CN113741375B - Heavy ion microporous membrane special production terminal control system - Google Patents

Abstract

The invention relates to a heavy ion microporous membrane production terminal control system which comprises a first layer network control structure, wherein each device of a heavy ion microporous membrane production terminal is connected with a front-end server, the front-end server acquires production state data of the heavy ion microporous membrane production terminal in real time and controls each device of the heavy ion microporous membrane production terminal respectively; in the second layer network control structure, the front-end server converges and transmits the acquired production state data to the core service end controller, and the core service end controller manages and controls each device of the heavy ion microporous membrane production terminal; the third layer network control structure is characterized in that a core server controller and a master control client side carry out data interaction, and the master control client side is used for checking, managing and controlling the whole irradiation production terminal; and each device of the heavy ion microporous membrane production terminal and the master control client are distributed. The invention can realize the full-automatic high-density irradiation production of the heavy ion microporous membrane.

Description

Heavy ion microporous membrane special production terminal control system

technical field

The invention relates to a terminal control system for the production of heavy ion microporous membranes, and relates to the technical field of heavy ion microporous membranes.

Background technique

The heavy ion microporous membrane is the most precise microporous filtration membrane in the world. It is a porous plastic film with densely packed pores, each of which has the same shape and size. The heavy ion microporous membrane has many specifications, the membrane thickness ranges from 5 microns to 60 microns, the pore diameter ranges from 0.2 microns to 15 microns, and the pore density ranges from 1-10 to the 9th power per square centimeter.

Heavy ion microporous membranes are usually drilled with heavy ions provided by high-energy accelerators. Heavy ion drilling is the most critical part of the production process of heavy ion microporous membranes. Therefore, ion beam irradiation is the most important step in the production of heavy ion microporous membranes. A very important production step. The control of the microporous membrane irradiation production terminal is the nerve of the irradiation special production terminal, and its construction is essential.

Contents of the invention

In view of the above problems, the purpose of the present invention is to provide a heavy ion microporous membrane production terminal control system, which can improve the production efficiency of the heavy ion microporous membrane and realize the fully automatic production of the heavy ion microporous membrane.

In order to achieve the above object, the present invention adopts the following technical solutions: a heavy ion microporous membrane production terminal control system, the control system adopts a three-layer network control structure, including: the first layer network control structure, heavy ion microporous membrane production terminal Each device is connected to the front-end server, and the front-end server obtains the production status data of the heavy ion microporous membrane production terminal in real time, and controls each device of the heavy ion microporous membrane production terminal respectively; the second layer of network control structure, the front-end server will obtain the production After the status data is aggregated, it is sent to the core server controller, which manages and controls the devices of the heavy ion microporous membrane production terminal; the third layer network control structure, the core server controller and the general control client For data interaction, the master control client is used to view, manage and control the production of the entire irradiation production terminal; among them, distributed deployment is adopted between each device of the heavy ion microporous membrane production terminal and the master control client.

The terminal control system for heavy ion microporous membrane production, further, the front-end server includes an ion source control system, a linear accelerator control system, a vacuum differential control system, a beam feedback system, an irradiation chamber control system, and a roll film control system system; the ion source control system is used to control and debug the working process of the ion source; the linear accelerator control system is used to control and debug each device of the linear accelerator device; the vacuum differential control system is used to monitor the vacuum in real time The vacuum degree of each vacuum chamber in the differential device, so that the vacuum degree of each vacuum chamber meets the set requirements; the beam current feedback system is used for real-time monitoring of the beam current intensity and beam position during the irradiation process, and judging the beam current Whether the flow meets the production requirements; the irradiation chamber control system is used to control the movement of the vacuum chamber of the irradiation winding equipment; the roll film control system is used to control the automatic winding of the irradiation original film , to realize the operation of film release and film collection.

The terminal control system for heavy ion microporous membrane production, further, the vacuum differential control system adopts five-level differential distributed control, including a main pump control module, a molecular pump control module and a mechanical pump control module; the main pump The control module is used to obtain the vacuum degree of each vacuum chamber, and judges whether to turn on the molecular pump and the mechanical pump according to the obtained vacuum degree data; the molecular pump control module is used to control the molecular pump corresponding to each vacuum chamber step by step. Vacuum extraction; the mechanical pump control module is used to gradually control the mechanical pump corresponding to each vacuum chamber to perform vacuum extraction.

In the heavy ion microporous membrane production terminal control system, further, the beam feedback system includes two current intensity detectors, two boundary position detectors, a beam current intensity analysis module and a beam position analysis module; The two current intensity detectors are respectively arranged at the exit of the beam pipe and the rear end of the irradiation, and are used to monitor the beam current intensity before and after irradiation; the two boundary position detectors are arranged at the left and right ends of the irradiation area, with To monitor the boundary position where the beam reaches; the beam intensity analysis module is used to analyze the acquired beam intensity data, and compare the remaining current intensity after penetrating the membrane with the beam intensity before irradiation By comparison, it is calculated whether the current flow intensity meets the production requirements, so that the rolling film device operates uniformly; the beam position analysis module is used to obtain the position data of the beam and detect the uniformity of the beam. If the detection position reaches the preset calculation value, it is judged as beam uniformity composite production requirements, if it fails to detect the preset calculated value, then adjust the beam scattering, increase or decrease the size of beam scattering until it meets the requirements of irradiation production beam uniformity.

The terminal control system for heavy ion microporous membrane production, further, the irradiation chamber control system includes an automatic sealing module, a rail traction module, and a vacuum feedback module; the rail traction module controls the driving device to drive the irradiation winding device to Slide on the slide rail to make the irradiation winding equipment move to the working position; the automatic sealing module makes the irradiation winding equipment reach the working position by monitoring the limit switch signal to perform sealing operation; the vacuum feedback module, when the irradiation winding After the equipment moves to the working position and is sealed, the monitoring data of the vacuum degree in the vacuum chamber is obtained, and if the vacuum value reaches a predetermined threshold, the irradiation winding equipment is controlled for production.

The terminal control system for heavy ion microporous membrane production, further, the roll film control system includes a material discharging control module, a material receiving control module, a tension control module and a state monitoring module; a material discharging control module and a material receiving control module Control the movement of the unwinding motor and the rewinding motor respectively so that the unwinding shaft and the rewinding shaft complete the unwinding and rewinding actions; the tension control module is used to receive the tension sensor signal and monitor the tension during the production process of the irradiated raw film; The monitoring module is used to monitor the tension value of receiving and discharging in real time.

In the heavy ion microporous membrane production terminal control system, further, the core server controller is provided with a production management system and a fault diagnosis system; The operating data of each device of the ion microporous membrane production terminal is managed and stored; the fault diagnosis system is used to record, analyze and give early warning of various faults in the production process of each device of the heavy ion microporous membrane production terminal.

In the heavy ion microporous membrane production terminal control system, further, the fault diagnosis system includes an equipment operation parameter management module and a fault diagnosis prediction processing module; the equipment operation parameter management module uses big data to The operating parameter data of each device of the ion microporous membrane production terminal is stored during production; the fault diagnosis and prediction processing module is used to perform cross-comparison analysis on the data in the production process of the irradiation production terminal using correlation analysis rules, and then can Judgment of equipment failure or failure warning.

The terminal control system for heavy ion microporous membrane production further includes a hand-held wireless device for obtaining data of the front-end server, the core server controller and the master control client by wireless means.

The present invention has the following advantages due to the adoption of the above technical scheme:

1. The present invention can realize the fully automatic high-density irradiation production of heavy ion microporous membranes;

2. The present invention can realize the beam feedback linkage production of the heavy ion microporous membrane and the accelerator;

3. The invention can realize the uniform scattering of the beam current and improve the irradiation uniformity of the heavy ion microporous membrane;

4. The present invention can improve the production efficiency of the heavy ion microporous membrane;

In summary, the present invention can be widely used in the irradiation production of heavy ion microporous membranes.

Description of drawings

Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiment. The drawings are only for the purpose of illustrating a preferred embodiment and are not to be considered as limiting the invention. Throughout the drawings, the same reference numerals are used to refer to the same parts. In the attached picture:

Fig. 1 is the structure diagram of the linear accelerator heavy ion microporous membrane irradiation device of the embodiment of the present invention;

2 is a structural diagram of a beam scattering device according to an embodiment of the present invention;

3 is a schematic structural diagram of a vacuum differential device according to an embodiment of the present invention;

Fig. 4 is a schematic diagram of the structure of a heavy ion microporous membrane vacuum irradiation terminal according to an embodiment of the present invention;

Fig. 5 is a structural schematic diagram of a rolling film device according to an embodiment of the present invention;

6 is a schematic structural diagram of a sealing device according to an embodiment of the present invention, (a) is a schematic structural diagram of a vacuum chamber sealing ring, and (b) is a structural schematic diagram of a beam outlet sealing ring;

Fig. 7 is a schematic diagram of the overall control structure of the irradiation terminal according to the embodiment of the present invention;

Fig. 8 is a schematic diagram of the overall control principle of the irradiation terminal according to the embodiment of the present invention;

9 is a schematic structural diagram of a beam feedback system according to an embodiment of the present invention;

Fig. 10 is a schematic diagram of the control structure of the irradiation chamber according to the embodiment of the present invention;

Fig. 11 is a schematic diagram of a film roll control structure according to an embodiment of the present invention.

Detailed ways

Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present invention are shown in the drawings, it should be understood that the invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.

It should be understood that the terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" may also be meant to include the plural forms unless the context clearly dictates otherwise. The terms "comprising", "comprising", "containing" and "having" are inclusive and thus indicate the presence of stated features, steps, operations, elements and/or parts but do not exclude the presence or addition of one or Various other features, steps, operations, elements, components, and/or combinations thereof. The method steps, processes, and operations described herein are not to be construed as necessarily requiring their performance in the particular order described or illustrated, unless an order of performance is specifically indicated. It should also be understood that additional or alternative steps may be used.

Although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be referred to as These terms are limited. These terms may be only used to distinguish one element, component, region, layer or section from another region, layer or section. Terms such as "first," "second," and other numerical terms when used herein do not imply a sequence or order unless clearly indicated by the context. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the example embodiments.

For ease of description, spatial relative terms may be used herein to describe the relationship of one element or feature as shown in the figures with respect to another element or feature, such as "inner", "outer", "inner". ", "Outside", "Below", "Above", etc. Such spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures.

As shown in FIG. 1 , the linac heavy ion microporous membrane irradiation device provided in this embodiment includes a linear accelerator device 1 , a beam scattering device 2 , a vacuum differential device 3 and a heavy ion microporous membrane vacuum irradiation terminal 4 .

The linear accelerator device 1 is used to generate various heavy ion beam currents of 4 MeV/u.

The beam scattering device 2 is used to make the heavy ion beam diffuse and make the spatial distribution uniform.

The vacuum differential device 3 is used to gradually reduce the high vacuum of the beam pipeline to low vacuum.

The heavy ion microporous membrane vacuum irradiation terminal 4 is used to form the heavy ion microporous membrane under beam bombardment from the irradiated original membrane in a vacuum environment.

In some preferred embodiments of the present invention, the linear accelerator device 1 includes a conventional ECR ion source, a low-energy beam transmission line LEBT, a radio frequency quadrupole accelerator RFQ, a medium-energy beam matching section MEBT, a drift tube linear accelerator IH-DTL and a high-energy injection line HEBT. Among them: the ECR ion source generates a high-current heavy ion beam; the high-current heavy-ion beam passes through the low-energy beam line LEBT for beam lateral matching; the laterally matched beam is injected into the radio frequency quadrupole accelerator RFQ with a working frequency of 162.5MHz Accelerated to 600keV/u; the beam emitted by the radio frequency quadrupole accelerator RFQ passes through the middle-energy beam matching section MEBT to match the transverse and longitudinal phase spaces of the beam; the beam that is matched through the transverse and longitudinal phase spaces is injected into The drift tube linear accelerator IH-DTL with the same operating frequency is finally accelerated to an energy of 4MeV/u; the high-energy injection line HEBT includes a beam vacuum tube and a quadrupole magnet, and the beam vacuum tube passes through the quadrupole magnet for warp drift The beam emitted by the tube linear accelerator IH-DTL is transmitted, and its vacuum changes are balanced. In summary, since the operating frequency of this embodiment is designed to be 162.5 MHz, the linear accelerator device 1 of this embodiment has many advantages such as high acceleration efficiency, good beam quality, and compact structure.

In some preferred embodiments of the present invention, in order to improve the irradiation uniformity of the heavy ion microporous membrane, after the beam of the linear accelerator device 1 of this embodiment is extracted, the beam diffusion and spatial distribution are uniformized by the beam scattering device 2 .

As shown in FIG. 2 , the beam scattering device 2 of this embodiment includes a beam vacuum pipe 21 , a pre-defocus quadrupole magnet 22 , an octopole magnet 23 and an end defocus quadrupole magnet 24 .

The cross-section and divergence angle of the beam generated by the linear accelerator device 1 are very small. The pre-defocus quadrupole magnet 22 is placed at the entrance of the beam vacuum pipeline 21, and the beam emitted by the linear accelerator device 1 passes through the beam vacuum pipeline 21. Pre-defocusing quadrupole magnet 22, the cross section of the beam in the horizontal direction (the cross section in the horizontal direction is a cross section parallel to the beam current) begins to increase, that is, divergent transmission, and the cross section in the vertical direction (the cross section in the vertical direction is a cross section perpendicular to the beam current) A cross section) starts to be small, that is, convergent transmission; when the beam reaches the beam waist in the vertical direction (the beam waist is the middle position of the beam), an eight-pole magnet 23 is placed here to modulate the spatial distribution of the beam By applying high-voltage current to the octopole magnet 23 and increasing the magnetic field, and then affecting the heavy ion beam in the beam vacuum tube 21, even if the edge beam current in the horizontal direction feels a large focusing force, while the internal beam current in the horizontal direction is basically Without the effect of focusing, the distribution of the beam current in the horizontal direction can be made uniform by adjusting the focusing strength of the octopole magnet 23 . The beam continues to transmit to the right, and the ion beam is affected by the enhanced magnetic field through the terminal defocused quadrupole magnet 24, so that the divergence angle in the horizontal direction of the beam is further increased, and the horizontal profile of the beam can be quickly reached to the order of 0.5 meters. It can meet the needs of heavy ion microporous membrane production terminal.

During the above-mentioned beam transmission process, the vertical section of the beam has been constrained in a small range by two quadrupole magnets, so the beam pipeline generally chooses a rectangular cross-section or an elliptical cross-section to maximize the use of the space of the vacuum pipeline , on the other hand, it can reduce the impact of the heavy ion microporous membrane production terminal on the vacuum of the front-end ion accelerator, and help reduce the design difficulty of the vacuum differential system. Preferably, the outlet of the beam vacuum pipe 21 adopts a trumpet shape.

In some preferred embodiments of the present invention, when nuclear pore membranes are mass-produced, in order to improve production efficiency, the heavy ion microporous membrane vacuum irradiation terminal 4 needs to be connected to the vacuum differential device 3 for irradiation production as soon as possible after replacing the membrane material. Due to the large volume of the heavy ion microporous membrane vacuum irradiation terminal 4, the built-in membrane material and the large air load of the winding device, it takes a long time to pump to a high vacuum state. Therefore, considering the heavy ion microporous membrane vacuum irradiation terminal Acceptable pumping time and vacuum differential capability, so a vacuum differential structure of 10 ^-6 Pa to 10 ² Pa is designed and constructed between the beam vacuum pipeline and the heavy ion microporous membrane vacuum irradiation terminal. This embodiment adopts 5 levels The way of differential is to extract the vacuum step by step. This is an example, it is not limited to this, and it can be set according to actual needs.

The inlet of the vacuum differential device 3 is connected to the outlet of the beam vacuum pipeline 21 , and the outlet of the vacuum differential device 1 is connected to the vacuum irradiation terminal 4 of the heavy ion microporous membrane. The vacuum differential device 1 is used to gradually reduce the high vacuum of the beam vacuum pipeline 21 to the low vacuum of the heavy ion microporous membrane vacuum irradiation terminal 4, for example, from 5E-6Pa to 1E+2Pa, and gradually reduce the vacuum degree.

Specifically, as shown in Figure 3, the vacuum differential device 3 of this embodiment uses five-stage differential to complete the transition from 10 ^-6 Pa to 10 ² Pa. The vacuum differential device 3 includes a beam vacuum pipeline 30 and first to fifth vacuum Chambers 31-35, the first-fifth vacuum chambers 31-35 are sequentially arranged at intervals, the first-fifth vacuum chambers 31-35 are connected by a beam vacuum pipeline 30, and the outlet of the fifth vacuum chamber 35 is set in a trumpet shape . Among them, the vacuum degree is reduced step by step in the vacuum differential device 1 to complete the transition from 10 ^-6 Pa to 10 ² Pa. The specific structure of the vacuum chamber is similar to that of the existing vacuum chamber, including various The pump and the regulating valve are not described in detail here, and can be realized by using existing technologies. Further, each vacuum chamber is provided with a vacuum gauge for monitoring the vacuum degree.

In some preferred embodiments of the present invention, as shown in Figure 4, the heavy ion microporous membrane vacuum irradiation terminal 4 of this embodiment includes two irradiation winding devices 41, slide rails 42, driving devices 43 and control devices 44 Each radiation winding device 41 is driven by the control device 44 to control the driving device 43 so that it can move horizontally or/and vertically on the slide rail 42, so that each radiation winding device 41 can pass through the slide rail 42 Move to the beam outlet (i.e. working position) for irradiation processing.

In some implementations, the sliding rail 42 may include a horizontal sliding rail 421 and a longitudinal sliding rail 422, which are arranged outside the outlet of the heavy ion beam. The horizontal sliding rail 421 corresponds to the exit position of the vacuum differential device 3, and can make the irradiation winding device 41 move. To the working position for irradiation processing, the longitudinal slide rail 422 can make the irradiation winding device 41 move back and forth up and down; each slide rail is provided with a driving device 43 for pulling the radiation winding device 41 to move, and the driving device 43 can The traction motor is adopted, and the traction motor enables the radiation winding device 41 to perform horizontal and/or longitudinal reciprocating circular motion along the slide rail, and pulls the radiation winding device 41 to the ion beam outlet (ie, the working position).

In other implementations, each irradiation winding device 41 includes a vacuum chamber 411. The differences between the vacuum chamber 411 in this embodiment and the prior art are specifically described as follows:

The inlet of each vacuum chamber 411 is provided with a sealing device 412 for sealing the connection between the vacuum chamber 411 and the outlet of the beam pipeline.

Each vacuum chamber 411 is provided with a film rolling device 5 , and one side of each vacuum chamber 411 is provided with a switch door, which is convenient for changing the film roll, and the film material can be placed and collected manually. Further, a roll film observation window can be provided on the switch door, and the roll film observation window is used to observe the supply and take-up of the roll film device 5 and the irradiation of the film material, and a shielding plate can also be provided at the observation window. A visual observation system can also be set on the switch door, and a camera can also be installed for remote observation, which is used to check the work in the vacuum cavity 411 . Preferably, each vacuum cavity 411 can adopt a circular horizontal all-stainless steel structure.

Further, the roll film device 5 includes a first discharge shaft 51, a second discharge shaft 52, a first discharge motor 53, a second discharge motor 54, a first discharge tension monitoring shaft 55, a second discharge tension Monitoring shaft 56, first transmission shaft 57, second transmission shaft 58, third transmission shaft 59, fourth transmission shaft 510, first receiving tension monitoring shaft 511, second receiving tension monitoring shaft 512, first receiving tension Shaft 513 , second receiving shaft 514 , first receiving motor 515 and second receiving motor 516 .

The top in the vacuum chamber 4 is provided with a first discharge shaft 51 and a second discharge shaft 52 in parallel, the first discharge shaft 51 is connected to the first discharge motor 53, and the second discharge shaft 52 is connected to the second discharge shaft 52. The motor 54, the first discharging motor 53 and the second discharging motor 54 are used to drive the first discharging shaft 51 and the second discharging shaft 52 to discharge the film material.

Corresponding to the position of the first discharge shaft 51, a first discharge tension monitoring shaft 55, a first transmission shaft 57, a second transmission shaft 58 and a first receiving tension monitoring shaft are vertically spaced in the middle of the vacuum chamber 4 511. Corresponding to the position of the second discharge shaft 52, a second discharge tension monitoring shaft 56, a third transmission shaft 59, a fourth transmission shaft 510 and a second receiving tension are arranged vertically in the middle of the vacuum chamber 4. Axis 512 is monitored. The first discharging tension monitoring axis 55 , the first receiving tension monitoring axis 511 , the second discharging tension monitoring axis 56 and the second receiving tension monitoring axis 512 are used to monitor the tension of the film material on the corresponding monitoring axes.

The bottom of each vacuum cavity 4 is provided with a first material receiving shaft 513 and a second material receiving shaft 514 in parallel, the first material receiving shaft 513 is connected with a first material receiving motor 515, and the second material receiving shaft 514 is connected with the second material receiving shaft 514. The second rewinding motor 516, the first rewinding motor 515 and the second rewinding motor 516 are used to rewind the film material passing through the corresponding discharge tension monitoring shaft, transmission shaft and rewinding tension monitoring shaft.

Further, the first discharging tension monitoring shaft 55, the first transmission shaft 57, the second transmission shaft 58, the first receiving tension monitoring shaft 511, the second discharging tension monitoring shaft 56, the third transmission shaft 59, the fourth The membrane material driven on the drive shaft 510 and the second receiving tension monitoring shaft 512 is perpendicular to the direction of the beam flow. Only in this way can the beam flow irradiate the membrane to form a heavy ion microporous membrane.

Furthermore, the first unwinding tension monitoring shaft 55, the second unwinding tension monitoring shaft 56, the first rewinding tension monitoring shaft 511 and the second rewinding tension monitoring shaft 512 are provided with tension sensors, and the tension sensors are used for Collect the tension value of the film material on the transmission shaft.

It should be noted that the film rolling device 5 in this embodiment adopts a structure of two releases and two collections, but the number of reels for unwinding and rewinding can be set according to actual needs, and the number of film materials to be irradiated at the same time can be increased. The specific number is not specified. limited.

In still some implementations, as shown in FIG. 4 and FIG. 6 , the sealing device 412 includes several limit switches 4121 , a vacuum cavity sealing ring 4122 and a beam outlet sealing ring 4123 .

The irradiation winding device 41 is pulled by the traction motor to the vacuum cavity 411 to a predetermined position, and the limit switch 4121 is triggered. After receiving the signal from the limit switch 4121, the control device 44 sends a stop command to the longitudinal drive device 43 and restarts. When the horizontal driving device 43 reaches the predetermined position and triggers the limit switch 4121, the control device 44 sends a signal to stop the command. At this time, the sealing position has been reached, and the vacuum cavity sealing ring 4122 corresponds to the beam outlet sealing ring 4123. At this time, the vacuum cavity The sealing ring 4122 and the beam outlet sealing ring 4123 are tightly interlocked, wherein, the vacuum chamber sealing ring 4122 is provided with rubber posts 4122-1 extending outward at intervals in the circumferential direction, and correspondingly, the beam outlet sealing ring 4123 is provided with rubber posts 4122-1. The rubber hole 4123 that matches the column, the rubber column 4122-1 of the vacuum cavity sealing ring 4122 is inserted into the rubber hole of the beam outlet sealing ring 4123-1 to complete the sealing. At this time, the control device 44 sends an instruction to seal the entire The device is tightened to complete the entire sealing process. During specific use, the vacuum cavity sealing ring 4122 and the beam outlet sealing ring 4123 can be arranged on the interface flange of the vacuum cavity 41 and the beam flow vacuum pipe outlet of the vacuum differential device 4, so that the interface flange of the vacuum cavity 41 is in contact with the beam. The outlet flange of the flow vacuum pipeline is butted and sealed.

As shown in Figure 7, the heavy ion microporous membrane production terminal control system provided in this embodiment adopts a three-layer network convergence, and performs data transmission and interaction in a wireless manner, and can also intervene in an external network through a dedicated VPN virtual private network , to grant some permissions to view data, but the external network cannot perform control operations.

Specifically, the three-layer network control structure includes a front-end server 6, a core server controller 7, and a general control client 8 for controlling various hardware devices at the bottom layer.

Among them, the data of each device of the heavy ion microporous membrane production terminal is collected through the front-end server 6 through the underlying network (the underlying network refers to the connection of related equipment and sensors through the Internet of Things, and the network uses a combination of six types of network cables and Gigabit switches) Afterwards, it is sent to the core server controller 7 through the sub-node and the data aggregation point through the secondary network (the secondary network adopts 10 Gigabit core switches and optical fibers); the core server controller 7 is used to manage and control the front-end server 6 , the core server controller 7 performs data interaction with the general control client 8 through the three-level network (the three-level network adopts 10 Gigabit core aggregation switches and optical fibers), and the general control client 8 is used to monitor the production of the entire irradiation production terminal management and control. In addition, the processing results of the front-end server 6 , the core server controller 7 and the general control client 8 can also be obtained by the handheld wireless device 9 in a wireless manner. Among them, distributed deployment is adopted between each device of the heavy ion microporous membrane production terminal and the master control client 8, and each control unit is independent, and some problems will not affect the overall operation, and the corresponding control unit can be quickly replaced. After the system is repaired, the entire control interface can adopt a visual structure, use the modeling of actual objects, and actually simulate the production terminal state on site, which is convenient for operators to operate and can improve production efficiency.

As shown in Figure 8, the control process of the irradiation production of the whole irradiation production terminal is as follows: the ion source system provides the original beam current, after passing through the components of the linear accelerator device 1, the current intensity increases, and then passes through the beam scattering device 2 The beam is scattered to achieve the beam intensity required for irradiation production, and the beam passes through the vacuum differential device 3 and enters the vacuum cavity 411 of the heavy ion microporous membrane vacuum irradiation terminal 4 for irradiation production.

In some embodiments of the present invention, the front-end server 6 includes an ion source control system, a linear accelerator control system, a vacuum differential control system, a beam feedback system, an irradiation chamber control system, and a roll film control system.

The ion source control system is used to control and debug the working process of the ion source;

The linear accelerator control system is used to control and debug each device of the linear accelerator device;

The vacuum differential control system is used to monitor the vacuum degree of each vacuum chamber in the vacuum differential device in real time, so that the vacuum degree of each vacuum chamber meets the set requirement. Specifically, the vacuum differential control system includes a main pump control module, a molecular pump control module and a mechanical pump control module. The main pump control module is used to obtain the vacuum degree of each vacuum chamber, and judge whether to turn on the molecular pump and the mechanical pump according to the obtained vacuum degree data; the molecular pump control module is used to control the molecular pump corresponding to each vacuum chamber step by step. Vacuum extraction; the mechanical pump control module is used to gradually control the mechanical pump corresponding to each vacuum chamber to perform vacuum extraction. This embodiment adopts five-level differential for distributed control, and automatically turns on the relevant vacuum pumps for vacuum pumping according to the acquired vacuum gauge data until the requirements are met. Each vacuum chamber of the five-level differential is correspondingly equipped with a molecular pump and a mechanical pump. Pump; first start the differential molecular pump and/or mechanical pump for vacuum pumping, and when the vacuum value reaches the required threshold, it will automatically turn on the differential molecular pump and/or mechanical pump for vacuum extraction. Vacuum extraction, when it is detected that the vacuum value reaches the required threshold, it will automatically turn on the three-stage differential molecular pump and/or mechanical pump for extraction, and so on until the vacuum meets the production requirements, and when it exceeds the threshold, it will Turn on the corresponding molecular pump and/or mechanical pump for vacuum pumping.

The beam feedback system is used for real-time monitoring of the beam intensity emitted by the linear accelerator device, and is linked with the heavy ion microporous membrane vacuum irradiation terminal 4 according to the intensity of the beam. The beam feedback system includes two beam A current intensity detector, two boundary position detectors, a beam current intensity analysis module and a beam position analysis module; the two beam current intensity detectors are respectively arranged at the exit of the beam pipe and the back end of the irradiation for monitoring the radiation The beam current intensity before and after irradiation; two boundary position detectors are set at the left and right ends of the irradiation area to monitor the boundary position reached by the beam current; the beam current intensity analysis module is used to convert the acquired beam current intensity data Perform analysis, compare the remaining current intensity after penetrating the membrane with the beam current intensity before irradiation, and calculate whether the current current intensity meets the production requirements, so that the rolling film device can run uniformly; the beam position analysis module is used to obtain The position data of the beam detects the uniformity of the beam. If the detection position reaches the preset calculation value, it is determined that the beam uniformity meets the production requirements. If the preset calculation value cannot be detected, the beam scattering is adjusted. Increase or decrease the size of the beam scatter until the beam uniformity required for irradiation production is achieved. Specifically, as shown in Figure 9, the detector of the beam feedback system in this embodiment is provided with a front-end beam current intensity detector, a rear-end beam current intensity detector, a left boundary position detector, and a right boundary position detector , using dual detection of beam position and beam current intensity, the obtained data is sent to the corresponding analysis module, which provides a basis for the operation of the roll film system. The beam current feedback system is the eyes of the entire production terminal, and its main function is to Real-time feedback of beam current intensity and beam position data provides interlocking basis for back-end control. In some implementations, the beam current of the heavy ion beam is in the beam vacuum tube, and the front-end beam current intensity detector can be embedded in the beam vacuum tube by using a non-intercepting annular detector, and when the beam passes through it, it is detected by current induction Flow strength data. A beam current intensity detector is also placed at the back end of the irradiation film, mainly to detect the current intensity of the beam. The data detected by the detector are compared to calculate the remaining flow intensity after penetrating the membrane, which can indirectly calculate whether the current flow intensity meets the production requirements. The beam current intensity analysis module analyzes and processes the beam current data. According to the strength of the current intensity, it sends the motor control command to the film rolling device. When the current intensity becomes stronger, the motion motor will speed up. To reduce the speed, the beam current intensity detector at the front end cooperates with the beam current intensity detector at the rear end to determine the optimal command sent to the motion motor. In other implementations, the main function of the position detector is to detect the uniformity of the beam. If the detectors on both sides can detect the data reaching the theoretical calculation value, the beam position analysis module determines that the beam uniformity meets the production requirements. If the detectors on both sides fail to detect data reaching the theoretically calculated value, the beam position analysis module will adjust the beam scattering device to increase or decrease the size of the beam scattering until it reaches the beam required for irradiation production. flow uniformity.

The irradiation chamber control system is used to control the movement of the vacuum chamber 411 of the irradiation winding device 41 , such as the movement of the vacuum chamber 411 on the slide rail and the automatic docking and sealing of the vacuum chamber 411 . Specifically, as shown in Figure 10, the irradiation chamber control system includes an automatic sealing module, a rail traction module, a vacuum feedback module, and a state monitoring module; the rail traction module controls the driving device to drive the irradiation winding device to slide on the slide rail , so that the radiation winding equipment moves to the working position; the automatic sealing module, by monitoring the signal of the limit switch, makes the radiation winding equipment reach the working position for sealing operation; the vacuum feedback module, when the radiation winding equipment moves to the working position After sealing, the monitoring data of the vacuum degree in the vacuum chamber is obtained. If the vacuum value reaches the predetermined threshold, the irradiation winding equipment is controlled for production; the state monitoring module is used to collect the data of the underlying sensors in real time, such as pressure, temperature, Vacuum value, etc. for status monitoring.

The roll film control system includes a discharge control module, a rewind control module, a tension control module and a state monitoring module; the discharge control module and the rewind control module respectively control the movement of the discharge motor and the rewind motor so that the discharge shaft and the rewind The axis completes the feeding and receiving actions; the tension control module is used to receive the signal of the tension sensor to monitor the tension of the irradiation raw film production process; the state monitoring module is used to monitor the tension value of receiving and discharging in real time. This embodiment adopts a double roll film structure, which requires that the roll film speed must be synchronized, and can automatically adjust the speed according to the received beam current feedback signal to maintain a balance in production, and is used for automatic winding of the original irradiated film, mainly It is realized by driving two unwinding reels and two rewinding reels by a servo motor.

In some embodiments of the present invention, the core server controller is provided with a production management system and a fault diagnosis system;

The production management system is used to manage and store the operation data of each device of the heavy ion microporous membrane production terminal in the production process of the irradiation production terminal;

The fault diagnosis system is used to record and analyze various faults in the production process of the irradiation production terminal, such as the operation state of the linear accelerator, the state of the vacuum chamber and other data for real-time storage, and use the correlation analysis rules of the data, Carry out cross-comparison analysis to judge equipment failure or predict failure in advance. For example, when the temperature is too high and the water pressure is too low, it can be judged that there is a problem with the cooling system of the accelerator. Specifically, the fault diagnosis system includes a device operation parameter management module and a fault diagnosis prediction processing module; the device operation parameter management module uses big data to store the data of each device and production; Record and analyze according to various faults in the production process of the production terminal, such as the operating status of the linear accelerator, the operating status of the power supply, the status of the vacuum chamber and other data for real-time storage, and use the correlation analysis rules of the data for cross-comparison Analysis can further determine equipment failure or predict failure in advance. For example, when the temperature is too high and the water pressure is too low, it can be judged that there is a problem with the accelerator’s cooling system.

In summary, the present invention constitutes an overall control system through distributed distribution, introduces the concept of artificial intelligence, and combines various subsystems to form a special production device control system for heavy ion microporous membranes. The production device can produce high-density, high-density quality heavy ion microporous membrane.

Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: it can still be Modifications are made to the technical solutions described in the foregoing embodiments, or equivalent replacements are made to some of the technical features, and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims (8)

1. A heavy ion microporous membrane production terminal control system is characterized in that the control system adopts a three-layer network control structure, including: The first layer of network control structure, each device of the heavy ion microporous membrane production terminal is connected to the front-end server, and the front-end server obtains the production status data of the heavy ion microporous membrane production terminal in real time, and controls each device of the heavy ion microporous membrane production terminal respectively ; Wherein, the front-end server includes an ion source control system, a linear accelerator control system, a vacuum differential control system, a beam feedback system, an irradiation chamber control system, and a roll film control system; The ion source control system is used to control and debug the working process of the ion source; The linear accelerator control system is used to control and debug each device of the linear accelerator device; The vacuum differential control system is used to monitor the vacuum degree of each vacuum chamber in the vacuum differential device in real time, so that the vacuum degree of each vacuum chamber meets the set requirements; The beam current feedback system is used for real-time monitoring of the beam current intensity and beam current position during the irradiation process, and judging whether the beam current meets the production requirements; The irradiation chamber control system is used to control the movement of the vacuum chamber of the irradiation winding equipment; The roll film control system is used to control the automatic winding of the irradiated original film to realize the film unwinding and film winding operations; The second layer of network control structure, the front-end server aggregates the obtained production status data and sends it to the core server controller, and the core server controller manages and controls the various devices of the heavy ion microporous membrane production terminal; The third-layer network control structure, the core server controller and the general control client perform data interaction, and the general control client is used to view, manage and control the production of the entire irradiation production terminal; among them, the heavy ion microporous membrane production terminal Distributed deployment is adopted between each device and the master control client. 2. The heavy ion microporous membrane production terminal control system according to claim 1, wherein the vacuum differential control system adopts five-level differential distributed control, including a main pump control module, a molecular pump control module and a mechanical pump control module; The main pump control module is used to obtain the vacuum degree of each vacuum chamber, and judge whether to turn on the molecular pump and the mechanical pump according to the obtained vacuum degree data; The molecular pump control module is used to gradually control the molecular pump corresponding to each vacuum chamber to perform vacuum extraction; The mechanical pump control module is used to control the mechanical pump corresponding to each vacuum chamber step by step to extract vacuum. 3. The heavy ion microporous membrane production terminal control system according to claim 1, wherein the beam feedback system comprises two beam current intensity detectors, two boundary position detectors, and a beam current intensity detector. Analysis module and beam position analysis module; The two beam current intensity detectors are respectively arranged at the exit of the beam pipe and the rear end of the irradiation, and are used to monitor the beam current intensity before and after irradiation; The two boundary position detectors are arranged at the left and right ends of the irradiation area, and are used to monitor the boundary position reached by the beam; The beam current intensity analysis module is used to analyze the acquired beam current intensity data, compare the remaining current intensity after penetrating the membrane with the beam current intensity before irradiation, and calculate whether the current current intensity meets the requirements of Production requirements, so that the rolling film device runs evenly; The beam position analysis module is used to obtain the position data of the beam and detect the uniformity of the beam. If the detection position reaches the preset calculation value, it is determined that the beam uniformity meets the production requirements. If the calculated value is designed, the beam scattering is adjusted, and the size of the beam scattering is increased or decreased until the beam uniformity required for irradiation production is achieved. 4. The heavy ion microporous membrane production terminal control system according to claim 1, wherein the irradiation chamber control system includes an automatic sealing module, a track traction module and a vacuum feedback module; The track traction module controls the driving equipment to drive the irradiation winding equipment to slide on the slide rail, so that the irradiation winding equipment moves to the working position; The automatic sealing module, by monitoring the signal of the limit switch, enables the irradiation winding equipment to perform sealing operation after reaching the working position; The vacuum feedback module, when the irradiation winding equipment moves to the working position and seals, obtains the monitoring data of the vacuum degree in the vacuum chamber, and if the vacuum value reaches a predetermined threshold, controls the irradiation winding equipment to start production. 5. The heavy ion microporous membrane production terminal control system according to claim 1, wherein the roll film control system comprises a discharging control module, a receiving control module, a tension control module and a state monitoring module; The discharging control module and the receiving control module respectively control the movement of the discharging motor and the receiving motor so that the discharging shaft and the receiving shaft complete the discharging and receiving actions; The tension control module is used to receive the tension sensor signal and monitor the tension in the production process of the irradiated original film; The state monitoring module is used to monitor the tension value of receiving and discharging in real time. 6. The heavy ion microporous membrane production terminal control system according to any one of claims 1 to 5, the core server controller is provided with a production management system and a fault diagnosis system; The production management system is used to manage and store the operation data of each device of the heavy ion microporous membrane production terminal in the production process of the irradiation production terminal; The fault diagnosis system is used for recording, analyzing and early warning of various faults in the production process of each device of the heavy ion microporous membrane production terminal. 7. the heavy ion microporous membrane production terminal control system according to claim 6, is characterized in that, described fault diagnosis system comprises equipment operating parameter management module and fault diagnosis prediction processing module; The equipment operating parameter management module uses big data to store the operating parameter data of each device of the heavy ion microporous membrane production terminal during production; The fault diagnosis and prediction processing module is used for performing cross-comparison analysis on the data in the production process of the irradiation production terminal using data correlation analysis rules, and then can judge equipment faults or fault warnings. 8. The heavy ion microporous membrane production terminal control system according to any one of claims 1 to 5, characterized in that it also includes a hand-held wireless device for obtaining front-end servers, core server controllers and Master control client data.

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