CN105887024B - TiCrN ＆ MoS2/ Cr/Ti laminated coatings cutter and its preparation process - Google Patents

Abstract

The invention belongs to the field of mechanically manufacturing metal cutting tools, and in particular relates to a TiCrN&MoS ₂ /Cr/Ti laminated coating tool and a preparation process thereof. The base material of the tool is high-speed steel, hard alloy, cubic boron nitride or diamond, and the surface of the tool is MoS ₂ /Ti/Cr lubricating coating, and the order from the base to the coating surface is: Ti transition layer, Ti/Cr transition layer, TiCrN hard coating and MoS ₂ /Ti/Cr lubricating coating alternate composite laminated structure. The tool combines the advantages of TiCrN multi-component hard coating, MoS ₂ /Ti/Cr lubricating coating and laminated structure. It not only has high hardness, but also has lubricating effect and low friction coefficient. Performance has been significantly improved.

Description

TiCrN&MoS2/Cr/Ti laminated coating tool and its preparation process

technical field

The invention belongs to the field of mechanically manufacturing metal cutting tools, and in particular relates to a TiCrN&MoS ₂ /Cr/Ti laminated coating tool and a preparation process thereof.

Background technique

According to the nature of the coating material, coated tools can be divided into two categories, namely: "hard" coated tools and "lubricated" coated tools. The main advantages of "high hardness" coating tools are high hardness and good wear resistance. Typical "high hardness" coating materials include TiN, TiCN, TiAlN and diamond-like carbon. The goal of "lubricating" coated tools is low friction coefficient. Typical "lubricating" coating materials are solid lubricating materials with low friction coefficient (such as: MoS ₂ , WS ₂ , TaS ₂ and other sulfides). The current development trend of tool coatings is: coating components tend to be diversified and compounded. Composite coatings can combine the advantages of single coatings. The emergence of composite multi-coatings and related technologies can not only improve the bonding strength between coatings and substrates, but also take into account the comprehensive performance of various single coatings, so that the performance of coated tools can be improved. Significantly increased.

Chinese patent (Patent No. ZL 2006 1 0068975.3) reports "Self-lubricating Composite Soft Coated Cutting Tool and Its Preparation Method", which is a MoS ₂ /Zr composite coated cutting tool prepared by medium frequency magnetron + multi-arc coating method, cutting tool The surface is a MoS ₂ layer, and there is a Ti transition layer between the MoS ₂ layer and the tool substrate. During the cutting process without cutting fluid cooling and lubrication, the tool can form a lubricating lubricating film on the surface of the tool, thereby realizing the lubricating function of the tool itself, but the hardness of this lubricating coating is low, which leads to the tool coating especially The service life of the flank coating is not long. The literature (ActaMaterials.2011, 59(1): 68-74) reported the mechanism and performance of TiN hard coating tools during cutting, but this hard coating is limited due to its relatively high coefficient of friction. use. The Chinese patent TiN+MoS ₂ /Zr combined coating tool (Patent No. ZL 201110081977.7) adopts the method of intermediate frequency magnetron sputtering and arc plating to prepare the TiN+MoS ₂ /Zr combined coating tool, but the combined coating is dry When cutting superhard materials, the service life of the tool still cannot meet the needs of actual use. The ZrTiN composite coating knife prepared by the Chinese patent gradient laminated coating tool and its preparation method (Patent No. ZL201110214393.2) has high hardness and strength, excellent wear resistance and corrosion resistance, but when cutting non-ferrous metal materials Its surface friction coefficient is high, and the service life of the tool cannot meet the needs of use.

Layered composite material is a new material reinforcement and toughening technology developed in recent years. This structure is derived by imitating shells, so it is also called bionic laminated composite material. The nacre of shells in nature is a natural layered structure material, but its fracture toughness is more than 3000 times higher than that of ordinary single homogeneous structure. Therefore, by imitating the interlayer design of the structure of biological materials, the prepared laminated composite coating can significantly improve the comprehensive properties of the coating, such as toughness, bonding strength, anti-friction and wear resistance.

Contents of the invention

The purpose of the present invention is to overcome the deficiencies of the above-mentioned existing coating tool technology, combined with the advantages of multi-component hard coating, lubricating coating and multi-layer structure, to provide a TiCrN&MoS ₂ /Cr/Ti laminated coating tool and its preparation craft.

The present invention is achieved in the following ways:

TiCrN&MoS ₂ /Cr/Ti laminated coating tool, the tool base material is high speed steel, cemented carbide, cubic boron nitride or diamond, the tool surface is MoS ₂ /Ti/Cr lubricating coating, and from the base to the coating surface The order is: Ti transition layer, Ti/Cr transition layer, TiCrN hard coating and MoS ₂ /Ti/Cr lubricating coating alternate composite laminated structure.

The preparation process of the TiCrN&MoS ₂ /Cr/Ti laminated coating tool, the deposition method is to use arc plating and intermediate frequency magnetron sputtering composite coating method to prepare a combined coating, including a Ti target arc target, a Cr target arc target , 2 MoS ₂ magnetron sputtering targets: arc ion plating deposits Ti transition layer and Ti/Cr transition layer for 4-5 minutes each, and then alternately deposits TiCrN hard coating (arc ion plating) and A MoS ₂ /Ti/Cr lubricating coating with a thickness of about 15-25nm (magnetron sputtering + arc ion plating), and the final surface is a MoS ₂ /Ti/Cr lubricating coating.

Specifically include the following steps:

(1) Pretreatment: Polish the surface of the tool substrate to remove impurities, then put it in alcohol and acetone in turn, clean it ultrasonically, put it into a coating machine after drying, vacuumize to 7.5×10 ^-3 Pa, and heat to 280°C , keep warm for 35-40 minutes;

(2) Ion cleaning: pass Ar gas, the pressure is 1.5Pa, turn on the bias power supply, voltage 600V, duty cycle 0.2, glow discharge cleaning for 15min; reduce the bias voltage to 400V, turn on the ion source ion cleaning for 15min, turn on Ti The arc source of the target, the bias voltage is 300V, the target current is 60A, and the ions bombard the Ti target for 2min;

(3) Deposit Ti transition layer: Ar pressure 0.5-0.6Pa, bias voltage down to 250V, Ti target current 70A, deposition temperature 250°C, arc plating Ti transition layer for 3-5min;

(4) Deposition of Ti/Cr transition layer: Ar pressure 0.5-0.6Pa, bias voltage 250V, Ti target current 80A, Cr target current 50A, arc plating Ti/Cr transition layer 4-5min;

(5) Deposit TiCrN hard coating: turn on N ₂ , Ar pressure 0.5Pa, bias voltage 220V, Ti target target current 90A, Cr target current 70A, N ₂ pressure 1.2Pa, deposition temperature 200-230°C, arc Plating TiCrN hard coating for 3 to 4 minutes;

(6) Deposit MoS ₂ /Ti/Cr lubricating coating: turn off N ₂ , Ti target current 70A, Cr target current 60A, turn on MoS ₂ target magnetron sputtering power supply, current 2.0A, bias voltage to 200V, deposition temperature 230～260℃, compound deposited MoS ₂ /Ti/Cr lubricating coating for 3～4min;

(7) deposit TiCrN hard coating: repeat (5);

(8) deposit MoS ₂ /Ti/Cr lubricating coating: repeat (6);

(9) Repeat (5), (6), (5)...: alternately deposit TiCrN, MoS ₂ /Ti/Cr...TiCrN coatings for a total of 100 min;

(10) deposit surface layer MoS ₂ /Ti/Cr lubricating coating: repeat (6);

(11) Post-processing: all power supplies, ion sources and gas sources are turned off, and the coating is finished.

Compared with the prior art, the present invention has the following excellent effects:

The present invention adopts arc plating and magnetron sputtering composite coating method to prepare TiCrN&MoS ₂ /Cr/Ti composite laminate coating tool, the coating is a multi-layer structure, wherein the Ti transition layer and Ti/Cr transition layer on the substrate are mainly Improve the bonding performance between the coating and the tool substrate. The tool combines the advantages of TiCrN multi-component hard coating, MoS ₂ /Ti/Cr lubricating coating and laminated structure. It not only has high hardness, but also has lubricating effect and low friction coefficient. Performance has been significantly improved. At the same time, the laminated structure can make the coated tool maintain good anti-friction and lubricity throughout the service life of the coating, prolonging the service life of the lubricating coating. In addition, the laminated structure can slow down the premature peeling of the coating and the propagation of cracks through the interlayer interface of different material structures and composition. When the coated tool is cutting, because the surface MoS ₂ /Ti/Cr coating itself has a lubricating effect, it can reduce the friction between the tool and the chip, thereby reducing the cutting force and cutting temperature; at the same time, the TiCrN high hardness coating can Improve the overall strength of the MoS ₂ /Ti/Cr lubricating coating and slow down the premature wear of the tool coating due to the low hardness of the MoS ₂ /Ti/Cr coating itself. Compared with TiN+MoS ₂ /Zr coated tool (Patent No. ZL 201110081977.7), the wear resistance is increased by 30-35%, and the service life of the coated tool is increased by more than 25%; with ZrTiN composite coated tool (Patent No. 201110214393.2 ), the surface friction coefficient is reduced by more than 30%, the anti-friction and wear resistance is increased by 30-35%, the service life of the coated tool is increased by 20-30%, and the scope of use of the coated tool is improved, which can be more widely used including Cutting of various materials including non-ferrous metals.

Description of drawings

Fig. 1 is a schematic diagram of the coating structure of the TiCrN&MoS ₂ /Ti/Cr composite laminated coating tool of the present invention.

In the figure: 1 is the tool matrix, 2 is the Ti transition layer, 3 is the Ti/Cr transition layer, 4 is the TiCrN hard coating, 5 is the MoS ₂ /Ti/Cr lubricating coating, 6 is TiCrN and MoS ₂ /Ti /Cr alternating coating.

Detailed ways

The preferred embodiment of the present invention is given below:

Embodiment one

A TiCrN&MoS ₂ /Ti/Cr composite laminated coating tool is an ordinary milling insert, and its base material is hard alloy YT15. The deposition method is to prepare a combined coating by arc plating and intermediate frequency magnetron sputtering composite coating method, including 1 Ti target arc target, a Cr target arc target, and 2 MoS ₂ magnetron sputtering targets: arc ion plating deposits Ti transition layer and Ti/Cr transition layer for 4-5 minutes each, and then alternately deposit a TiCrN coating (arc ion plating) with a thickness of about 30-40 nm and a MoS ₂ /Ti/Cr coating (magnetron sputtering) with a thickness of about 15-25 nm. Spray + arc ion plating), the final surface is MoS ₂ /Ti/Cr lubricating coating, the preparation process is:

(1) Pretreatment: Polish the surface of the tool base to remove surface oil, rust and other impurities, then place them in alcohol and acetone in turn, and ultrasonically clean them for 40 minutes each to remove oil and other attachments on the surface of the tool, and dry them quickly with a hair dryer. Put it into the coating machine, evacuate to 7.5×10 ^-3 Pa, heat to 280°C, and keep it warm for 35-40min;

(2) Ion cleaning: pass Ar gas, the pressure is 1.5Pa, turn on the bias power supply, voltage 600V, duty cycle 0.2, glow discharge cleaning for 15min; reduce the bias voltage to 400V, turn on the ion source ion cleaning for 15min, turn on Ti The arc source of the target, the bias voltage is 300V, the target current is 60A, and the ions bombard the Ti target for 2min;

(3) Deposit Ti transition layer: Ar pressure 0.5-0.6Pa, bias voltage down to 250V, Ti target current 70A, deposition temperature 250°C, arc plating Ti transition layer for 3-5min;

(4) Deposition of Ti/Cr transition layer: Ar pressure 0.5-0.6Pa, bias voltage 250V, Ti target current 80A, Cr target current 50A, arc plating Ti/Cr transition layer 4-5min;

(5) Deposit TiCrN layer: turn on N ₂ , Ar pressure 0.5Pa, bias voltage 220V, Ti target current 90A, Cr target current 70A, N ₂ pressure 1.2Pa, deposition temperature 200-230°C, arc plating TiCrN layer 3～4min;

(6) Deposit MoS ₂ /Ti/Cr layer: turn off N ₂ , Ti target current 70A, Cr target current 60A, turn on MoS ₂ target magnetron sputtering power supply, current 2.0A, bias voltage to 200V, deposition temperature 230~ 260°C, composite deposition of MoS ₂ /Ti/Cr for 3~4min;

(7) deposit TiCrN layer: repeat (5);

(8) deposit MoS ₂ /Ti/Cr layer: repeat (6);

(9) Repeat (5), (6), (5)...: alternately deposit TiCrN, MoS ₂ /Ti/Cr...TiCrN coatings for a total of 100 min;

(10) Deposit the surface MoS ₂ /Ti/Cr layer: repeat (6);

(11) Post-processing: all power supplies, ion sources and gas sources are turned off, and the coating is finished.

Embodiment two

A TiCrN&MoS ₂ /Cr/Ti laminated coating cutting tool is an ordinary twist drill, and the cutting tool base material is high-speed steel W18Cr4V. The deposition method is to prepare a combined coating by arc plating and intermediate frequency magnetron sputtering composite coating method, including 1 Ti target arc target, a Cr target arc target, and 2 MoS ₂ magnetron sputtering targets: arc ion plating deposits Ti transition layer and Ti/Cr transition layer for 4-5 minutes each, and then alternately deposit a TiCrN coating (arc ion plating) with a thickness of about 30-40 nm and a MoS ₂ /Ti/Cr coating (magnetron sputtering) with a thickness of about 15-25 nm Spray + arc ion plating), the final surface is MoS ₂ /Ti/Cr lubricating coating, the preparation process is:

(1) Pretreatment: Polish the surface of the tool base to remove surface oil, rust and other impurities, then place them in alcohol and acetone in turn, and ultrasonically clean them for 40 minutes each to remove oil and other attachments on the surface of the tool, and dry them quickly with a hair dryer. Put it into the coating machine, evacuate to 7.5×10 ^-3 Pa, heat to 280°C, and keep it warm for 35-40min;

(2) Ion cleaning: pass Ar gas, the pressure is 1.5Pa, turn on the bias power supply, voltage 600V, duty cycle 0.2, glow discharge cleaning for 15min; reduce the bias voltage to 400V, turn on the ion source ion cleaning for 15min, turn on Ti The arc source of the target, the bias voltage is 300V, the target current is 60A, and the ions bombard the Ti target for 2min;

(3) Deposit Ti transition layer: Ar pressure 0.5-0.6Pa, bias voltage down to 250V, Ti target current 70A, deposition temperature 250°C, arc plating Ti transition layer for 3-5min;

(4) Deposition of Ti/Cr transition layer: Ar pressure 0.5-0.6Pa, bias voltage 250V, Ti target current 80A, Cr target current 50A, arc plating Ti/Cr transition layer 4-5min;

(5) Deposit TiCrN layer: turn on N ₂ , Ar pressure 0.5Pa, bias voltage 220V, Ti target current 90A, Cr target current 70A, N ₂ pressure 1.2Pa, deposition temperature 200-230°C, arc plating TiCrN layer 3～4min;

(6) Deposit MoS ₂ /Ti/Cr layer: turn off N ₂ , Ti target current 70A, Cr target current 60A, turn on MoS ₂ target magnetron sputtering power supply, current 2.0A, bias voltage to 200V, deposition temperature 230~ 260°C, composite deposition of MoS ₂ /Ti/Cr for 3~4min;

(7) deposit TiCrN layer: repeat (5);

(8) deposit MoS ₂ /Ti/Cr layer: repeat (6);

(9) Repeat (5), (6), (5)...: alternately deposit TiCrN, MoS ₂ /Ti/Cr...TiCrN coatings for a total of 100 min;

(10) Deposit the surface MoS ₂ /Ti/Cr layer: repeat (6);

(11) Post-processing: all power supplies, ion sources and gas sources are turned off, and the coating is finished.

Claims (2)

1.TiCrN&MoS₂/ Cr/Ti laminated coating cutters, tool matrix material be high-speed steel, hard alloy, cubic boron nitride or Diamond, which is characterized in that tool surface MoS₂/ Ti/Cr lubricant coatings, and be followed successively by coating surface by matrix：Ti mistakes Cross layer, Ti/Cr transition zones, TiCrN hard coats and MoS₂The alternate composite lamainated structure of/Ti/Cr lubricant coatings；The coating knife Tool depositional mode is plated using electric arc and combines coating, including 1 Ti target electric arc target with the preparation of medium frequency magnetron sputtering composite film coating method, One Cr target electric arc target, 2 MoS₂Magnetic controlled sputtering target：Electric arc ion-plating deposition Ti transition zones, each 4-5min of Ti/Cr transition zones, Then the MoS that the TiCrN hard coats and thickness that alternating deposit thickness is 30~40nm are 15~25nm₂/ Ti/Cr lubrications apply Layer, the TiCrN hard coats use electric arc ion-plating deposition, the MoS₂/ Ti/Cr lubricant coatings are using magnetron sputtering and electricity Arc ion plating composite deposition, last surface are MoS₂/ Ti/Cr lubricant coatings；Specifically include following steps：

(1) pre-treatment：Tool matrix surface is polished, impurity is removed, is then sequentially placed into alcohol and acetone, is cleaned by ultrasonic, It is put into coating machine rapidly after drying, is evacuated to 7.5 × 10^-3Pa is heated to 280 DEG C, keeps the temperature 35~40min；

(2) Ion Cleaning：Logical Ar gas, pressure 1.5Pa open grid bias power supply, voltage 600V, duty ratio 0.2, glow discharge Clean 15min；Reduction is biased into 400V, opens ion source Ion Cleaning 15min, opens the arc source of Ti targets, bias 300V, target Electric current 60A, ion bombardment Ti targets 2min；

(3) depositing Ti transition zone：Ar 0.5~0.6Pa of air pressure, bias are down to 250V, Ti target current 70A, 250 DEG C of depositing temperature, Electric arc plates 3~5min of Ti transition zones；

(4) depositing Ti/Cr transition zones：Ar 0.5~0.6Pa of air pressure, bias 250V, Ti target current 80A, Cr target current 50A, electric arc Plate 4~5min of Ti/Cr transition zones；

(5) depositing Ti CrN hard coats：Open N₂, Ar air pressure 0.5Pa, target current 90A, the Cr target current of bias 220V, Ti target 70A, N₂Air pressure is 1.2Pa, 200~230 DEG C of depositing temperature, 3~4min of electric arc plating TiCrN hard coats；

(6) MoS is deposited₂/ Ti/Cr lubricant coatings：Close N₂, Ti target currents 70A, Cr target current 60A, unlatching MoS₂Target magnetic control splashes Radio source, electric current 2.0A, bias are adjusted to 200V, 230~260 DEG C of depositing temperature, composite deposition MoS₂/ Ti/Cr lubricant coatings 3~ 4min；

(7) depositing Ti CrN hard coats：It repeats (5)；

(8) MoS is deposited₂/ Ti/Cr lubricant coatings：It repeats (6)；

(9) (5), (6), (5) are repeated：Alternating deposit TiCrN, MoS₂The total 100min of/Ti/CrTiCrN coatings；

(10) surface layer MoS is deposited₂/ Ti/Cr lubricant coatings：It repeats (6)；

(11) it post-processes：Each power supply, ion source and gas source are closed, coating terminates.

2. TiCrN＆MoS as described in claim 1₂The preparation process of/Cr/Ti laminated coating cutters, which is characterized in that deposition side Formula is to combine coating, including 1 Ti target electric arc target, a Cr with the preparation of medium frequency magnetron sputtering composite film coating method using electric arc plating Target electric arc target, 2 MoS₂Magnetic controlled sputtering target：Electric arc ion-plating deposition Ti transition zones, each 4-5min of Ti/Cr transition zones, are then handed over For deposition thickness be 30~40nm TiCrN hard coats and thickness be 15~25nm MoS₂/ Ti/Cr lubricant coatings, it is described TiCrN hard coats use electric arc ion-plating deposition, the MoS₂/ Ti/Cr lubricant coatings use magnetron sputtering and arc ions Composite deposition is plated, last surface is MoS₂/ Ti/Cr lubricant coatings, specifically include following steps：

(1) pre-treatment：Tool matrix surface is polished, impurity is removed, is then sequentially placed into alcohol and acetone, is cleaned by ultrasonic, It is put into coating machine rapidly after drying, is evacuated to 7.5 × 10^-3Pa is heated to 280 DEG C, keeps the temperature 35~40min；

(2) Ion Cleaning：Logical Ar gas, pressure 1.5Pa open grid bias power supply, voltage 600V, duty ratio 0.2, glow discharge Clean 15min；Reduction is biased into 400V, opens ion source Ion Cleaning 15min, opens the arc source of Ti targets, bias 300V, target Electric current 60A, ion bombardment Ti targets 2min；

(3) depositing Ti transition zone：Ar 0.5~0.6Pa of air pressure, bias are down to 250V, Ti target current 70A, 250 DEG C of depositing temperature, Electric arc plates 3~5min of Ti transition zones；

(4) depositing Ti/Cr transition zones：Ar 0.5~0.6Pa of air pressure, bias 250V, Ti target current 80A, Cr target current 50A, electric arc Plate 4~5min of Ti/Cr transition zones；

(5) depositing Ti CrN hard coats：Open N₂, Ar air pressure 0.5Pa, target current 90A, the Cr target current of bias 220V, Ti target 70A, N₂Air pressure is 1.2Pa, 200~230 DEG C of depositing temperature, 3~4min of electric arc plating TiCrN hard coats；

(6) MoS is deposited₂/ Ti/Cr lubricant coatings：Close N₂, Ti target currents 70A, Cr target current 60A, unlatching MoS₂Target magnetic control splashes Radio source, electric current 2.0A, bias are adjusted to 200V, 230~260 DEG C of depositing temperature, composite deposition MoS₂/ Ti/Cr lubricant coatings 3~ 4min；

(7) depositing Ti CrN hard coats：It repeats (5)；

(8) MoS is deposited₂/ Ti/Cr lubricant coatings：It repeats (6)；

(9) (5), (6), (5) are repeated：Alternating deposit TiCrN, MoS₂The total 100min of/Ti/CrTiCrN coatings；

(10) surface layer MoS is deposited₂/ Ti/Cr lubricant coatings：It repeats (6)；

(11) it post-processes：Each power supply, ion source and gas source are closed, coating terminates.