CN112683493B - 透光性器件检测系统 - Google Patents
透光性器件检测系统 Download PDFInfo
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- CN112683493B CN112683493B CN201910994143.1A CN201910994143A CN112683493B CN 112683493 B CN112683493 B CN 112683493B CN 201910994143 A CN201910994143 A CN 201910994143A CN 112683493 B CN112683493 B CN 112683493B
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- 238000001514 detection method Methods 0.000 title claims abstract description 26
- 230000007547 defect Effects 0.000 claims abstract description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 14
- 239000011247 coating layer Substances 0.000 claims description 13
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000007689 inspection Methods 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 230000031700 light absorption Effects 0.000 description 8
- 239000003086 colorant Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910021418 black silicon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 210000001624 hip Anatomy 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
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CN201910994143.1A CN112683493B (zh) | 2019-10-18 | 2019-10-18 | 透光性器件检测系统 |
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CN112683493A CN112683493A (zh) | 2021-04-20 |
CN112683493B true CN112683493B (zh) | 2025-02-25 |
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CN113432833B (zh) * | 2021-06-15 | 2022-09-16 | 北方夜视技术股份有限公司 | 用于测试像增强管光电阴极光照后稳定性的装置及方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001235432A (ja) * | 2000-02-22 | 2001-08-31 | Nippon Maxis Co Ltd | 傷検査方法、傷検査用光源、傷検査装置 |
JP2009229221A (ja) * | 2008-03-21 | 2009-10-08 | Fujifilm Corp | 光学デバイス欠陥検査方法及び光学デバイス欠陥検査装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
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US6124909A (en) * | 1996-12-25 | 2000-09-26 | Casio Computer Co., Ltd. | Color liquid crystal display device having a plurality of pixel areas which emit non-colored light |
WO2003056876A2 (en) * | 2001-12-14 | 2003-07-10 | Digital Optics International Corporation | Uniform illumination system |
JP4826750B2 (ja) * | 2005-04-08 | 2011-11-30 | オムロン株式会社 | 欠陥検査方法およびその方法を用いた欠陥検査装置 |
KR101322292B1 (ko) * | 2005-07-08 | 2013-10-28 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | 텔레센트릭 축상 암 시야 조명으로 구현된 광학 시스템의 사용과 성능의 최적화 |
JP2007240431A (ja) * | 2006-03-10 | 2007-09-20 | Omron Corp | 欠陥検査装置および欠陥検査方法 |
JP5316198B2 (ja) * | 2009-04-23 | 2013-10-16 | 凸版印刷株式会社 | 外観検査装置 |
IT1395116B1 (it) * | 2009-07-29 | 2012-09-05 | Utpvision S R L | Sistema di rilevamento ottico di difetti superficiali |
JP5900187B2 (ja) * | 2012-06-27 | 2016-04-06 | 住友金属鉱山株式会社 | 表面傷検査装置及び表面傷検査方法 |
KR102272450B1 (ko) * | 2014-08-26 | 2021-07-02 | 엘지디스플레이 주식회사 | 액정 표시 패널 평가 방법 및 이를 이용한 액정 표시 패널 평가 장치 |
CN108594263A (zh) * | 2018-01-30 | 2018-09-28 | 北醒(北京)光子科技有限公司 | 一种激光雷达及无人驾驶系统 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2001235432A (ja) * | 2000-02-22 | 2001-08-31 | Nippon Maxis Co Ltd | 傷検査方法、傷検査用光源、傷検査装置 |
JP2009229221A (ja) * | 2008-03-21 | 2009-10-08 | Fujifilm Corp | 光学デバイス欠陥検査方法及び光学デバイス欠陥検査装置 |
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Effective date of registration: 20210707 Address after: 510660 No.7, Shenzhou Road, Science City, high tech Industrial Development Zone, Guangzhou City, Guangdong Province Applicant after: Guangzhou delta Imaging Technology Co.,Ltd. Address before: 330096 no.1404, Tianxiang North Avenue, Nanchang hi tech Industrial Development Zone, Nanchang City, Jiangxi Province Applicant before: Jiangxi Jingrun optics Co.,Ltd. |
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Effective date of registration: 20241030 Address after: 519000 Room 105-74257, No. 6 Baohua Road, Hengqin New District, Zhuhai City, Guangdong Province (centralized office area) Applicant after: Zhuhai Delta Technology Co.,Ltd. Country or region after: China Address before: 510660 No.7, Shenzhou Road, Science City, high tech Industrial Development Zone, Guangzhou City, Guangdong Province Applicant before: Guangzhou delta Imaging Technology Co.,Ltd. Country or region before: China |
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