CN105671496A - MoN/TiBN nano-composite laminated coating tool and manufacturing method thereof - Google Patents

Abstract

The invention provides a MoN/TiBN nano-composite laminated coating tool and a manufacturing method thereof and belongs to the field of mechanical cutting tool machining. The MoN/TiBN nano-composite laminated coating tool and the manufacturing method are applied to the machining industry. The MoN/TiBN nano-composite laminated coating tool at least comprises a tool base body. A transition layer, an abrasion-resisting layer and a self-lubricating layer are sequentially attached to the tool base body from inside to outside. The total thickness of the lubricating layer, the abrasion-resisting layer and the self-lubricating layer ranges from 1 micrometers to 4 micrometers. The transition layer is TiN, and the thickness of the transition layer ranges from 100 nm to 200 nm. The abrasion-resisting layer is formed by compounding TiBN layers and MoN layers alternately. The self-lubricating layer is MoN. The coating tool has higher hardness, higher adhesion force and good abrasion resistance; and in addition, a coating of the structure has wide applicability to different base body materials, and meanwhile industrial popularization is facilitated.

Description

A molybdenum nitride/nitrogen-boron-titanium nanocomposite multi-layer coating tool and its preparation method

technical field

The invention provides a molybdenum nitride/titanium boride nitride (MoN/TiBN) nanocomposite multi-layer coating tool, which is applied in the machining industry and belongs to the field of mechanical cutting tool processing. The invention also provides a preparation method for the tool .

Background technique

With the development of modern industry, people pay more and more attention to new materials and new technologies. The requirements of modern industry on the manufacturing industry are also constantly improving, various new materials emerge in an endless stream, and various industrial technologies are constantly innovating. In the manufacturing industry, high-speed and efficient cutting technology has become the mainstream technology in the processing and manufacturing industry. High-speed and high-efficiency cutting is a complex system engineering, involving technical cooperation and technological innovation in many fields such as machine tools, cutting tools and materials. In order to obtain good application results in high-speed and high-efficiency cutting, it must be a combination of high-performance high-speed cutting machine tools, cutting tools suitable for workpiece materials and cutting processes based on specific processing objects. However, when the traditional tool cemented carbide blade mills steel at high speed, because it is subjected to alternating heat load at high temperature, the tool is easy to peel off due to its own brittleness. Large pieces of chipping, so it cannot meet the requirements of high-end manufacturing for advanced CNC processing technology.

The carbide-coated cutting tool developed in the 1990s has integrated the advantages of strength, toughness and hardness. Its appearance is an important milestone in the history of cutting tools. Cemented carbide cutting tools refer to the use of physical vapor deposition technology to coat a functional coating with good wear resistance on the cemented carbide substrate. The coating acts as a chemical barrier and a thermal barrier, reducing the chemical resistance between the tool and the workpiece. Reaction and diffusion, thereby reducing wear and extending life.

In the development of coated tools, the structural performance of the tool is constantly updated with the improvement of industrial requirements. Nanocrystalline composite multilayer coatings can take into account some of the properties of single-layer coatings, have better mechanical properties, and are suitable for higher requirements for machining cutting tools. They have good market prospects and significant competitiveness. Among these coatings, MoN has been widely studied and applied due to its excellent properties. The metal nitride film Mo-Nx generally has a low friction coefficient, and it will form MoO ₃ at high temperature, which is a typical autogenous coating. Lubricating phase, can reduce friction and cutting wear very well. TiBN coating can significantly improve the hardness, dry friction performance and red hardness of the coating. Combining the two coatings with each other can greatly improve the performance of the coating, which has important industrial application prospects.

ZL201010608461 applied for a kind of DLC/TiAlN/CrN/Cr multi-layer superhard coating, the prepared coating has high hardness, but there are many types of film layers. ZL200910044474.5 discloses a periodically deposited multi-coated tool and its preparation method. The multi-coated tool coating is a multi-period coating with a cycle of "TiN layer to TiSiN layer to MoN layer to TiSiN layer" . Although the coatings prepared by these two patented technologies have high hardness, the preparation process is complicated, the operability for actual production is not high, and there is not much industrial application value.

Contents of the invention

The invention provides a molybdenum nitride/titanium boride nitride (MoN/TiBN) nanocomposite multi-layer coating tool, the coating tool has higher hardness, better adhesion and good wear resistance; and The structural coating has wide applicability to different substrate materials and is easy to promote in industry.

The technical scheme adopted to realize the above-mentioned purpose of the present invention is:

A molybdenum nitride/nitrogen-boron-titanium nano-composite multi-layer coating tool at least includes a tool base, on which a transition layer, a wear-resistant layer and a self-lubricating layer are sequentially attached from the inside to the outside, the transition layer, the wear-resistant The total thickness of the grinding layer and the self-lubricating layer is 1-4 μm, the transition layer is TiN, and the thickness of the transition layer is 100-200nm. The wear-resistant layer is composed of TiBN layer and MoN layer alternately, and the self-lubricating layer is MoN.

The thickness of each TiBN layer+MoN layer in the wear-resistant layer is 5-10 nm.

The thickness of the self-lubricating layer is 20-50nm.

The material of the tool base is tool steel, high speed steel or hard alloy.

The wear-resistant layer contains TiN and MoN nanocrystals, and the film layer has a superlattice structure.

The present invention also provides a method for preparing the above-mentioned MoN/TiBN nanocomposite multi-layer coating tool, the preparation process is simple and easy, and it is very easy for industrial production.

The technical scheme adopted to realize the above-mentioned purpose of the present invention is:

A method for preparing the above-mentioned molybdenum nitride/nitride-boron-titanium nanocomposite multilayer coating tool, comprising the following steps:

(1) Put the surface-clean tool substrate in the cleaning tank, add cleaning agent, clean it with ultrasonic cleaning, dry it and check whether the surface of the substrate is clean;

(2) After ensuring that the surface of the substrate is free from pollution, clamp the substrate on the workpiece frame and start vacuuming the furnace body; wait for the vacuum to be below 5×10 ^-3 Pa, and at the same time heat the temperature to 300-500°C , proceed to the next step;

(3) Fill the furnace body with argon gas to maintain an argon atmosphere with a pressure of 1.5-2.5Pa in the furnace body. At the same time, under the conditions of substrate bias voltage of -600-800V and duty cycle of 80%, start to use Argon plasma is used to glow clean the tool substrate for 30-90 minutes;

(4) After the glow cleaning is finished, turn off the argon gas, start filling the furnace with nitrogen, keep the air pressure in the furnace at 0.3-0.7Pa, and set the bias voltage at -100--250V at the same time, turn on the Ti target, the target current Set it to 60-100A, start to deposit the TiN transition layer on the tool substrate, and the duration is 5 minutes;

(5) After the transition layer is deposited, close the Ti target, adjust the nitrogen gas pressure and the substrate bias voltage, and turn on the TiB ₂ target and the Mo target under the condition that the nitrogen gas pressure is 1.0-4.0Pa and the bias voltage is -100--250V , the target current is 60-100A, and the wear-resistant layer is deposited on the transition layer, and the deposition time is 40 minutes to 120 minutes;

(6) After the wear-resistant layer is deposited, close the TiB ₂ target, open the Mo target, adjust the nitrogen gas pressure and the substrate bias voltage, and start the The MoN self-lubricating layer is deposited, the target current is 60-100A, and the deposition time is 1-2 minutes.

The material of the tool base is tool steel, high speed steel or hard alloy.

In steps (2), (3), (4), (5), and (6), the rotational speed of the workpiece holder during the deposition process is 3-6 rpm.

The present invention deposits a layer of transition layer before coating, and the transition layer can greatly improve the adhesion of the coating; Air pressure, to realize the change of the modulation period of the multilayer composite film, so as to adjust the thickness of a double layer period. Finally, a thin MoN self-lubricating layer is deposited on the coating surface. Therefore compared with the prior art, the present invention has the following advantages: the first, compared with magnetron sputtering, the present invention has adopted cathodic arc ion plating technology to prepare coating, because the high ionization rate makes coating have better Bonding force and hardness overcome the problem of low bonding force of the coating prepared by magnetron sputtering; second, the TiBN/MoN nanocomposite multilayer coating obtained by the present invention is a superlattice structure, and the highest hardness value is about The average hardness of the ordinary unit coating is increased by about 30%, which can reach 25-30GPa; thirdly, the surface of the coating obtained by the present invention is a MoN layer, which has a self-lubricating function and can effectively improve the wear resistance of the coating. Fourth, the arc ion plating technology adopted in the present invention is similar to the current coating equipment, and the coating equipment has a simple structure, is easy to control, and has a good industrial application prospect.

The TiBN/MoN nano-composite multi-layer coating knife prepared by the present invention has higher hardness, good bonding force and good wear resistance, and the coating has some characteristics of the two single-layer coatings, which improves the coating The overall performance of the layer ensures the long-term stable operation of the cutter, greatly improves the mechanical performance of the cutter, greatly improves the production efficiency, reduces the production cost of the manufacturer, and has a good application prospect in the industry.

Description of drawings

Fig. 1 is a schematic structural diagram of a preparation device for a molybdenum nitride/titanium boron nitride nanocomposite multi-layer coating tool provided by the present invention.

Fig. 2 is the top view of Fig. 1;

Fig. 3 is the cross-sectional morphology figure of the molybdenum nitride/titanium boron nitride nanocomposite multilayer coating provided by the present invention;

In the figure: 1-furnace door, 2-vacuum chamber, 3-TiB ₂ target, 4-Mo target, 5-vacuumizing system, 6-workpiece rack, 7-cross baffle, 8-Ti target.

detailed description

The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, but the protection content of the present invention is not limited to the following embodiments.

In the following examples provided by the present invention, the device used to prepare MoN/TiBN nanocomposite multilayer coating cutters is shown in Figure 1 and Figure 2, the vacuum chamber 2 of this device is surrounded by furnace walls, and the vacuum chamber 2 height is 1000mm with a diameter of 900mm. A furnace door 1 is provided on the side of the vacuum chamber to facilitate loading and unloading of workpieces. The vacuum chamber is equipped with a vacuum system 5, and the vacuum unit vacuumizes the vacuum chamber through the vacuum port, and the ultimate vacuum can reach 5×10 ^-4 Pa. The two arc sources TiB ₂ , target 3 and Mo target 4 are symmetrically installed on the furnace wall on both sides, Ti target 8 is installed on the inner wall of the furnace door 1, and the sample is installed on the workpiece rack 6, which is provided with a cross baffle 7 , The bottom of the workpiece holder 6 is provided with a rotating device for driving the workpiece holder to rotate. This layout greatly increases the plasma density in the vacuum chamber, and the workpiece is completely immersed in the plasma. The deposition rate, hardness and adhesion are greatly improved.

Example 1

The preparation method of the MoN/TiBN nanocomposite multi-layer coating tool provided in the present embodiment is as follows:

First, put the tool in the cleaning tank and clean it by ultrasonic cleaning. After drying, check whether the surface is clean. After confirming that there is no pollution on the surface, clamp the tool base on the workpiece holder, close the furnace door, and start the preliminary extraction. Vacuum and heating operations. After the vacuum reaches 5×10 ^-3 Pa and the temperature reaches 300°C, start to perform argon plasma glow cleaning on tool steel, high-speed steel or hard alloy tools for 30 minutes in an argon environment, and the argon pressure is 1.5Pa , the substrate bias was -600V; after the glow cleaning, the TiN transition layer was deposited for 5min under the conditions of 0.3Pa nitrogen pressure, target current of 60A, and substrate bias of -100V; then TiBN/MoN nanocomposite multilayer coating was deposited For 40 minutes, the nitrogen pressure was 1.0Pa, the target current was 60A, and the substrate bias was -100V; finally, the MoN lubricating layer was deposited for 1 minute, the nitrogen pressure was 1.0Pa, the target current was 60A, and the substrate bias was -100V. During the entire deposition process, the rotating speed of the workpiece holder was 6 rpm, and the total thickness of the coating was about 1 micron. After the preparation, it was naturally cooled to obtain a TiBN/MoN nanocomposite multi-layer coating tool.

The cross-sectional morphology of the TiBN/MoN coating prepared in this example is shown in Figure 3. It can be seen from the figure that the coating is closely attached to the tool substrate and the coating is dense.

Example 2

The preparation method of the MoN/TiBN nanocomposite multi-layer coating tool provided in the present embodiment is as follows:

First, put the tool in the cleaning tank and clean it by ultrasonic cleaning. After drying, check whether the surface is clean. After confirming that there is no pollution on the surface, clamp the tool base on the workpiece holder, close the furnace door, and start the preliminary extraction. Vacuum and heating operations. At 350°C and in an argon environment, perform argon plasma glow cleaning on tool steel, high-speed steel or cemented carbide tools for 30 minutes, the air pressure is 2.0Pa, and the substrate bias voltage is -700V; after glow cleaning, at 0.4Pa Nitrogen pressure, target current 70A, substrate bias -150V to deposit TiN transition layer for 5min; then deposit TiBN/MoN nanocomposite multilayer coating for 50min, nitrogen pressure 2.0Pa, target current 70A, substrate bias -150V; finally deposit MoN lubricating layer for 1min, nitrogen pressure is 2.0Pa, target current is 70A, substrate bias is -150V. During the whole deposition process, the rotation speed of the workpiece holder was 5 rpm, and the total thickness of the coating was about 1.5 microns. After the preparation, it was naturally cooled to obtain a TiBN/MoN nanocomposite multilayer coating tool.

Example 3

The preparation method of the MoN/TiBN nanocomposite multi-layer coating tool provided in the present embodiment is as follows:

First, put the tool in the cleaning tank and clean it by ultrasonic cleaning. After drying, check whether the surface is clean. After confirming that there is no pollution on the surface, clamp the tool base on the workpiece holder, close the furnace door, and start the preliminary extraction. Vacuum and heating operations. At 400°C and in an argon environment, tool steel, high-speed steel or hard alloy tools were subjected to argon plasma glow cleaning for 60 minutes, the air pressure was 2.0Pa, and the substrate bias was -700V; Nitrogen pressure, target current 80A, substrate bias -200V to deposit TiN transition layer; then deposit TiBN/MoN nanocomposite multilayer coating for 80min, nitrogen pressure 2.5Pa, target current 80A, substrate bias - 200V; finally deposit the MoN lubricating layer for 2min, the nitrogen pressure is 2.5Pa, the target current is 80A, and the substrate bias is -200V. During the whole deposition process, the rotation speed of the workpiece frame was 5 rpm, and the total thickness of the coating was about 2 microns. After the preparation, it was naturally cooled to obtain a TiBN/MoN nanocomposite multi-layer coating tool.

Example 4

The preparation method of the MoN/TiBN nanocomposite multi-layer coating tool provided in the present embodiment is as follows:

First, put the tool in the cleaning tank and clean it by ultrasonic cleaning. After drying, check whether the surface is clean. After confirming that there is no pollution on the surface, clamp the tool base on the workpiece holder, close the furnace door, and start the preliminary extraction. Vacuum and heating operations. At 450°C in an argon environment, tool steel, high-speed steel or cemented carbide tools were subjected to argon plasma glow cleaning for 60 minutes, the air pressure was 2.0Pa, and the substrate bias was -800V; Nitrogen pressure, target current 90A, substrate bias -200V to deposit TiN transition layer; then deposit TiBN/MoN nanocomposite multilayer coating for 100min, nitrogen pressure 3.0Pa, target current 90A, substrate bias -200V; finally deposit the MoN lubricating layer for 2min, the nitrogen pressure is 3.0Pa, the target current is 90A, and the substrate bias is -200V. During the entire deposition process, the rotating speed of the workpiece holder was 4 rpm, and the total thickness of the coating was about 3 microns. After the preparation, it was naturally cooled to obtain a TiBN/MoN nanocomposite multi-layer coating tool.

Example 5

The preparation method of the MoN/TiBN nanocomposite multi-layer coating tool provided in the present embodiment is as follows:

First, put the tool in the cleaning tank and clean it by ultrasonic cleaning. After drying, check whether the surface is clean. After confirming that there is no pollution on the surface, clamp the tool base on the workpiece holder, close the furnace door, and start the preliminary extraction. Vacuum and heating operations. At 500°C and in an argon atmosphere, tool steel, high-speed steel or hard alloy tools were subjected to argon plasma glow cleaning for 90 minutes, the air pressure was 2.5Pa, and the substrate bias was -800V; Nitrogen pressure, target current 90A, substrate bias -250V to deposit TiN transition layer; then deposit TiBN/MoN nanocomposite multilayer coating for 120min, nitrogen pressure 4.0Pa, target current 100A, substrate bias -250V; finally deposit the MoN lubricating layer for 2min, the nitrogen pressure is 4.0Pa, the target current is 100A, and the substrate bias is -250V. During the whole deposition process, the rotation speed of the workpiece frame was 3rpm, and the total thickness of the coating was about 4 microns. After the preparation, it was naturally cooled to obtain a TiBN/MoN nanocomposite multilayer coating tool.

Claims (8)

1. A molybdenum nitride/nitrogen-boron-titanium nanocomposite multi-layer coating cutter, at least comprising a cutter substrate, is characterized in that: a transition layer, a wear-resistant layer and a self-lubricating layer are sequentially attached to the cutter substrate from the inside to the outside The total thickness of the transition layer, wear-resistant layer and self-lubricating layer is 1-4 μm, of which the transition layer is TiN, and the thickness of the transition layer is 100-200nm. The wear-resistant layer is composed of TiBN layer and MoN layer alternately, and the self-lubricating layer for MoN. 2. The molybdenum nitride/titanium boron nitride nanocomposite multilayer coated tool according to claim 1, characterized in that: the thickness of each TiBN layer+MoN layer in the wear-resistant layer is 5-10 nm. 3. The molybdenum nitride/nitrogen-boron-titanium nanocomposite multi-layered cutting tool according to claim 1, characterized in that the thickness of the self-lubricating layer is 20-50 nm. 4. The molybdenum nitride/nitrogen-boron-titanium nanocomposite multi-layer coating cutter according to claim 1, characterized in that: the material of the cutter base is tool steel, high-speed steel or cemented carbide. 5. The molybdenum nitride/titanium boron nitrogen nanocomposite multilayer coating tool according to claim 1, characterized in that: the wear-resistant layer contains TiN and MoN nanocrystals, and the film layer is a superlattice structure . 6. A method for preparing molybdenum nitride/titanium boron nitrogen nanocomposite multilayer coating cutter according to claim 1, characterized in that it comprises the following steps: (1) Put the surface-clean tool substrate in the cleaning tank, add cleaning agent, clean it with ultrasonic cleaning, dry it and check whether the surface of the substrate is clean; (2) After ensuring that the surface of the substrate is free from pollution, clamp the substrate on the workpiece frame and start vacuuming the furnace body; wait for the vacuum to be below 5×10 ^-3 Pa, and at the same time heat the temperature to 300-500°C , proceed to the next step; (3) Fill the furnace body with argon gas to maintain an argon atmosphere with a pressure of 1.5-2.5Pa in the furnace body. At the same time, under the conditions of substrate bias voltage of -600-800V and duty cycle of 80%, start to use Argon plasma is used to glow clean the tool substrate for 30-90 minutes; (4) After the glow cleaning is finished, turn off the argon gas, start filling the furnace with nitrogen, keep the air pressure in the furnace at 0.3-0.7Pa, and set the bias voltage at -100--250V at the same time, turn on the Ti target, the target current Set it to 60-100A, start to deposit the TiN transition layer on the tool substrate, and the duration is 5 minutes; (5) After the transition layer is deposited, close the Ti target, adjust the nitrogen gas pressure and the substrate bias voltage, and turn on the TiB ₂ target and the Mo target under the condition that the nitrogen gas pressure is 1.0-4.0Pa and the bias voltage is -100--250V , the target current is 60-100A, and the wear-resistant layer is deposited on the transition layer, and the deposition time is 40 minutes to 120 minutes; (6) After the wear-resistant layer is deposited, close the TiB ₂ target, open the Mo target, adjust the nitrogen gas pressure and the substrate bias voltage, and start the The MoN self-lubricating layer is deposited, the target current is 60-100A, and the deposition time is 1-2 minutes. 7. The preparation method according to claim 6, characterized in that: the material of the tool base is tool steel, high speed steel or cemented carbide. 8. The preparation method according to claim 6, characterized in that: in steps (2), (3), (4), (5), and (6), the rotating speed of the workpiece holder during the deposition process is 3-6 rpm.