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CN111323480B - A handheld auto-focus laser ultrasonic nondestructive testing system - Google Patents

A handheld auto-focus laser ultrasonic nondestructive testing system Download PDF

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CN111323480B
CN111323480B CN202010107939.3A CN202010107939A CN111323480B CN 111323480 B CN111323480 B CN 111323480B CN 202010107939 A CN202010107939 A CN 202010107939A CN 111323480 B CN111323480 B CN 111323480B
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lens
convex lens
light
beam splitter
nondestructive testing
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CN111323480A (en
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丁雷
颜学俊
卢明辉
鲁强兵
钱斯文
钱利强
耿开胜
徐晓东
陈延峰
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Nanjing Huaqin Photoacoustic Technology Co ltd
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Nanjing Guangsheng Superstructure Materials Research Institute Co ltd
Nanjing University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/023Solids

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

The invention provides a handheld automatic focusing laser ultrasonic nondestructive testing system, in particular to the field of laser ultrasonic nondestructive testing, excitation light is led into an optical fiber collimator, the optical fiber collimator corrects a beam divergence angle to obtain a beam of parallel light, and the parallel light is divided into two beams by a beam splitter; the parallel light can be expanded by a beam expander consisting of a concave lens and a first convex lens, then focused by a second convex lens controlled by an electric control motor through a light outlet window to form spot light on a workpiece to be detected, scattered and then sequentially reflected by the second convex lens, the first convex lens and the concave lens, passed through a sleeve lens by the beam splitter, and captured by a high-speed CCD camera arranged on the sleeve lens to form an image; the coordinate tracking camera can transmit the updated focusing light spot position to the control and signal processing module; and finally reconstructing the captured data by a high-performance computer to obtain a test result. The invention can improve the detection efficiency and is more humanized in detection.

Description

一种手持式自动对焦激光超声无损检测系统A handheld auto-focus laser ultrasonic nondestructive testing system

技术领域Technical Field

本发明属于激光超声无损检领域,具体涉及一种手持式自动对焦激光超声无损检测系统。The invention belongs to the field of laser ultrasonic nondestructive testing, and in particular relates to a handheld automatic focusing laser ultrasonic nondestructive testing system.

背景技术Background Art

无损检测技术(NDT)指在不损坏试件的前提下,以物理或化学方法为手段,借助先进的技术和设备器材,对试件表面及内部结构、性质、状态等性能参数进行检测和测试的方法。目前常规的检测方法主要包括:1、目视法。2、断裂疲劳拉伸试验。3、X射线检测以及4、超声检测这四类方法。Nondestructive testing technology (NDT) refers to a method of detecting and testing the performance parameters of the surface and internal structure, properties, state, etc. of a specimen by means of physical or chemical methods, with the help of advanced technology and equipment without damaging the specimen. At present, the conventional detection methods mainly include: 1. Visual method. 2. Fracture fatigue tensile test. 3. X-ray detection and 4. Ultrasonic detection.

目视法虽然是指人工观察工件表面的缺陷裂纹情况,该方法虽然可以看到表面一些较大(相对于激光超声而言)的裂纹,但是无法获取工件内部的缺陷。而且获取的信息也比较单一,无法对工件的应力应变等物理特性进行预判。断裂疲劳拉伸试验顾名思义是一种破坏性实验,对于一些“贵重”的工件,无法满足无损的要求。X射线检测虽然可以看到工件内部的一些裂纹情况,但其达不到激光超声的检测精度,对于一些微小的裂纹孔洞不敏感。与此同时,X射线具有一定的辐射性,难以实现在线集成。超声法是目前无损检测的主流方法,其基本思想是通过超声发射超声接收。当超声波在异性介质间传播时产生反射,透射,散射等现象,人们对超声波与物质相互作用后的信号进行分析处理,最终提取出缺陷的相关特征。超声波检测具有可以检测不同种类材料的缺陷,对缺陷的深度容忍度高,可以准确定位缺陷的位置,检测灵敏度高,且该技术使用方便,检测速度快,对人体无害,便于在故障场地实施等特点。然而该技术为接触式检测,无法在一些极端条件下应用(比如,高温,高压,有毒等恶劣环境)。Although the visual method refers to the manual observation of the defects and cracks on the surface of the workpiece, this method can see some larger cracks on the surface (relative to laser ultrasound), but it cannot obtain the defects inside the workpiece. Moreover, the information obtained is relatively single, and it is impossible to predict the physical properties of the workpiece, such as stress and strain. As the name suggests, the fracture fatigue tensile test is a destructive experiment. For some "precious" workpieces, it cannot meet the requirements of non-destructive testing. Although X-ray detection can see some cracks inside the workpiece, it cannot reach the detection accuracy of laser ultrasound and is not sensitive to some tiny crack holes. At the same time, X-rays have certain radiation and are difficult to achieve online integration. Ultrasonic method is the mainstream method of non-destructive testing at present. Its basic idea is to transmit and receive ultrasound through ultrasound. When ultrasound propagates between heterogeneous media, it produces reflection, transmission, scattering and other phenomena. People analyze and process the signals after the interaction between ultrasound and matter, and finally extract the relevant characteristics of the defects. Ultrasonic testing has the characteristics of being able to detect defects of different types of materials, high tolerance for the depth of defects, accurate positioning of defects, high detection sensitivity, and easy use of the technology, fast detection speed, harmless to the human body, and easy to implement at the fault site. However, this technology is a contact detection and cannot be applied under some extreme conditions (for example, high temperature, high pressure, toxic and other harsh environments).

激光超声作为一种非接触式的无损检测技术越来越受到人们关注,其基本思路是通过脉冲激光激励产生超声信号再通过测振仪或换能器来接收超声信号,该方法不必接触试件表面即可实现对被测工件进行大面积地、快速地扫描检测,其检测的信号无论在时间上还是在空间上都具有很高的分辨率。但该方法都需要额外的配置一套扫描振镜系统,而且扫描路径比较单一,此外若对于一些复杂工件,扫描一侧后如果再想扫描其它面就不得不将工件翻转,平移等,这样一来扫描效率会大大降低,而且整个实验环境(定位,设备的稳定性等)也会有微小的变化。Laser ultrasound, as a non-contact non-destructive testing technology, is gaining more and more attention. Its basic idea is to generate ultrasonic signals through pulsed laser excitation and then receive ultrasonic signals through a vibrometer or transducer. This method can achieve large-area and rapid scanning and testing of the workpiece without contacting the surface of the test piece, and the detected signal has high resolution both in time and space. However, this method requires an additional set of scanning galvanometer systems, and the scanning path is relatively simple. In addition, for some complex workpieces, if you want to scan other surfaces after scanning one side, you have to flip and translate the workpiece, which will greatly reduce the scanning efficiency, and the entire experimental environment (positioning, equipment stability, etc.) will also have slight changes.

发明内容Summary of the invention

针对上述不足,本发明的目的是提供一种手持式自动对焦激光超声无损检测系统,该系统除了能够对在高温高压等环境中的工件进行实时在线监测,而且由于其手持式激光探头的便捷性,可大大提高检测效率,更加人性化。In view of the above-mentioned shortcomings, the purpose of the present invention is to provide a handheld auto-focus laser ultrasonic non-destructive testing system, which can not only perform real-time online monitoring of workpieces in high temperature and high pressure environments, but also greatly improve the detection efficiency and be more user-friendly due to the convenience of its handheld laser probe.

本发明提供了如下的技术方案:The present invention provides the following technical solutions:

一种手持式自动对焦激光超声无损检测系统,包括激光超声无损检测探头、纳秒脉冲激光器、高速信号采集卡、光电探测器、光纤耦合器、高性能电脑软件、多模光纤、坐标跟踪摄像头和测振仪;A handheld auto-focus laser ultrasonic nondestructive testing system, comprising a laser ultrasonic nondestructive testing probe, a nanosecond pulse laser, a high-speed signal acquisition card, a photoelectric detector, a fiber coupler, high-performance computer software, a multimode optical fiber, a coordinate tracking camera and a vibrometer;

激光超声无损检测探头包括壳体、以及集成在壳体里的可变焦长焦距组合透镜、光电探测器、分束镜、电控马达、高速CCD相机、光纤准直器、双凸透镜、套筒透镜、丝杠;可变焦长焦距组合透镜包括凹透镜、第一凸透镜和第二凸透镜;The laser ultrasonic nondestructive testing probe includes a shell, and a variable focus long focal length combined lens, a photoelectric detector, a beam splitter, an electronically controlled motor, a high-speed CCD camera, a fiber collimator, a double convex lens, a sleeve lens, and a lead screw integrated in the shell; the variable focus long focal length combined lens includes a concave lens, a first convex lens, and a second convex lens;

其光电探测器和高速CCD相机位于分束镜两侧,且光电探测器和分束镜之间设有双凸透镜,高速CCD相机和分束镜之间设有套筒透镜;分束镜的两端分别设有光纤准直器和依次设置的凹透镜、第一凸透镜和第二凸透镜;第二凸透镜的外侧在壳体上设有出光窗口;The photoelectric detector and the high-speed CCD camera are located on both sides of the beam splitter, and a double convex lens is arranged between the photoelectric detector and the beam splitter, and a sleeve lens is arranged between the high-speed CCD camera and the beam splitter; both ends of the beam splitter are respectively provided with a fiber collimator and a concave lens, a first convex lens and a second convex lens arranged in sequence; the outer side of the second convex lens is provided with a light exit window on the shell;

激光超声无损检测探头与纳秒脉冲激光器通过多模光纤连接,多模光纤两端分别连接光纤准直器和光纤耦合器;纳秒脉冲激光器的激励光通过光纤耦合器耦合到熔石英光纤,将激励光导入至光纤准直器中,光纤准直器对光束发散角进行修正得到一束平行光,再通过分束镜将平行光分为两束;The laser ultrasonic nondestructive testing probe is connected to the nanosecond pulse laser through a multimode optical fiber, and the two ends of the multimode optical fiber are connected to a fiber collimator and a fiber coupler respectively; the excitation light of the nanosecond pulse laser is coupled to the fused silica optical fiber through the fiber coupler, and the excitation light is introduced into the fiber collimator. The fiber collimator corrects the divergence angle of the light beam to obtain a beam of parallel light, and then the parallel light is divided into two beams by a beam splitter;

其中,通过分束镜的部分平行光,经双凸透镜聚焦后被光电探测器接收、用于信号进行触发和用于单个脉冲激光能量的校准;Among them, part of the parallel light passing through the beam splitter is focused by the double convex lens and received by the photodetector, which is used for signal triggering and for calibration of single pulse laser energy;

通过分束镜的另一部分平行光,可经过凹透镜与第一凸透镜组成的扩束镜对光斑进行扩束,再通过电控马达控制的第二凸透镜,第二凸透镜可在传动导轨中前后平移进而实现对焦点位置的控制,再通过出光窗口在待检测的工件上聚焦形成点光斑,点光斑被散射后依次经过第二凸透镜、第一凸透镜、凹透镜再被分束镜反射经过套筒透镜,并被安装在套筒透镜上的高速CCD相机捕捉成像;Another part of the parallel light passing through the beam splitter can be expanded by a beam expander composed of a concave lens and a first convex lens, and then by a second convex lens controlled by an electronic motor, the second convex lens can be translated back and forth in the transmission guide rail to control the focus position, and then focused on the workpiece to be inspected through the light exit window to form a point light spot. After being scattered, the point light spot passes through the second convex lens, the first convex lens, and the concave lens in turn, and then is reflected by the beam splitter through the sleeve lens, and is captured by a high-speed CCD camera installed on the sleeve lens.

其中,高速CCD相机可将捕捉到的聚焦光斑大小反馈给控制与信号处理模块,控制与信号处理模块发送命令至电控马达;坐标跟踪摄像头可将更新的聚焦光斑位置传送至控制与信号处理模块;最终通过高性能电脑将捕获的数据重构获得测试结果。Among them, the high-speed CCD camera can feed back the captured focus spot size to the control and signal processing module, and the control and signal processing module sends commands to the electronic motor; the coordinate tracking camera can transmit the updated focus spot position to the control and signal processing module; finally, the captured data is reconstructed by a high-performance computer to obtain the test results.

优选的,第二凸透镜的外围设有传动导轨,传动导轨侧部连接有传动轮,传动轮的中心贯穿有丝杆,丝杠的端部与电控马达的驱动轴连接;传动轮与传动导轨之间的键合方式为精密的齿轮咬合,其传动误差小于300微米。Preferably, a transmission guide rail is provided on the periphery of the second convex lens, a transmission wheel is connected to the side of the transmission guide rail, a lead screw passes through the center of the transmission wheel, and the end of the lead screw is connected to the driving shaft of the electronically controlled motor; the bonding method between the transmission wheel and the transmission guide rail is a precise gear meshing, and the transmission error is less than 300 microns.

优选的,高速信号采集卡带宽达数百MHz,采样率达GSa/S,可高保真的还原原始信号。Preferably, the high-speed signal acquisition card has a bandwidth of hundreds of MHz and a sampling rate of GSa/S, which can restore the original signal with high fidelity.

优选的,高性能电脑软件为MATLAB,所用的图像可视化算法原理基于激发与接收超声波之间的互易性特点。测振仪为双玻混合干涉仪,灵敏度优于10纳米。Preferably, the high-performance computer software is MATLAB, and the principle of the image visualization algorithm used is based on the reciprocity between the excitation and reception of ultrasonic waves. The vibrometer is a double-glass hybrid interferometer with a sensitivity better than 10 nanometers.

优选的,多模光纤为熔石英光纤,其纤径为200微米,两端连接方式为SMA接口。Preferably, the multimode optical fiber is a fused silica optical fiber with a fiber diameter of 200 microns and a SMA interface at both ends.

优选的,根据在扫描过程中手实际上下抖动的幅度大小,传动导轨前后移动的最大距离为±20mm。Preferably, according to the actual amplitude of the hand shaking up and down during the scanning process, the maximum distance that the transmission guide rail moves back and forth is ±20mm.

优选的,坐标跟踪摄像头被安装在坚固稳定的三脚架上,以防止其晃动等不稳定因素对激光聚焦光斑坐标带来的误差。Preferably, the coordinate tracking camera is mounted on a sturdy and stable tripod to prevent the coordinates of the laser focus spot from being distorted by unstable factors such as shaking.

优选的,出光窗口在点光源激发时窗口内安装有一高透射率的平面镜用于保护外壳内部的光学元件,在用线光源激发时只需将镜头换成圆形平凸柱面透镜即可,操作非常便捷。Preferably, when the light exit window is excited by a point light source, a high-transmittance plane mirror is installed in the window to protect the optical elements inside the housing. When excited by a line light source, it is only necessary to replace the lens with a circular plano-convex cylindrical lens, which is very convenient to operate.

本发明的有益效果:Beneficial effects of the present invention:

(1)本发明涉及到“光-声-光”即通过光激发产生超声波,再通过“光”探测超声波检测技术,故可对在高温高压下的工件进行无损检测。(1) The present invention relates to a "light-acoustic-light" detection technology that generates ultrasonic waves through light excitation and then detects ultrasonic waves through "light". Therefore, non-destructive detection of workpieces under high temperature and high pressure can be performed.

(2)本发明不需要振镜扫描系统,只需手持激光激发探头即可对工件进行全方位多角度扫描,操作便捷。(2) The present invention does not require a galvanometer scanning system, and only requires a handheld laser excitation probe to perform all-round and multi-angle scanning of the workpiece, which is easy to operate.

(3)本发明扫描过程中由于手的抖动所带来的焦斑偏移通过高速CCD相机和控制马达组成的反馈修正电路实时进行补偿,使得实验结果更加准确。(3) In the present invention, the focus deviation caused by hand shaking during the scanning process is compensated in real time by a feedback correction circuit composed of a high-speed CCD camera and a control motor, making the experimental results more accurate.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

附图用来提供对本发明的进一步理解,并且构成说明书的一部分,与本发明的实施例一起用于解释本发明,并不构成对本发明的限制。在附图中:The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

图1为本发明的整体系统示意图;FIG1 is a schematic diagram of the overall system of the present invention;

图2为本发明激光超声无损检测探头结构示意图;FIG2 is a schematic diagram of the structure of a laser ultrasonic nondestructive testing probe according to the present invention;

图3为本发明结构框图;Fig. 3 is a structural block diagram of the present invention;

附图标记:1、纳秒激光器;2、光纤耦合器;3、熔石英多模光纤;4、激光超声无损检测探头;5、工件;6、滤光片;7、测振仪;8、高速采集卡;9、坐标跟踪摄像头;10、三角支架;11、高性能电脑;12、激光器模块;13、坐标跟踪模块;14、手持探头模块;15、探测模块;16、控制信号处理模块;17、外壳;18、光纤准直器;19、双凸透镜;20、光电探测器;21、分束镜;22、套筒透镜;23、高速CCD相机;24、电控马达;25、丝杠;26、凹透镜;27、第一凸透镜;28、传动轮;29、传动导轨;30、第二凸透镜;31、出光窗口;32、圆形平凸柱面透镜。Figure numerals: 1. nanosecond laser; 2. fiber coupler; 3. fused silica multimode optical fiber; 4. laser ultrasonic nondestructive testing probe; 5. workpiece; 6. filter; 7. vibrometer; 8. high-speed acquisition card; 9. coordinate tracking camera; 10. tripod; 11. high-performance computer; 12. laser module; 13. coordinate tracking module; 14. handheld probe module; 15. detection module; 16. control signal processing module; 17. housing; 18. fiber collimator; 19. double convex lens; 20. photodetector; 21. beam splitter; 22. sleeve lens; 23. high-speed CCD camera; 24. electric control motor; 25. lead screw; 26. concave lens; 27. first convex lens; 28. transmission wheel; 29. transmission guide rail; 30. second convex lens; 31. light exit window; 32. circular plano-convex cylindrical lens.

具体实施方式DETAILED DESCRIPTION

实例例1:Example 1:

参见本申请附图1和图2,本装置系统包括纳秒激光器1、光纤耦合器2、熔石英多模光纤3、激光超声无损检测探头4、工件5、滤光片6、测振仪7、高速采集卡8、坐标跟踪摄像头9、三角支架10、高性能电脑11;纳秒脉冲激光器脉冲1脉冲宽度为8ns,单脉冲能量小于5mJ,重复频率小于50Hz。熔石英多模光纤3两端为SMA接头分别与光纤耦合器2和光纤准直器18相连。激光超声无损检测探头4后端有三根导线,其中连接高速CCD相机23和电控马达24的两根导线与高性能电脑11相连。另外一根导线连接光电探测器20与高速采集卡8相连用于触发信号。坐标跟踪摄像头9固定于三角支架上。测振仪7正前方放置一532nm滤光片6,防止纳秒脉冲激光器脉冲1中的激励光漏出进入到测振仪7中,从而对测量信号造成干扰及对测振仪7本身造成损伤;Referring to Figures 1 and 2 of the present application, the device system includes a nanosecond laser 1, a fiber coupler 2, a fused silica multimode optical fiber 3, a laser ultrasonic nondestructive testing probe 4, a workpiece 5, a filter 6, a vibrometer 7, a high-speed acquisition card 8, a coordinate tracking camera 9, a tripod 10, and a high-performance computer 11; the nanosecond pulse laser pulse 1 has a pulse width of 8ns, a single pulse energy of less than 5mJ, and a repetition frequency of less than 50Hz. The two ends of the fused silica multimode optical fiber 3 are SMA connectors connected to the fiber coupler 2 and the fiber collimator 18 respectively. There are three wires at the rear end of the laser ultrasonic nondestructive testing probe 4, of which two wires connected to the high-speed CCD camera 23 and the electric control motor 24 are connected to the high-performance computer 11. Another wire connects the photodetector 20 to the high-speed acquisition card 8 for triggering the signal. The coordinate tracking camera 9 is fixed on the tripod. A 532nm filter 6 is placed in front of the vibrometer 7 to prevent the excitation light in the nanosecond pulse laser pulse 1 from leaking into the vibrometer 7, thereby interfering with the measurement signal and causing damage to the vibrometer 7 itself;

系统工作时,纳秒脉冲激光器1发出的激励光经过光纤耦合器2耦合到熔石英多模光纤3中,再将其传输到激光超声无损检测探头4将光斑聚焦到待检测的工件5上,由于纳秒脉冲与工件5表面物质作用时间非常短,此时在工件5的表面局部地方会受热膨胀,局部温度来不及扩散到周围,会产生一个温度梯度,根据应力平衡原理进而会产生超声波。该超声波主要包含声表面波、纵波、横波这三种不同模式的波。超声波在工件5表面及其内部传播时会引起其表面微小的振动,该振动可被测振仪7感应到,并将振动信号转化为电信号同步传输至高速信号采集卡8中并将信号传输至高性能高性能电脑11中。同时,坐标跟踪摄像头9实时的记录激励光斑的位置,内置于激光超声无损检测探头4内的自动对焦系统会实时的根据光斑的大小进行自动调焦以确保聚焦光斑在工件5上。并传输至高性能高性能电脑11中,最后高性能高性能电脑11根据可视化算法对数据及时处理得到三维动态图像,以及判定工件5内部及表面缺陷的位置及大小并给出详细的分析报告。When the system is working, the excitation light emitted by the nanosecond pulse laser 1 is coupled to the fused silica multimode optical fiber 3 through the fiber coupler 2, and then transmitted to the laser ultrasonic nondestructive testing probe 4 to focus the light spot on the workpiece 5 to be tested. Since the nanosecond pulse and the surface material of the workpiece 5 have a very short action time, the local area on the surface of the workpiece 5 will be heated and expanded, and the local temperature will not have time to diffuse to the surroundings, which will produce a temperature gradient, and then generate ultrasonic waves according to the stress balance principle. The ultrasonic wave mainly includes three different modes of waves: surface acoustic wave, longitudinal wave, and transverse wave. When the ultrasonic wave propagates on the surface and inside of the workpiece 5, it will cause a tiny vibration on its surface, which can be sensed by the vibration meter 7, and the vibration signal is converted into an electrical signal and synchronously transmitted to the high-speed signal acquisition card 8 and the signal is transmitted to the high-performance computer 11. At the same time, the coordinate tracking camera 9 records the position of the excitation light spot in real time, and the automatic focusing system built into the laser ultrasonic nondestructive testing probe 4 will automatically adjust the focus according to the size of the light spot in real time to ensure that the focused light spot is on the workpiece 5. And transmit it to the high-performance high-performance computer 11. Finally, the high-performance high-performance computer 11 processes the data in time according to the visualization algorithm to obtain a three-dimensional dynamic image, and determines the position and size of the internal and surface defects of the workpiece 5 and gives a detailed analysis report.

实施例2:Embodiment 2:

参见本申请附图3,一种手持式自动对焦激光超声无损检测系统包括:激光器模块12、坐标跟踪模块13、手持探头模块14、控制与信号处理模块16和探测模块15。其中激光器模块12功能为提供稳定的纳米脉冲光源,坐标跟踪模块13功能为实时最终激励光斑的位置、手持探头模块14功能为关联坐标跟踪模块13和控制与信号处理模块16,对光斑进行自动聚焦并进行信号触发、控制与信号处理模块16功能为控制电控马达24并对测振仪7和光电探测器反馈的信号进行高速采集,探测模块15功能为捕捉工件5表面微小振动并将机械信号转化为电信号。Referring to Figure 3 of the present application, a handheld auto-focus laser ultrasonic non-destructive testing system includes: a laser module 12, a coordinate tracking module 13, a handheld probe module 14, a control and signal processing module 16 and a detection module 15. The function of the laser module 12 is to provide a stable nano-pulse light source, the function of the coordinate tracking module 13 is to determine the position of the final excitation light spot in real time, the function of the handheld probe module 14 is to associate the coordinate tracking module 13 and the control and signal processing module 16, automatically focus the light spot and trigger the signal, the function of the control and signal processing module 16 is to control the electric control motor 24 and collect the signals fed back by the vibrometer 7 and the photoelectric detector at high speed, and the function of the detection module 15 is to capture the tiny vibrations on the surface of the workpiece 5 and convert the mechanical signal into an electrical signal.

实施例3:Embodiment 3:

参见本申请图1和图2,激光超声无损检测探头包括外壳17、以及集成在壳体里的可变焦长焦距组合透镜、光电探测器20、分束镜21、电控马达24、高速CCD相机23、光纤准直器18、双凸透镜19、套筒透镜22、丝杠25、传动轮28以及传动导轨29。1 and 2 of the present application, the laser ultrasonic nondestructive testing probe includes a housing 17, and a variable focus long focal length combination lens integrated in the housing, a photodetector 20, a beam splitter 21, an electronically controlled motor 24, a high-speed CCD camera 23, a fiber collimator 18, a biconvex lens 19, a sleeve lens 22, a lead screw 25, a transmission wheel 28 and a transmission guide rail 29.

可变焦长焦距组合透镜包括凹透镜26、第一凸透镜27、第二凸透镜30。The variable focal length combined lens includes a concave lens 26 , a first convex lens 27 , and a second convex lens 30 .

纳秒脉冲激光器发1出的激励光通过光纤耦合器2耦合到熔石英多模光纤3,将激励光导入至光纤准直器18中,光纤准直器18对光束发散角进行修正得到近似于一束平行光,再通过分束镜21将平行光分为两束,一部分反射光经双凸透镜19聚焦后被光电探测器20接收一方面用于对信号进行触发,另一方面用于单个脉冲激光能量的校准。The excitation light emitted by the nanosecond pulse laser 1 is coupled to the fused silica multimode optical fiber 3 through the optical fiber coupler 2, and the excitation light is introduced into the optical fiber collimator 18. The optical fiber collimator 18 corrects the divergence angle of the light beam to obtain a beam of parallel light, and then the parallel light is divided into two beams by the beam splitter 21. A part of the reflected light is focused by the double convex lens 19 and received by the photodetector 20. On the one hand, it is used to trigger the signal, and on the other hand, it is used to calibrate the energy of a single pulse laser.

另一部分透射光先经过凹透镜26与第一凸透镜27组成的扩束镜对光斑进行扩束,再通过电控马达24控制的第二凸透镜30,第二凸透镜30可在传动导轨29中前后平移进而实现对焦点位置的控制,再通过出光窗口31在待检测的工件上聚焦形成点光斑,点光斑被散射后依次经过第二凸透镜30、第一凸透镜27、凹透镜26再被分束镜21反射经过套筒透镜22,并被安装在套筒透镜上的高速CCD相机23捕捉成像。The other part of the transmitted light first passes through a beam expander composed of a concave lens 26 and a first convex lens 27 to expand the light spot, and then passes through a second convex lens 30 controlled by an electronic motor 24. The second convex lens 30 can be translated back and forth in a transmission guide rail 29 to control the focus position, and then is focused on the workpiece to be inspected through a light exit window 31 to form a point light spot. After being scattered, the point light spot passes through the second convex lens 30, the first convex lens 27, and the concave lens 26 in turn, and is then reflected by the beam splitter 21 through the sleeve lens 22, and is captured by a high-speed CCD camera 23 installed on the sleeve lens.

高速CCD相机23实时将捕捉到的聚焦光斑大小反馈给控制与信号处理模块16,控制与信号处理16模块立即发送命令到电控马24达,对其做出左旋或右旋的命令控制,进而电控马达24带动丝杠25旋转从何带动传动导轨向前或者向后平移。与此同时,坐标跟踪摄像头9也在不断的跟新聚焦光斑的位置并将其实时的记录下来反馈给控制与信号处理模块16,最终通过特定的算法将捕获的数据快速重构以获取超声波在工件表面及其体内传播的动态变化图像及工件表面及体内缺陷位置及大小情况。The high-speed CCD camera 23 feeds back the captured focus spot size to the control and signal processing module 16 in real time, and the control and signal processing module 16 immediately sends a command to the electric motor 24 to make a left or right rotation command control, and then the electric motor 24 drives the lead screw 25 to rotate and drive the transmission guide rail to move forward or backward. At the same time, the coordinate tracking camera 9 is also constantly updating the position of the focus spot and recording it in real time to feed back to the control and signal processing module 16, and finally the captured data is quickly reconstructed through a specific algorithm to obtain the dynamic change image of the ultrasonic wave propagating on the surface and inside the workpiece and the position and size of the defects on the surface and inside the workpiece.

高速信号采集卡带宽达数百MHz,采样率达GSa/S,可高保真的还原原始信号。The high-speed signal acquisition card has a bandwidth of hundreds of MHz and a sampling rate of GSa/S, which can restore the original signal with high fidelity.

高性能电脑软件为MATLAB,所用的图像可视化算法原理基于激发与接收超声波之间的互易性特点。测振仪为双玻混合干涉仪,灵敏度优于10纳米。The high-performance computer software is MATLAB, and the image visualization algorithm used is based on the reciprocity between the excitation and reception of ultrasonic waves. The vibrometer is a double-glass hybrid interferometer with a sensitivity better than 10 nanometers.

多模光纤为熔石英光纤,其纤径为200微米,两端连接方式为SMA接口。The multimode optical fiber is a fused silica optical fiber with a fiber diameter of 200 microns and SMA interfaces at both ends.

根据在扫描过程中手实际上下抖动的幅度大小,传动导轨前后移动的最大距离为±20mm。According to the actual amplitude of the hand shaking up and down during the scanning process, the maximum distance the transmission guide rail moves forward and backward is ±20mm.

传动轮与传动导轨之间的键合方式为精密的齿轮咬合,其传动误差小于300微米。The keying mode between the transmission wheel and the transmission guide rail is a precise gear meshing, and the transmission error is less than 300 microns.

坐标跟踪摄像头被安装在坚固稳定的三脚架上,以防止其晃动等不稳定因素对激光聚焦光斑坐标带来的误差。The coordinate tracking camera is installed on a sturdy and stable tripod to prevent the coordinates of the laser focus spot from being affected by unstable factors such as shaking.

出光窗口在点光源激发时窗口内安装有一高透射率的平面镜用于保护外壳内部的光学元件,在用线光源激发时只需将镜头换成圆形平凸柱面透镜即可,操作非常便捷。When the light exit window is excited by a point light source, a high-transmittance plane mirror is installed in the window to protect the optical elements inside the shell. When excited by a line light source, it is only necessary to replace the lens with a circular plano-convex cylindrical lens, which is very convenient to operate.

实施步骤如下:The implementation steps are as follows:

S1、按照图1组装各个设备,打开各设备,调整测振仪7的信号使其达到最强;S1. Assemble each device according to FIG. 1 , turn on each device, and adjust the signal of the vibration meter 7 to reach the strongest;

S2、选择所需的镜头(点源激发还是线源激发),按照实验所需的扫描路径扫描;S2. Select the required lens (point source excitation or line source excitation) and scan according to the scanning path required by the experiment;

S3、扫描结束后对数据进行三维动态可视化重构并获取详细检测报告;S3. After scanning, the data is reconstructed into three-dimensional dynamic visualization and a detailed inspection report is obtained;

S4、实验结束后依次关闭各个实验设备。S4. After the experiment, turn off each experimental device in turn.

以上仅为本发明的优选实施例而已,并不用于限制本发明,尽管参照前述实施例对本发明进行了详细的说明,对于本领域的技术人员来说,其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims (5)

1.一种手持式自动对焦激光超声无损检测系统,其特征在于:包括激光超声无损检测探头、纳秒脉冲激光器、高速信号采集卡、光电探测器、光纤耦合器、高性能电脑软件、多模光纤、坐标跟踪摄像头和测振仪;1. A handheld auto-focus laser ultrasonic nondestructive testing system, characterized by: comprising a laser ultrasonic nondestructive testing probe, a nanosecond pulse laser, a high-speed signal acquisition card, a photodetector, a fiber coupler, high-performance computer software, a multimode optical fiber, a coordinate tracking camera and a vibrometer; 激光超声无损检测探头包括壳体、以及集成在壳体里的可变焦长焦距组合透镜、光电探测器、分束镜、电控马达、高速CCD相机、光纤准直器、双凸透镜、套筒透镜、丝杠;可变焦长焦距组合透镜包括凹透镜、第一凸透镜和第二凸透镜;The laser ultrasonic nondestructive testing probe includes a shell, and a variable focus long focal length combined lens, a photoelectric detector, a beam splitter, an electronically controlled motor, a high-speed CCD camera, a fiber collimator, a double convex lens, a sleeve lens, and a lead screw integrated in the shell; the variable focus long focal length combined lens includes a concave lens, a first convex lens, and a second convex lens; 其光电探测器和高速CCD相机位于分束镜两侧,且光电探测器和分束镜之间设有双凸透镜,高速CCD相机和分束镜之间设有套筒透镜;分束镜的两端分别设有光纤准直器和依次设置的凹透镜、第一凸透镜和第二凸透镜;第二凸透镜的外侧在壳体上设有出光窗口;The photoelectric detector and the high-speed CCD camera are located on both sides of the beam splitter, and a double convex lens is arranged between the photoelectric detector and the beam splitter, and a sleeve lens is arranged between the high-speed CCD camera and the beam splitter; both ends of the beam splitter are respectively provided with a fiber collimator and a concave lens, a first convex lens and a second convex lens arranged in sequence; the outer side of the second convex lens is provided with a light exit window on the shell; 激光超声无损检测探头与纳秒脉冲激光器通过多模光纤连接,多模光纤两端分别连接光纤准直器和光纤耦合器;纳秒脉冲激光器的激励光通过光纤耦合器耦合到熔石英光纤,将激励光导入至光纤准直器中,光纤准直器对光束发散角进行修正得到一束平行光,再通过分束镜将平行光分为两束;The laser ultrasonic nondestructive testing probe is connected to the nanosecond pulse laser through a multimode optical fiber, and the two ends of the multimode optical fiber are connected to a fiber collimator and a fiber coupler respectively; the excitation light of the nanosecond pulse laser is coupled to the fused silica optical fiber through the fiber coupler, and the excitation light is introduced into the fiber collimator. The fiber collimator corrects the divergence angle of the light beam to obtain a beam of parallel light, and then the parallel light is divided into two beams by a beam splitter; 通过分束镜的部分平行光,经双凸透镜聚焦后被光电探测器接收、用于信号进行触发和用于单个脉冲激光能量的校准;通过分束镜的另一部分平行光,可经过凹透镜与第一凸透镜组成的扩束镜对光斑进行扩束,再通过电控马达控制的第二凸透镜,第二凸透镜可在传动导轨中前后平移进而实现对焦点位置的控制,再通过出光窗口在待检测的工件上聚焦形成点光斑,点光斑被散射后依次经过第二凸透镜、第一凸透镜、凹透镜再被分束镜反射经过套筒透镜,并被安装在套筒透镜上的高速CCD相机捕捉成像;Part of the parallel light passing through the beam splitter is focused by the double convex lens and then received by the photodetector, which is used for signal triggering and for calibration of the energy of a single pulse laser. Another part of the parallel light passing through the beam splitter can be expanded by a beam expander composed of a concave lens and a first convex lens, and then by a second convex lens controlled by an electric motor. The second convex lens can be translated back and forth in the transmission guide rail to control the focus position, and then focused on the workpiece to be inspected through the light exit window to form a point light spot. After being scattered, the point light spot passes through the second convex lens, the first convex lens, and the concave lens in turn, and then is reflected by the beam splitter through the sleeve lens, and is captured by a high-speed CCD camera installed on the sleeve lens. 高速CCD相机可将捕捉到的聚焦光斑大小反馈给控制与信号处理模块,控制与信号处理模块发送命令至电控马达;坐标跟踪摄像头可将更新的聚焦光斑位置传送至控制与信号处理模块;最终通过高性能电脑将捕获的数据重构获得测试结果;The high-speed CCD camera can feed back the captured focus spot size to the control and signal processing module, which then sends commands to the electronically controlled motor; the coordinate tracking camera can transmit the updated focus spot position to the control and signal processing module; finally, the captured data can be reconstructed by a high-performance computer to obtain the test results; 第二凸透镜的外围设有传动导轨,传动导轨侧部连接有传动轮,传动轮的中心贯穿有丝杆,丝杠的端部与电控马达的驱动轴连接;传动轮与传动导轨之间的键合方式为齿轮齿合;A transmission guide rail is arranged on the periphery of the second convex lens, a transmission wheel is connected to the side of the transmission guide rail, a lead screw runs through the center of the transmission wheel, and the end of the lead screw is connected to the driving shaft of the electric control motor; the bonding method between the transmission wheel and the transmission guide rail is gear engagement; 坐标跟踪摄像头设置在三脚架上。The coordinate tracking camera is set up on a tripod. 2.根据权利要求1所述的一种手持式自动对焦激光超声无损检测系统,其特征在于:传动导轨前后移动的距离为±20mm。2. A handheld auto-focus laser ultrasonic non-destructive testing system according to claim 1, characterized in that the distance that the transmission guide rail moves forward and backward is ±20mm. 3.根据权利要求1所述的一种手持式自动对焦激光超声无损检测系统,其特征在于:高速信号采集卡带宽100至600MHz,采样率为1至10GSa/S;高性能电脑软件为MATLAB,测振仪为双玻混合干涉仪。3. A handheld auto-focus laser ultrasonic nondestructive testing system according to claim 1, characterized in that: the bandwidth of the high-speed signal acquisition card is 100 to 600 MHz, and the sampling rate is 1 to 10 GSa/S; the high-performance computer software is MATLAB, and the vibrometer is a double-glass hybrid interferometer. 4.根据权利要求1所述的一种手持式自动对焦激光超声无损检测系统,其特征在于:多模光纤为熔石英光纤,纤径为200微米,多模光纤两端连接方式为SMA接口。4. A handheld auto-focus laser ultrasonic nondestructive testing system according to claim 1, characterized in that the multimode optical fiber is a fused silica optical fiber with a fiber diameter of 200 microns, and the connection method at both ends of the multimode optical fiber is an SMA interface. 5.根据权利要求1所述的一种手持式自动对焦激光超声无损检测系统,其特征在于:出光窗口在点光源激发时窗口内安装有一高透射率的平面镜或用线光源激发时则采用圆形平凸柱面透镜。5. A handheld auto-focus laser ultrasonic nondestructive testing system according to claim 1, characterized in that: when the light exit window is excited by a point light source, a high-transmittance plane mirror is installed in the window, or when excited by a line light source, a circular plano-convex cylindrical lens is used.
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