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CN112746247A - Self-lubricating gear and preparation method thereof - Google Patents

Self-lubricating gear and preparation method thereof Download PDF

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Publication number
CN112746247A
CN112746247A CN202011477479.XA CN202011477479A CN112746247A CN 112746247 A CN112746247 A CN 112746247A CN 202011477479 A CN202011477479 A CN 202011477479A CN 112746247 A CN112746247 A CN 112746247A
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coating
target
gear
self
microtexture
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邢佑强
吴泽
刘磊
李燕凡
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Southeast University
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Southeast University
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635Carbides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H55/00Elements with teeth or friction surfaces for conveying motion; Worms, pulleys or sheaves for gearing mechanisms
    • F16H55/02Toothed members; Worms
    • F16H55/06Use of materials; Use of treatments of toothed members or worms to affect their intrinsic material properties
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H55/00Elements with teeth or friction surfaces for conveying motion; Worms, pulleys or sheaves for gearing mechanisms
    • F16H55/02Toothed members; Worms
    • F16H55/17Toothed wheels

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

本发明公开了一种自润滑齿轮及其制备方法,所述自润滑齿轮包括轴承基体、微织构和复合涂层,所述微织构和复合涂层涂覆在所述轴承基体的表面;所述复合涂层包括第一涂层和第二涂层,所述第一涂层和第二涂层交替叠加;所述第一涂层为ZrZnMoN层,所述第二涂层为TiAgVC层。微织构采用激光加工制备,涂层采用多弧离子镀+中频磁控溅射共沉积的方法制备。该齿轮在工作温度较高时,ZrZnMoN涂层、TiAgVC涂层与空气中氧气会发生反应,生成具有高温润滑作用的ZnMoO4和Ag3VO4化合物,从而能够起到润滑作用,同时,微织构能够收集磨屑、存储润滑剂,微织构与自润滑涂层结合,可有效减小齿面摩擦磨损,提高齿轮寿命。

Figure 202011477479

The invention discloses a self-lubricating gear and a preparation method thereof. The self-lubricating gear comprises a bearing matrix, a microtexture and a composite coating, and the microtexture and the composite coating are coated on the surface of the bearing matrix; The composite coating includes a first coating layer and a second coating layer, and the first coating layer and the second coating layer are alternately stacked; the first coating layer is a ZrZnMoN layer, and the second coating layer is a TiAgVC layer. The microtexture is prepared by laser processing, and the coating is prepared by the method of multi-arc ion plating + intermediate frequency magnetron sputtering co-deposition. When the working temperature of the gear is high, the ZrZnMoN coating and TiAgVC coating will react with oxygen in the air to generate ZnMoO 4 and Ag 3 VO 4 compounds with high temperature lubrication, which can play a lubricating role. The micro-texture is combined with the self-lubricating coating, which can effectively reduce the friction and wear of the tooth surface and improve the life of the gear.

Figure 202011477479

Description

Self-lubricating gear and preparation method thereof
Technical Field
The invention belongs to the technical field of gear manufacturing, and particularly relates to a self-lubricating gear and a preparation method thereof.
Background
In the process of gear transmission, large friction and abrasion exist between tooth surfaces to generate high heat, and if the heat generation of the gear in unit time is far greater than the heat dissipation, the temperature of the gear is higher and higher, so that the gear is easy to lose efficacy due to overhigh temperature. Therefore, the lubrication can reduce the friction wear of the tooth surface, and has important significance for prolonging the service life of the gear. The self-lubricating gear does not need lubricating oil and a complex lubricating system thereof, can form a lubricating film on the working surface, realizes the lubricating effect in the working process of the gear, and thus reduces the frictional wear and heat generation.
Chinese patent "application number: 201711395397.9 discloses a self-lubricating gear with micro-texture, which is characterized in that the surface of the gear is processed with the micro-texture and filled with a lubricating medium, and the micro-texture is softened at high friction temperature to form a lubricating film, thereby realizing the continuous self-lubricating effect in the friction area of the gear. Chinese patent "application number: 201710086850.1 discloses a honeycomb polygonal self-lubricating gear, which is characterized in that honeycomb grooves and strip-shaped grooves are processed on the surface of the gear based on bionics, and the self-lubricating effect of gear engagement is realized by filling a solid lubricant in the bionic grooves. Chinese patent "application number: 201810145366.6 discloses a multi-material composite self-lubricating gear, which is prepared by a 3D printing technology on the surface of a gear substrate to realize the self-lubricating function of the gear.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the invention provides a self-lubricating gear and a preparation method thereof, wherein the gear can generate a lubricating film on the surface in a high-temperature environment, and the self-lubricating effect of the gear in the working process is realized, so that the frictional wear of the tooth surface is reduced, and the service life of the gear is prolonged.
In order to solve the technical problem, in one aspect, an embodiment of the present invention provides a self-lubricating gear, including a bearing substrate, a micro-texture and a composite coating, where the micro-texture and the composite coating are coated on a surface of the bearing substrate; the composite coating comprises a first coating and a second coating, and the first coating and the second coating are alternately superposed; the first coating is a ZrZnMoN layer, and the second coating is a TiAgVC layer.
Preferably, the composite coating at least comprises 5 ZrZnMoN layers and 5 TiAgVC layers, and the single-layer thickness of the first coating and the single-layer thickness of the second coating are both less than or equal to 200 nm.
Preferably, in the first coating, the atomic percent of Zr element is 30-50%, the atomic percent of Zn element is 10-20%, the atomic percent of Mo element is 10-20%, the atomic percent of N element is 20-35%, and the sum of the atomic percent of Zr, Zn, Mo and N element is 100%.
Preferably, in the second coating, the atomic percent of Ti element is 20-30%, the atomic percent of Ag element is 15-25%, the atomic percent of V element is 10-20%, the atomic percent of C element is 30-40%, and the sum of the atomic percent of Ti, Ag, V and C element is 100%.
Preferably, the gear base material is carbon steel or cast iron.
On the other hand, the embodiment of the invention provides a preparation method for preparing a self-lubricating gear, which comprises the following steps:
step 1, preparing a micro-texture by laser processing;
and 2, preparing the composite coating by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition.
Preferably, the micro texture is prepared by laser processing, and the specific preparation method comprises the following steps:
step 1, pretreatment: grinding and polishing the gear matrix, and sequentially putting the gear matrix into alcohol and acetone for ultrasonic cleaning for 20-30min respectively to remove oil stain pollutants on the surface;
step 2, processing the microtexture: and (3) processing a micro-texture on the surface of the gear matrix by adopting nanosecond laser, wherein the width of the micro-texture is 10-100 mu m, and the depth of the micro-texture is 10-200 mu m.
Preferably, the composite coating is prepared by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition, and the specific preparation method comprises the following steps:
step 1, placing the textured gear into alcohol for ultrasonic cleaning for 20-30min, fully drying the gear by adopting a vacuum drying oven, and quickly placing the gear into a vacuum chamber of a film coating machine, wherein the background vacuum of the vacuum chamber is 7.0 multiplied by 10-3-8.0×10-3Pa, heating to 150 ℃ and 200 ℃, and keeping the temperature for 30-40 min;
step 2, introducing Ar gas with the pressure of 0.5-3.0Pa, starting a bias voltage power supply with the voltage of 600-1000V and the duty ratio of 0.25-0.3, and performing glow discharge cleaning for 20-30 min; reducing the bias voltage to 250-600V, starting ion source ion cleaning for 20-30min, starting the arc source Zr target, wherein the bias voltage is 300-600V, the target current is 40-60A, and the ion bombards the Zr target for 0.5-2.0 min;
step 3, adjusting the working air pressure to be 0.5-3.5Pa, the bias voltage to be 150-300V, adjusting the Zr target current to be 80-120A, starting the ZnMoN target, adjusting the target current to be 60-100A, and depositing the first coating for 2-15 min;
step 4, closing the Zr target and the ZnMoN target, adjusting the working air pressure to be 0.6-2.0Pa, adjusting the bias voltage to be 200-300V, starting the electric arc power supply of the Ti target, the Ag target and the VC target, wherein the current of the Ti target is 100-120A, the current of the Ag target is 60-80A, the current of the VC target is 80-120A, and depositing a second coating for 2-15 min;
step 5, repeating the step 3 and the step 4, and alternately depositing the first coating and the second coating to obtain a laminated coating, wherein the total thickness of the composite coating is 2-100 mu m;
and 6, closing all the targets, the bias power supply and the gas source, preserving the heat for 30-60min, and finishing the coating.
Has the advantages that: 1. the gear has good self-lubricating effect under the high-temperature working condition, and ZrZnMoN and TiAgVC react with oxygen in the air at higher temperature to generate ZnMoO with high-temperature lubricating effect4And Ag3VO4The compound can play a good lubricating role under the high-temperature condition; 2. the micro-texture on the surface of the gear can improve the bonding strength of a matrix and a coating, can collect abrasive dust and a high-temperature lubricating phase, and plays roles in reducing abrasive wear and providing secondary lubrication, so that the service life of the gear is prolonged; 3. the gear surface coating of the invention is of a nano laminated structure, the internal stress is small, and the coatingThe bonding strength is high; 4. the gear is a self-lubricating gear, does not need lubricating oil or a complex lubricating system thereof, and has simple structure and convenient use.
Drawings
Fig. 1 is a schematic structural view of a self-lubricating gear of the present invention.
In the figure: 1 gear substrate, 2 microtexture, 3 first coating and 4 second coating.
Detailed Description
The following description is merely exemplary in nature and is not intended to limit the present disclosure, application, or uses. It should be understood that throughout the drawings, corresponding reference numerals indicate like or corresponding parts and features.
As shown in fig. 1, the embodiment adopted by the present invention is as follows:
example 1: a self-lubricating gear is characterized in that a gear base material is 45 carbon steel, and the surface of the base material is provided with a self-lubricating laminated coating with a micro texture and ZrZnMoN + TiAgVC alternately distributed. The laminated coating contains 5 ZrZnMoN layers and 5 TiAgVC layers, and the thickness of each ZrZnMoN layer and each TiAgVC layer is 200 nm.
According to the self-lubricating gear, the atomic percent of Zr element in the ZrZnMoN coating is 50%, the atomic percent of Zn element is 10%, the atomic percent of Mo element is 20%, the atomic percent of N element is 20%, and the sum of the atomic percent of Zr, Zn, Mo and N element is 100%; in the TiAgVC coating, the atomic percent of Ti element is 30%, the atomic percent of Ag element is 20%, the atomic percent of V element is 10%, the atomic percent of C element is 40%, and the sum of the atomic percent of Ti, Ag, V and C element is 100%.
The preparation method of the self-lubricating gear comprises the following steps:
step 1, preparing a micro-texture by laser processing;
and 2, preparing the composite coating by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition.
Further, the method for preparing the microtexture by laser processing comprises the following steps:
step 1, pretreatment: grinding and polishing the gear matrix, and sequentially putting the gear matrix into alcohol and acetone for ultrasonic cleaning for 20min respectively to remove oil stain pollutants on the surface;
step 2, processing the microtexture: processing a micro-texture on the surface of a gear matrix by nanosecond laser, wherein the width of the micro-texture is 20 micrometers, and the depth of the micro-texture is 20 micrometers;
further, the composite coating is prepared by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition, and the specific preparation method comprises the following steps:
step 1, placing the textured gear into alcohol for ultrasonic cleaning for 20min, fully drying the gear by adopting a vacuum drying oven, and quickly placing the gear into a vacuum chamber of a film coating machine, wherein the background vacuum of the vacuum chamber is 7.0 multiplied by 10-3Pa, heating to 150 ℃, and keeping the temperature for 30 min;
step 2, introducing Ar gas, starting a bias voltage power supply with the voltage of 600V and the duty ratio of 0.3 under the pressure of 1.0Pa, and performing glow discharge cleaning for 20 min; reducing the bias voltage to 250V, starting ion source ion cleaning for 20min, starting an arc source Zr target, wherein the bias voltage is 300V, the target current is 40A, and ion bombardment Zr is carried out for 1.0 min;
step 3, adjusting the working pressure to be 1.5Pa, the bias voltage to be 150V, adjusting the Zr target current to be 120A, starting the ZnMoN target, adjusting the target current to be 80A, and depositing the ZrZnMoN coating for 12 min;
step 4, closing the Zr target and the ZnMoN target, adjusting the working air pressure to be 2.0Pa, adjusting the bias voltage to be 200V, starting the Ti target, the Ag target and the VC target arc power supply, setting the Ti target current to be 120A, the Ag target current to be 60A and the VC target current to be 90A, and depositing the TiAgVC coating for 12 min;
step 5, repeating the steps 3 and 4, and alternately depositing a ZrZnMoN + TiAgVC laminated coating to enable the total thickness of the coating to be 2 microns;
and 6, closing all the targets, the bias power supply and the gas source, preserving the heat for 60min, and finishing the coating.
Example 2: a self-lubricating gear is characterized in that a gear substrate is made of HT200 cast iron, and the surface of the gear substrate is provided with a laminated coating with a micro texture and ZrZnMoN + TiAgVC alternately distributed. The laminated coating comprises 50 ZrZnMoN layers and 50 TiAgVC layers, and the thickness of each ZrZnMoN layer and each TiAgVC layer is 100 nm.
According to the self-lubricating gear, the atomic percent of Zr element in the ZrZnMoN coating is 35%, the atomic percent of Zn element is 20%, the atomic percent of Mo element is 15%, the atomic percent of N element is 30%, and the sum of the atomic percent of the Zr element, the Zn element, the Mo element and the N element is 100%; in the TiAgVC coating, the atomic percent of Ti element is 25%, the atomic percent of Ag element is 25%, the atomic percent of V element is 20%, the atomic percent of C element is 30%, and the sum of the atomic percent of Ti, Ag, V and C element is 100%.
The preparation method of the self-lubricating gear comprises the following steps:
step 1, preparing a micro-texture by laser processing;
and 2, preparing the composite coating by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition.
Further, the method for preparing the microtexture by laser processing comprises the following steps:
step 1, pretreatment: grinding and polishing the gear matrix, and sequentially putting the gear matrix into alcohol and acetone for ultrasonic cleaning for 30min to remove oil stain pollutants on the surface;
step 2, processing the microtexture: processing a micro-texture on the surface of a gear matrix by nanosecond laser, wherein the width of the micro-texture is 80 mu m, and the depth of the micro-texture is 100 mu m;
further, the composite coating is prepared by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition, and the specific preparation method comprises the following steps:
step 1, placing the textured gear into alcohol for ultrasonic cleaning for 30min, fully drying the gear by adopting a vacuum drying oven, and quickly placing the gear into a vacuum chamber of a film coating machine, wherein the background vacuum of the vacuum chamber is 8.0 multiplied by 10-3Pa, heating to 200 ℃, and keeping the temperature for 40 min;
step 2, introducing Ar gas, starting a bias voltage power supply with the voltage of 900V and the duty ratio of 0.25 under the pressure of 3.0Pa, and carrying out glow discharge cleaning for 30 min; reducing the bias voltage to 500V, starting ion source ion cleaning for 25min, starting an arc source Zr target, wherein the bias voltage is 500V, the target current is 50A, and the ion bombards the Zr target for 2.0 min;
step 3, adjusting the working pressure to be 3.5Pa, the bias voltage to be 250V, adjusting the Zr target current to be 90A, starting the ZnMoN target, adjusting the target current to be 100A, and depositing the ZrZnMoN coating for 3 min;
step 4, closing the Zr target and the ZnMoN target, adjusting the working air pressure to be 2.0Pa, adjusting the bias voltage to be 300V, starting the Ti target, the Ag target and the VC target arc power supply, setting the current of the Ti target to be 100A, the current of the Ag target to be 80A and the current of the VC target to be 100A, and depositing the TiAgVC coating for 3 min;
step 5, repeating the steps 3 and 4, and alternately depositing a ZrZnMoN + TiAgVC laminated coating to enable the total thickness of the coating to be 10 microns;
and 6, closing all the targets, the bias power supply and the gas source, preserving the heat for 40min, and finishing the coating.
Example 3: a self-lubricating gear is characterized in that a gear substrate is made of HT200 cast iron, and the surface of the gear substrate is provided with a laminated coating with a micro texture and ZrZnMoN + TiAgVC alternately distributed. The laminated coating comprises 20 ZrZnMoN layers and 20 TiAgVC layers, and the thickness of each ZrZnMoN layer and each TiAgVC layer is 80 nm.
According to the self-lubricating gear, the atomic percent of Zr element in the ZrZnMoN coating is 30%, the atomic percent of Zn element is 15%, the atomic percent of Mo element is 20%, the atomic percent of N element is 35%, and the sum of the atomic percent of Zr, Zn, Mo and N element is 100%; in the TiAgVC coating, the atomic percent of Ti element is 30%, the atomic percent of Ag element is 15%, the atomic percent of V element is 18%, the atomic percent of C element is 37%, and the sum of the atomic percent of Ti, Ag, V and C element is 100%.
The preparation method of the self-lubricating gear comprises the following steps:
step 1, preparing a micro-texture by laser processing;
and 2, preparing the composite coating by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition.
Further, the method for preparing the microtexture by laser processing comprises the following steps:
step 1, pretreatment: grinding and polishing the gear matrix, and sequentially putting the gear matrix into alcohol and acetone for ultrasonic cleaning for 25min to remove oil stain pollutants on the surface;
step 2, processing the microtexture: processing a micro-texture on the surface of a gear matrix by nanosecond laser, wherein the width of the micro-texture is 10 mu m, and the depth of the micro-texture is 10 mu m;
further, the composite coating is prepared by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition, and the specific preparation method comprises the following steps:
step 1, placing the textured gear into alcohol for ultrasonic cleaning for 25min, fully drying the gear by adopting a vacuum drying oven, and quickly placing the gear into a vacuum chamber of a film coating machine, wherein the background vacuum of the vacuum chamber is 7.5 multiplied by 10-3Pa, heating to 180 ℃, and keeping the temperature for 35 min;
step 2, introducing Ar gas, starting a bias voltage power supply with the voltage of 1000V and the duty ratio of 0.27 under the pressure of 0.5Pa, and carrying out glow discharge cleaning for 25 min; reducing the bias voltage to 600V, starting ion source ion cleaning for 30min, starting an arc source Zr target, wherein the bias voltage is 600V, the target current is 60A, and the ion bombardment Zr target is subjected to 0.5 min;
step 3, adjusting the working pressure to be 0.5Pa, the bias voltage to be 300V, adjusting the Zr target current to be 80A, starting the ZnMoN target, adjusting the target current to be 60A, and depositing the ZrZnMoN coating for 2 min;
step 4, closing the Zr target and the ZnMoN target, adjusting the working air pressure to be 0.6Pa, adjusting the bias voltage to be 250V, starting the Ti target, the Ag target and the VC target arc power supply, setting the Ti target current to be 110A, the Ag target current to be 70A and the VC target current to be 80A, and depositing the TiAgVC coating for 2 min;
step 5, repeating the steps 3 and 4, and alternately depositing a ZrZnMoN + TiAgVC laminated coating to enable the total thickness of the coating to be 100 mu m;
and 6, closing all the targets, the bias power supply and the gas source, preserving the heat for 30min, and finishing the coating.
Example 4: a self-lubricating gear is characterized in that a gear substrate is made of HT200 cast iron, and the surface of the gear substrate is provided with a laminated coating with a micro texture and ZrZnMoN + TiAgVC alternately distributed. The laminated coating contains 40 ZrZnMoN layers and 40 TiAgVC layers, and the thickness of each ZrZnMoN layer and each TiAgVC layer is 50 nm.
According to the self-lubricating gear, the atomic percent of Zr element in the ZrZnMoN coating is 35%, the atomic percent of Zn element is 20%, the atomic percent of Mo element is 10%, the atomic percent of N element is 35%, and the sum of the atomic percent of Zr, Zn, Mo and N element is 100%; in the TiAgVC coating, the atomic percent of Ti element is 20%, the atomic percent of Ag element is 20%, the atomic percent of V element is 20%, the atomic percent of C element is 40%, and the sum of the atomic percent of Ti, Ag, V and C element is 100%.
The preparation method of the self-lubricating gear comprises the following steps:
step 1, preparing a micro-texture by laser processing;
and 2, preparing the composite coating by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition.
Further, the method for preparing the microtexture by laser processing comprises the following steps:
step 1, pretreatment: grinding and polishing the gear matrix, and sequentially putting the gear matrix into alcohol and acetone for ultrasonic cleaning for 30min to remove oil stain pollutants on the surface;
step 2, processing the microtexture: processing a micro-texture on the surface of a gear matrix by nanosecond laser, wherein the width of the micro-texture is 100 micrometers, and the depth of the micro-texture is 200 micrometers;
further, the composite coating is prepared by adopting a method of multi-arc ion plating and medium-frequency magnetron sputtering codeposition, and the specific preparation method comprises the following steps:
step 1, placing the textured gear into alcohol for ultrasonic cleaning for 30min, fully drying the gear by adopting a vacuum drying oven, and quickly placing the gear into a vacuum chamber of a film coating machine, wherein the background vacuum of the vacuum chamber is 8.0 multiplied by 10-3Pa, heating to 200 ℃, and keeping the temperature for 40 min;
step 2, introducing Ar gas, starting a bias voltage power supply with the voltage of 900V and the duty ratio of 0.25 under the pressure of 3.0Pa, and carrying out glow discharge cleaning for 30 min; reducing the bias voltage to 500V, starting ion source ion cleaning for 25min, starting an arc source Zr target, wherein the bias voltage is 500V, the target current is 50A, and the ion bombards the Zr target for 2.0 min;
step 3, adjusting the working pressure to be 3.5Pa, the bias voltage to be 250V, adjusting the Zr target current to be 90A, starting the ZnMoN target, adjusting the target current to be 100A, and depositing the ZrZnMoN coating for 15 min;
step 4, closing the Zr target and the ZnMoN target, adjusting the working air pressure to be 1.0Pa, adjusting the bias voltage to be 300V, starting the Ti target, the Ag target and the VC target arc power supply, setting the Ti target current to be 100A, the Ag target current to be 80A and the VC target current to be 120A, and depositing the TiAgVC coating for 15 min;
step 5, repeating the steps 3 and 4, and alternately depositing a ZrZnMoN + TiAgVC laminated coating to enable the total thickness of the coating to be 50 microns;
and 6, closing all the targets, the bias power supply and the gas source, preserving the heat for 30min, and finishing the coating.
The embodiments of the present invention are merely preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. That is, all equivalent changes and modifications made according to the content of the claims of the present invention should be regarded as the technical scope of the present invention.

Claims (8)

1.一种自润滑齿轮,其特征在于,包括轴承基体(1)、微织构(2)和复合涂层,所述微织构(2)和复合涂层涂覆在所述轴承基体(1)的表面;所述复合涂层包括第一涂层(3)和第二涂层(4),所述第一涂层(3)和第二涂层(4)交替叠加;所述第一涂层(3)为ZrZnMoN层,所述第二涂层(4)为TiAgVC层。1. A self-lubricating gear, characterized in that it comprises a bearing matrix (1), a microtexture (2) and a composite coating, wherein the microtexture (2) and the composite coating are coated on the bearing matrix ( 1) surface; the composite coating comprises a first coating (3) and a second coating (4), and the first coating (3) and the second coating (4) are alternately superimposed; the first coating (3) and the second coating (4) are alternately stacked; The first coating (3) is a ZrZnMoN layer, and the second coating (4) is a TiAgVC layer. 2.根据权利要求1所述的自润滑齿轮,其特征在于,所述复合涂层至少含有5层ZrZnMoN层和5层TiAgVC层,第一涂层(3)和第二涂层(4)的单层厚度均小于等于200nm。2. The self-lubricating gear according to claim 1, wherein the composite coating contains at least 5 ZrZnMoN layers and 5 TiAgVC layers, the first coating (3) and the second coating (4) The thickness of the single layer is less than or equal to 200nm. 3.根据权利要求1所述的自润滑齿轮,其特征在于,所述第一涂层(3)中,Zr元素原子百分比为30-50%,Zn元素原子百分比为10-20%,Mo元素原子百分比为10-20%,N元素原子百分比为20-35%,所述Zr、Zn、Mo、N元素原子百分比之和为100%。3. The self-lubricating gear according to claim 1, characterized in that, in the first coating (3), the atomic percentage of Zr element is 30-50%, the atomic percentage of Zn element is 10-20%, and the atomic percentage of Mo element is 30-50%. The atomic percentage is 10-20%, the atomic percentage of the N element is 20-35%, and the sum of the atomic percentage of the Zr, Zn, Mo, and N elements is 100%. 4.根据权利要求1所述的自润滑齿轮,其特征在于,所述第二涂层(4)中,Ti元素原子百分比为20-30%,Ag元素原子百分比为15-25%,V元素原子百分比为10-20%,C元素原子百分比为30-40%,所述Ti、Ag、V、C元素原子百分比之和为100%。4. The self-lubricating gear according to claim 1, characterized in that, in the second coating (4), the atomic percentage of Ti element is 20-30%, the atomic percentage of Ag element is 15-25%, and the atomic percentage of V element is 20-30%. The atomic percentage is 10-20%, the atomic percentage of C element is 30-40%, and the sum of the atomic percentage of the Ti, Ag, V, and C elements is 100%. 5.根据权利要求1所述的自润滑齿轮,其特征在于,所述齿轮基体(1)材料为碳钢或铸铁。5. The self-lubricating gear according to claim 1, characterized in that, the material of the gear base (1) is carbon steel or cast iron. 6.一种制备权利要求1-5任意一项所述的自润滑齿轮的制备方法,其特征在于,包括:6. a preparation method for preparing the self-lubricating gear described in any one of claims 1-5, is characterized in that, comprising: 步骤1、采用激光加工制备微织构(2);Step 1, using laser processing to prepare microtexture (2); 步骤2、采用多弧离子镀+中频磁控溅射共沉积的方法制备复合涂层。Step 2, the composite coating is prepared by the method of multi-arc ion plating + intermediate frequency magnetron sputtering co-deposition. 7.根据权利要求6所述的自润滑齿轮的制备方法,其特征在于,所述采用激光加工制备微织构(2),具体制备方法包括以下步骤:7. The preparation method of the self-lubricating gear according to claim 6, wherein the preparation of the microtexture (2) by laser processing, the specific preparation method comprises the following steps: 步骤1、前处理:将齿轮基体(1)研磨抛光,并依次放入酒精和丙酮中超声清洗各20-30min,去除表面油渍污染物;Step 1. Pretreatment: Grind and polish the gear base (1), and then put it into alcohol and acetone for ultrasonic cleaning for 20-30min each to remove oily contaminants on the surface; 步骤2、加工微织构(2):采用纳秒激光在齿轮基体(1)表面加工出微织构(2),微织构(2)宽度为10-100μm,微织构(2)深度为10-200μm。Step 2, processing the microtexture (2): using a nanosecond laser to process the microtexture (2) on the surface of the gear substrate (1), the width of the microtexture (2) is 10-100 μm, and the depth of the microtexture (2) 10-200μm. 8.根据权利要求6所述的自润滑齿轮的制备方法,其特征在于,所述采用多弧离子镀+中频磁控溅射共沉积的方法制备复合涂层,具体制备方法包括以下步骤:8. the preparation method of self-lubricating gear according to claim 6, is characterized in that, described adopts the method of multi-arc ion plating+intermediate frequency magnetron sputtering co-deposition to prepare composite coating, and concrete preparation method comprises the following steps: 步骤1、将织构化齿轮放入酒精中超声清洗20-30min,采用真空干燥箱充分干燥后迅速放入镀膜机真空室,真空室本底真空为7.0×10-3-8.0×10-3Pa,加热至150-200℃,保温时间30-40min;Step 1. Put the textured gear into alcohol for ultrasonic cleaning for 20-30min, fully dry it in a vacuum drying oven, and quickly put it into the vacuum chamber of the coating machine. The background vacuum of the vacuum chamber is 7.0×10 -3 -8.0×10 -3 Pa, heated to 150-200℃, holding time 30-40min; 步骤2、通入Ar气,其压力为0.5-3.0Pa,开启偏压电源,电压为600-1000V,占空比为0.25-0.3,辉光放电清洗20-30min;偏压降低至250-600V,开启离子源离子清洗20-30min,开启电弧源Zr靶,偏压为300-600V,靶电流为40-60A,离子轰击Zr靶0.5-2.0min;Step 2. Enter Ar gas, the pressure is 0.5-3.0Pa, turn on the bias power supply, the voltage is 600-1000V, the duty cycle is 0.25-0.3, and the glow discharge cleaning is 20-30min; the bias voltage is reduced to 250-600V , turn on the ion source for ion cleaning for 20-30min, turn on the arc source Zr target, the bias voltage is 300-600V, the target current is 40-60A, and the ion bombards the Zr target for 0.5-2.0min; 步骤3、调整工作气压为0.5-3.5Pa,偏压为150-300V,调整Zr靶电流为80-120A,开启ZnMoN靶,靶电流调至60-100A,沉积第一涂层(3)2-15min;Step 3. Adjust the working pressure to 0.5-3.5Pa, the bias voltage to 150-300V, adjust the Zr target current to 80-120A, turn on the ZnMoN target, adjust the target current to 60-100A, and deposit the first coating (3)2- 15min; 步骤4、关闭Zr靶和ZnMoN靶,调整工作气压为0.6-2.0Pa,偏压为200-300V,开启Ti靶、Ag靶和VC靶电弧电源,Ti靶电流为100-120A,Ag靶电流为60-80A,VC靶电流为80-120A,沉积第二涂层(4)2-15min;Step 4. Turn off the Zr target and the ZnMoN target, adjust the working pressure to 0.6-2.0Pa, the bias voltage to 200-300V, turn on the arc power of the Ti target, the Ag target and the VC target, the current of the Ti target is 100-120A, and the current of the Ag target is 60-80A, the VC target current is 80-120A, and the second coating (4) is deposited for 2-15min; 步骤5、重复以上步骤3和步骤4,交替沉积第一涂层(3)和第二涂层(4),得到叠层涂层,使复合涂层总厚度为2-100μm;Step 5, repeating the above steps 3 and 4, alternately depositing the first coating (3) and the second coating (4) to obtain a laminated coating, so that the total thickness of the composite coating is 2-100 μm; 步骤6、关闭所有靶材、偏压电源及气体源,保温30-60min,涂层结束。Step 6. Turn off all target materials, bias power supply and gas source, keep the temperature for 30-60min, and finish the coating.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113774315A (en) * 2021-09-13 2021-12-10 北京金轮坤天特种机械有限公司 A kind of aviation heavy-duty gear and preparation method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105861996A (en) * 2016-06-15 2016-08-17 济宁学院 Ti-Al-Cr-N-Mo-S multi-element compounded reinforced coating tool and preparation process thereof
CN106811725A (en) * 2015-11-27 2017-06-09 中国科学院宁波材料技术与工程研究所 Temperature range self adaptation lubricant coating wide and preparation method and application
CN107829068A (en) * 2017-11-07 2018-03-23 东南大学 Mo Se Ta+TiAlTaN soft and rigid composite coating layers and preparation method thereof
CN110016642A (en) * 2019-05-13 2019-07-16 东南大学 A kind of micro-texture gradient coating tool and preparation method thereof
CN110158044A (en) * 2019-05-13 2019-08-23 东南大学 A kind of multiple elements design gradient coating cutter and preparation method thereof
CN110306190A (en) * 2019-06-13 2019-10-08 东南大学 A multi-component nano-gradient coating tool and its preparation method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106811725A (en) * 2015-11-27 2017-06-09 中国科学院宁波材料技术与工程研究所 Temperature range self adaptation lubricant coating wide and preparation method and application
CN105861996A (en) * 2016-06-15 2016-08-17 济宁学院 Ti-Al-Cr-N-Mo-S multi-element compounded reinforced coating tool and preparation process thereof
CN107829068A (en) * 2017-11-07 2018-03-23 东南大学 Mo Se Ta+TiAlTaN soft and rigid composite coating layers and preparation method thereof
CN110016642A (en) * 2019-05-13 2019-07-16 东南大学 A kind of micro-texture gradient coating tool and preparation method thereof
CN110158044A (en) * 2019-05-13 2019-08-23 东南大学 A kind of multiple elements design gradient coating cutter and preparation method thereof
CN110306190A (en) * 2019-06-13 2019-10-08 东南大学 A multi-component nano-gradient coating tool and its preparation method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113774315A (en) * 2021-09-13 2021-12-10 北京金轮坤天特种机械有限公司 A kind of aviation heavy-duty gear and preparation method thereof
CN113774315B (en) * 2021-09-13 2023-11-28 北京金轮坤天特种机械有限公司 Aviation heavy-duty gear and preparation method thereof

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