CN111292866A - A heavy ion production device for industrial production of nuclear pore membranes - Google Patents
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Abstract
本发明涉及一种核孔膜工业生产用的重离子生产装置,包括离子源、LEBT束线、粒子加速器、HEBT束线和膜照射终端;离子源用于产生高电荷态的重离子束流并对重离子束流进行初级加速;LEBT束线用于对重离子束流进行分析并匹配传输至粒子加速器;粒子加速器对重离子束流进行主加速,然后注入到HEBT束线;HEBT束线将注入的重离子束流劈分成若干股重离子束流后分别传输至若干个膜照射终端,膜照射终端将重离子束流引出并对放置于大气环境中的薄膜进行照射。本发明由于可以将薄膜放置在大气环境下进行照射,使薄膜的更换方便快捷,大大减小更换薄膜的时间,且在同一时间,可有多个终端同时照射薄膜,极大提高薄膜的照射效率,从而提高核孔膜的生产效率。
The invention relates to a heavy ion production device for the industrial production of nuclear pore membranes, comprising an ion source, a LEBT beamline, a particle accelerator, an HEBT beamline and a membrane irradiation terminal; the ion source is used to generate a high-charge state heavy ion beam and The primary acceleration of the heavy ion beam; the LEBT beamline is used to analyze and match the heavy ion beam to the particle accelerator; the particle accelerator mainly accelerates the heavy ion beam, and then injects it into the HEBT beamline; the HEBT beamline will The implanted heavy ion beam is split into several heavy ion beams and then transmitted to several membrane irradiation terminals. The membrane irradiation terminal draws out the heavy ion beams and irradiates the thin film placed in the atmospheric environment. Because the invention can place the film in the atmospheric environment for irradiation, the replacement of the film is convenient and fast, and the time for replacing the film is greatly reduced, and at the same time, multiple terminals can irradiate the film at the same time, which greatly improves the irradiation efficiency of the film. , thereby improving the production efficiency of nuclear pore membranes.
Description
技术领域technical field
本发明涉及一种重离子生产装置,具体涉及一种核孔膜工业生产用的重离子生产装置,属于核孔膜生产技术领域。The invention relates to a heavy ion production device, in particular to a heavy ion production device for industrial production of nuclear pore membranes, and belongs to the technical field of nuclear pore membrane production.
背景技术Background technique
重离子核孔膜在水处理、空气过滤以及清洁能源(如锂离子电池隔膜)等方面具有不可替代的优秀作用,并在新型特殊功能材料方面有着独特的作用,有望在民用和军用新材料方面有许多突破性进展。Heavy ion nuclear pore membrane has an irreplaceable and excellent role in water treatment, air filtration and clean energy (such as lithium ion battery separator), and has a unique role in new special functional materials, which is expected to be used in civil and military new materials. There are many breakthroughs.
目前国际上已有的核孔膜照射专用装置,可提供的重离子单核子能量约为3MeV/u,需照射的薄膜只能放置在真空状态,且在同一时间段只有一个照射终端工作,薄膜的照射效率不高,导致核孔膜的生产效率低。At present, the existing special equipment for nuclear pore film irradiation in the world can provide a heavy ion mononuclear energy of about 3MeV/u. The film to be irradiated can only be placed in a vacuum state, and only one irradiation terminal works at the same time period. The irradiation efficiency of the thin film is not high, resulting in a low production efficiency of nuclear pore membranes.
发明内容SUMMARY OF THE INVENTION
针对上述问题,本发明的目的是提供一种核孔膜工业生产用的重离子生产装置。In view of the above problems, the purpose of the present invention is to provide a heavy ion production device for the industrial production of nuclear pore membranes.
为实现上述目的,本发明采取以下技术方案:一种核孔膜工业生产用的重离子生产装置,包括离子源、LEBT束线、粒子加速器、HEBT束线和膜照射终端;所述离子源用于产生高电荷态的重离子束流并对重离子束流进行初级加速;所述LEBT束线设置在所述离子源的出口和所述粒子加速器的入口之间,用于对所述离子源产生的重离子束流进行分析,以根据不同类型核孔膜需求选定适合加速的重离子,然后匹配传输至所述粒子加速器;所述粒子加速器对重离子束流进行主加速,然后注入到所述HEBT束线;所述HEBT束线将注入的重离子束流劈分成若干股重离子束流后分别传输至若干个膜照射终端,所述膜照射终端将重离子束流引出并对放置于大气环境中的薄膜进行照射。In order to achieve the above purpose, the present invention adopts the following technical solutions: a heavy ion production device for industrial production of nuclear pore membranes, comprising an ion source, a LEBT beamline, a particle accelerator, an HEBT beamline and a membrane irradiation terminal; The LEBT beam line is arranged between the outlet of the ion source and the inlet of the particle accelerator for generating a high-charge state heavy ion beam and performing primary acceleration of the heavy ion beam; The generated heavy ion beam is analyzed to select suitable heavy ions for acceleration according to the requirements of different types of nuclear pore membranes, and then matched and transmitted to the particle accelerator; the particle accelerator mainly accelerates the heavy ion beam, and then injects it into the particle accelerator. The HEBT beam line; the HEBT beam line splits the implanted heavy ion beam into several heavy ion beams and then transmits them to several membrane irradiation terminals respectively, and the membrane irradiation terminals draw out the heavy ion beams and place them. Irradiate thin films in atmospheric environment.
所述的重离子生产装置,优选地,所述LEBT束线包括依次设置的:第一螺线管磁透镜,用于对引出重离子束流进行聚焦或散焦;双向校正磁铁,用于调整重离子束流至中心位置;分析二极磁铁,用于分析重离子种类并选定适合加速的重离子;第一组合四极磁铁,用于对选定的重离子束流进行聚焦或散焦;双向偏转二极磁铁,用于使重离子束流的方向偏转;第二组合四极磁铁和第二螺线管磁透镜,用于对重离子束流进行聚焦或散焦。In the heavy ion production device, preferably, the LEBT beam line includes: a first solenoid magnetic lens, used for focusing or defocusing the extracted heavy ion beam; a bidirectional correction magnet, used for adjusting The heavy ion beam is centered; the analysis dipole magnet is used to analyze the heavy ion species and select suitable heavy ions for acceleration; the first combination of quadrupole magnets is used to focus or defocus the selected heavy ion beam ; Bidirectional deflection dipole magnet for deflecting the direction of the heavy ion beam; a second combined quadrupole magnet and a second solenoid magnetic lens for focusing or defocusing the heavy ion beam.
所述的重离子生产装置,优选地,所述HEBT束线包括依次设置的:劈束装置,至少一个所述劈束装置沿所述HEBT束线的传输方向依次放置,用于将所述粒子加速器引出的一束重离子束流进行分割以劈分成若干股重离子束;偏转二极磁铁,用于使重离子束流的方向偏转以传输至所述膜照射终端;聚焦四极磁铁,用于对引出重离子束流进行聚焦或散焦;水平扫描磁铁和垂直扫描磁铁,用于使重离子束流的束斑均匀。In the heavy ion production device, preferably, the HEBT beam line includes: beam splitting devices arranged in sequence, and at least one of the beam splitting devices is placed in sequence along the transmission direction of the HEBT beam line for the particles to be separated. A beam of heavy ion beams drawn from the accelerator is split to split into several heavy ion beams; a deflection dipole magnet is used to deflect the direction of the heavy ion beams for transmission to the film irradiation terminal; a focusing quadrupole magnet is used It is used to focus or defocus the extracted heavy ion beam; the horizontal scanning magnet and the vertical scanning magnet are used to make the beam spot of the heavy ion beam uniform.
所述的重离子生产装置,优选地,所述LEBT束线同时与若干个所述离子源连接,且若干个所述离子源在极短时间间隔内交替运行。In the heavy ion production device, preferably, the LEBT beam line is connected to a plurality of the ion sources at the same time, and the plurality of the ion sources operate alternately within a very short time interval.
所述的重离子生产装置,优选地,所述离子源为超导离子源和/或ECR离子源。In the heavy ion production device, preferably, the ion source is a superconducting ion source and/or an ECR ion source.
所述的重离子生产装置,优选地,所述离子源产生的高电荷态重离子的平均束流强度为百微安量级。In the heavy ion production device, preferably, the average beam current intensity of the highly charged heavy ions generated by the ion source is in the order of hundreds of microamps.
所述的重离子生产装置,优选地,所述粒子加速器能够将重离子束流加速到单核能约为5MeV/u至20MeV/u。In the heavy ion production device, preferably, the particle accelerator can accelerate the heavy ion beam to a single nuclear energy of about 5 MeV/u to 20 MeV/u.
所述的重离子生产装置,优选地,所述粒子加速器为超导回旋加速器。In the heavy ion production device, preferably, the particle accelerator is a superconducting cyclotron.
本发明由于采取以上技术方案,其具有以下优点:1、本发明采用离子源提供高电荷态重离子,并通过粒子加速器将高电荷态重离子加速到单核能约为5MeV/u至20MeV/u,使重离子有能力穿过真空膜窗,且在大气环境下有足够的穿射距离,因此可以将薄膜放置在大气环境下进行照射,使薄膜的更换方便快捷,大大减小更换薄膜的时间,且在同一时间,可有多个照射终端同时照射薄膜,极大提高薄膜的照射效率,以提高核孔膜的生产效率。2、本发明选用高电荷态重离子方式,可减小粒子加速器体积和重量,减小建造成本。The present invention has the following advantages due to the adoption of the above technical solutions: 1. The present invention adopts an ion source to provide high-charge state heavy ions, and accelerates the high-charge state heavy ions to a mononuclear energy of about 5MeV/u to 20MeV/ by a particle accelerator. u, so that the heavy ions have the ability to pass through the vacuum film window, and there is enough penetration distance in the atmospheric environment, so the film can be placed in the atmospheric environment for irradiation, which makes the replacement of the film convenient and fast, and greatly reduces the replacement of the film. At the same time, multiple irradiation terminals can simultaneously irradiate the film, which greatly improves the irradiation efficiency of the film and improves the production efficiency of the nuclear pore membrane. 2. The present invention adopts the method of high-charged heavy ions, which can reduce the volume and weight of the particle accelerator and reduce the construction cost.
附图说明Description of drawings
图1是本发明的整体结构示意图;Fig. 1 is the overall structure schematic diagram of the present invention;
图2是本发明的局部结构示意图。FIG. 2 is a schematic diagram of a partial structure of the present invention.
具体实施方式Detailed ways
以下将结合附图对本发明的较佳实施例进行详细说明,以便更清楚理解本发明的目的、特点和优点。应理解的是,附图所示的实施例并不是对本发明范围的限制,而只是为了说明本发明技术方案的实质精神。The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, so as to more clearly understand the objects, features and advantages of the present invention. It should be understood that the embodiments shown in the accompanying drawings are not intended to limit the scope of the present invention, but are only intended to illustrate the essential spirit of the technical solutions of the present invention.
如图1、图2所示,本发明提供的核孔膜工业生产用的重离子生产装置包括离子源、LEBT束线1、粒子加速器2、HEBT束线3和膜照射终端4。其中,离子源用于产生高电荷态的重离子(如氩离子或氪离子等)束流并对重离子束流进行初级加速。LEBT束线1设置在离子源的出口和粒子加速器2的入口之间,用于对离子源产生的重离子束流进行分析,以根据不同类型核孔膜需求选定适合加速的重离子,然后匹配传输至粒子加速器2。粒子加速器2对重离子束流进行主加速,然后注入到HEBT束线3。HEBT束线3将注入的重离子束流劈分成若干股重离子束流后分别传输至若干个膜照射终端4,膜照射终端4将重离子束流引出并对放置于大气环境中的薄膜进行照射。As shown in FIG. 1 and FIG. 2 , the heavy ion production device for industrial production of nuclear pore membranes provided by the present invention includes an ion source, a
在上述实例中,优选的,LEBT束线1包括依次设置的:第一螺线管磁透镜11,用于对引出重离子束流进行聚焦或散焦;双向校正磁铁12,用于调整重离子束流至中心位置;分析二极磁铁13,用于分析重离子种类并选定适合加速的重离子;第一组合四极磁铁14,用于对选定的重离子束流进行聚焦或散焦;双向偏转二极磁铁15,用于使重离子束流的方向偏转;第二组合四极磁铁16和第二螺线管磁透镜17,用于对重离子束流进行聚焦或散焦。In the above example, preferably, the
在上述实例中,优选的,HEBT束线3包括依次设置的:劈束装置31,至少一个劈束装置31沿HEBT束线3的传输方向依次放置,用于将粒子加速器2引出的一束重离子束流进行分割以劈分成若干股重离子束;偏转二极磁铁32,用于使重离子束流的方向偏转以传输至膜照射终端4;聚焦四极磁铁33,用于对引出重离子束流进行聚焦或散焦;水平扫描磁铁34和垂直扫描磁铁35,用于使重离子束流的束斑均匀。In the above example, preferably, the
在上述实例中,优选的,LEBT束线1可以同时与若干个离子源连接,若干个离子源可在极短时间间隔内交替运行,由此提高粒子加速器2的运行效率。In the above example, preferably, the
在上述实例中,优选的,离子源为超导离子源和/或ECR离子源。In the above examples, preferably, the ion source is a superconducting ion source and/or an ECR ion source.
在上述实例中,优选的,离子源产生的高电荷态重离子的平均束流强度为百微安量级。In the above example, preferably, the average beam current intensity of the highly charged heavy ions generated by the ion source is in the order of hundreds of microamps.
在上述实例中,优选的,粒子加速器2可以将重离子束流加速到单核能约为5MeV/u至20MeV/u,以使得引出的重离子有能力穿过膜照射终端4的真空膜窗,且在大气环境下有足够的穿射距离。In the above example, preferably, the
在上述实例中,优选的,粒子加速器2为超导回旋加速器。In the above example, preferably, the
最后应说明的是:以上实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, but not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that it can still be The technical solutions described in the foregoing embodiments are modified, or some technical features thereof are equivalently replaced; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111651903A (en) * | 2020-07-07 | 2020-09-11 | 中国科学院近代物理研究所 | A particle accelerator engineering optimization method and system |
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CN112973458A (en) * | 2021-02-08 | 2021-06-18 | 中国科学院近代物理研究所 | Ion track porous membrane and physical preparation method and application thereof |
CN113741375A (en) * | 2021-09-18 | 2021-12-03 | 中国科学院近代物理研究所 | Special production terminal control system for heavy ion microporous membrane |
CN113808775A (en) * | 2021-09-18 | 2021-12-17 | 中国科学院近代物理研究所 | Linear accelerator heavy ion microporous membrane irradiation device |
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2415436Y (en) * | 2000-04-07 | 2001-01-17 | 中国原子能科学研究院 | Heavy ion irradiation device |
US20080128641A1 (en) * | 2006-11-08 | 2008-06-05 | Silicon Genesis Corporation | Apparatus and method for introducing particles using a radio frequency quadrupole linear accelerator for semiconductor materials |
CN101536616A (en) * | 2006-11-08 | 2009-09-16 | 硅源公司 | Apparatus and method for introducing particles using a radio frequency quadrupole linear accelerator for semiconductor materials |
CN201349358Y (en) * | 2009-01-12 | 2009-11-18 | 中国科学院近代物理研究所 | Accelerator for proton-heavy ion beam cancer-treatment |
CN102793979A (en) * | 2012-07-28 | 2012-11-28 | 中国科学院近代物理研究所 | Proton or heavy ion beam cancer treatment device |
CN109842986A (en) * | 2019-02-02 | 2019-06-04 | 惠州离子科学研究中心 | The uniform fast-cycling synchrotron of lateral line and accelerator system |
CN110213877A (en) * | 2019-06-21 | 2019-09-06 | 中国科学院近代物理研究所 | Bundle device is split for the ion beam of beam simultaneously for a kind of multiple terminals |
CN110225643A (en) * | 2019-04-23 | 2019-09-10 | 中国科学院近代物理研究所 | A kind of cocktail line preparation facilities and method |
-
2020
- 2020-03-05 CN CN202010146079.4A patent/CN111292866B/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2415436Y (en) * | 2000-04-07 | 2001-01-17 | 中国原子能科学研究院 | Heavy ion irradiation device |
US20080128641A1 (en) * | 2006-11-08 | 2008-06-05 | Silicon Genesis Corporation | Apparatus and method for introducing particles using a radio frequency quadrupole linear accelerator for semiconductor materials |
CN101536616A (en) * | 2006-11-08 | 2009-09-16 | 硅源公司 | Apparatus and method for introducing particles using a radio frequency quadrupole linear accelerator for semiconductor materials |
CN201349358Y (en) * | 2009-01-12 | 2009-11-18 | 中国科学院近代物理研究所 | Accelerator for proton-heavy ion beam cancer-treatment |
CN102793979A (en) * | 2012-07-28 | 2012-11-28 | 中国科学院近代物理研究所 | Proton or heavy ion beam cancer treatment device |
CN109842986A (en) * | 2019-02-02 | 2019-06-04 | 惠州离子科学研究中心 | The uniform fast-cycling synchrotron of lateral line and accelerator system |
CN110225643A (en) * | 2019-04-23 | 2019-09-10 | 中国科学院近代物理研究所 | A kind of cocktail line preparation facilities and method |
CN110213877A (en) * | 2019-06-21 | 2019-09-06 | 中国科学院近代物理研究所 | Bundle device is split for the ion beam of beam simultaneously for a kind of multiple terminals |
Non-Patent Citations (2)
Title |
---|
李钟汕: "CSR_LINAC_IH_RFQ的高频电磁设计", 《原子核物理评论》 * |
蔡畅: "聚碳酸酯和聚酯核孔膜的性能研究", 《核技术》 * |
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