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CN112683493B - Transparent device detection system - Google Patents

Transparent device detection system Download PDF

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Publication number
CN112683493B
CN112683493B CN201910994143.1A CN201910994143A CN112683493B CN 112683493 B CN112683493 B CN 112683493B CN 201910994143 A CN201910994143 A CN 201910994143A CN 112683493 B CN112683493 B CN 112683493B
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light
light source
transmitting device
bearing surface
transmissive device
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CN112683493A (en
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胡伟鹏
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Zhuhai Delta Technology Co ltd
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Zhuhai Delta Technology Co ltd
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Abstract

本发明提供了一种透光性器件检测系统,包括托盘、摄像组件和光源组件,托盘包括呈平面的承载面,承载面用于承载透光性器件,光源组件包括第一光源和第二光源,第一光源朝向承载面发射垂直的第一光线,第二光源朝向承载面发射倾斜的第二光线,第一光线和第二光线在透光性器件上反射,摄像组件接收透光性器件反射的光线而形成图像,根据图像检测透光性器件的缺陷。通过采用第二光源作为补偿光源,增加倾斜于待测的透光性器件的第二光线,从而使得发生在透光性器件的漫反射更多,使得透光性器件的内部以及表面缺陷显现出来。

The present invention provides a light-transmitting device detection system, including a tray, a camera assembly and a light source assembly, wherein the tray includes a planar bearing surface, the bearing surface is used to bear the light-transmitting device, the light source assembly includes a first light source and a second light source, the first light source emits a vertical first light ray toward the bearing surface, the second light source emits an inclined second light ray toward the bearing surface, the first light ray and the second light ray are reflected on the light-transmitting device, the camera assembly receives the light reflected by the light-transmitting device to form an image, and detects defects of the light-transmitting device according to the image. By using the second light source as a compensation light source, the second light ray inclined to the light-transmitting device to be tested is increased, so that more diffuse reflection occurs in the light-transmitting device, so that the internal and surface defects of the light-transmitting device are revealed.

Description

Light-transmitting device detection system
Technical Field
The invention belongs to the field of detection of optical imaging, and particularly relates to a light-transmitting device detection system.
Background
Along with the development of society, the market of color filters is also becoming larger, for example, color display appliances such as mobile phone camera modules, digital cameras, liquid crystal displays, vehicle-mounted systems, computer cameras, video phones and the like are not separated from the color filters, so that the quality control of the color filters is also becoming more important.
At present, the method for detecting the optical filter by the optical filter supplier and the company is that a sunlight source is matched with a microscope with the magnification of X20 times, and the surface morphology of the optical filter is observed under the naked eye condition.
If the existing method for detecting the optical filter is used, many internal structures and coating defects are difficult to judge, and the method cannot detect the front surface, the back surface and the interior of the optical filter at the same time.
Disclosure of Invention
The invention aims to provide a light-transmitting device detection system which solves the technical problems of the traditional light-transmitting device detection method.
In order to achieve the purpose of the invention, the invention provides the following technical scheme:
The invention provides a light-transmitting device detection system, which comprises a tray, a camera shooting assembly and a light source assembly, wherein the tray comprises a plane bearing surface, the bearing surface is used for bearing a light-transmitting device, the light source assembly comprises a first light source and a second light source, the first light source emits vertical first light rays towards the bearing surface, the second light source emits inclined second light rays towards the bearing surface, the first light rays and the second light rays are reflected on the light-transmitting device, the camera shooting assembly receives the light rays reflected by the light-transmitting device to form an image, and defects of the light-transmitting device are detected according to the image.
By adopting the second light source as the compensation light source, the second light inclined to the light-transmitting device to be measured is increased, so that diffuse reflection occurring in the light-transmitting device is more, and internal and surface defects of the light-transmitting device are revealed.
The bearing surface is provided with a coating layer, the bearing surface is made of silicon, and the coating layer is made of silicon nitride. The black silicon nitride film with high light absorption capacity is plated on the bearing surface of the silicon material, so that light emitted by the light source assembly and transmitted through the light-transmitting device can be absorbed, light reflection and scattering interference are reduced, and detection precision is improved.
The light-transmitting device comprises a bearing surface, a plurality of protrusions are arranged on the bearing surface, and two ends of the light-transmitting device are respectively carried on two adjacent protrusions, so that the light-transmitting device and the bearing surface have a first interval distance. By arranging a plurality of bulges on the bearing surface, the bearing surface is favorable for better absorbing redundant light. At the same time, the first interval distance is set, and the bearing surface can perform secondary absorption (the light emitted by the light source assembly passes through the light-transmitting device but the bearing surface is not absorbed, and the rest light is reflected to the light-transmitting device and then reflected back again).
Wherein the protrusions are in a shape of a Chinese character 'tu' to form a step structure, and the light-transmitting device is arranged on the step structure. By placing the light transmissive device in the stepped structure in the middle of the protrusion, interference of an external light source is reduced to reduce detection errors.
Wherein the first spacing distance is 0.1-1 mm. The first interval distance between the light-transmitting device and the bearing surface is reasonably set, the light absorption capacity of the bearing surface is enhanced, meanwhile, the interference of external light is eliminated, and the detection error is reduced.
The first light source and the second light source are annular, the second light source encloses to form a first space, the first space is used for accommodating the first light source, the first light source encloses to form a second space, and the image pickup assembly shoots an image of the light-transmitting device through the second space. The structure of the first light source and the second light source is reasonably arranged, so that the light intensities of the first light and the second light can be effectively overlapped, and the range and the intensity of the light reaching the light-transmitting device meet the detection requirement.
The first light source comprises three light emitting parts, namely red, green and blue, and the three light emitting parts are used for adjusting the color of light rays emitted by the first light source. By providing the above three light emitting portions on the first light source, it is possible to detect pixel defects of the light transmissive device in different colors.
The second light ray intersects the first light ray, and the inclination angle of the second light ray relative to the bearing surface is 30-85 degrees. The size of the inclination angle is reasonably set, and diffuse reflection can be better provided on the surface of the light-transmitting device.
The distance between the first light source and the bearing surface is a second interval distance, and the second interval distance is 50-150 mm. The second interval distance between the first light source and the bearing surface is reasonably set, so that the first light source has a larger irradiation range while the energy loss of the first light is reduced.
The camera shooting assembly comprises a microscope and a camera, the optical axis of the microscope is perpendicular to the bearing surface, and the camera is arranged on an eyepiece of the microscope. Through the cooperation of microscope and camera, enlarge the defect and with the form of defect conversion image to the staff detects the work of being convenient for, reduces the error, increases the precision of detecting.
The light-transmitting device detection system further comprises a display and a control device, wherein the display is electrically connected with the image pickup assembly and used for displaying images shot by the image pickup assembly, and the control device is used for controlling the light source assembly and/or the image pickup assembly to move relative to the tray. The device comprises a light source component, a light transmission component, a display, a control device and a camera component, wherein the light source component is arranged on the light transmission component, the display is used for displaying detected images in the light transmission component, the detection is facilitated, the detection efficiency is improved, and the control device is used for adjusting the distance between the light source component and the camera component and a bearing surface under different conditions (different external light conditions, different materials and sizes of the light transmission component and the like) to enhance the adaptability of a system.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained from them without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram showing a structure of a light transmissive device inspection system according to an embodiment;
FIG. 2 is a front view of a tray in one embodiment;
FIG. 3 is a top view of a tray in one embodiment;
fig. 4 is a positional relationship diagram of a tray and a light transmissive device in one embodiment;
FIG. 5 is a schematic view showing a part of a structure of a light transmissive device detecting system according to an embodiment;
FIG. 6a is a schematic diagram of a first light source according to an embodiment;
FIG. 6b is a schematic diagram of a second embodiment of a first light source;
FIG. 7 is a schematic diagram illustrating the operation of a light source module according to an embodiment.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, are intended to fall within the scope of the present invention.
Referring to fig. 1, an embodiment of the present invention provides a light transmissive device inspection system 1000, where the light transmissive device inspection system 1000 can inspect defects on the front, back and inside of a light transmissive device 11. The light-transmitting device 11 may be a device applicable to a screen, such as a color filter, a touch panel module, or a glass cover plate, or may be an optical element such as a lens.
The light transmissive device detecting system 1000 includes a tray 1, an imaging module 3, and a light source module 2. The light source assembly 2 provides light necessary for detection, the image pickup assembly 3 collects image information of the light transmissive device 11, and the tray 1 provides a space for placing the light transmissive device 11.
The tray 1 includes a planar carrying surface 10, the carrying surface 10 being for carrying the light transmissive device 11. The tray 1 is arranged in the irradiation direction of the light source assembly 2, so that the light source assembly 2 can project the light to the bearing surface 10 of the tray 1, and the camera assembly 3 can receive the light reflected by the light-transmitting device 11.
The light source assembly 2 includes a first light source 21 and a second light source 22, wherein the first light source 21 provides a first light beam perpendicular to the carrying surface 10, and the second light source 22 provides a second light beam inclined to the carrying surface 10, and both the first light beam and the second light beam can be projected onto the light transmissive device 11 and reflected. The image pickup device 3 receives the reflected light to form an image, and by analyzing the image, defects of the light transmissive device 11 can be detected.
Since the first light emitted from the first light source 21 is perpendicular to the carrying surface 10, a sufficient diffuse reflection is not easily generated on the light transmissive device 11, whereas the second light emitted from the second light source 22, which is inclined to the carrying surface 10, can generate a large amount of diffuse reflection on the light transmissive device 11. By adopting the second light source 22 in cooperation with the first light source 21, diffuse reflection occurring on the light transmissive device 11 is more, and further, micro cracks or internal defects on the surface of the light transmissive device 11 reflect more light to the image pickup assembly 3, so that internal and surface defects of the light transmissive device 11 are more easily revealed (similar to invisible surface scratches in daily life, can be seen obliquely aiming at lights).
In an embodiment, referring to fig. 2 and 3, a coating layer 12 is disposed on the carrying surface 10, the carrying surface 10 is made of silicon, the coating layer 12 is made of silicon nitride, and preferably Si 3N4 is used as the coating layer 12. In addition, the film coating is only one means for combining the silicon nitride with the bearing surface 10, the bearing surface 10 is made of silicon nitride, or a piece of silicon nitride wafer is independently arranged on the bearing surface 10, so that the effect can be achieved. By plating the black silicon nitride film with strong light absorption capability on the silicon bearing surface 10, the light emitted by the light source component 2 and transmitted through the light-transmitting device 11 can be absorbed, so that the light reflection and scattering interference are reduced, and the detection precision is increased.
In an embodiment, as shown in fig. 2 and 3, a plurality of protrusions 13 are disposed on the carrying surface 10, and two ends of the light-transmissive device 11 are respectively mounted on two adjacent protrusions 13, so that the light-transmissive device 11 and the carrying surface 10 have a first spacing distance 91. The light-transmissive member 11 may be mounted on the protrusions 13 in various manners, and the light-transmissive member 11 may be mounted between two waists of two adjacent triangles by providing the triangular protrusions 13, or may be mounted on the end surface of a cylinder by providing the cylindrical protrusions 13. The protrusions 13 are preferably provided in a "convex" shape, and the light transmissive device 11 is placed in the middle of the stepped structure. By providing a plurality of protrusions 13 on the carrying surface 10, it is advantageous that the carrying surface 10 absorbs the excessive light better. At the same time, the first separation distance 91 is set, and the carrying surface 10 is capable of performing secondary absorption (the light emitted from the light source assembly 2 passes through the light-transmissive device 11 but the carrying surface 10 is not absorbed, and the remaining light is reflected to the light-transmissive device 11 and then reflected back again). Further, the light transmissive device 11 is placed in a stepped configuration in the middle of the convex 13 in a "convex" shape, reducing interference of an external light source to reduce detection errors.
In one embodiment, referring to fig. 4, the carrying surface 10 and the light-transmissive device 11 are parallel, and the first spacing distance 91 is set to 0.1-1 mm. The first distance 91 is the length of the perpendicular line between the support surface 10 and the light transmissive device 11. The first separation distance 91 may be adjusted according to different detection conditions and different properties of the light transmissive device 11. When the thickness of the silicon nitride coating layer 12 of the carrying surface 10 is thinner, the light absorption capability of the silicon nitride coating layer 12 is weaker, and the first spacing distance 91 may be set to 0.7-1 mm, specifically, 0.7mm, 0.8mm, 0.9mm, 0.95mm, 1mm, etc., which is favorable for the silicon nitride coating layer 12 of the carrying surface 10 to absorb the light passing through the light-transmitting device 11 for multiple times, so as to achieve a better light absorption effect. When the thickness of the silicon nitride coating layer 12 of the bearing surface 10 is thicker, the light absorption capability of the silicon nitride coating layer 12 is stronger, and the first spacing distance 91 can be set to be 0.1 mm-0.4 mm, specifically can be 0.1mm, 0.2mm, 0.3mm or 0.4mm, so that the space of the tray 1 is saved, and the arrangement of pipeline detection is facilitated. When the thickness of the silicon nitride coating layer 12 of the bearing surface 10 is generally the same, the first spacing distance 91 is set to 0.4-0.7 mm, specifically, 0.44mm, 0.55mm, 0.66mm, etc., so as to achieve the purposes of saving space and having good light absorption effect. The first spacing distance 91 between the light-transmitting device 11 and the carrying surface 10 is set reasonably, so that the light absorption capacity of the carrying surface 10 is enhanced, the interference of external light is eliminated, and the detection error is reduced.
In one embodiment, referring to fig. 5, the first light source 21 and the second light source 22 are configured to be annular, which may be a ring, an elliptical ring or a square ring, preferably a ring, so that light is projected uniformly. Taking a circular ring as an example, the first light source 21 is arranged in an inner circular ring of the second light source 22. The image pickup assembly 3 is disposed on the inner ring of the first light source 21, away from one side of the tray 1, so that the image pickup assembly 3 can take an image of the light transmissive device 11 to be tested through the inner hole of the first light source 21. The structures of the first light source 21 and the second light source 22 are reasonably arranged, so that the light intensities of the first light and the second light can be effectively overlapped, and the range and the intensity of the light reaching the light-transmitting device 11 meet the detection requirement.
In one embodiment, referring to fig. 5 and 6a, the first light source 21 includes three light emitting portions, red, green and blue, for adjusting the color of the light emitted from the first light source 21. The three light emitting portions have different arrangement modes, when the arrangement modes are that the plurality of red light emitting portions 211, the green light emitting portion 212 and the blue light emitting portion 213 are sequentially arranged in a red, green and blue cycle, the three light emitting portions can adjust various colors, when the colors of the three light emitting portions are respectively adjusted to be red, green and blue, and the three light emitting portions are sequentially circulated, and the light color received by the light transmitting device 11 is white and is equivalent to a sunlight source. When only the red light emitting portion 211 of the three light emitting portions is operated, the red light can be adjusted. Similarly, the green and blue light can be modulated according to this principle. In addition to the three colors of white and RGB (red, green and blue), the light color of the first light source 21 may be adjusted to be a mixture of red and green when the red light emitting portion 211 and the green light emitting portion 212 are operated according to the color combination principle, and the light obtained in the light transmissive device 11 may be yellow. In summary, other colors of light may also be obtained according to this principle.
In addition, referring to fig. 6b, when the three light emitting portions of red, green and blue form one integrated light emitting portion 210, a plurality of integrated light emitting portions 210 are disposed on the annular first light source 21, so as to achieve the effect of color adjustment. By providing the above three light emitting portions on the first light source 21, pixel defects of the light transmissive device 11 in different colors can be detected. When the light transmissive device 11 is a filter, since the filter is capable of transmitting three kinds of light rays of red/green/blue, the filter properties in different colors can be detected, respectively.
In one embodiment, referring to fig. 7, the second light intersects the first light, and the second light is inclined at an angle of 30-85 ° with respect to the bearing surface 10. The inclination angle 93 can be adjusted according to the specific light source structure, the inclination angle 93 is smaller than 30 degrees, the larger the second light source 22 occupies, the inclination angle 93 is larger than 85 degrees, the diffuse reflection degree is low, and the effect of detecting the fine external defects or the internal defects is poor. By properly setting the magnitude of the inclination angle, diffuse reflection can be provided better on the surface of the light transmissive device 11.
In one embodiment, referring to fig. 7, the second distance 92 between the first light source 21 and the supporting surface 10 is 50-150 mm, and the second distance 92 is a distance perpendicular to the line segment between the first light source 21 and the supporting surface 10. When the second spacing distance 92 is less than 50mm, the second spacing distance 92 between the first light source 21 and the carrying surface 10 is too short, which is unfavorable for superposition of the first light source 21 and the second light of the second light source 22, and the irradiation range of the first light source 21 is too small, and when the second spacing distance 92 is more than 150mm, the second spacing distance 92 between the first light source 21 and the carrying surface 10 is too long, the first light is easy to disperse, and the intensity is reduced. The second interval distance 92 between the first light source 21 and the bearing surface 10 is reasonably set, so that the first light source 21 has a larger irradiation range while reducing the energy loss of the first light.
In one embodiment, referring to fig. 1, the camera assembly 3 includes a microscope 31 and a camera 32, the optical axis of the microscope 31 is perpendicular to the bearing surface 10, and the camera 32 is disposed on an eyepiece of the microscope 31. In addition, the image pickup assembly 3 may be disposed beside the light source assembly 2, wherein the camera 32 is still disposed on the eyepiece of the microscope 31, and the optical axis of the microscope 31 is inclined to the bearing surface 10, so that the observation effect can be achieved. The camera 32 is used in a variety of devices, such as video cameras, still cameras, and the like. Through the cooperation of microscope 31 and camera 32, enlarge the defect and with the form of defect conversion image to the staff detects the work of being convenient for, reduces the mistake, increases the precision of detecting.
In one embodiment, referring to fig. 1, the light-transmissive device detecting system 1000 further includes a display 4 and a control device 5, where the display 4 is electrically connected to the image capturing assembly 3 and is used for displaying an image captured by the image capturing assembly 3, and the control device 5 is used for controlling the light source assembly 2 and/or the image capturing assembly 3 to move relative to the tray 1. The display 4 may be a television screen, a computer screen, or a projection-like device capable of visualization. The control device 5 may be a device such as a computer or PLC that can issue instructions to the imaging module 3 and the light source module 2. The display 4 is arranged to display the detected image, which is favorable for systematic detection and increases the detection efficiency, and the control device 5 is arranged to adjust the distance from the light source component 2 and the image pickup component 3 to the bearing surface 10 under different conditions (different conditions of external light, different materials and sizes of the light-transmitting device 11, etc.), thereby enhancing the adaptability of the system.
In one embodiment, the detection method comprises the steps of placing the light-transmitting device 11 to be detected on the tray 1 designed by us, and controlling the light source assembly 2 and the image pickup assembly 3 to move to a proper position through the control device 5, so that the second spacing distance 92 is about 100 mm. The first light source 21 is then adjusted to the red, green and blue cycle color (i.e. mixed to a white light source) and then the second light source 22 is turned on and the light source intensity is adjusted to 1800-2000Lux. Finally, a fixed-focus photographing is performed, the focal point of the camera is fixed in the light-transmitting device 11, photographing is performed to observe whether or not there is a flaw, and then the objective lens of the microscope 31 is moved up and down to confirm whether or not there is a missing flaw in the light-transmitting device 11. Thus, the surface information of the light transmissive device 11 can be collected, and the middle and lower surface information of the light transmissive device 11 can be collected (light passes through the light transmissive device 11, and the light can be combined with the background of the tray 1, so that not only the surface of the light transmissive device 11 but also the internal uniformity of the light transmissive device 11 can be seen, and the photographed image can be exported to the display 4 to visually observe whether the light transmissive device 11 has flaws.
The above disclosure is only a preferred embodiment of the present invention, and it should be understood that the scope of the invention is not limited thereto, and those skilled in the art will appreciate that all or part of the procedures described above can be performed according to the equivalent modifications of the claims, and still fall within the scope of the present invention.

Claims (9)

1. The utility model provides a light-transmitting device detecting system, its characterized in that includes tray, subassembly and light source subassembly make a video recording, the tray is including being planar loading surface, be equipped with a plurality of archs on the loading surface, the both ends of light-transmitting device are carried respectively on two adjacent on the arch, so that light-transmitting device with the loading surface has first interval distance, the arch is "protruding" font and forms the step structure, light-transmitting device sets up on the step structure, the light source subassembly includes first light source and second light source, first light source orientation the loading surface is the first light of perpendicular, the second light source orientation the loading surface is the second light of slope, first light with the second light is in on the light-transmitting device reflection, the subassembly of making a video recording is received light that light-transmitting device reflected forms the image, detects according to the image light-transmitting device's defect.
2. The light transmissive device inspection system of claim 1, wherein the bearing surface is provided with a coating layer, the bearing surface is made of silicon, and the coating layer is made of silicon nitride.
3. The light transmissive device detecting system according to claim 1, wherein the first separation distance is 0.1 to 1mm.
4. The light transmissive device detection system of claim 1, wherein the first light source and the second light source are both annular, the second light source encloses a first space for receiving the first light source, the first light source encloses a second space, and the imaging assembly captures an image of the light transmissive device through the second space.
5. The light transmissive device detecting system according to claim 4, wherein the first light source includes three light emitting portions of red, green and blue for adjusting the color of light emitted from the first light source.
6. The light transmissive device detecting system according to claim 4, wherein the second light ray intersects the first light ray, and the second light ray is inclined at an angle of 30 ° to 85 ° with respect to the bearing surface.
7. The light transmissive device detecting system according to claim 1, wherein the first light source is spaced apart from the carrying surface by a second spacing distance of 50 to 150mm.
8. The light transmissive device testing system of claim 1, wherein the camera assembly comprises a microscope having an optical axis perpendicular to the bearing surface and a camera disposed on an eyepiece of the microscope.
9. The light transmissive device inspection system of claim 1, further comprising a display electrically coupled to the camera assembly for displaying images captured by the camera assembly and a control device for controlling movement of the light source assembly and/or the camera assembly relative to the tray.
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