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CN115084997B - Laser cooling heat sink device and semiconductor laser thereof - Google Patents

Laser cooling heat sink device and semiconductor laser thereof Download PDF

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Publication number
CN115084997B
CN115084997B CN202210535639.4A CN202210535639A CN115084997B CN 115084997 B CN115084997 B CN 115084997B CN 202210535639 A CN202210535639 A CN 202210535639A CN 115084997 B CN115084997 B CN 115084997B
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flow channel
layer
water inlet
layer block
channel
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CN115084997A (en
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曹明轩
臧鲁浩
高一伟
何国豪
王颖
甘宏海
王俊超
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Wuyi University Fujian
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/024Arrangements for thermal management
    • H01S5/02407Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling
    • H01S5/02423Liquid cooling, e.g. a liquid cools a mount of the laser

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

The invention discloses a laser cooling heat sink device and a semiconductor laser thereof, wherein the heat sink device is provided with a water inlet hole, a water inlet layer flow channel, a first guide channel, a water return layer flow channel, a second guide channel and a water outlet hole which are communicated in sequence; the water inlet layer flow channel and the backwater layer flow channel are positioned in different layers; the water inlet layer flow channel and the backwater layer flow channel are provided with slow flow sections, and the side wall surfaces of the slow flow sections conform to a sinusoidal curve along the length direction; the wavy channels are added to increase the heat exchange area, so that the mixing of cold and hot fluid is optimized, and the heat exchange efficiency is enhanced.

Description

一种激光器冷却热沉装置及其半导体激光器Laser cooling heat sink device and semiconductor laser thereof

技术领域Technical Field

本发明涉及热沉装置,特别是一种激光器冷却热沉装置及其半导体激光器。The invention relates to a heat sink device, in particular to a laser cooling heat sink device and a semiconductor laser thereof.

背景技术Background Art

现在半导体激光器的需求是小体积、光电转换效率高、高功率、稳定性好以及寿命长,随着需求越来越多和越来越高,对散热要求也越来越高。The current demands for semiconductor lasers are small size, high photoelectric conversion efficiency, high power, good stability and long life. As the demands become more and more numerous and higher, the requirements for heat dissipation are also getting higher and higher.

现在半导体激光器通常是由最基础的发光单管进行组合,发光单管形成多个Bar条,再由多个Bar条形成一定的叠阵。激光芯片尺寸较小,功率大,极大的热流密度。为了使激光器获得高功率、高的可靠性和高的光电转换效率,高温度会影响激光器性能,且减少激光器寿命。因此能高效散热的激光器冷却热沉装置,对于半导体激光器十分重要。Nowadays, semiconductor lasers are usually composed of the most basic single light-emitting tubes, which form multiple Bars, and then multiple Bars form a certain stacked array. The laser chip is small in size, high in power, and has a very high heat flux density. In order to make the laser obtain high power, high reliability, and high photoelectric conversion efficiency, high temperature will affect the performance of the laser and reduce the life of the laser. Therefore, a laser cooling heat sink device that can dissipate heat efficiently is very important for semiconductor lasers.

发明内容Summary of the invention

本发明的目的在于至少解决现有技术中存在的技术问题之一,提供一种激光器冷却热沉装置及其半导体激光器。The purpose of the present invention is to solve at least one of the technical problems existing in the prior art and to provide a laser cooling heat sink device and a semiconductor laser thereof.

本发明解决其问题所采用的技术方案是:The technical solution adopted by the present invention to solve the problem is:

本发明的第一方面,一种激光器冷却热沉装置,所述装置设置有依次连通的进水孔、进水层流道、第一导引道、回水层流道、第二导引道、出水孔;所述进水层流道和所述回水层流道位于不同的层面中;所述进水层流道和所述回水层流道设置有缓流段,所述缓流段的侧壁面沿长度方向符合正弦曲线。The first aspect of the present invention is a laser cooling heat sink device, which is provided with a water inlet hole, a water inlet layer flow channel, a first guide channel, a return water layer flow channel, a second guide channel, and a water outlet hole which are connected in sequence; the water inlet layer flow channel and the return water layer flow channel are located in different planes; the water inlet layer flow channel and the return water layer flow channel are provided with a slow flow section, and the side wall surface of the slow flow section conforms to a sine curve along the length direction.

根据本发明的第一方面,所述缓流段的相对两侧的侧壁面均符合正弦曲线,其中一侧的侧壁面的波峰与另一侧的侧壁面的波峰位置对应,其中一侧的侧壁面的波谷与另一侧的侧壁面的波谷位置对应。According to the first aspect of the present invention, the side walls on the opposite sides of the slow flow section conform to a sine curve, wherein the crest of the side wall on one side corresponds to the crest of the side wall on the other side, and the trough of the side wall on one side corresponds to the trough of the side wall on the other side.

根据本发明的第一方面,所述正弦曲线对应的方程式为:y=Asin(2πx/λ),其中,A为振幅,λ为波长。According to the first aspect of the present invention, the equation corresponding to the sine curve is: y=Asin(2πx/λ), wherein A is the amplitude and λ is the wavelength.

根据本发明的第一方面,所述振幅的范围为1微米至90微米,所述波长的范围为250微米至1000微米。According to the first aspect of the present invention, the amplitude ranges from 1 micron to 90 microns, and the wavelength ranges from 250 microns to 1000 microns.

根据本发明的第一方面,所述进水层流道设置有多条缓流段,所述进水孔与所述进水层流道的多条缓流段之间连通有第一合流道。According to the first aspect of the present invention, the water inlet layer flow channel is provided with a plurality of slow flow sections, and a first confluence channel is connected between the water inlet hole and the plurality of slow flow sections of the water inlet layer flow channel.

根据本发明的第一方面,所述回水层流道设置有多条缓流段,所述回水层流道还包括第二合流道,所述回水层流道的多条缓流段和所述第二合流道连通。According to the first aspect of the present invention, the return layer flow channel is provided with a plurality of slow flow sections, and the return layer flow channel further comprises a second confluence channel, and the plurality of slow flow sections of the return layer flow channel are connected to the second confluence channel.

根据本发明的第一方面,所述进水层流道的多条缓流段与所述回水层流道的多条缓流段一一对应地连通。According to the first aspect of the present invention, the plurality of slow flow sections of the water inlet layer flow channel are connected to the plurality of slow flow sections of the water return layer flow channel in a one-to-one correspondence.

根据本发明的第一方面,所述装置包括依次叠放的第一层块、第二层块、第三层块、第四层块和第五层块,所述进水孔和所述出水孔均位于所述第五层块上;所述进水层流道位于所述第四层块上,所述回水层流道位于所述第二层块上;所述第一导引道位于所述第三层块上,所述第二导引道位于所述第三层块和所述第四层块上。According to the first aspect of the present invention, the device includes a first layer block, a second layer block, a third layer block, a fourth layer block and a fifth layer block stacked in sequence, the water inlet hole and the water outlet hole are both located on the fifth layer block; the water inlet layer flow channel is located on the fourth layer block, and the return water layer flow channel is located on the second layer block; the first guide channel is located on the third layer block, and the second guide channel is located on the third layer block and the fourth layer block.

根据本发明的第一方面,所述第一层块、所述第二层块、所述第三层块、所述第四层块和所述第五层块均由3D打印而成。According to the first aspect of the present invention, the first layer block, the second layer block, the third layer block, the fourth layer block and the fifth layer block are all formed by 3D printing.

本发明的第二方面,一种半导体激光器,所述半导体激光器包括如本发明的第一方面所述的激光器冷却热沉装置。A second aspect of the present invention is a semiconductor laser, comprising the laser cooling heat sink device according to the first aspect of the present invention.

上述方案至少具有以下的有益效果:缓流段的侧壁面为曲面,沿长度方向符合正弦曲线,增大了换热面积进而增大表面换热系数;在热沉装置的进水层流道和所述回水层流道均设置有缓流段能使进水层流道的热流体和回水层流道的冷流体混合更充分,强化微尺度条件下流体的受迫对流。一方面,缓流段的截面面积的变化能够中断热边界层发展,使换热一直处于未充分发展阶段,强化传热性能;另一方面,缓流段的符合正弦曲线的波浪凹穴侧壁面,能增强流体内部扰动,进而对流动与传热特性产生重要影响,使传热性能的增强远远大于压力的损失。The above scheme has at least the following beneficial effects: the side wall surface of the slow flow section is a curved surface, which conforms to a sine curve along the length direction, thereby increasing the heat exchange area and thus increasing the surface heat transfer coefficient; the slow flow section is provided in both the water inlet layer flow channel and the return layer flow channel of the heat sink device, which can make the hot fluid in the water inlet layer flow channel and the cold fluid in the return layer flow channel mix more fully, thereby strengthening the forced convection of the fluid under micro-scale conditions. On the one hand, the change in the cross-sectional area of the slow flow section can interrupt the development of the thermal boundary layer, so that the heat exchange is always in an underdeveloped stage, thereby strengthening the heat transfer performance; on the other hand, the side wall surface of the wave cavity of the slow flow section conforming to the sine curve can enhance the internal disturbance of the fluid, thereby having an important influence on the flow and heat transfer characteristics, so that the enhancement of the heat transfer performance is far greater than the pressure loss.

本发明的附加方面和优点将在下面的描述中部分给出,部分将从下面的描述中变得明显,或通过本发明的实践了解到。Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

附图用来提供对本发明技术方案的进一步理解,并且构成说明书的一部分,与本发明的实施例一起用于解释本发明的技术方案,并不构成对本发明技术方案的限制。The accompanying drawings are used to provide a further understanding of the technical solution of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the technical solution of the present invention and do not constitute a limitation on the technical solution of the present invention.

图1是本发明实施例一种激光器冷却热沉装置的结构图;FIG1 is a structural diagram of a laser cooling heat sink device according to an embodiment of the present invention;

图2是本发明实施例一种激光器冷却热沉装置的结构分解图;FIG2 is a structural exploded view of a laser cooling heat sink device according to an embodiment of the present invention;

图3是第二层块、第三层块、第四层块和第五层块的结构图;FIG3 is a structural diagram of a second layer block, a third layer block, a fourth layer block and a fifth layer block;

图4是第三层块、第四层块和第五层块的结构图;FIG4 is a structural diagram of a third layer block, a fourth layer block and a fifth layer block;

图5是第四层块和第五层块的结构图;FIG5 is a structural diagram of a fourth layer block and a fifth layer block;

图6是缓流段的结构示意图;FIG6 is a schematic diagram of the structure of the slow flow section;

图7是正弦曲线的曲线示意图。FIG. 7 is a curve diagram of a sine curve.

具体实施方式DETAILED DESCRIPTION

本部分将详细描述本发明的具体实施例,本发明之较佳实施例在附图中示出,附图的作用在于用图形补充说明书文字部分的描述,使人能够直观地、形象地理解本发明的每个技术特征和整体技术方案,但其不能理解为对本发明保护范围的限制。This section will describe in detail the specific embodiments of the present invention. The preferred embodiments of the present invention are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present invention, but it cannot be understood as a limitation on the scope of protection of the present invention.

在本发明的描述中,需要理解的是,涉及到方位描述,例如上、下、前、后、左、右等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

在本发明的描述中,若干的含义是一个或者多个,多个的含义是两个以上,大于、小于、超过等理解为不包括本数,以上、以下、以内等理解为包括本数。如果有描述到第一、第二只是用于区分技术特征为目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量或者隐含指明所指示的技术特征的先后关系。In the description of the present invention, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood as not including the number itself, and "above", "below", "within" etc. are understood as including the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

本发明的描述中,除非另有明确的限定,设置、安装、连接等词语应做广义理解,所属技术领域技术人员可以结合技术方案的具体内容合理确定上述词语在本发明中的具体含义。In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

参照图1和图2,本发明的第一方面的实施例,提供了一种激光器冷却热沉装置。1 and 2 , an embodiment of a first aspect of the present invention provides a laser cooling heat sink device.

激光器冷却热沉装置设置有依次连通的进水孔210、进水层流道310、第一导引道410、回水层流道320、第二导引道420、出水孔220;进水层流道310和回水层流道320位于不同的层面中;进水层流道310和回水层流道320设置有缓流段500,缓流段500的侧壁面沿长度方向符合正弦曲线。The laser cooling heat sink device is provided with a water inlet hole 210, a water inlet layer flow channel 310, a first guide channel 410, a return water layer flow channel 320, a second guide channel 420, and a water outlet hole 220 which are connected in sequence; the water inlet layer flow channel 310 and the return water layer flow channel 320 are located in different levels; the water inlet layer flow channel 310 and the return water layer flow channel 320 are provided with a slow flow section 500, and the side wall surface of the slow flow section 500 conforms to a sine curve along the length direction.

需要说明的是,该缓流段500包括进水层流道310的多条缓流段311和回水层流道320的多条缓流段321。It should be noted that the slow flow section 500 includes a plurality of slow flow sections 311 of the water inlet layer flow channel 310 and a plurality of slow flow sections 321 of the water return layer flow channel 320 .

在该实施例中,缓流段500的侧壁面为曲面,沿长度方向符合正弦曲线,增大了换热面积进而增大表面换热系数;在热沉装置的进水层流道310和回水层流道320均设置有缓流段500能使进水层流道310的热流体和回水层流道320的冷流体混合更充分,强化微尺度条件下流体的受迫对流。一方面,缓流段500的截面面积的变化能够中断热边界层发展,使换热一直处于未充分发展阶段,强化传热性能;另一方面,缓流段500的符合正弦曲线的波浪凹穴侧壁面,能增强流体内部扰动,进而对流动与传热特性产生重要影响,使传热性能的增强远远大于压力的损失。In this embodiment, the side wall surface of the slow flow section 500 is a curved surface, which conforms to a sine curve along the length direction, thereby increasing the heat exchange area and thus increasing the surface heat transfer coefficient; the slow flow section 500 is provided in both the water inlet layer flow channel 310 and the return layer flow channel 320 of the heat sink device, so that the hot fluid in the water inlet layer flow channel 310 and the cold fluid in the return layer flow channel 320 can be mixed more fully, thereby strengthening the forced convection of the fluid under micro-scale conditions. On the one hand, the change in the cross-sectional area of the slow flow section 500 can interrupt the development of the thermal boundary layer, so that the heat exchange is always in an underdeveloped stage, thereby strengthening the heat transfer performance; on the other hand, the wave concave side wall surface of the slow flow section 500 conforming to a sine curve can enhance the internal disturbance of the fluid, thereby having an important influence on the flow and heat transfer characteristics, so that the enhancement of the heat transfer performance is far greater than the pressure loss.

参照图6,本发明的第一方面的某些实施例,缓流段500的相对两侧的侧壁面均符合正弦曲线,其中一侧的侧壁面的波峰与另一侧的侧壁面的波峰位置对应,其中一侧的侧壁面的波谷与另一侧的侧壁面的波谷位置对应。6 , in certain embodiments of the first aspect of the present invention, the side walls on opposite sides of the slow flow section 500 conform to a sine curve, wherein the crest of the side wall on one side corresponds to the crest of the side wall on the other side, and the trough of the side wall on one side corresponds to the trough of the side wall on the other side.

在该实施例中,流体在流经缓流段500的时候,由于离心力的原因,流体在流过波峰的时候,会使流道中心的最大速度向波峰偏移。流体边界层变薄,速度梯度变大,增加局部努塞尔数;且会在波峰附近产生迪恩涡,促使冷热流体的混合和,增强散热效果。In this embodiment, when the fluid flows through the slow flow section 500, due to the centrifugal force, the maximum velocity at the center of the flow channel will be offset toward the wave crest when the fluid flows through the wave crest. The fluid boundary layer becomes thinner, the velocity gradient becomes larger, and the local Nusselt number increases; and Dean vortices are generated near the wave crest, which promotes the mixing of cold and hot fluids and enhances the heat dissipation effect.

参照图7,本发明的第一方面的某些实施例,正弦曲线对应的方程式为:y=Asin(2πx/λ),其中,A为振幅,λ为波长。研究发现在一定范围内,波长越小散热效果越好;随着振幅的越大散热效果有所增强,但在较大振幅会使被加热的流体在波峰处不能流出。Referring to FIG7 , in some embodiments of the first aspect of the present invention, the equation corresponding to the sine curve is: y=Asin(2πx/λ), where A is the amplitude and λ is the wavelength. Studies have found that within a certain range, the smaller the wavelength, the better the heat dissipation effect; as the amplitude increases, the heat dissipation effect is enhanced, but at a larger amplitude, the heated fluid cannot flow out at the wave crest.

本发明的第一方面的某些实施例,振幅的范围为1微米至90微米,波长的范围为250微米至1000微米。其中,振幅取50微米,波长取500微米,为最优效果。In some embodiments of the first aspect of the present invention, the amplitude ranges from 1 micron to 90 microns, and the wavelength ranges from 250 microns to 1000 microns, wherein the amplitude is 50 microns and the wavelength is 500 microns for the best effect.

参照图3至图5,本发明的第一方面的某些实施例,进水层流道310设置有多条缓流段311,进水孔210与进水层流道310的多条缓流段311之间连通有第一合流道312。即进水层流道310也包括第一合流道312。3 to 5 , in some embodiments of the first aspect of the present invention, the water inlet layer flow channel 310 is provided with a plurality of slow flow sections 311 , and a first confluence channel 312 is connected between the water inlet hole 210 and the plurality of slow flow sections 311 of the water inlet layer flow channel 310 . That is, the water inlet layer flow channel 310 also includes the first confluence channel 312 .

另外,回水层流道320设置有多条缓流段321,回水层流道320还包括第二合流道322,回水层流道320的多条缓流段321和第二合流道322连通。In addition, the return water layer flow channel 320 is provided with a plurality of slow flow sections 321 , and the return water layer flow channel 320 further includes a second confluence channel 322 , and the plurality of slow flow sections 321 of the return water layer flow channel 320 are in communication with the second confluence channel 322 .

进一步,进水层流道310的多条缓流段311与回水层流道320的多条缓流段321一一对应地连通。即每条进水层流道310的缓流段311通过一条第一导引道410与每条回水层流道320的缓流段321连通。Furthermore, the multiple slow flow sections 311 of the water inlet channel 310 are connected to the multiple slow flow sections 321 of the water return channel 320 in a one-to-one correspondence. That is, the slow flow section 311 of each water inlet channel 310 is connected to the slow flow section 321 of each water return channel 320 through a first guide channel 410 .

在该实施例中,流体从进水孔210进入,流至进水层流道310的第一合流道312,然后从第一合流道312分至进水层流道310的多条缓流段311,进水层流道310的缓流段311的两侧的侧壁面能使得流体流速减慢,并利于流体散热,同时流动中的流体在流动时产生迪恩涡,促进冷热流体的混合;使流体中心处的最大速度向波峰偏移,流体边界层和热边界层变薄,温度梯度和速度梯度增大,增大对流换热系数从而增强换热效果。In this embodiment, the fluid enters from the water inlet hole 210, flows to the first confluence channel 312 of the water inlet layer flow channel 310, and then is divided from the first confluence channel 312 to multiple slow flow sections 311 of the water inlet layer flow channel 310. The side wall surfaces on both sides of the slow flow section 311 of the water inlet layer flow channel 310 can slow down the flow rate of the fluid and facilitate the heat dissipation of the fluid. At the same time, the flowing fluid generates Dean vortices during flow, which promotes the mixing of cold and hot fluids; the maximum velocity at the center of the fluid is shifted toward the crest, the fluid boundary layer and the thermal boundary layer become thinner, the temperature gradient and the velocity gradient increase, the convective heat transfer coefficient is increased, and the heat transfer effect is enhanced.

然后每条进水层流道310的缓流段311中的流体经过第一导引道410进入回水层流道320。Then, the fluid in the slow flow section 311 of each water inlet layer flow channel 310 enters the water return layer flow channel 320 through the first guide channel 410 .

回水层流道320的缓流段321两侧的侧壁面能使得流体流速减慢,并利于流体散热,同时流动中的流体在流动时产生迪恩涡,促进冷热流体的混合;使流体中心处的最大速度向波峰偏移,流体边界层和热边界层变薄,温度梯度和速度梯度增大,增大对流换热系数从而增强换热效果。The side walls on both sides of the slow flow section 321 of the return layer flow channel 320 can slow down the fluid flow rate and facilitate the heat dissipation of the fluid. At the same time, the flowing fluid generates Dean vortices during flow, which promotes the mixing of cold and hot fluids; the maximum velocity at the center of the fluid is shifted toward the wave crest, the fluid boundary layer and the thermal boundary layer become thinner, the temperature gradient and the velocity gradient increase, the convective heat transfer coefficient increases, and the heat exchange effect is enhanced.

回水层流道320的多条缓流段321中的流体汇合至第二合流道322,然后经第二合流道322从第二导引道420从出水孔220离开。The fluids in the plurality of slow flow sections 321 of the return water layer flow channel 320 merge into the second confluence channel 322 , and then leave the water outlet 220 from the second guide channel 420 through the second confluence channel 322 .

参照图3至图5,本发明的第一方面的某些实施例,装置包括依次叠放的第一层块110、第二层块120、第三层块130、第四层块140和第五层块150,进水孔210和出水孔220均位于第五层块150上;进水层流道310位于第四层块140上,回水层流道320位于第二层块120上;第一导引道410位于第三层块130上,第二导引道420位于第三层块130和第四层块140上。3 to 5 , in certain embodiments of the first aspect of the present invention, the device includes a first layer block 110, a second layer block 120, a third layer block 130, a fourth layer block 140 and a fifth layer block 150 stacked in sequence, the water inlet hole 210 and the water outlet hole 220 are both located on the fifth layer block 150; the water inlet layer flow channel 310 is located on the fourth layer block 140, and the return water layer flow channel 320 is located on the second layer block 120; the first guide channel 410 is located on the third layer block 130, and the second guide channel 420 is located on the third layer block 130 and the fourth layer block 140.

在该实施例中,流体从第五层块150的进水孔210进入,流至第四层块140的进水层流道310的第一合流道312,然后从第一合流道312分至第四层块140的进水层流道310的多条缓流段311。In this embodiment, the fluid enters from the water inlet hole 210 of the fifth layer block 150 , flows to the first confluence channel 312 of the water inlet layer flow channel 310 of the fourth layer block 140 , and then is divided from the first confluence channel 312 into multiple slow flow sections 311 of the water inlet layer flow channel 310 of the fourth layer block 140 .

然后,第四层块140的每条进水层流道310的缓流段311中的流体经过第三层块130的第一导引道410进入第二层块120的回水层流道320。Then, the fluid in the slow flow section 311 of each water inlet layer flow channel 310 of the fourth layer block 140 enters the water return layer flow channel 320 of the second layer block 120 through the first guide channel 410 of the third layer block 130 .

然后,第二层块120的回水层流道320的多条缓流段321中的流体汇合至第二层块120的第二合流道322,并经过第三层块130和第四层块140的第二导引道420从第五层块150的出水孔220离开。Then, the fluid in the multiple slow flow sections 321 of the return layer flow channel 320 of the second layer block 120 converges into the second confluence channel 322 of the second layer block 120, and passes through the second guide channel 420 of the third layer block 130 and the fourth layer block 140 and leaves from the water outlet 220 of the fifth layer block 150.

需要说明的是,第二层块120设有两条第二合流道322,两条第二合流道322分别位于第二层块120的左右两侧。另外,出水孔220的两侧分别设置有两条第二导引道420。每条第二合流道322中的流体会分别进入到两条第二导引道420中,然后经两条第二导引道420汇聚到出水孔220中离开该热沉装置。It should be noted that the second layer block 120 is provided with two second confluence channels 322, and the two second confluence channels 322 are respectively located on the left and right sides of the second layer block 120. In addition, two second guide channels 420 are respectively provided on both sides of the water outlet 220. The fluid in each second confluence channel 322 will enter the two second guide channels 420 respectively, and then converge to the water outlet 220 through the two second guide channels 420 to leave the heat sink device.

本发明的第一方面的某些实施例,热沉装置为5层镂空金属薄片叠合而成,镂空结构叠加成供流体经过的微通道。第一层块110、第二层块120、第三层块130、第四层块140和第五层块150均由3D打印而成。3D打印而成的层块避免了由于各层焊接引入的热应力及热阻,也避免了内壁镀金材料脱落导致热沉堵塞,提高换热效率。In certain embodiments of the first aspect of the present invention, the heat sink device is composed of 5 layers of hollow metal sheets, and the hollow structures are stacked into microchannels for fluid to pass through. The first layer block 110, the second layer block 120, the third layer block 130, the fourth layer block 140 and the fifth layer block 150 are all 3D printed. The 3D printed layer blocks avoid the thermal stress and thermal resistance introduced by the welding of each layer, and also avoid the clogging of the heat sink caused by the falling of the gold-plated material on the inner wall, thereby improving the heat exchange efficiency.

本发明的第二方面的实施例,提供了一种半导体激光器;所述半导体激光器包括如本发明的第一方面的实施例所述的激光器冷却热沉装置。An embodiment of the second aspect of the present invention provides a semiconductor laser; the semiconductor laser comprises the laser cooling heat sink device as described in the embodiment of the first aspect of the present invention.

对于该半导体激光器,通过利用上述的激光器冷却热沉装置,通过增加波浪形通道增加了换热面积,优化了冷热流体的混合,强化了换热效率。For the semiconductor laser, by utilizing the above-mentioned laser cooling heat sink device, the heat exchange area is increased by adding a wavy channel, the mixing of cold and hot fluids is optimized, and the heat exchange efficiency is enhanced.

以上所述,只是本发明的较佳实施例而已,本发明并不局限于上述实施方式,只要其以相同的手段达到本发明的技术效果,都应属于本发明的保护范围。The above is only a preferred embodiment of the present invention. The present invention is not limited to the above implementation mode. As long as the technical effect of the present invention is achieved by the same means, it should belong to the protection scope of the present invention.

Claims (6)

1. The device is characterized in that the device is provided with a water inlet hole, a water inlet layer flow channel, a first guide channel, a water return layer flow channel, a second guide channel and a water outlet hole which are communicated in sequence; the water inlet layer flow channel and the backwater layer flow channel are positioned in different layers; the water inlet layer flow channel and the backwater layer flow channel are provided with slow flow sections, and the side wall surfaces of the slow flow sections conform to a sinusoidal curve along the length direction; the water inlet layer flow channel is provided with a plurality of slow flow sections, and a first combined flow channel is communicated between the water inlet hole and the plurality of slow flow sections of the water inlet layer flow channel; the return water laminar flow channel is provided with a plurality of slow flow sections, the return water laminar flow channel also comprises a second merging flow channel, and the slow flow sections of the return water laminar flow channel are communicated with the second merging flow channel; the plurality of slow flow sections of the water inlet layer flow channel are communicated with the plurality of slow flow sections of the backwater layer flow channel in a one-to-one correspondence manner; the device comprises a first layer block, a second layer block, a third layer block, a fourth layer block and a fifth layer block which are sequentially stacked, wherein the water inlet hole and the water outlet hole are both positioned on the fifth layer block; the water inlet layer flow channel is positioned on the fourth layer block, and the backwater layer flow channel is positioned on the second layer block; the first guide track is located on the third layer block, and the second guide track is located on the third layer block and the fourth layer block.
2. The laser cooling heat sink device of claim 1, wherein the side wall surfaces on opposite sides of the slow flow section each conform to a sinusoidal curve, wherein the peak of the side wall surface on one side corresponds to the peak position of the side wall surface on the other side, and wherein the trough of the side wall surface on one side corresponds to the trough position of the side wall surface on the other side.
3. The laser cooling heat sink device of claim 1, wherein the sinusoidal curve corresponds to the equation: y=asin (2πx/λ), where a is the amplitude and λ is the wavelength.
4. A laser cooling heat sink device as claimed in claim 3 wherein the amplitude is in the range 1 micron to 90 microns and the wavelength is in the range 250 microns to 1000 microns.
5. The laser cooling heat sink device of claim 1, wherein the first layer block, the second layer block, the third layer block, the fourth layer block, and the fifth layer block are each 3D printed.
6. A semiconductor laser comprising a laser cooling heat sink device as claimed in any one of claims 1 to 5.
CN202210535639.4A 2022-05-17 2022-05-17 Laser cooling heat sink device and semiconductor laser thereof Active CN115084997B (en)

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