CN113808775B - Linear accelerator heavy ion microporous membrane irradiation device - Google Patents

Abstract

The invention relates to a linear accelerator heavy ion microporous membrane irradiation device, which includes a linear accelerator device, a beam scattering device, a vacuum differential device and a heavy ion microporous membrane vacuum irradiation terminal; the linear accelerator device is configured to generate heavy ions Beam; beam scattering device, configured to make the heavy ion beam diffuse and spatially distributed uniformly in the beam pipeline transmission; vacuum differential device, configured to gradually reduce the vacuum degree of the beam pipeline; heavy ion microporous membrane The vacuum irradiation terminal and the sealed connection vacuum differential device are configured so that the irradiated original film in a vacuum environment forms a heavy ion microporous film under the bombardment of heavy ion beams. The invention can realize high-density irradiation production of heavy ion microporous membranes.

Description

Linear accelerator heavy ion microporous membrane irradiation device

Technical field

The invention relates to a linear accelerator heavy ion microporous membrane irradiation device and relates to the technical field of heavy ion microporous membrane production.

Background technique

Heavy ion microporous membrane is the world's most sophisticated microporous filtration membrane. It is a porous plastic film with densely packed pores, each of which has almost the same shape and size. Heavy ion microporous membranes have many specifications, with film thickness ranging from 5 microns to 60 microns, pore diameters ranging from 0.2 microns to 15 microns, and pore density ranging from 1-10 to the 9th power per square centimeter.

Heavy ion microporous membranes usually use heavy ion drilling provided by high-energy accelerators. Heavy ion drilling is the most critical part of the heavy ion microporous membrane production process, so ion beam irradiation is the most important factor in the production of heavy ion microporous membranes. A very important production step.

In the current irradiation production, since there is no dedicated heavy ion microporous membrane irradiation device for production, the density and quality of the heavy ion microporous membrane produced are not high. The main reason is that the accelerator is not dedicated and faces a variety of heavy ions. Therefore, a lot of energy is spent on adjusting the ion beam required to irradiate the heavy ion microporous membrane for each irradiation. , which will cause the quality of the ion beam to be low, and also directly lead to the density and quality of the irradiated film to be low. In addition, irradiation in the atmosphere cannot irradiate high-density heavy ion microporous membranes due to relatively large beam energy loss.

Contents of the invention

In view of the above problems, the purpose of the present invention is to provide a linear accelerator heavy ion microporous membrane irradiation device that can effectively improve the density and quality of heavy ion microporous membranes.

In order to achieve the above object, the present invention adopts the following technical solutions: a linear accelerator heavy ion microporous membrane irradiation device, including a linear accelerator device, a beam scattering device, a vacuum differential device and a heavy ion microporous membrane vacuum irradiation terminal;

The linear accelerator device is configured to generate a heavy ion beam;

The beam scattering device is configured to diffuse and uniformly distribute the heavy ion beam in the beam pipeline transmission;

The vacuum differential device is configured to gradually reduce the vacuum degree of the beam pipeline;

The heavy ion microporous membrane vacuum irradiation terminal is sealed and connected to the vacuum differential device, which is configured so that the irradiated original membrane in a vacuum environment forms a heavy ion microporous membrane under heavy ion beam bombardment.

The linear accelerator heavy ion microporous membrane irradiation device, further, the linear accelerator device includes an ECR ion source, a low energy beam transmission line, a radio frequency quadrupole accelerator, a medium energy beam matching section, a drift tube linear accelerator and a high energy injection line;

The ECR ion source generates a strong heavy ion beam. The strong heavy ion beam passes through the low-energy beam transmission line for beam transverse matching. The transversely matched beam is injected into the radio frequency quadrupole accelerator for acceleration. The beam emitted from the radio frequency quadrupole accelerator passes through the medium-energy beam matching section to match the beam transverse and longitudinal phase spaces, and the beam after matching the transverse and longitudinal phase spaces is injected into the drift tube linear accelerator for further Accelerate, and the accelerated heavy ion beam is injected into the beam scattering device through the high-energy injection line, wherein the high-energy injection line includes a first vacuum beam pipe and a quadrupole magnet, and the first vacuum beam The pipeline passes through the quadrupole magnet so that the heavy ion beam is transmitted in the first vacuum beam pipeline.

The linear accelerator heavy ion microporous membrane irradiation device, further, the beam scattering device includes a second vacuum beam pipeline, a pre-defocused quadrupole magnet, an octupole magnet and an end defocused quadrupole magnet;

The pre-defocused quadrupole magnet passes through the inlet of the second vacuum beam pipeline, so that the heavy ion beam injected through the high-energy injection line begins to increase in profile in the horizontal direction and begins to converge in the vertical direction;

The eight-pole magnet is arranged at the beam waist position where the heavy ion beam reaches the vertical direction, so that the heavy ion beam is evenly distributed in the horizontal direction;

The terminal defocused quadrupole magnet passes through the second vacuum beam pipe outlet, which increases the divergence angle of the heavy ion beam in the horizontal direction.

In the linear accelerator heavy ion microporous membrane irradiation device, further, the vacuum differential device includes a plurality of vacuum chambers and a third vacuum beam pipeline connected in sequence, and the plurality of vacuum chambers pass through the third vacuum beam. The pipelines are connected in sequence, and the outlet of the last stage of the vacuum chamber is connected to the heavy ion microporous membrane vacuum irradiation terminal through a beam horn transmission pipeline, where the vacuum degree is gradually reduced in the vacuum differential device to complete Gradual transition of vacuum degree.

The linear accelerator heavy ion microporous membrane irradiation device, further, the heavy ion microporous membrane vacuum irradiation terminal includes at least one winding irradiation equipment, slide rails, driving equipment and control equipment;

The slide rail is arranged outside the vacuum differential device;

The driving device is arranged on the slide rail, and is controlled by the control device to pull the winding irradiation device to reciprocate laterally and/or longitudinally along the slide rail, and can move the The winding irradiation equipment is pulled to the ion beam outlet for irradiation processing.

The linear accelerator heavy ion microporous membrane irradiation device, further, the winding irradiation equipment includes a vacuum chamber;

A sealing device is provided at the inlet of the vacuum chamber for sealing the connection between the vacuum chamber and the beam outlet;

A film rolling device is provided in the vacuum chamber;

A switch door is provided on one side of the vacuum chamber for placing and collecting the irradiated original film.

The linear accelerator heavy ion microporous membrane irradiation device, further, the film rolling device includes at least one unwinding motor, unwinding shaft, transmission shaft, rewinding shaft and rewinding motor;

At least one discharging shaft is provided in the vacuum chamber, and each discharging shaft is connected to the discharging motor for discharging the irradiated original film;

At least one rewinding shaft is provided at the bottom of the vacuum chamber, and the rewinding shaft is connected with the rewinding motor for retracting the irradiated original film;

The transmission shaft is arranged between the unwinding shaft and the rewinding shaft and is used to drive the irradiation original film.

In the linear accelerator heavy ion microporous membrane irradiation device, further, a discharging tension monitoring axis and a receiving tension monitoring axis are provided at intervals between the discharging axis and the receiving axis, and the discharging tension The monitoring shaft and the rewinding tension monitoring shaft are also provided with tension sensors for monitoring the tension of the film material on the corresponding monitoring shaft.

In the linear accelerator heavy ion microporous membrane irradiation device, further, the sealing device includes several limit switches, vacuum chamber sealing rings and beam outlet sealing rings;

The limit switch is used to limit the movement position of the vacuum chamber. When the vacuum chamber moves to a predetermined position, the limit switch is triggered, and the control device receives a trigger signal to cause the vacuum chamber to move to a predetermined position. The cavity stops moving;

When the vacuum chamber moves to the working position, the vacuum chamber sealing ring and the beam outlet sealing ring cooperate to complete the sealing.

In the linear accelerator heavy ion microporous membrane irradiation device, further, the vacuum chamber sealing ring is provided with rubber columns extending outward at circumferential intervals. Correspondingly, the beam outlet sealing ring is provided with The rubber column matches the rubber hole, and the rubber column of the vacuum chamber sealing ring is inserted into the rubber hole of the beam outlet sealing ring to complete the sealing; preferably, the switch door is provided with a rolling film observation window or visual inspection window. An observation system is used to observe the work in the vacuum chamber.

Since the present invention adopts the above technical solutions, it has the following advantages:

1. The heavy ion microporous membrane vacuum irradiation terminal provided by the present invention includes winding irradiation equipment, slide rails, driving equipment and control equipment. The driving equipment controls the pulling of the winding irradiation equipment along the slide rails laterally and/or through the control equipment. Or longitudinal reciprocating motion, and can pull the winding irradiation equipment to the ion beam outlet for irradiation processing. The winding irradiation equipment includes a vacuum chamber. A sealing device is provided at the inlet of the vacuum chamber, and a sealing device is provided inside the vacuum chamber. There is a rolling film device, and the heavy ion microporous membrane vacuum irradiation terminal can be used to achieve high-density irradiation production of heavy ion microporous membranes;

2. The present invention is equipped with a beam scattering device. The beam scattering device includes a vacuum beam pipe, a pre-defocused quadrupole magnet, an octupole magnet and an end defocused quadrupole magnet. Two quadrupole magnets and one octupole magnet are used. Instead of scanning magnets, the beam is uniformly distributed in a large spatial range, achieving uniform scattering of the beam and improving the irradiation uniformity of the heavy ion microporous membrane;

3. The present invention is equipped with a vacuum differential device. The vacuum differential device includes a number of vacuum chambers and vacuum beam pipes connected in sequence. The vacuum degree is gradually reduced in the vacuum differential device to complete the step-by-step transition of the vacuum degree, which can improve the vacuum degree. The irradiation efficiency of the irradiated original film in the vacuum chamber;

In summary, the present invention can be widely used in the irradiation production of heavy ion microporous membranes.

Description of drawings

Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are for the purpose of illustrating preferred embodiments only and are not to be construed as limiting the invention. Throughout the drawings, the same reference numbers refer to the same parts. In the attached picture:

Figure 1 is a structural diagram of a linear accelerator heavy ion microporous membrane irradiation device according to an embodiment of the present invention;

Figure 2 is a structural diagram of a beam scattering device according to an embodiment of the present invention;

Figure 3 is a schematic structural diagram of a vacuum differential device according to an embodiment of the present invention;

Figure 4 is a schematic diagram of the vacuum irradiation terminal structure of the heavy ion microporous membrane according to an embodiment of the present invention;

Figure 5 is a schematic structural diagram of the film rolling device according to the embodiment of the present invention;

Figure 6 is a schematic structural diagram of the sealing device according to the embodiment of the present invention. (a) is a schematic structural diagram of the vacuum chamber sealing ring, and (b) is a schematic structural diagram of the beam outlet sealing ring.

Detailed ways

Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a thorough understanding of the invention, and to fully convey the scope of the invention to those skilled in the art.

It is to be understood that the terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. The terms "comprises", "includes", "contains" and "having" are inclusive and thus indicate the presence of stated features, steps, operations, elements and/or parts but do not exclude the presence or addition of one or Various other features, steps, operations, elements, components, and/or combinations thereof. The method steps, procedures, and operations described herein are not to be construed as requiring that they be performed in the particular order described or illustrated, unless an order of performance is expressly indicated. It should also be understood that additional or alternative steps may be used.

Although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections shall not be referred to as restricted by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Terms such as "first," "second," and other numerical terms when used herein do not imply a sequence or order unless clearly indicated by the context. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the example embodiments.

For convenience of description, spatially relative terms may be used herein to describe the relationship of one element or feature to another element or feature as shown in the figures. These relative terms, such as "inner", "outer", "inner" ”, “outside”, “below”, “above”, etc. Such spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures.

As shown in Figure 1, the linear accelerator heavy ion microporous membrane irradiation device provided in this embodiment includes a linear accelerator device 1, a beam scattering device 2, a vacuum differential device 3 and a heavy ion microporous membrane vacuum irradiation terminal 4.

Linear accelerator device 1 is used to generate a variety of heavy ion beams of 4MeV/u.

The beam scattering device 2 is used to diffuse the heavy ion beam and uniformize its spatial distribution.

Vacuum differential device 3 is used to gradually reduce the high vacuum of the beam pipeline to low vacuum.

The heavy ion microporous membrane vacuum irradiation terminal 4 is used to form a heavy ion microporous membrane under beam bombardment from the irradiated original membrane in a vacuum environment.

In some preferred embodiments of the present invention, the linear accelerator device 1 includes a conventional ECR ion source, a low energy beam transmission line LEBT, a radio frequency quadrupole accelerator RFQ, a medium energy beam matching section MEBT, a drift tube linear accelerator IH-DTL and a high energy injection line HEBT. Among them: the ECR ion source generates a strong current heavy ion beam; the strong current heavy ion beam passes through the low-energy beam transport line LEBT for beam transverse matching; the transversely matched beam is injected into the radio frequency quadrupole accelerator RFQ with an operating frequency of 162.5MHz. Accelerated to 600keV/u; the beam emitted from the radio frequency quadrupole accelerator RFQ passes through the medium energy beam matching section MEBT to match the transverse and longitudinal phase spaces of the beam; the beam that is matched in the transverse and longitudinal phase spaces is injected into The drift tube linear accelerator IH-DTL with the same operating frequency is finally accelerated to an energy of 4MeV/u; the high-energy injection line HEBT includes a beam vacuum pipe and a quadrupole magnet. The beam vacuum pipe passes through the quadrupole magnet for warp drift. The beam emitted from the tube linear accelerator IH-DTL is transmitted and its vacuum changes are balanced. To sum up, since the operating frequency of this embodiment is designed to be 162.5 MHz, the linear accelerator device 1 of this embodiment has many advantages such as high acceleration efficiency, good beam quality, and compact structure.

In some preferred embodiments of the present invention, in order to improve the irradiation uniformity of the heavy ion microporous membrane, the beam of the linear accelerator device 1 of this embodiment is extracted and passed through the beam scattering device 2 to uniformize the beam diffusion and spatial distribution. .

As shown in FIG. 2 , the beam scattering device 2 of this embodiment includes a beam vacuum pipe 21 , a pre-defocused quadrupole magnet 22 , an octupole magnet 23 and an end defocused quadrupole magnet 24 .

The beam cross-section and divergence angle generated by the linear accelerator device 1 are very small. The pre-defocused quadrupole magnet 22 is placed at the entrance of the beam vacuum pipe 21. The beam emitted by the linear accelerator device 1 passes through the beam vacuum pipe 21. Pre-defocused quadrupole magnet 22, the beam begins to increase in the horizontal direction (the cross-section in the horizontal direction is a cross-section parallel to the beam), that is, divergently propagates, and when the cross-section in the vertical direction (the cross-section in the vertical direction is perpendicular to the beam) (a section) starts out small, that is, converges and transmits; when the beam reaches the vicinity of the beam waist in the vertical direction (the beam waist is the middle position of the beam), an eight-pole magnet 23 is placed here to modulate the spatial distribution of the beam. By adding high-voltage current to the eight-pole magnet 23 and increasing the magnetic field, the heavy ion beam in the beam vacuum pipe 21 is affected. Even though the edge beam in the horizontal direction feels a greater focusing force, at the same time, the internal beam in the horizontal direction is basically Without being affected by focusing, the distribution of the beam in the horizontal direction can be made uniform by adjusting the focusing intensity of the eight-pole magnet 23 . The beam continues to propagate to the right, and passes through the end defocused quadrupole magnet 24 to influence the ion beam by enhancing the magnetic field, further increasing the divergence angle of the beam in the horizontal direction, and the horizontal profile of the beam can quickly reach the level of 0.5 meters. It can meet the needs of heavy ion microporous membrane production terminals.

During the above-mentioned beam transmission process, the vertical cross-section of the beam has been constrained to a small range by two quadrupole magnets, so the beam pipe generally chooses a rectangular or elliptical cross-section to maximize the use of the space of the vacuum pipe. , on the other hand, it can reduce the impact of the heavy ion microporous membrane production terminal on the vacuum of the front-end ion accelerator, and help reduce the design difficulty of the vacuum differential system. Preferably, the outlet of the beam vacuum pipe 21 adopts a trumpet shape.

In some preferred embodiments of the present invention, when mass-producing nuclear pore membranes, in order to improve production efficiency, the heavy ion microporous membrane vacuum irradiation terminal 4 needs to be connected to the vacuum differential device 3 as soon as possible after replacing the membrane material for irradiation production. Heavy ion microporous membrane vacuum irradiation terminal 4 Due to the large volume of the cavity, the large air load of the built-in membrane material and the winding device, it takes a long time to pump to a high vacuum state, so the requirements of the heavy ion microporous membrane vacuum irradiation terminal should be comprehensively considered. Acceptable pumping time and vacuum differential capability, therefore, a vacuum differential structure of 10 ^-6 Pa to 10 ² Pa is designed and constructed between the beam vacuum pipeline and the heavy ion microporous membrane vacuum irradiation terminal. This embodiment uses 5 levels. The differential method is to extract vacuum step by step. This is an example. It is not limited to this and can be set according to actual needs.

The inlet of the vacuum differential device 3 is connected to the outlet of the beam vacuum pipeline 21, and the outlet of the vacuum differential device 3 is connected to the heavy ion microporous membrane vacuum irradiation terminal 4. The vacuum differential device 3 is used to gradually reduce the high vacuum of the beam vacuum pipe 21 to the low vacuum of the heavy ion microporous membrane vacuum irradiation terminal 4, for example, from 5E-6Pa to 1E+2Pa, gradually reducing the vacuum degree.

Specifically, as shown in Figure 3, the vacuum differential device 3 of this embodiment uses 5 levels of differential to complete the transition from 10 ^-6 Pa to 10 ² Pa. The vacuum differential device 3 includes a beam vacuum pipeline 30 and first to fifth vacuums. Chambers 31 to 35, the first to fifth vacuum chambers 31 to 35 are arranged in sequence, the first to fifth vacuum chambers 31 to 35 are connected through a beam vacuum pipeline 30, and the outlet of the fifth vacuum chamber 35 is set in a trumpet shape. . Among them, the vacuum degree is gradually reduced in the vacuum differential device 3 to complete the transition of the vacuum degree from 10 ^-6 Pa to 10 ² Pa. The specific structure of the vacuum chamber is similar to the existing vacuum chamber structure, including various The pump and regulating valve will not be described in detail here and can be implemented using existing technology. Further, each vacuum chamber is equipped with a vacuum gauge for monitoring the vacuum degree.

In some preferred embodiments of the present invention, as shown in Figure 4, the heavy ion microporous membrane vacuum irradiation terminal 4 of this embodiment includes two winding irradiation devices 41, slide rails 42, driving equipment 43 and control equipment 44 ; Each winding irradiation device 41 controls the driving device 43 through the control device 44 so that it can move laterally or/and longitudinally on the slide rail 42, so that each roll irradiation device 41 can pass through the slide rail 42 Move to the beam exit (i.e. the working position) for irradiation processing.

In some implementations, the slide rail 42 may include a transverse slide rail 421 and a longitudinal slide rail 422, which are arranged outside the heavy ion beam exit. The transverse slide rail 421 corresponds to the exit position of the vacuum differential device 3 and can make the winding irradiation equipment 41 move. To the working position for irradiation processing, the longitudinal slide rails 422 can make the winding irradiation equipment 41 move up and down; each slide rail is provided with a driving device 43 for pulling the movement of the winding irradiation equipment 41, and the driving device 43 can Using a traction motor, the traction motor allows the winding irradiation equipment 41 to perform lateral and/or longitudinal reciprocating movement along the slide rail, and pulls the winding irradiation equipment 41 to the ion beam outlet (i.e., the working position).

In other implementations, each winding irradiation device 41 includes a vacuum chamber 411. The differences between the vacuum chamber 411 in this embodiment and the prior art are specifically described as follows:

A sealing device 412 is provided at the inlet of each vacuum chamber 411 for sealing the connection between the vacuum chamber 411 and the exit of the beam pipe.

Each vacuum chamber 411 is provided with a film rolling device 5, and one side of each vacuum chamber 411 is provided with a switch door to facilitate the replacement of the film roll, and the film material can be placed and collected manually. Further, the opening and closing door can be provided with a rolling film observation window. The rolling film observation window is used to observe the unwinding and retracting conditions of the film rolling device 5 and the irradiation condition of the film material. A blocking plate can also be provided at the observation window. . A visual observation system can also be installed on the switch door, or a camera can be installed for remote observation to view the work in the vacuum chamber 411. Preferably, each vacuum chamber 411 can adopt a circular horizontal all-stainless steel structure.

Further, the film rolling device 5 includes a first unwinding shaft 51, a second unwinding shaft 52, a first unwinding motor 53, a second unwinding motor 54, a first unwinding tension monitoring shaft 55, and a second unwinding tension. Monitoring shaft 56, first transmission shaft 57, second transmission shaft 58, third transmission shaft 59, fourth transmission shaft 510, first rewinding tension monitoring shaft 511, second rewinding tension monitoring shaft 512, first rewinding shaft 513, the second taking-up shaft 514, the first taking-up motor 515 and the second taking-up motor 516.

The top of the vacuum chamber 4 is provided with a first discharge shaft 51 and a second discharge shaft 52 in parallel. The first discharge shaft 51 is connected to the first discharge motor 53, and the second discharge shaft 52 is connected to the second discharge shaft. The motor 54, the first discharging motor 53 and the second discharging motor 54 are used to drive the first discharging shaft 51 and the second discharging shaft 52 to discharge the film material.

Corresponding to the position of the first unloading shaft 51, a first unloading tension monitoring shaft 55, a first transmission shaft 57, a second transmission shaft 58 and a first rewinding tension monitoring shaft are arranged at vertical intervals in the middle of the vacuum chamber 4. 511. Corresponding to the position of the second discharging shaft 52, a second discharging tension monitoring shaft 56, a third transmission shaft 59, a fourth transmission shaft 510 and a second taking-up tension are arranged at vertical intervals in the middle of the vacuum chamber 4. Monitor axis 512. The first unwinding tension monitoring axis 55, the first rewinding tension monitoring axis 511, the second unwinding tension monitoring axis 56 and the second rewinding tension monitoring axis 512 are used to monitor the tension of the film material on the corresponding monitoring axis.

The bottom of each vacuum chamber 4 is provided with a first collecting shaft 513 and a second collecting shaft 514 in parallel. The first collecting shaft 513 is connected to a first collecting motor 515, and the second collecting shaft 514 is connected to a first collecting motor 515. The two rewinding motors 516, the first rewinding motor 515 and the second rewinding motor 516 are used to rewind the film material passing through the corresponding unwinding tension monitoring shaft, transmission shaft and rewinding tension monitoring shaft.

Further, the first unwinding tension monitoring shaft 55, the first transmission shaft 57, the second transmission shaft 58 and the first rewinding tension monitoring shaft 511 as well as the second unwinding tension monitoring shaft 56, the third transmission shaft 59, the fourth The membrane material driven on the transmission shaft 510 and the second rewinding tension monitoring shaft 512 is perpendicular to the direction of the beam. Only in this way can the beam irradiate the membrane to form a heavy ion microporous membrane.

Furthermore, the first unwinding tension monitoring shaft 55, the second unwinding tension monitoring shaft 56, the first rewinding tension monitoring shaft 511 and the second rewinding tension monitoring shaft 512 are all provided with tension sensors, and the tension sensors are used for Collect the tension value of the membrane material on the drive shaft.

It should be noted that the film rolling device 5 in this embodiment adopts a structure of two unwinding and two retracting, but the number of unwinding and retracting reels can be set according to actual needs to increase the number of film materials irradiated at the same time. The specific number is not specified. limited.

In some implementations, as shown in Figures 4 and 6, the sealing device 412 includes several limit switches 4121, vacuum chamber sealing rings 4122, and beam outlet sealing rings 4123.

The winding irradiation equipment 41 pulls the vacuum chamber 411 to a predetermined position by the traction motor and triggers the limit switch 4121. After receiving the signal from the limit switch 4121, the control equipment 44 sends a stop command to the longitudinal driving equipment 43 and then starts again. After the horizontal driving device 43 reaches the predetermined position and triggers the limit switch 4121, the control device 44 sends a signal to stop the command. At this time, the sealing position has been reached. The vacuum chamber sealing ring 4122 corresponds to the beam outlet sealing ring 4123. At this time, the vacuum chamber The sealing ring 4122 and the beam exit sealing ring 4123 are closely interlocked. The vacuum chamber sealing ring 4122 is provided with rubber posts 4122-1 extending outward at circumferential intervals. Correspondingly, the beam exit sealing ring 4123 is provided with rubber posts 4122-1. The rubber hole 4123 that matches the column, the rubber column 4122-1 of the vacuum chamber sealing ring 4122 is inserted into the rubber hole of the beam outlet sealing ring 4123-1 to complete the sealing. At this time, the control device 44 sends an instruction to seal the entire seal through the cylinder A. The device is tightened to complete the entire sealing process. In specific use, the vacuum chamber sealing ring 4122 and the beam outlet sealing ring 4123 can be provided on the interface flange of the vacuum chamber 41 and the beam vacuum pipeline outlet of the vacuum differential device 3, so that the interface flange of the vacuum chamber 41 is connected with the beam. Flange docking and sealing of outlet of flow vacuum pipeline.

When the heavy ion microporous membrane vacuum irradiation terminal 4 of this embodiment is used, for example, the first winding irradiation equipment 41 is ready, for example, after the original irradiation film is installed and the vacuum chamber 411 is evacuated, the The control device 44 controls the winding irradiation device 41 to move to the ion beam outlet, move to the working position to complete docking and sealing, and quickly evacuate the vacuum chamber 411. When the vacuum reaches the predetermined working vacuum, the irradiation process is performed; While the first winding equipment 41 is performing the irradiation process, the second winding equipment 41 starts to wind up and vacuum. When the irradiation of the first winding equipment 41 is completed, the vacuum is destroyed and the working position is evacuated. The second winding equipment 41 is controlled by the control device 44 to move along the slide rail to the working position, and repeats the irradiation process of the vacuum chamber of the first winding equipment 41 in a reciprocating cycle to meet the requirement of continuous irradiation work.

To sum up, the present invention can use the linear accelerator device 1, the beam scattering device 2, the vacuum differential device 3 and the heavy ion microporous membrane vacuum irradiation terminal 4 to form a linear accelerator-based heavy ion microporous membrane production device, using This production device can produce high-density, high-quality heavy ion microporous membranes.

The usage process of the linear accelerator heavy ion microporous membrane irradiation device provided in this embodiment is as follows:

S1. The heavy ion beam emitted by the linear accelerator device 1 is diffused and spatially distributed and then launched to the vacuum differential device 3 through the vacuum beam pipeline.

S2. The vacuum differential device 3 gradually reduces the high vacuum in the beam pipe to the low vacuum in the vacuum chamber 411.

S3. Set the irradiated original film material on the film rolling device 5 in the vacuum chamber 411.

S4. Use the traction motor to slide the vacuum chamber 411 through the slide rail 42 to the beam outlet, that is, the working position, so that the inlet of the vacuum chamber 411 is connected to the beam outlet, and sealed by the sealing device 412. After sealing, The vacuum chamber 411 is evacuated until it reaches a preset vacuum value.

S5. Irradiate the membrane material in the vacuum chamber 411 with the diverged beam to form a heavy ion microporous membrane.

S6. While irradiating the membrane material in the vacuum chamber 411, change the membrane material in another vacuum chamber 411, and evacuate until the preset vacuum value is reached, waiting for irradiation production.

S7. When the membrane material in the vacuum chamber 411 completes the irradiation, use the traction motor to evacuate the vacuum chamber 411 from the working position through the slide rail, and repeat steps S4 and S6 until the requirements for continuous irradiation work are met.

Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that it can still be used Modifications may be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions may be made to some of the technical features, but these modifications or substitutions do not cause the essence of the corresponding technical solutions to depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. The linear accelerator heavy ion microporous membrane irradiation device is characterized by comprising a linear accelerator device, a beam scattering device, a vacuum difference device and a heavy ion microporous membrane vacuum irradiation terminal;

the linac apparatus is configured to generate a heavy ion beam;

the beam dispersing device is configured to uniformly disperse and spatially distribute heavy ion beams in beam pipeline transmission;

the vacuum difference device is configured to gradually reduce the vacuum degree of the beam pipeline;

and the heavy ion microporous membrane vacuum irradiation terminal is connected with the vacuum differential device in a sealing way, so that the irradiation raw membrane in a vacuum environment forms a heavy ion microporous membrane under the bombardment of heavy ion beam current.

2. The linear accelerator ion microporous membrane irradiation device according to claim 1, wherein the linear accelerator device comprises an ECR ion source, a low energy beam transmission line, a radio frequency quadrupole accelerator, a mid energy beam matching section, a drift tube linear accelerator, and a high energy injection line;

the ECR ion source generates strong-current heavy-ion beams, the strong-current heavy-ion beams are subjected to beam transverse matching through the low-energy beam transmission line, the beams subjected to transverse matching are injected into the radio-frequency quadrupole accelerator to accelerate, the beams emitted by the radio-frequency quadrupole accelerator are subjected to beam transverse and longitudinal phase space matching through the medium-energy beam matching section, the beams subjected to transverse and longitudinal phase space matching are injected into the drift tube linear accelerator to accelerate further, the accelerated heavy-ion beams are injected into the beam scattering device through the high-energy injection line, wherein the high-energy injection line comprises a first vacuum beam pipeline and a quadrupole magnet, and the first vacuum beam pipeline penetrates through the quadrupole magnet, so that the heavy-ion beams are transmitted in the first vacuum beam pipeline.

3. The linear accelerator heavy ion microporous membrane irradiation device according to claim 2, wherein the beam dispersing device comprises a second vacuum beam conduit, a pre-defocused quadrupole magnet, an octapole magnet and a terminal defocused quadrupole magnet;

the pre-defocused quadrupole magnet passes through the inlet of the second vacuum beam pipeline, so that the section of the heavy ion beam injected by the high-energy injection line begins to be increased in the horizontal direction, and the section begins to be converged in the vertical direction;

the octupole magnet is arranged at the beam waist position of the heavy ion beam in the vertical direction, so that the heavy ion beam is uniformly distributed in the horizontal direction;

the tail end defocusing quadrupole magnet passes through the outlet of the second vacuum beam pipeline, so that the divergence angle of the heavy ion beam in the horizontal direction is increased.

4. The linear accelerator heavy ion microporous membrane irradiation device according to any one of claims 1 to 3, wherein the vacuum differential device comprises a plurality of vacuum chambers and a third vacuum beam pipeline which are sequentially connected, the vacuum chambers are sequentially connected through the third vacuum beam pipeline, an outlet of a final stage vacuum chamber is connected with the heavy ion microporous membrane vacuum irradiation terminal through a beam horn-shaped transmission pipeline, and the vacuum degree is gradually reduced in the vacuum differential device, so that gradual transition of the vacuum degree is completed.

5. A linear accelerator heavy ion microporous membrane irradiation device according to any one of claims 1 to 3, wherein the heavy ion microporous membrane vacuum irradiation terminal comprises at least one winding irradiation apparatus, a slide rail, a driving apparatus and a control apparatus;

the sliding rail is arranged at the outer side of the vacuum differential device;

the driving device is arranged on the sliding rail, and the driving device controls and pulls the winding irradiation device to reciprocate along the sliding rail transversely and/or longitudinally through the control device, and can pull the winding irradiation device to an ion beam outflow opening for irradiation processing.

6. The linear accelerator ion microporous membrane irradiation device according to claim 5, wherein the winding irradiation apparatus comprises a vacuum chamber;

a sealing device is arranged at the inlet of the vacuum cavity and used for sealing the joint of the vacuum cavity and the beam outlet;

a film rolling device is arranged in the vacuum cavity;

and an opening and closing door is arranged on one side of the vacuum cavity and used for placing and collecting the irradiation original film.

7. The linear accelerator heavy ion microporous membrane irradiation device according to claim 6, wherein the membrane winding device comprises at least one discharging motor, a discharging shaft, a transmission shaft, a receiving shaft and a receiving motor;

at least one discharging shaft is arranged in the vacuum cavity, and each discharging shaft is connected with a discharging motor for discharging the irradiation raw film;

the bottom in the vacuum cavity is provided with at least one material receiving shaft, and the material receiving shaft is connected with a material receiving motor for receiving the irradiation raw film;

the transmission shaft is arranged between the discharging shaft and the receiving shaft and is used for transmitting the irradiation raw film.

8. The linear accelerator heavy ion microporous membrane irradiation device according to claim 7, wherein a discharging tension monitoring shaft and a receiving tension monitoring shaft are arranged between the discharging shaft and the receiving shaft at intervals, and tension sensors are further arranged on the discharging tension monitoring shaft and the receiving tension monitoring shaft and used for monitoring the tension of the membrane material on the corresponding monitoring shaft.

9. The linear accelerator heavy ion microporous membrane irradiation device according to claim 6, wherein the sealing device comprises a plurality of limit switches, a vacuum cavity sealing ring and a beam outlet sealing ring;

the limit switch is used for limiting the movement position of the vacuum cavity, when the vacuum cavity moves to a preset position to trigger the limit switch, the control equipment receives a trigger signal to stop the movement of the vacuum cavity;

when the vacuum cavity moves to the working position, the sealing ring of the vacuum cavity and the sealing ring of the beam outlet are matched to finish sealing.

10. The linear accelerator heavy ion microporous membrane irradiation device according to claim 9, wherein rubber columns are arranged on the vacuum cavity sealing ring in a circumferentially-spaced and outwards extending manner, and correspondingly, rubber holes matched with the rubber columns are arranged on the beam outlet sealing ring, and the rubber columns of the vacuum cavity sealing ring are inserted into the rubber holes of the beam outlet sealing ring to complete sealing; and a film rolling observation window or a visual observation system is arranged on the switch door and used for checking the work in the vacuum cavity.