例中单个鱼鳃结构单元3的个数为两个,每个所述鱼鳃结构单元3由沿纵向方向依次平行错位堆叠的第一肋片3.1、第二肋片3.2和第三肋片3.3组成,其中所述第二肋片3.2以所述内部流道2的水平中间平面为基准面上下对称布置。和实施例一相比,实施例二可以减小冷却工质流体在流动时受到的阻力,以满足不同热源的冷却需求。Figures 8 to 9 are the schematic diagram and the left side view of the three-dimensional structure of the microchannel radiator of the bionic structure of fish gills according to the second embodiment of the present invention. The difference between this embodiment and the first embodiment is that the number of a single gill structural unit 3 in this embodiment is two, and each gill structural unit 3 is composed of first fins 3.1 stacked in parallel and displaced in sequence along the longitudinal direction. , a second rib 3.2 and a third rib 3.3, wherein the second rib 3.2 is arranged symmetrically up and down with the horizontal middle plane of the inner flow channel 2 as a reference. Compared with the first embodiment, the second embodiment can reduce the resistance of the cooling working fluid when it flows, so as to meet the cooling requirements of different heat sources.

实施例三Embodiment 3

如图10-14为本发明实施例三的示意图,该实施例与实施例一的区别在于以下几点。10-14 are schematic diagrams of Embodiment 3 of the present invention. The difference between this embodiment and Embodiment 1 lies in the following points.

如图10所示,根据实际散热需要,本实施例中鱼鳃结构单元3的数量仅为一个。所述鱼鳃结构单元3上设置有四片肋片,中间第二肋片3.2和第三肋片3.3的结构相同,最上面第一肋片3.1和最下面第四肋片3.4的结构相同。所述肋片的俯视图如图11~12所示,其中图11中第一肋片3.1的形状与实施例一中的一致;图12为第二肋片3.2的俯视图,其中中间部分为平直部分6,所述平直部分6未设置齿槽4.2,所述平直部分6与梳体部分5结合为一整体。通过平直部分6的设置,减少了中间两片肋片上齿槽4.2的数量,强行让冷却工质从上方的第一肋片3.1或者下方的第四肋片3.4流过,以满足不同热源分布的需要。As shown in FIG. 10 , according to actual heat dissipation requirements, the number of fish gill structural units 3 in this embodiment is only one. The fish gill structural unit 3 is provided with four fins, the middle second fin 3.2 and the third fin 3.3 have the same structure, and the uppermost first fin 3.1 and the lowermost fourth fin 3.4 have the same structure. The top views of the fins are shown in Figures 11-12, wherein the shape of the first rib 3.1 in Figure 11 is the same as that in the first embodiment; Figure 12 is a top view of the second rib 3.2, wherein the middle part is straight Part 6, the straight part 6 is not provided with tooth slots 4.2, and the straight part 6 is combined with the comb body part 5 as a whole. Through the arrangement of the straight portion 6, the number of tooth slots 4.2 on the two middle fins is reduced, and the cooling medium is forced to flow through the first fin 3.1 above or the fourth fin 3.4 below, so as to meet the distribution of different heat sources. needs.

图13为本实施例微通道的主视图。从图11和12可以看出,第一肋片3.1或第四肋片3.4中最左边或最右边梳齿4.1的宽度为其它两片肋片相同位置梳齿4.1宽度的两倍,这样就刚好使得上下所述齿槽4.2相互错位开来。本实施例通过上下错位齿槽的设置,可以增加冷却工质的扰动,进一步增加微通道散热器的散热性能。FIG. 13 is a front view of the microchannel of this embodiment. It can be seen from Figures 11 and 12 that the width of the leftmost or rightmost comb teeth 4.1 in the first fin 3.1 or the fourth rib 3.4 is twice the width of the comb teeth 4.1 in the same position of the other two fins, so that it is just right The upper and lower tooth slots 4.2 are displaced from each other. This embodiment can increase the disturbance of the cooling medium and further increase the heat dissipation performance of the micro-channel heat sink through the arrangement of the upper and lower dislocation tooth slots.

图14为本实施例微通道的右视图,从图中可以看出各肋片之间留有间隔,并且靠近冷却工质入口7处的间隔大,靠近冷却工质出口8处的间隔小。14 is a right side view of the microchannel of this embodiment. It can be seen from the figure that there are intervals between the fins, and the interval near the cooling medium inlet 7 is large, and the interval near the cooling medium outlet 8 is small.

表1、2和图15、16分别为本发明实施例利用COMSOL软件进行实施例一和实施例三做的仿真实验的数据结果图和入口流量为0.5g/s的等温线云图。Tables 1 and 2 and Figures 15 and 16 are respectively the data result diagrams and the isotherm cloud diagrams with an inlet flow rate of 0.5 g/s of the simulation experiments performed by using COMSOL software in Embodiments 1 and 3 according to the embodiment of the present invention.

本实施例中,所述微通道散热器的材料为硅质。本次仿真实验做出如下简化假设:In this embodiment, the material of the micro-channel heat sink is silicon. This simulation experiment makes the following simplified assumptions:

(1) 冷却工质流动和传热均处于稳态,冷却工质不可压缩,流态为层流;(1) The flow and heat transfer of the cooling medium are in a steady state, the cooling medium is incompressible, and the flow state is laminar flow;

(2) 固体材料均常物性,固体导热材料各向同性;(2) Solid materials have constant physical properties, and solid thermal conductive materials are isotropic;

(3) 流道壁面采用无滑移边界条件;(3) The no-slip boundary condition is adopted for the wall of the runner;

(4) 不计重力,不考虑辐射换热和粘性耗散引起的耗散热。(4) Regardless of gravity, dissipated heat caused by radiative heat transfer and viscous dissipation is not considered.

边界条件如下:The boundary conditions are as follows:

(1) 流动和传热充分发展,入口水温恒定 ;(1) The flow and heat transfer are fully developed, and the inlet water temperature is constant;

(2) 入口流量为0.5g/s~1g/s;(2) The inlet flow is 0.5g/s~1g/s;

(3) 出口:压力出口条件;(3) Outlet: pressure outlet condition;

(4) 给定热源功率100W,除与芯片接触的位置,热沉外壁面绝热。(4) For a given heat source power of 100W, the outer wall of the heat sink is insulated except for the position in contact with the chip.

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Figure 639233DEST_PATH_IMAGE002

从表1~2可以看出,当质量流量从0.5g/s变化到1g/s时,随着入口质量流量的增加,热沉的换热能力增强,对流换热系数增加,单位面积上带走的热量更多。在实施例三中,由于减少了位于鱼鳃结构单元3上中间的第二肋片3.2和第三肋片3.3上齿槽4.2的数量,强迫让冷却工质从上下的第一肋片3.1和第四肋片3.4中的齿槽4.2处流过。由于上下两片肋片距离热源位置较近,温度较高,更多的冷却工质流过上下两片肋片,强化了散热器整体的换热能力。但同时,由于齿槽4.2的减少,导致肋片对冷却工质的阻碍增加,通道压降有所增大。It can be seen from Tables 1 and 2 that when the mass flow rate changes from 0.5g/s to 1g/s, with the increase of the inlet mass flow rate, the heat transfer capacity of the heat sink increases, the convective heat transfer coefficient increases, and the band on the unit area increases. Walk more calories. In the third embodiment, since the number of tooth slots 4.2 on the second fins 3.2 and the third fins 3.3 located in the middle of the fish gill structural unit 3 is reduced, the cooling medium is forced to flow from the upper and lower first fins 3.1 and 3.1. The slots 4.2 in the fourth rib 3.4 flow through. Because the upper and lower fins are closer to the heat source and the temperature is higher, more cooling medium flows through the upper and lower fins, which strengthens the overall heat exchange capacity of the radiator. But at the same time, due to the reduction of the cogging 4.2, the obstruction of the fins to the cooling medium increases, and the channel pressure drop increases.

从图15~16可以看出,当质量流量固定在0.5g/s时,实施例三比实施例一的温度分布更加均匀。齿槽4.2的设置可以拓宽冷却工质的流动路径,有减阻的作用,但是设置过多的齿槽4.2会导致通道中心位置的温度较高,从而使通道的冷却能力降低,因此中间的两片肋片采用了平直部分6,而且上下齿槽采用错位布置的形式,增加了冷却工质的流动,平衡了通道的冷却能力和压降。It can be seen from Figures 15-16 that when the mass flow rate is fixed at 0.5 g/s, the temperature distribution of the third embodiment is more uniform than that of the first embodiment. The setting of the tooth slot 4.2 can widen the flow path of the cooling medium, and has the effect of reducing drag, but the setting of too many tooth slots 4.2 will cause the temperature at the center of the channel to be higher, thereby reducing the cooling capacity of the channel. The fins use a straight part 6, and the upper and lower tooth slots are arranged in a dislocation form, which increases the flow of the cooling medium and balances the cooling capacity and pressure drop of the channel.

本发明中第一和第三实施例中的单个鱼鳃结构单元3上中间的第二肋片3.2和第三肋片3.3可以合并成一个沿内部流道2的中心平面对称布置的整体肋片。The second fins 3.2 and the third fins 3.3 in the middle of the single gill structural unit 3 in the first and third embodiments of the present invention can be combined into an integral fin symmetrically arranged along the central plane of the internal flow channel 2 .

本发明的鱼鳃仿生结构微通道散热器,可以通过增加鱼鳃仿生结构单元及其上梳齿和齿槽的数量和增大肋片的厚度,以获得更优的散热能力,但是这会引起泵耗功率增加。本发明可以通过调节以上结构的尺寸,以满足不同的热源冷却需求,使泵耗功率增加的较少,具有很强的适用性。The micro-channel radiator of the bionic structure of fish gills of the present invention can obtain better heat dissipation capability by increasing the number of bionic structural units of fish gills and their upper comb teeth and tooth slots, and increasing the thickness of the fins, but this will cause The power consumption of the pump increases. The present invention can meet the cooling requirements of different heat sources by adjusting the dimensions of the above structures, so that the power consumption of the pump is less increased and has strong applicability.

本发明的鱼鳃仿生结构微通道散热器可以采用3D打印一体成型。The microchannel radiator of the fish gill bionic structure of the present invention can be integrally formed by 3D printing.

在本申请的描述中,需要理解的是,方位词如“前、后、上、下、左、右”、“横向、竖向、垂直、水平”和“顶、底”等所指示的方位或位置关系通常是基于附图所示的方位或位置关系,仅是为了便于描述本申请和简化描述,在未作相反说明的情况下,这些方位词并不指示和暗示所指的装置或元件必须具有特定的方位或者以特定的方位构造和操作,因此不能理解为对本申请保护范围的限制;方位词“内、外”是指相对于各部件本身的轮廓的内外。In the description of this application, it should be understood that the orientations indicated by the orientation words such as "front, rear, top, bottom, left, right", "horizontal, vertical, vertical, horizontal" and "top, bottom" etc. Or the positional relationship is usually based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and these orientations do not indicate or imply the indicated device or element unless otherwise stated. It must have a specific orientation or be constructed and operated in a specific orientation, so it cannot be construed as a limitation on the protection scope of the application; the orientation words "inside and outside" refer to the inside and outside relative to the contour of each component itself.

以上对本发明的具体实施例进行了描述。需要理解的是,本发明并不局限于上述特定实施方式,本领域技术人员可以在权利要求的范围内做出各种变形或修改,这并不影响本发明的实质内容。同时集成电路只是本发明适用的应用领域之一,能源动力、电力电子、化工过程等各种应用领域均存在类似的散热需求,本领域技术人员均可以运用本发明构思及变形或改进进行有效散热。Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the above-mentioned specific embodiments, and those skilled in the art can make various variations or modifications within the scope of the claims, which do not affect the essential content of the present invention. At the same time, integrated circuits are only one of the application fields to which the present invention is applicable. Various application fields such as energy power, power electronics, and chemical processes all have similar heat dissipation requirements. Those skilled in the art can use the concept and deformation or improvement of the present invention to effectively dissipate heat. .

Claims (10)

1.一种鱼鳃仿生结构微通道散热器,包括壳体(1)、内部流道(2)和流经所述内部流道(2)的冷却工质;其特征在于:1. A micro-channel radiator with a bionic structure of fish gills, comprising a shell (1), an internal flow channel (2) and a cooling medium flowing through the internal flow channel (2); it is characterized in that: 所述壳体(1)的一端设置有冷却工质入口(7),另一端设置有冷却工质出口(8);One end of the casing (1) is provided with a cooling medium inlet (7), and the other end is provided with a cooling medium outlet (8); 所述内部流道(2)中至少设置有一个鱼鳃结构单元(3),每个所述鱼鳃结构单元(3)至少由两片平行叠放在一起的梳子状的肋片组成;所述鱼鳃结构单元(3)横向布置于内部流道(2)中;所述梳子状的肋片包括朝向所述冷却工质出口(8)的梳齿部分(4)和位于所述梳齿部分根部的梳体部分(5)。At least one gill structural unit (3) is provided in the internal flow channel (2), and each gill structural unit (3) is at least composed of two comb-shaped fins stacked in parallel; The fish gill structural unit (3) is laterally arranged in the internal flow channel (2); the comb-shaped fins include a comb-tooth portion (4) facing the cooling medium outlet (8) and a comb-tooth portion (4) located on the comb-tooth Part of the comb body at the root (5). 2.根据权利要求1所述的一种鱼鳃仿生结构微通道散热器,其特征在于:所述壳体(1)由上层盖板和凹槽状的下层壳体组装而成,所述内部流道(2)为所述下层壳体的凹槽状部分。2 . The microchannel radiator of fish gill biomimetic structure according to claim 1 , wherein the shell ( 1 ) is assembled from an upper cover plate and a groove-shaped lower shell, and the inner flow The channel (2) is the groove-shaped part of the lower shell. 3.根据权利要求1所述的一种鱼鳃仿生结构微通道散热器,其特征在于:多个所述鱼鳃结构单元(3)沿内部流道(2)的流动的方向平行等间距布置。3 . The micro-channel radiator of fish gill biomimetic structure according to claim 1 , characterized in that: a plurality of the fish gill structural units ( 3 ) are arranged in parallel and at equal intervals along the flow direction of the internal flow channel ( 2 ). 4 . 4.根据权利要求1所述的一种鱼鳃仿生结构微通道散热器,其特征在于:单个所述鱼鳃结构单元(3)上肋片的数量为2到8片。4 . The micro-channel radiator of fish gill biomimetic structure according to claim 1 , wherein the number of ribs on a single fish gill structural unit ( 3 ) is 2 to 8. 5 . 5.根据权利要求4所述的一种鱼鳃仿生结构微通道散热器,其特征在于:上下相邻所述肋片之间留有间隙。5 . The microchannel radiator of fish gill biomimetic structure according to claim 4 , wherein a gap is left between the upper and lower adjacent fins. 6 . 6.根据权利要求1所述的一种鱼鳃仿生结构微通道散热器,其特征在于:单个所述鱼鳃结构单元(3)的相邻两肋片之间沿内部流道(2)流动的方向错位排列布置,所述相邻肋片之间错位的距离d2大于梳体部分(5)的宽度d36 . The microchannel radiator of fish gill biomimetic structure according to claim 1 , wherein the radiator flowing along the internal flow channel ( 2 ) between two adjacent fins of a single fish gill structural unit ( 3 ) The directions are staggered and arranged, and the staggered distance d 2 between the adjacent fins is greater than the width d 3 of the comb body part (5). 7.根据权利要求1所述的一种鱼鳃仿生结构微通道散热器,其特征在于:单个所述鱼鳃结构单元(3)的相邻两肋片上的梳齿部分(4)在垂直于冷却工质流动的方向上相互错位布置。7 . The microchannel radiator of fish gill biomimetic structure according to claim 1 , characterized in that: the comb tooth portion ( 4 ) on the adjacent two fins of the single fish gill structural unit ( 3 ) is perpendicular to the cooling The working fluids are arranged in mutual dislocations in the direction of flow. 8.根据权利要求1所述的一种鱼鳃仿生结构微通道散热器,其特征在于:每个所述肋片的梳齿部分(4)和梳体部分(5)的横截面积沿冷却工质流动的方向逐渐平顺增大。8 . The microchannel radiator of fish gill biomimetic structure according to claim 1 , wherein the cross-sectional area of the comb tooth portion ( 4 ) and the comb body portion ( 5 ) of each of the fins is along the cooling process. 9 . The direction of mass flow gradually increases smoothly. 9.根据权利要求1所 述的一种鱼鳃仿生结构微通道散热器,其特征在于:所述内部流道(2)的鱼鳃结构单元(3)中最上层和最下层的肋片分别与所述内部流道(2)中的上下内表面抵接。9 . The microchannel radiator of fish gill biomimetic structure according to claim 1 , wherein the fins of the uppermost layer and the lowermost layer of the fish gill structural unit (3) of the internal flow channel (2) are respectively The upper and lower inner surfaces of the inner flow channel (2) are in abutment. 10.根据权利要求1所述的一种鱼鳃仿生结构微通道散热器,其特征在于:所述鱼鳃结构单元(3)的左右两端与所述内部流道(2)中的左右内表面抵接。10 . The micro-channel radiator of fish gill biomimetic structure according to claim 1 , wherein the left and right ends of the fish gill structural unit ( 3 ) and the left and right inner surfaces of the internal flow channel ( 2 ) Abut.
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US5609202A (en) * 1995-06-30 1997-03-11 International Business Machines Corporation Enhanced flow distributor for integrated circuit spot coolers
CN101022097A (en) * 2007-03-13 2007-08-22 秦彪 Circulating hot tube type radiator
CN101588708A (en) * 2008-05-23 2009-11-25 中国科学院工程热物理研究所 Microchannel heat sink and measuring device
WO2020022013A1 (en) * 2018-07-24 2020-01-30 信越ポリマー株式会社 Paper sheet and method for manufacturing paper sheet

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Publication number Priority date Publication date Assignee Title
US5609202A (en) * 1995-06-30 1997-03-11 International Business Machines Corporation Enhanced flow distributor for integrated circuit spot coolers
CN101022097A (en) * 2007-03-13 2007-08-22 秦彪 Circulating hot tube type radiator
CN101588708A (en) * 2008-05-23 2009-11-25 中国科学院工程热物理研究所 Microchannel heat sink and measuring device
WO2020022013A1 (en) * 2018-07-24 2020-01-30 信越ポリマー株式会社 Paper sheet and method for manufacturing paper sheet

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