CN113808775A - Linear accelerator heavy ion microporous membrane irradiation device - Google Patents
Linear accelerator heavy ion microporous membrane irradiation device Download PDFInfo
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- CN113808775A CN113808775A CN202111097055.5A CN202111097055A CN113808775A CN 113808775 A CN113808775 A CN 113808775A CN 202111097055 A CN202111097055 A CN 202111097055A CN 113808775 A CN113808775 A CN 113808775A
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- G—PHYSICS
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- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/04—Irradiation devices with beam-forming means
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/10—Scattering devices; Absorbing devices; Ionising radiation filters
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/10—Irradiation devices with provision for relative movement of beam source and object to be irradiated
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Abstract
本发明涉及一种直线加速器重离子微孔膜辐照装置，包括直线加速器装置、束流散射装置、真空差分装置和重离子微孔膜真空辐照终端；直线加速器装置，被配置为产生重离子束流；束流散射装置，被配置为使重离子束流在束流管道传输中扩散及空间分布均匀；真空差分装置，被配置为逐级降低束流管道的真空度；重离子微孔膜真空辐照终端，密封连接真空差分装置被配置为使得处于真空环境的辐照原膜在重离子束流轰击下形成重离子微孔膜。本发明可以实现重离子微孔膜的高密度辐照生产。
The invention relates to a linear accelerator heavy ion microporous film irradiation device, comprising a linear accelerator device, a beam scattering device, a vacuum differential device and a heavy ion microporous film vacuum irradiation terminal; the linear accelerator device is configured to generate heavy ions beam; beam scattering device, configured to make the heavy ion beam diffuse and evenly distributed in the beam pipeline transmission; vacuum differential device, configured to reduce the vacuum degree of the beam pipeline step by step; heavy ion microporous membrane The vacuum irradiation terminal, hermetically connected vacuum differential device is configured so that the irradiated original film in the vacuum environment forms a heavy ion microporous film under the bombardment of the heavy ion beam. The invention can realize the high-density irradiation production of the heavy ion microporous film.
Description
Technical Field
The invention relates to a heavy ion microporous membrane irradiation device of a linear accelerator, and relates to the technical field of heavy ion microporous membrane production.
Background
The heavy ion microporous membrane is the most precise microporous filtering membrane in the world, and is a porous plastic film, dense and hemp pores are arranged on the membrane, and the shape and the size of each pore are almost the same. Heavy ion microporous membranes come in a variety of sizes, ranging from 5 microns to 60 microns in membrane thickness, 0.2 microns to 15 microns in pore size, and from 1 to the 9 th power of 10 per square centimeter in pore density.
Heavy ion microporous membranes are generally perforated by heavy ions provided by a high-energy accelerator, and the perforation of the heavy ions is the most critical ring in the production process of the heavy ion microporous membranes, so that ion beam irradiation is a very important production step in the production of the heavy ion microporous membranes.
In the current irradiation production, because a special heavy ion microporous membrane irradiation device for production is not available, the density and the quality of the produced heavy ion microporous membrane are not high. The main reason is that since the accelerator is not dedicated and is faced with a variety of heavy ions, each irradiation requires a great deal of effort to tune the ion beam required for irradiating the heavy ion microporous membrane, which results in poor ion beam quality and directly results in poor density and quality of the irradiated membrane. In addition, the heavy ion microporous membrane with high density cannot be irradiated due to the large energy loss of beam current in the atmosphere.
Disclosure of Invention
In view of the above problems, the present invention aims to provide a heavy ion microporous membrane irradiation device of a linear accelerator, which can effectively improve the density and the quality of the heavy ion microporous membrane.
In order to achieve the purpose, the invention adopts the following technical scheme: a linear accelerator heavy ion microporous membrane irradiation device comprises a linear accelerator device, a beam scattering device, a vacuum difference device and a heavy ion microporous membrane vacuum irradiation terminal;
the linear accelerator device configured to generate a heavy ion beam;
the beam scattering device is configured to enable heavy ion beams to be diffused and distributed uniformly in space during beam pipeline transmission;
the vacuum difference device is configured to reduce the vacuum degree of the beam pipeline step by step;
the heavy ion microporous membrane vacuum irradiation terminal is hermetically connected with the vacuum differential device and is configured to enable an irradiation original membrane in a vacuum environment to form a heavy ion microporous membrane under the bombardment of heavy ion beam current.
The linear accelerator heavy ion microporous membrane irradiation device further comprises an ECR ion source, a low-energy beam transmission line, a radio frequency quadrupole accelerator, an intermediate energy beam matching section, a drift tube linear accelerator and a high-energy injection line;
the ECR ion source produces heavy ion beam current of heavy current, and heavy ion beam current of heavy current passes through low energy beam current transmission line carries out the horizontal matching of beam current, and the beam current through horizontal matching injects into the radio frequency quadrupole accelerator accelerates, passes through the beam current of radio frequency quadrupole accelerator outgoing passes through the horizontal and vertical phase space of beam current is matchd to well ability beam current matching section, and the beam current after horizontal and vertical phase space match injects drift tube linear accelerator further accelerates, and the heavy ion beam current after the acceleration passes through the high energy is injected the line and is injected into beam current scattering device, wherein, the line is injected to the high energy includes first vacuum beam current pipeline and quadrupole magnet, first beam current vacuum pipeline passes quadrupole magnet for heavy ion beam current is in first vacuum beam current pipeline transmits.
The linear accelerator heavy ion microporous membrane irradiation device is characterized in that the beam scattering device comprises a second vacuum beam pipeline, a pre-defocusing quadrupole magnet, an octopole magnet and a terminal defocusing quadrupole magnet;
the pre-defocusing quadrupole magnet penetrates through an inlet of the second vacuum beam pipeline, so that the section of the heavy ion beam injected by the high-energy injection line begins to increase in the horizontal direction and the section begins to converge in the vertical direction;
the eight-pole magnet is arranged at the beam waist position where the heavy ion beam reaches the vertical direction, so that the heavy ion beam is uniformly distributed in the horizontal direction;
and the tail end defocusing quadrupole magnet penetrates through an outlet of the second vacuum beam current pipeline, so that the divergence angle of the heavy ion beam current in the horizontal direction is increased.
The linear accelerator heavy ion microporous membrane irradiation device is characterized in that the vacuum difference device comprises a plurality of vacuum chambers and a third vacuum beam pipeline which are sequentially connected, the vacuum chambers are sequentially connected through the third vacuum beam pipeline, an outlet of the last stage of vacuum chamber is connected with the heavy ion microporous membrane vacuum irradiation terminal through a beam trumpet-shaped transmission pipeline, and the vacuum degree is reduced step by step in the vacuum difference device to complete step-by-step transition of the vacuum degree.
The heavy ion microporous membrane irradiation device of the linear accelerator is characterized in that the heavy ion microporous membrane vacuum irradiation terminal comprises at least one winding irradiation device, a slide rail, a driving device and a control device;
the sliding rail is arranged on the outer side of the vacuum difference device;
the driving device is arranged on the slide rail, and the driving device controls and draws the winding irradiation device to do reciprocating motion along the transverse direction and/or the longitudinal direction of the slide rail through the control device, and can draw the winding irradiation device to an ion beam outlet for irradiation processing.
The linear accelerator heavy ion microporous membrane irradiation device is characterized in that the winding irradiation equipment comprises a vacuum cavity;
the inlet of the vacuum cavity is provided with a sealing device for sealing the connection part of the vacuum cavity and the beam outlet;
a film rolling device is arranged in the vacuum cavity;
and a switch door is arranged on one side of the vacuum cavity and used for placing and collecting the original irradiation film.
The linear accelerator heavy ion microporous membrane irradiation device is characterized in that the membrane rolling device comprises at least one discharging motor, a discharging shaft, a transmission shaft, a receiving shaft and a receiving motor;
at least one discharging shaft is arranged in the vacuum cavity, and each discharging shaft is connected with a discharging motor for discharging an irradiation raw film;
the bottom in the vacuum cavity is provided with at least one material receiving shaft, and the material receiving shaft is connected with a material receiving motor for receiving the irradiation raw film;
the transmission shaft is arranged between the discharging shaft and the receiving shaft and used for transmitting the original irradiation film.
The linear accelerator heavy ion microporous membrane irradiation device is characterized in that a discharging tension monitoring shaft and a receiving tension monitoring shaft are arranged between the discharging shaft and the receiving shaft at intervals, and tension sensors are further arranged on the discharging tension monitoring shaft and the receiving tension monitoring shaft and used for monitoring the tension of a membrane material on the corresponding monitoring shafts.
The linear accelerator heavy ion microporous membrane irradiation device is characterized in that the sealing device comprises a plurality of limit switches, vacuum cavity sealing rings and beam outlet sealing rings;
the limit switch is used for limiting the movement position of the vacuum cavity, and when the vacuum cavity moves to a preset position to trigger the limit switch, the control equipment receives a trigger signal to stop the movement of the vacuum cavity;
when the vacuum cavity moves to a working position, the vacuum cavity sealing ring and the beam outlet sealing ring are matched to complete sealing.
The linear accelerator heavy ion microporous membrane irradiation device is characterized in that rubber columns are arranged on the vacuum cavity sealing ring in an outward extending mode at intervals in the circumferential direction, correspondingly, rubber holes matched with the rubber columns are formed in the beam outlet sealing ring, and the rubber columns of the vacuum cavity sealing ring are inserted into the rubber holes of the beam outlet sealing ring to complete sealing; preferably, a film rolling observation window or a visual observation system is arranged on the switch door and used for checking the work in the vacuum cavity.
Due to the adoption of the technical scheme, the invention has the following advantages:
1. the heavy ion microporous membrane vacuum irradiation terminal comprises a winding irradiation device, a sliding rail, a driving device and a control device, wherein the driving device controls and pulls the winding irradiation device to do reciprocating motion along the transverse direction and/or the longitudinal direction of the sliding rail through the control device, and can pull the winding irradiation device to an ion beam outlet for irradiation processing;
2. the invention is provided with a beam scattering device, the beam scattering device comprises a vacuum beam pipeline, a pre-defocusing quadrupole magnet, an octopole magnet and a tail-end defocusing quadrupole magnet, and two quadrupole magnets and one octopole magnet are used for replacing a scanning magnet, so that the beam is uniformly distributed in a larger space range, the uniform scattering of the beam is realized, and the irradiation uniformity of a heavy ion microporous membrane is improved;
3. the vacuum degree transition device is provided with a vacuum difference device, the vacuum difference device comprises a plurality of vacuum chambers and a vacuum beam pipeline which are sequentially connected, the vacuum degree is reduced step by step in the vacuum difference device, the step by step transition of the vacuum degree is completed, and the irradiation efficiency of an irradiation original film in a vacuum cavity can be improved;
in conclusion, the invention can be widely applied to irradiation production of heavy ion microporous membranes.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Like reference numerals refer to like parts throughout the drawings. In the drawings:
FIG. 1 is a structural diagram of a linear accelerator heavy ion microporous membrane irradiation device according to an embodiment of the present invention;
FIG. 2 is a structural diagram of a beam scattering device according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a vacuum differential device according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a heavy ion microporous membrane vacuum irradiation terminal according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a film winding apparatus according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of a sealing device according to an embodiment of the present invention, where (a) is a schematic structural diagram of a sealing ring of a vacuum chamber, and (b) is a schematic structural diagram of a sealing ring of a beam outlet.
Detailed Description
Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention can be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
It is to be understood that the terminology used herein is for the purpose of describing particular example embodiments only, and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" may be intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," "including," and "having" are inclusive and therefore specify the presence of stated features, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and/or groups thereof. The method steps, processes, and operations described herein are not to be construed as necessarily requiring their performance in the particular order described or illustrated, unless specifically identified as an order of performance. It should also be understood that additional or alternative steps may be used.
Although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms may be only used to distinguish one element, component, region, layer or section from another region, layer or section. Terms such as "first," "second," and other numerical terms when used herein do not imply a sequence or order unless clearly indicated by the context. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the example embodiments.
For convenience of description, spatially relative terms, such as "inner", "outer", "lower", "upper", and the like, may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. Such spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures.
As shown in fig. 1, the heavy ion microporous membrane irradiation device of the linear accelerator provided by this embodiment includes a linear accelerator device 1, a beam scattering device 2, a vacuum difference device 3, and a heavy ion microporous membrane vacuum irradiation terminal 4.
A linear accelerator apparatus 1 for generating a plurality of heavy ion beam currents of 4 MeV/u.
And the beam scattering device 2 is used for homogenizing heavy ion beam diffusion and spatial distribution.
And the vacuum difference device 3 is used for gradually reducing the high vacuum of the beam pipeline to low vacuum.
And the heavy ion microporous membrane vacuum irradiation terminal 4 is used for enabling an irradiation original membrane in a vacuum environment to form a heavy ion microporous membrane under beam bombardment.
In some preferred embodiments of the invention, the linac apparatus 1 includes a conventional ECR ion source, a low energy beam transport line LEBT, a radio frequency quadrupole accelerator RFQ, an intermediate energy beam matching section MEBT, a drift tube linac IH-DTL, and a high energy injection line HEBT. Wherein: an ECR ion source generates a heavy ion beam; enabling the high-current heavy ion beam to flow through a low-energy beam operation line LEBT for beam transverse matching; injecting the transversely matched beam into a radio frequency quadrupole accelerator RFQ with the working frequency of 162.5MHz and accelerating to 600 keV/u; matching the transverse and longitudinal phase spaces of the beam by the beam emitted by the radio frequency quadrupole accelerator RFQ through the intermediate energy beam matching section MEBT; injecting beam matched with the transverse and longitudinal phase spaces into a drift tube linear accelerator IH-DTL with the same working frequency, and finally accelerating to 4MeV/u energy; the high-energy injection line HEBT comprises a beam vacuum pipeline and a quadrupole magnet, wherein the beam vacuum pipeline penetrates through the quadrupole magnet and is used for transmitting beams emitted by the drift tube linear accelerator IH-DTL and balancing vacuum change of the beams. In summary, since the operating frequency of the present embodiment is designed to be 162.5MHz, the linear accelerator apparatus 1 of the present embodiment has many advantages, such as high acceleration efficiency, good beam quality, and compact structure.
In some preferred embodiments of the present invention, in order to improve the irradiation uniformity of the heavy ion microporous membrane, the beam of the linear accelerator device 1 of the present embodiment is extracted and then the beam is diffused and spatially distributed uniformly by the beam diffusion device 2.
As shown in fig. 2, the beam scattering device 2 of the present embodiment includes a beam vacuum tube 21, a pre-defocusing quadrupole magnet 22, an octupole magnet 23, and an end defocusing quadrupole magnet 24.
The cross section and the divergence angle of the beam generated by the linear accelerator device 1 are small, the pre-defocusing quadrupole magnet 22 is placed at the inlet of the beam vacuum pipeline 21, the beam emitted by the linear accelerator device 1 passes through the pre-defocusing quadrupole magnet 22 from the beam vacuum pipeline 21, the beam starts to increase in the horizontal direction (the horizontal direction is a section parallel to the beam) and is transmitted in a diverging mode, and the beam starts to decrease in the vertical direction (the vertical direction is a section perpendicular to the beam) and is transmitted in a converging mode; when the beam reaches the position near the beam waist in the vertical direction (the beam waist is the middle position of the beam), one octupole magnet 23 is arranged at the position, the spatial distribution of the beam is modulated, and the high-voltage current is added to the octupole magnet 23 to increase the magnetic field, so that the heavy ion beam in the beam vacuum pipeline 21 is influenced, even if the edge beam in the horizontal direction feels larger focusing force, and meanwhile, the inner beam in the horizontal direction is basically not focused, and the distribution of the beam in the horizontal direction can be uniformly distributed by adjusting the focusing strength of the octupole magnet 23. The beam is continuously transmitted to the right side, the ion beam is influenced by the enhanced magnetic field through the end defocusing quadrupole magnet 24, so that the divergence angle of the beam in the horizontal direction is further increased, the horizontal direction section of the beam can quickly reach 0.5 meter level, and the requirement of a heavy ion microporous membrane production terminal can be met.
In the process of beam transmission, the section of the beam in the vertical direction is always restrained in a small range by the two quadrupole magnets, so that the beam pipeline generally has a rectangular section or an elliptical section so as to be capable of utilizing the space of the vacuum pipeline to the maximum extent, and on the other hand, the influence of the heavy ion microporous membrane production terminal on the vacuum aspect of the front-end ion accelerator can be reduced, and the design difficulty of a vacuum differential system can be reduced. Preferably, the outlet of the beam vacuum duct 21 is flared.
In some preferred embodiments of the present invention, in order to improve the production efficiency when the nuclear pore membranes are mass-produced, the heavy ion microporous membrane vacuum irradiation terminal 4 is further providedAfter the film material is changed, the film material is connected with the vacuum difference device 3 as soon as possible for irradiation production. The heavy ion microporous membrane vacuum irradiation terminal 4 needs a long time for pumping to a high vacuum state due to the large volume of the cavity, the large air load of the built-in membrane material and the winding device, and therefore the pumping time and the vacuum differential capacity which can be accepted by the heavy ion microporous membrane vacuum irradiation terminal are comprehensively considered, and 10 is designed and built between the beam current vacuum pipeline and the heavy ion microporous membrane vacuum irradiation terminal-6Pa to 102The vacuum differential structure of Pa, in this embodiment, a 5-stage differential mode is adopted, and vacuum is extracted step by step, which is not limited to this, and may be set according to actual needs.
The inlet of the vacuum differential device 3 is connected with the outlet of the beam vacuum pipeline 21, and the outlet of the vacuum differential device 1 is connected with the heavy ion microporous membrane vacuum irradiation terminal 4. The vacuum difference device 1 is used for gradually reducing the high vacuum of the beam current vacuum pipeline 21 to the low vacuum of the heavy ion microporous membrane vacuum irradiation terminal 4, for example, reducing the vacuum degree from 5E-6Pa to 1E +2Pa, and gradually reducing the vacuum degree.
Specifically, as shown in fig. 3, the vacuum differentiating apparatus 3 of the present embodiment employs 5-stage differentiation completion 10-6Pa to 102Pa, the vacuum difference device 3 comprises a beam vacuum pipeline 30 and first to fifth vacuum chambers 31 to 35, the first to fifth vacuum chambers 31 to 35 are arranged at intervals in sequence, the first to fifth vacuum chambers 31 to 35 are connected through the beam vacuum pipeline 30, and the outlet of the fifth vacuum chamber 35 is horn-shaped. Wherein, the vacuum degree is reduced step by step in the vacuum difference device 1 to finish the vacuum degree from 10-6Pa to 102The transition of Pa, the specific structure of the vacuum chamber is similar to the existing vacuum chamber structure, including various pumps and regulating valves, which are not described herein in detail, and can be implemented by adopting the existing technology. Further, each vacuum chamber is internally provided with a vacuum gauge for monitoring the vacuum degree.
In some preferred embodiments of the present invention, as shown in fig. 4, the heavy ion microporous membrane vacuum irradiation terminal 4 of the present embodiment includes two winding irradiation devices 41, a slide rail 42, a driving device 43 and a control device 44; each winding irradiation device 41 is driven by the control device 44 to control the driving device 43 to move transversely or/and longitudinally on the slide rail 42, so that each winding irradiation device 41 can move to the beam outlet (i.e. the working position) through the slide rail 42 for irradiation processing.
In some implementations, the slide rail 42 may include a transverse slide rail 421 and a longitudinal slide rail 422, which are disposed outside the heavy ion beam outflow port, the transverse slide rail 421 corresponds to an outlet position of the vacuum difference device 3, and may enable the coiled irradiation equipment 41 to move to a working position for irradiation processing, and the longitudinal slide rail 422 may enable the coiled irradiation equipment 41 to move up and down; each slide rail is provided with a driving device 43 for drawing the winding irradiation device 41 to move, and the driving device 43 can adopt a drawing motor, so that the winding irradiation device 41 can perform reciprocating circular motion transversely and/or longitudinally along the slide rail to draw the winding irradiation device 41 to an ion beam outlet (i.e. a working position).
In other implementations, each of the coiled irradiation devices 41 includes a vacuum cavity 411, and the differences between the vacuum cavity 411 of this embodiment and the prior art are specifically described as follows:
a sealing device 412 is disposed at an inlet of each vacuum chamber 411 for sealing a connection between the vacuum chamber 411 and an outlet of the beam line.
All be provided with in each vacuum chamber 411 and roll up membrane device 5, one side of each vacuum chamber 411 all is provided with the switch door, is convenient for change and rolls up the membrane, can carry out laying and collecting of membrane material through manual mode. Further, a film rolling observation window can be arranged on the switch door and used for observing the discharging and receiving conditions of the film rolling device 5 and the irradiation condition of the film material, and a baffle plate can be arranged at the observation window. A visual observation system can be arranged on the switch door, and a camera can be installed for remote observation and used for checking the work in the vacuum cavity 411. Preferably, each vacuum chamber 411 may be of a circular horizontal type all stainless steel structure.
Further, the film rolling device 5 includes a first discharging shaft 51, a second discharging shaft 52, a first discharging motor 53, a second discharging motor 54, a first discharging tension monitoring shaft 55, a second discharging tension monitoring shaft 56, a first transmission shaft 57, a second transmission shaft 58, a third transmission shaft 59, a fourth transmission shaft 510, a first receiving tension monitoring shaft 511, a second receiving tension monitoring shaft 512, a first receiving shaft 513, a second receiving shaft 514, a first receiving motor 515, and a second receiving motor 516.
The top in the vacuum cavity 4 is provided with a first discharging shaft 51 and a second discharging shaft 52 in parallel, the first discharging shaft 51 is connected with a first discharging motor 53, the second discharging shaft 52 is connected with a second discharging motor 54, and the first discharging motor 53 and the second discharging motor 54 are used for driving the first discharging shaft 51 and the second discharging shaft 52 to discharge the film materials.
Corresponding to the position of the first discharging shaft 51, a first discharging tension monitoring shaft 55, a first transmission shaft 57, a second transmission shaft 58 and a first receiving tension monitoring shaft 511 are vertically arranged at intervals in the middle of the vacuum cavity 4. A second discharging tension monitoring shaft 56, a third transmission shaft 59, a fourth transmission shaft 510 and a second receiving tension monitoring shaft 512 are vertically arranged at intervals in the middle of the vacuum cavity 4 corresponding to the position of the second discharging shaft 52. The first discharging tension monitoring shaft 55, the first receiving tension monitoring shaft 511, the second discharging tension monitoring shaft 56 and the second receiving tension monitoring shaft 512 are used for monitoring the tension of the film materials on the corresponding monitoring shafts.
The bottom in each vacuum cavity 4 is provided with a first material receiving shaft 513 and a second material receiving shaft 514 in parallel, the first material receiving shaft 513 is connected with a first material receiving motor 515, the second material receiving shaft 514 is connected with a second material receiving motor 516, and the first material receiving motor 515 and the second material receiving motor 516 are used for receiving the film materials passing through the corresponding discharging tension monitoring shaft, the transmission shaft and the material receiving tension monitoring shaft.
Furthermore, the film materials driven on the first discharging tension monitoring shaft 55, the first transmission shaft 57, the second transmission shaft 58, the first receiving tension monitoring shaft 511, the second discharging tension monitoring shaft 56, the third transmission shaft 59, the fourth transmission shaft 510 and the second receiving tension monitoring shaft 512 are perpendicular to the beam direction, so that the beam can irradiate the film to form the heavy ion microporous film.
Furthermore, the first discharging tension monitoring shaft 55, the second discharging tension monitoring shaft 56, the first receiving tension monitoring shaft 511 and the second receiving tension monitoring shaft 512 are all provided with tension sensors, and the tension sensors are used for collecting tension values of the film materials on the transmission shafts.
It should be noted that the film rolling device 5 in this embodiment adopts a structure of two-releasing and two-receiving, but the number of the winding shafts for releasing and receiving can be set according to actual requirements, so as to increase the number of the film materials to be irradiated simultaneously, and the specific number is not limited.
In yet other implementations, as shown in fig. 4 and 6, the sealing device 412 includes a plurality of limit switches 4121, vacuum chamber seals 4122, and stream outlet seals 4123.
The winding irradiation equipment 41 pulls the vacuum cavity 411 to a preset position by a traction motor, triggers the limit switch 4121, the control equipment 44 receives a signal of the limit switch 4121, sends a stop instruction to the longitudinal driving equipment 43, then starts the transverse driving equipment 43, reaches the preset position, triggers the limit switch 4121, and sends a signal stop instruction to the control equipment 44, the sealing position is reached, the vacuum cavity sealing ring 4122 corresponds to the beam outlet sealing ring 4123, the vacuum cavity sealing ring 4122 and the beam outlet sealing ring 4123 are tightly buckled, wherein the vacuum cavity sealing ring 4122 is circumferentially and outwardly extended at intervals and is provided with rubber columns 4122-1, correspondingly, rubber holes 4123 matched with the rubber columns are arranged on the beam outlet sealing ring 4123, the rubber columns 4122-1 of the vacuum cavity sealing ring 4122 are inserted into the rubber holes of the beam outlet sealing ring 4123-1 to complete sealing, at this time, the control device 44 sends a command to tightly press the whole sealing device through the cylinder a, and the whole sealing process is completed. When the vacuum cavity body sealing ring 4122 and the beam outlet sealing ring 4123 are used specifically, the vacuum cavity body 41 and the beam vacuum pipeline outlet interface flange of the vacuum differential device 4 can be arranged, so that the vacuum cavity body 41 interface flange is butted and sealed with the beam vacuum pipeline outlet flange.
When the heavy ion microporous membrane vacuum irradiation terminal 4 of this embodiment is used, for example, the first winding irradiation device 41 completes preparation, for example, after an irradiation original membrane is installed and vacuum pumping is performed on the vacuum cavity 411, the winding irradiation device 41 may be controlled by the control device 44 to move to an ion beam outlet, move to a working position to complete butt joint and sealing, quickly pump vacuum to the vacuum cavity 411, and perform an irradiation process when the vacuum degree reaches a predetermined working vacuum; when the first winding device 41 performs the irradiation process, the second winding device 41 starts to wind and vacuumize, when the first winding device 41 finishes irradiation, the vacuum is broken, the working position is removed, the second winding device 41 is controlled by the control device 44 to move to the working position along the sliding rail, the irradiation process of the vacuum chamber of the first winding device 41 is repeated, and the reciprocating circulation is performed, so that the requirement of continuous irradiation work is met.
In conclusion, the heavy ion microporous membrane production device based on the linear accelerator can be formed by the linear accelerator device 1, the beam scattering device 2, the vacuum difference device 3 and the heavy ion microporous membrane vacuum irradiation terminal 4, and the heavy ion microporous membrane with high density and high quality can be produced by the production device.
The application process of the irradiation device of the heavy ion microporous membrane of the linear accelerator provided by the embodiment is as follows:
and S1, after the heavy ion beam current emitted by the linear accelerator device 1 is diffused and distributed in space uniformly, the heavy ion beam current is emitted to the vacuum difference device 3 through a vacuum beam current pipeline.
S2, the vacuum difference device 3 gradually reduces the high vacuum of the beam tube to the low vacuum in the vacuum cavity 411.
S3, setting the irradiation source film material on the film winding device 5 in the vacuum chamber 411.
S4, sliding the vacuum chamber 411 to the beam outlet, i.e. the working position, by the traction motor via the slide rail 42, so that the inlet of the vacuum chamber 411 is connected to the beam outlet, sealing the vacuum chamber by the sealing device 412, and vacuumizing the vacuum chamber 411 until reaching the preset vacuum value
S5, irradiating the membrane material in the vacuum cavity 411 by the diverged beam to form a heavy ion microporous membrane.
S6, changing the sample of the membrane material in the other vacuum cavity 411 while irradiating the membrane material in the vacuum cavity 411, vacuumizing until reaching a preset vacuum value, and waiting for irradiation production.
S7, when the film material in the vacuum cavity 411 finishes irradiation, the vacuum cavity 411 is evacuated from the working position through the slide rail by the traction motor, and the steps S4 and S6 are repeated to perform reciprocating circulation until the requirement of continuous irradiation work is met.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: it is to be understood that modifications may be made to the above-described arrangements in the embodiments or equivalents may be substituted for some of the features of the embodiments without departing from the spirit or scope of the present invention.
Claims (10)
1. A linear accelerator heavy ion microporous membrane irradiation device is characterized by comprising a linear accelerator device, a beam scattering device, a vacuum difference device and a heavy ion microporous membrane vacuum irradiation terminal;
the linear accelerator device configured to generate a heavy ion beam;
the beam scattering device is configured to enable heavy ion beams to be diffused and distributed uniformly in space during beam pipeline transmission;
the vacuum difference device is configured to reduce the vacuum degree of the beam pipeline step by step;
the heavy ion microporous membrane vacuum irradiation terminal is hermetically connected with the vacuum differential device and is configured to enable an irradiation original membrane in a vacuum environment to form a heavy ion microporous membrane under the bombardment of heavy ion beam current.
2. The linear accelerator heavy ion microporous membrane irradiation device according to claim 1, wherein the linear accelerator device comprises an ECR ion source, a low energy beam transmission line, a radio frequency quadrupole accelerator, an intermediate energy beam matching section, a drift tube linear accelerator, and a high energy injection line;
the ECR ion source produces heavy ion beam current of heavy current, and heavy ion beam current of heavy current passes through low energy beam current transmission line carries out the horizontal matching of beam current, and the beam current through horizontal matching injects into the radio frequency quadrupole accelerator accelerates, passes through the beam current of radio frequency quadrupole accelerator outgoing passes through the horizontal and vertical phase space of beam current is matchd to well ability beam current matching section, and the beam current after horizontal and vertical phase space match injects drift tube linear accelerator further accelerates, and the heavy ion beam current after the acceleration passes through the high energy is injected the line and is injected into beam current scattering device, wherein, the line is injected to the high energy includes first vacuum beam current pipeline and quadrupole magnet, first beam current vacuum pipeline passes quadrupole magnet for heavy ion beam current is in first vacuum beam current pipeline transmits.
3. The linear accelerator heavy-ion microporous membrane irradiation device according to claim 2, wherein the beam scattering device comprises a second vacuum beam tube, a pre-defocusing quadrupole magnet, an octupole magnet and an end-defocusing quadrupole magnet;
the pre-defocusing quadrupole magnet penetrates through an inlet of the second vacuum beam pipeline, so that the section of the heavy ion beam injected by the high-energy injection line begins to increase in the horizontal direction and the section begins to converge in the vertical direction;
the eight-pole magnet is arranged at the beam waist position where the heavy ion beam reaches the vertical direction, so that the heavy ion beam is uniformly distributed in the horizontal direction;
and the tail end defocusing quadrupole magnet penetrates through an outlet of the second vacuum beam current pipeline, so that the divergence angle of the heavy ion beam current in the horizontal direction is increased.
4. The heavy ion microporous membrane irradiation device of the linear accelerator as claimed in any one of claims 1 to 3, wherein the vacuum differential device comprises a plurality of vacuum chambers and a third vacuum beam pipeline which are connected in sequence, the vacuum chambers are connected in sequence through the third vacuum beam pipeline, the outlet of the last vacuum chamber is connected with the heavy ion microporous membrane vacuum irradiation terminal through a beam trumpet-shaped transmission pipeline, and the vacuum degree is gradually reduced in the vacuum differential device to complete gradual transition of the vacuum degree.
5. The heavy ion microporous membrane irradiation device of any one of claims 1 to 3, wherein the heavy ion microporous membrane vacuum irradiation terminal comprises at least one winding irradiation device, a slide rail, a driving device and a control device;
the sliding rail is arranged on the outer side of the vacuum difference device;
the driving device is arranged on the slide rail, and the driving device controls and draws the winding irradiation device to do reciprocating motion along the transverse direction and/or the longitudinal direction of the slide rail through the control device, and can draw the winding irradiation device to an ion beam outlet for irradiation processing.
6. The linear accelerator heavy-ion microporous membrane irradiation device according to claim 5, wherein the coiled irradiation equipment comprises a vacuum chamber;
the inlet of the vacuum cavity is provided with a sealing device for sealing the connection part of the vacuum cavity and the beam outlet;
a film rolling device is arranged in the vacuum cavity;
and a switch door is arranged on one side of the vacuum cavity and used for placing and collecting the original irradiation film.
7. The heavy ion microporous membrane irradiation device of claim 6, wherein the membrane rolling device comprises at least one discharge motor, a discharge shaft, a transmission shaft, a receiving shaft and a receiving motor;
at least one discharging shaft is arranged in the vacuum cavity, and each discharging shaft is connected with a discharging motor for discharging an irradiation raw film;
the bottom in the vacuum cavity is provided with at least one material receiving shaft, and the material receiving shaft is connected with a material receiving motor for receiving the irradiation raw film;
the transmission shaft is arranged between the discharging shaft and the receiving shaft and used for transmitting the original irradiation film.
8. The heavy-ion microporous membrane irradiation device of claim 7, wherein a discharging tension monitoring shaft and a receiving tension monitoring shaft are arranged between the discharging shaft and the receiving shaft at intervals, and tension sensors are further arranged on the discharging tension monitoring shaft and the receiving tension monitoring shaft and used for monitoring the tension of the membrane material on the corresponding monitoring shafts.
9. The heavy ion microporous membrane irradiation device of claim 6, wherein the sealing device comprises a plurality of limit switches, vacuum cavity sealing rings and beam outlet sealing rings;
the limit switch is used for limiting the movement position of the vacuum cavity, and when the vacuum cavity moves to a preset position to trigger the limit switch, the control equipment receives a trigger signal to stop the movement of the vacuum cavity;
when the vacuum cavity moves to a working position, the vacuum cavity sealing ring and the beam outlet sealing ring are matched to complete sealing.
10. The heavy ion microporous membrane irradiation device of claim 9, wherein the vacuum cavity sealing ring is circumferentially provided with rubber columns extending outwards at intervals, and correspondingly, the beam outlet sealing ring is provided with rubber holes matched with the rubber columns, and the rubber columns of the vacuum cavity sealing ring are inserted into the rubber holes of the beam outlet sealing ring to complete sealing; preferably, a film rolling observation window or a visual observation system is arranged on the switch door and used for checking the work in the vacuum cavity.
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| CN114883023A (en) * | 2022-05-13 | 2022-08-09 | 中国科学院近代物理研究所 | Irradiation device for vacuum cavity inner membrane material |
| WO2024077945A1 (en) * | 2022-09-01 | 2024-04-18 | 中国科学院近代物理研究所 | Irradiation terminal based on combined rotating beam line and application |
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