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CN111292866A - A heavy ion production device for industrial production of nuclear pore membranes - Google Patents

A heavy ion production device for industrial production of nuclear pore membranes Download PDF

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CN111292866A
CN111292866A CN202010146079.4A CN202010146079A CN111292866A CN 111292866 A CN111292866 A CN 111292866A CN 202010146079 A CN202010146079 A CN 202010146079A CN 111292866 A CN111292866 A CN 111292866A
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heavy ion
heavy
ion beam
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particle accelerator
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CN111292866B (en
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王兵
孙良亭
莫丹
张金泉
王贤武
姚庆高
吴巍
马艺准
杨龙
吴北民
卢旺
杨建成
胡正国
徐瑚珊
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Institute of Modern Physics of CAS
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    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
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    • G21K5/00Irradiation devices
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Abstract

本发明涉及一种核孔膜工业生产用的重离子生产装置,包括离子源、LEBT束线、粒子加速器、HEBT束线和膜照射终端;离子源用于产生高电荷态的重离子束流并对重离子束流进行初级加速;LEBT束线用于对重离子束流进行分析并匹配传输至粒子加速器;粒子加速器对重离子束流进行主加速,然后注入到HEBT束线;HEBT束线将注入的重离子束流劈分成若干股重离子束流后分别传输至若干个膜照射终端,膜照射终端将重离子束流引出并对放置于大气环境中的薄膜进行照射。本发明由于可以将薄膜放置在大气环境下进行照射,使薄膜的更换方便快捷,大大减小更换薄膜的时间,且在同一时间,可有多个终端同时照射薄膜,极大提高薄膜的照射效率,从而提高核孔膜的生产效率。

Figure 202010146079

The invention relates to a heavy ion production device for the industrial production of nuclear pore membranes, comprising an ion source, a LEBT beamline, a particle accelerator, an HEBT beamline and a membrane irradiation terminal; the ion source is used to generate a high-charge state heavy ion beam and The primary acceleration of the heavy ion beam; the LEBT beamline is used to analyze and match the heavy ion beam to the particle accelerator; the particle accelerator mainly accelerates the heavy ion beam, and then injects it into the HEBT beamline; the HEBT beamline will The implanted heavy ion beam is split into several heavy ion beams and then transmitted to several membrane irradiation terminals. The membrane irradiation terminal draws out the heavy ion beams and irradiates the thin film placed in the atmospheric environment. Because the invention can place the film in the atmospheric environment for irradiation, the replacement of the film is convenient and fast, and the time for replacing the film is greatly reduced, and at the same time, multiple terminals can irradiate the film at the same time, which greatly improves the irradiation efficiency of the film. , thereby improving the production efficiency of nuclear pore membranes.

Figure 202010146079

Description

一种核孔膜工业生产用的重离子生产装置A heavy ion production device for industrial production of nuclear pore membranes

技术领域technical field

本发明涉及一种重离子生产装置,具体涉及一种核孔膜工业生产用的重离子生产装置,属于核孔膜生产技术领域。The invention relates to a heavy ion production device, in particular to a heavy ion production device for industrial production of nuclear pore membranes, and belongs to the technical field of nuclear pore membrane production.

背景技术Background technique

重离子核孔膜在水处理、空气过滤以及清洁能源(如锂离子电池隔膜)等方面具有不可替代的优秀作用,并在新型特殊功能材料方面有着独特的作用,有望在民用和军用新材料方面有许多突破性进展。Heavy ion nuclear pore membrane has an irreplaceable and excellent role in water treatment, air filtration and clean energy (such as lithium ion battery separator), and has a unique role in new special functional materials, which is expected to be used in civil and military new materials. There are many breakthroughs.

目前国际上已有的核孔膜照射专用装置,可提供的重离子单核子能量约为3MeV/u,需照射的薄膜只能放置在真空状态,且在同一时间段只有一个照射终端工作,薄膜的照射效率不高,导致核孔膜的生产效率低。At present, the existing special equipment for nuclear pore film irradiation in the world can provide a heavy ion mononuclear energy of about 3MeV/u. The film to be irradiated can only be placed in a vacuum state, and only one irradiation terminal works at the same time period. The irradiation efficiency of the thin film is not high, resulting in a low production efficiency of nuclear pore membranes.

发明内容SUMMARY OF THE INVENTION

针对上述问题,本发明的目的是提供一种核孔膜工业生产用的重离子生产装置。In view of the above problems, the purpose of the present invention is to provide a heavy ion production device for the industrial production of nuclear pore membranes.

为实现上述目的,本发明采取以下技术方案:一种核孔膜工业生产用的重离子生产装置,包括离子源、LEBT束线、粒子加速器、HEBT束线和膜照射终端;所述离子源用于产生高电荷态的重离子束流并对重离子束流进行初级加速;所述LEBT束线设置在所述离子源的出口和所述粒子加速器的入口之间,用于对所述离子源产生的重离子束流进行分析,以根据不同类型核孔膜需求选定适合加速的重离子,然后匹配传输至所述粒子加速器;所述粒子加速器对重离子束流进行主加速,然后注入到所述HEBT束线;所述HEBT束线将注入的重离子束流劈分成若干股重离子束流后分别传输至若干个膜照射终端,所述膜照射终端将重离子束流引出并对放置于大气环境中的薄膜进行照射。In order to achieve the above purpose, the present invention adopts the following technical solutions: a heavy ion production device for industrial production of nuclear pore membranes, comprising an ion source, a LEBT beamline, a particle accelerator, an HEBT beamline and a membrane irradiation terminal; The LEBT beam line is arranged between the outlet of the ion source and the inlet of the particle accelerator for generating a high-charge state heavy ion beam and performing primary acceleration of the heavy ion beam; The generated heavy ion beam is analyzed to select suitable heavy ions for acceleration according to the requirements of different types of nuclear pore membranes, and then matched and transmitted to the particle accelerator; the particle accelerator mainly accelerates the heavy ion beam, and then injects it into the particle accelerator. The HEBT beam line; the HEBT beam line splits the implanted heavy ion beam into several heavy ion beams and then transmits them to several membrane irradiation terminals respectively, and the membrane irradiation terminals draw out the heavy ion beams and place them. Irradiate thin films in atmospheric environment.

所述的重离子生产装置,优选地,所述LEBT束线包括依次设置的:第一螺线管磁透镜,用于对引出重离子束流进行聚焦或散焦;双向校正磁铁,用于调整重离子束流至中心位置;分析二极磁铁,用于分析重离子种类并选定适合加速的重离子;第一组合四极磁铁,用于对选定的重离子束流进行聚焦或散焦;双向偏转二极磁铁,用于使重离子束流的方向偏转;第二组合四极磁铁和第二螺线管磁透镜,用于对重离子束流进行聚焦或散焦。In the heavy ion production device, preferably, the LEBT beam line includes: a first solenoid magnetic lens, used for focusing or defocusing the extracted heavy ion beam; a bidirectional correction magnet, used for adjusting The heavy ion beam is centered; the analysis dipole magnet is used to analyze the heavy ion species and select suitable heavy ions for acceleration; the first combination of quadrupole magnets is used to focus or defocus the selected heavy ion beam ; Bidirectional deflection dipole magnet for deflecting the direction of the heavy ion beam; a second combined quadrupole magnet and a second solenoid magnetic lens for focusing or defocusing the heavy ion beam.

所述的重离子生产装置,优选地,所述HEBT束线包括依次设置的:劈束装置,至少一个所述劈束装置沿所述HEBT束线的传输方向依次放置,用于将所述粒子加速器引出的一束重离子束流进行分割以劈分成若干股重离子束;偏转二极磁铁,用于使重离子束流的方向偏转以传输至所述膜照射终端;聚焦四极磁铁,用于对引出重离子束流进行聚焦或散焦;水平扫描磁铁和垂直扫描磁铁,用于使重离子束流的束斑均匀。In the heavy ion production device, preferably, the HEBT beam line includes: beam splitting devices arranged in sequence, and at least one of the beam splitting devices is placed in sequence along the transmission direction of the HEBT beam line for the particles to be separated. A beam of heavy ion beams drawn from the accelerator is split to split into several heavy ion beams; a deflection dipole magnet is used to deflect the direction of the heavy ion beams for transmission to the film irradiation terminal; a focusing quadrupole magnet is used It is used to focus or defocus the extracted heavy ion beam; the horizontal scanning magnet and the vertical scanning magnet are used to make the beam spot of the heavy ion beam uniform.

所述的重离子生产装置,优选地,所述LEBT束线同时与若干个所述离子源连接,且若干个所述离子源在极短时间间隔内交替运行。In the heavy ion production device, preferably, the LEBT beam line is connected to a plurality of the ion sources at the same time, and the plurality of the ion sources operate alternately within a very short time interval.

所述的重离子生产装置,优选地,所述离子源为超导离子源和/或ECR离子源。In the heavy ion production device, preferably, the ion source is a superconducting ion source and/or an ECR ion source.

所述的重离子生产装置,优选地,所述离子源产生的高电荷态重离子的平均束流强度为百微安量级。In the heavy ion production device, preferably, the average beam current intensity of the highly charged heavy ions generated by the ion source is in the order of hundreds of microamps.

所述的重离子生产装置,优选地,所述粒子加速器能够将重离子束流加速到单核能约为5MeV/u至20MeV/u。In the heavy ion production device, preferably, the particle accelerator can accelerate the heavy ion beam to a single nuclear energy of about 5 MeV/u to 20 MeV/u.

所述的重离子生产装置,优选地,所述粒子加速器为超导回旋加速器。In the heavy ion production device, preferably, the particle accelerator is a superconducting cyclotron.

本发明由于采取以上技术方案,其具有以下优点:1、本发明采用离子源提供高电荷态重离子,并通过粒子加速器将高电荷态重离子加速到单核能约为5MeV/u至20MeV/u,使重离子有能力穿过真空膜窗,且在大气环境下有足够的穿射距离,因此可以将薄膜放置在大气环境下进行照射,使薄膜的更换方便快捷,大大减小更换薄膜的时间,且在同一时间,可有多个照射终端同时照射薄膜,极大提高薄膜的照射效率,以提高核孔膜的生产效率。2、本发明选用高电荷态重离子方式,可减小粒子加速器体积和重量,减小建造成本。The present invention has the following advantages due to the adoption of the above technical solutions: 1. The present invention adopts an ion source to provide high-charge state heavy ions, and accelerates the high-charge state heavy ions to a mononuclear energy of about 5MeV/u to 20MeV/ by a particle accelerator. u, so that the heavy ions have the ability to pass through the vacuum film window, and there is enough penetration distance in the atmospheric environment, so the film can be placed in the atmospheric environment for irradiation, which makes the replacement of the film convenient and fast, and greatly reduces the replacement of the film. At the same time, multiple irradiation terminals can simultaneously irradiate the film, which greatly improves the irradiation efficiency of the film and improves the production efficiency of the nuclear pore membrane. 2. The present invention adopts the method of high-charged heavy ions, which can reduce the volume and weight of the particle accelerator and reduce the construction cost.

附图说明Description of drawings

图1是本发明的整体结构示意图;Fig. 1 is the overall structure schematic diagram of the present invention;

图2是本发明的局部结构示意图。FIG. 2 is a schematic diagram of a partial structure of the present invention.

具体实施方式Detailed ways

以下将结合附图对本发明的较佳实施例进行详细说明,以便更清楚理解本发明的目的、特点和优点。应理解的是,附图所示的实施例并不是对本发明范围的限制,而只是为了说明本发明技术方案的实质精神。The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, so as to more clearly understand the objects, features and advantages of the present invention. It should be understood that the embodiments shown in the accompanying drawings are not intended to limit the scope of the present invention, but are only intended to illustrate the essential spirit of the technical solutions of the present invention.

如图1、图2所示,本发明提供的核孔膜工业生产用的重离子生产装置包括离子源、LEBT束线1、粒子加速器2、HEBT束线3和膜照射终端4。其中,离子源用于产生高电荷态的重离子(如氩离子或氪离子等)束流并对重离子束流进行初级加速。LEBT束线1设置在离子源的出口和粒子加速器2的入口之间,用于对离子源产生的重离子束流进行分析,以根据不同类型核孔膜需求选定适合加速的重离子,然后匹配传输至粒子加速器2。粒子加速器2对重离子束流进行主加速,然后注入到HEBT束线3。HEBT束线3将注入的重离子束流劈分成若干股重离子束流后分别传输至若干个膜照射终端4,膜照射终端4将重离子束流引出并对放置于大气环境中的薄膜进行照射。As shown in FIG. 1 and FIG. 2 , the heavy ion production device for industrial production of nuclear pore membranes provided by the present invention includes an ion source, a LEBT beamline 1 , a particle accelerator 2 , an HEBT beamline 3 and a membrane irradiation terminal 4 . Among them, the ion source is used to generate a beam of heavy ions (such as argon ions or krypton ions, etc.) with a high charge state and perform primary acceleration of the heavy ion beam. The LEBT beam line 1 is set between the outlet of the ion source and the inlet of the particle accelerator 2, and is used to analyze the heavy ion beam generated by the ion source, so as to select suitable heavy ions for acceleration according to the requirements of different types of nuclear pore membranes, and then Matching transmission to particle accelerator 2. The particle accelerator 2 mainly accelerates the heavy ion beam and injects it into the HEBT beamline 3 . The HEBT beam line 3 splits the implanted heavy ion beam into several heavy ion beams and then transmits them to several membrane irradiation terminals 4 respectively. irradiate.

在上述实例中,优选的,LEBT束线1包括依次设置的:第一螺线管磁透镜11,用于对引出重离子束流进行聚焦或散焦;双向校正磁铁12,用于调整重离子束流至中心位置;分析二极磁铁13,用于分析重离子种类并选定适合加速的重离子;第一组合四极磁铁14,用于对选定的重离子束流进行聚焦或散焦;双向偏转二极磁铁15,用于使重离子束流的方向偏转;第二组合四极磁铁16和第二螺线管磁透镜17,用于对重离子束流进行聚焦或散焦。In the above example, preferably, the LEBT beam line 1 includes sequentially arranged: a first solenoid magnetic lens 11 for focusing or defocusing the extracted heavy ion beam; a bidirectional correcting magnet 12 for adjusting the heavy ions The beam is brought to the center position; the analysis dipole magnet 13 is used to analyze the heavy ion species and select suitable heavy ions for acceleration; the first combined quadrupole magnet 14 is used to focus or defocus the selected heavy ion beam ; Bidirectional deflection dipole magnet 15 for deflecting the direction of the heavy ion beam; the second combined quadrupole magnet 16 and the second solenoid magnetic lens 17 for focusing or defocusing the heavy ion beam.

在上述实例中,优选的,HEBT束线3包括依次设置的:劈束装置31,至少一个劈束装置31沿HEBT束线3的传输方向依次放置,用于将粒子加速器2引出的一束重离子束流进行分割以劈分成若干股重离子束;偏转二极磁铁32,用于使重离子束流的方向偏转以传输至膜照射终端4;聚焦四极磁铁33,用于对引出重离子束流进行聚焦或散焦;水平扫描磁铁34和垂直扫描磁铁35,用于使重离子束流的束斑均匀。In the above example, preferably, the HEBT beamline 3 includes a beam splitting device 31 arranged in sequence, and at least one beam splitting device 31 is placed in sequence along the transmission direction of the HEBT beamline 3 , and is used for reproducing a beam drawn from the particle accelerator 2 . The ion beam is split to split into several heavy ion beams; the deflection dipole magnet 32 is used to deflect the direction of the heavy ion beam for transmission to the film irradiation terminal 4; the focusing quadrupole magnet 33 is used to extract heavy ions The beam is focused or defocused; the horizontal scanning magnet 34 and the vertical scanning magnet 35 are used to make the beam spot of the heavy ion beam uniform.

在上述实例中,优选的,LEBT束线1可以同时与若干个离子源连接,若干个离子源可在极短时间间隔内交替运行,由此提高粒子加速器2的运行效率。In the above example, preferably, the LEBT beamline 1 can be connected with several ion sources at the same time, and the several ion sources can be operated alternately within a very short time interval, thereby improving the operating efficiency of the particle accelerator 2 .

在上述实例中,优选的,离子源为超导离子源和/或ECR离子源。In the above examples, preferably, the ion source is a superconducting ion source and/or an ECR ion source.

在上述实例中,优选的,离子源产生的高电荷态重离子的平均束流强度为百微安量级。In the above example, preferably, the average beam current intensity of the highly charged heavy ions generated by the ion source is in the order of hundreds of microamps.

在上述实例中,优选的,粒子加速器2可以将重离子束流加速到单核能约为5MeV/u至20MeV/u,以使得引出的重离子有能力穿过膜照射终端4的真空膜窗,且在大气环境下有足够的穿射距离。In the above example, preferably, the particle accelerator 2 can accelerate the heavy ion beam to a single nuclear energy of about 5 MeV/u to 20 MeV/u, so that the extracted heavy ions have the ability to pass through the vacuum membrane window of the membrane irradiation terminal 4 , and has a sufficient penetration distance in the atmospheric environment.

在上述实例中,优选的,粒子加速器2为超导回旋加速器。In the above example, preferably, the particle accelerator 2 is a superconducting cyclotron.

最后应说明的是:以上实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, but not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that it can still be The technical solutions described in the foregoing embodiments are modified, or some technical features thereof are equivalently replaced; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (8)

1. A heavy ion production device for the industrial production of nuclear pore membranes is characterized by comprising an ion source, an LEBT beam line (1), a particle accelerator (2), an HEBT beam line (3) and a membrane irradiation terminal (4);
the ion source is used for generating heavy ion beams with high charge states and carrying out primary acceleration on the heavy ion beams;
the LEBT beam line (1) is arranged between an outlet of the ion source and an inlet of the particle accelerator (2) and is used for analyzing a heavy ion beam current generated by the ion source, selecting heavy ions suitable for acceleration according to requirements of different types of nuclear pore membranes, pre-accelerating the selected heavy ion beam current and then matching and transmitting the heavy ion beam current to the particle accelerator (2);
the particle accelerator (2) carries out main acceleration on the heavy ion beam again, and then injects the heavy ion beam into the HEBT beam line (3);
the HEBT beam line (3) splits the injected heavy ion beam into a plurality of strands of heavy ion beams and then transmits the heavy ion beams to a plurality of film irradiation terminals (4), and the film irradiation terminals (4) lead out the heavy ion beams and irradiate the film placed in the atmospheric environment.
2. A heavy ion production apparatus according to claim 1, wherein the LEBT beam line (1) comprises, in order:
a first solenoidal magnetic lens (11) for focusing or defocusing the extracted heavy ion beam;
a bidirectional correction magnet (12) for adjusting the heavy ion beam current to a central position;
an analyzing dipole magnet (13) for analyzing heavy ion species and selecting heavy ions suitable for acceleration;
a first combined quadrupole magnet (14) for focusing or defocusing a selected heavy ion beam current;
a bidirectional deflection dipole magnet (15) for deflecting the direction of the heavy ion beam;
a second combined quadrupole magnet (16) and a second solenoidal magnetic lens (17) for focusing or defocusing the heavy ion beam.
3. A heavy ion production apparatus according to claim 1, wherein the HEBT beam line (3) comprises, in order:
the beam splitting device (31), at least one beam splitting device (31) is sequentially arranged along the transmission direction of the HEBT beam line (3), and is used for splitting a heavy ion beam current led out by the particle accelerator (2) into a plurality of heavy ion beams;
a deflecting dipole magnet (32) for deflecting the direction of the heavy ion beam current for transmission to the film irradiation terminal (4);
a focusing quadrupole magnet (33) for focusing or defocusing the extracted heavy ion beam;
a horizontal scanning magnet (34) and a vertical scanning magnet (35) for making the beam spot of the heavy ion beam uniform.
4. The heavy ion production apparatus according to claim 1, wherein the LEBT beam line (1) is simultaneously connected to several of the ion sources, and several of the ion sources are operated alternately in very short time intervals.
5. The heavy ion production apparatus of claim 1, wherein the ion source is a superconducting ion source and/or an ECR ion source.
6. The heavy ion production apparatus of claim 1, wherein the ion source produces heavy ions of high charge state with an average beam current intensity on the order of hundreds of microamps.
7. The heavy ion production apparatus of claim 1, wherein the particle accelerator (2) is capable of accelerating a heavy ion beam to a single nuclear energy of about 5 to 20 MeV/u.
8. Heavy ion production plant according to claim 7, characterized in that said particle accelerator (2) is a superconducting cyclotron.
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