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CN112098520A - Detection system and method for detecting internal defect shape of material based on laser ultrasonic - Google Patents

Detection system and method for detecting internal defect shape of material based on laser ultrasonic Download PDF

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CN112098520A
CN112098520A CN202011122574.8A CN202011122574A CN112098520A CN 112098520 A CN112098520 A CN 112098520A CN 202011122574 A CN202011122574 A CN 202011122574A CN 112098520 A CN112098520 A CN 112098520A
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曹建树
纪卫克
张�诚
王十
张海超
姬保平
曹振
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Beijing Institute of Petrochemical Technology
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/26Arrangements for orientation or scanning by relative movement of the head and the sensor
    • G01N29/27Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the material relative to a stationary sensor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract

本发明公开了一种基于激光超声检测材料内部缺陷形状的检测系统及方法,包括激励模块、检测模块、数据采集处理模块、精密二维移动平台,所述精密二维移动平台上放置被测材料;激励模块包括脉冲激光发生器、散热器、控制手柄、激发光路和激光发射探头;检测模块包括光纤分离器、双波混合干涉仪、连续激光发生器和光纤;数据采集处理模块包括NI PXI‑5114数据采集卡、超声波检测探头和PC机。通过对被测材料的两面进行激光超声热弹模式C扫检测,提取超声波信号中纵波时间,计算内部缺陷外表面到被测平面的距离,对内部缺陷进行三维重构,得到内部缺陷的形状和方位。可以有效检测板材内部缺陷,并对内部缺陷进行三维重构,掌握内部缺陷的形状和方位。

Figure 202011122574

The invention discloses a detection system and method based on laser ultrasonic detection of the shape of internal defects of materials, comprising an excitation module, a detection module, a data acquisition and processing module, and a precise two-dimensional mobile platform, on which a material to be tested is placed ; Excitation module includes pulsed laser generator, heat sink, control handle, excitation light path and laser emission probe; Detection module includes fiber splitter, dual-wave hybrid interferometer, CW laser generator and optical fiber; Data acquisition and processing module includes NI PXI‑ 5114 data acquisition card, ultrasonic testing probe and PC. By performing laser ultrasonic thermoelastic mode C-scan detection on both sides of the tested material, extracting the longitudinal wave time in the ultrasonic signal, calculating the distance from the outer surface of the internal defect to the tested plane, and reconstructing the internal defect in three dimensions, the shape and shape of the internal defect are obtained. position. It can effectively detect the internal defects of the plate, carry out three-dimensional reconstruction of the internal defects, and master the shape and orientation of the internal defects.

Figure 202011122574

Description

一种基于激光超声检测材料内部缺陷形状的检测系统及方法A detection system and method based on laser ultrasonic detection of the shape of internal defects in materials

技术领域technical field

本发明涉及一种激光超声无损检测技术,尤其涉及一种基于激光超声检测材料内部缺陷形状的检测系统及方法。The invention relates to a laser ultrasonic nondestructive testing technology, in particular to a detection system and method based on the laser ultrasonic detection of the shape of internal defects of materials.

背景技术Background technique

缺陷是材料生产过程中重要的质量指标之一,目前缺乏对金属板材内部缺陷检测的良好手段。激光超声技术是新型的无损检测技术,它为非接触式检测手段,采用热弹效应可以不损伤材料而检测缺陷。Defect is one of the important quality indicators in the material production process, and there is currently a lack of good methods for detecting internal defects in metal sheets. Laser ultrasonic technology is a new type of non-destructive testing technology. It is a non-contact detection method. It can detect defects without damaging the material by using the thermoelastic effect.

但是现在大部分激光超声检测无法对材料内部缺陷形状进行表征。However, most of the current laser ultrasonic testing cannot characterize the shape of the internal defects of the material.

发明内容SUMMARY OF THE INVENTION

本发明的目的是提供一种基于激光超声检测材料内部缺陷形状的检测系统及方法。The purpose of the present invention is to provide a detection system and method for detecting the shape of internal defects in materials based on laser ultrasound.

本发明的目的是通过以下技术方案实现的:The purpose of this invention is to realize through the following technical solutions:

本发明的基于激光超声检测材料内部缺陷形状的检测系统,包括激励模块、检测模块、数据采集处理模块、精密二维移动平台1,所述精密二维移动平台1上放置被测材料2;The detection system based on laser ultrasonic detection of the shape of internal defects in materials of the present invention includes an excitation module, a detection module, a data acquisition and processing module, and a precise two-dimensional mobile platform 1, on which the tested material 2 is placed;

所述的激励模块包括脉冲激光发生器9、散热器10,控制手柄11、激发光路和激光发射探头4;The excitation module includes a pulsed laser generator 9, a radiator 10, a control handle 11, an excitation optical path and a laser emission probe 4;

所述的检测模块包括光纤分离器5、双波混合干涉仪6、连续激光发生器12和光纤;The detection module includes a fiber splitter 5, a dual-wave hybrid interferometer 6, a continuous laser generator 12 and an optical fiber;

所述的数据采集处理模块包括NI PXI-5114数据采集卡7、超声波检测探头3和PC机8。The data acquisition and processing module includes an NI PXI-5114 data acquisition card 7 , an ultrasonic detection probe 3 and a PC 8 .

上述的基于激光超声检测材料内部缺陷形状的检测系统进行三维重构的检测方法,包括如下具体步骤:The above-mentioned detection method for three-dimensional reconstruction based on a detection system for laser ultrasonic detection of internal defect shapes of materials includes the following specific steps:

步骤1:接通实验电源,打开连续激光发生器12和光纤分离5器开关,打开设置激发激光参数,在待检测区域发现红色光斑,调整精密二维移动平台1,调整激发光束和检测光束,使激发光束垂直于被测区域表面并且激发光束和检测光束光斑重合;Step 1: Turn on the experimental power supply, turn on the switches of the CW laser generator 12 and the fiber splitter 5, turn on and set the excitation laser parameters, find a red spot in the area to be detected, adjust the precision two-dimensional mobile platform 1, adjust the excitation beam and detection beam, Make the excitation beam perpendicular to the surface of the measured area and the excitation beam and the detection beam spot coincide;

步骤2:微调激光发射探头4与被测材料2的距离,使激发光斑大小改变,观察直流输出变化量,使其调整到最大值;Step 2: Fine-tune the distance between the laser emission probe 4 and the measured material 2 to change the size of the excitation spot, observe the DC output change, and adjust it to the maximum value;

步骤3:打开双波混合干涉仪6,调节光纤分离器5的分光率调节旋钮,调节输出信号为正弦信号,并且调节到正弦信号为最大时结束;Step 3: Turn on the dual-wave hybrid interferometer 6, adjust the spectroscopic rate adjustment knob of the fiber splitter 5, adjust the output signal to be a sine signal, and end when the sine signal is adjusted to the maximum;

步骤4:打开散热器10,通过控制手柄11设置激光参数,激发连续脉冲激光,打开PC机8上的信号采集软件,设置采集参数;Step 4: open the radiator 10, set the laser parameters through the control handle 11, excite the continuous pulse laser, open the signal acquisition software on the PC 8, and set the acquisition parameters;

步骤5:信号采集软件控制精密二维移动平台1带动被测材料2按照规定的路径做c扫,步长为1mm;Step 5: The signal acquisition software controls the precise two-dimensional mobile platform 1 to drive the tested material 2 to perform c-scanning according to the specified path, and the step length is 1mm;

步骤6:当被测材料2的完成c扫时,被测材料旋转1800,精密二维移动平台1按照原来的路径做c扫,原来路径起始点为本次路径终止点,原来路径终止点为本次路径起始点;Step 6: When the c-scan of the tested material 2 is completed, the tested material rotates by 1800, and the precision 2D mobile platform 1 performs the c-scan according to the original path. The original path starting point is the current path ending point, and the original path ending point is The starting point of this path;

步骤7:对检测的超声波信号进行处理。Step 7: Process the detected ultrasonic signal.

由上述本发明提供的技术方案可以看出,本发明实施例提供的基于激光超声检测材料内部缺陷形状的检测系统及方法,通过对被测材料的两面进行激光超声热弹模式C扫检测,提取超声波信号中纵波时间,计算内部缺陷外表面到被测平面的距离,对内部缺陷进行三维重构,得到内部缺陷的形状和方位。可以有效检测板材内部缺陷,并对内部缺陷进行三维重构,掌握内部缺陷的形状和方位。It can be seen from the technical solutions provided by the present invention that the detection system and method based on laser ultrasonic detection of the shape of internal defects in materials provided by the embodiments of the present invention perform laser ultrasonic thermoelastic mode C-scan detection on both sides of the tested material to extract The longitudinal wave time in the ultrasonic signal is used to calculate the distance from the outer surface of the internal defect to the measured plane, and three-dimensional reconstruction of the internal defect is performed to obtain the shape and orientation of the internal defect. It can effectively detect the internal defects of the plate, and carry out three-dimensional reconstruction of the internal defects to grasp the shape and orientation of the internal defects.

附图说明Description of drawings

图1为本发明实施例提供的基于激光超声检测材料内部缺陷形状的检测系统示意图。FIG. 1 is a schematic diagram of a detection system for detecting shapes of internal defects in materials based on laser ultrasound provided by an embodiment of the present invention.

图2为本发明实施例中光纤连接示意图。FIG. 2 is a schematic diagram of optical fiber connection in an embodiment of the present invention.

图3为本发明实施例激光超声检测试验材料内部缺陷激发路线示意图。FIG. 3 is a schematic diagram of the excitation route of the internal defects of the laser ultrasonic testing test material according to the embodiment of the present invention.

图4为本发明实施例超声波纵波内部缺陷三维重构示意图。FIG. 4 is a schematic diagram of three-dimensional reconstruction of an ultrasonic longitudinal wave internal defect according to an embodiment of the present invention.

图中:In the picture:

1、精密二维移动平台,2、被测材料,3、超声波检测探头,4、激光发射探头,5、光纤分离器,6、双波混合干涉仪,7、NI PXI-5114数据采集卡,8、PC机,9、脉冲激光发生器,10、散热器,11、控制手柄,12、连续激光发生器,13、信号光纤,14、探测光纤,15、探测光,16、参考光,17、分光比例调节旋钮,18、连续激光进入。1. Precision two-dimensional mobile platform, 2. Materials to be tested, 3. Ultrasonic detection probe, 4. Laser emission probe, 5. Optical fiber splitter, 6. Dual-wave hybrid interferometer, 7. NI PXI-5114 data acquisition card, 8. PC, 9. Pulse laser generator, 10, Radiator, 11, Control handle, 12, Continuous laser generator, 13, Signal fiber, 14, Probe fiber, 15, Probe light, 16, Reference light, 17 , Splitting ratio adjustment knob, 18. Continuous laser entry.

具体实施方式Detailed ways

下面将对本发明实施例作进一步地详细描述。本发明实施例中未作详细描述的内容属于本领域专业技术人员公知的现有技术。The embodiments of the present invention will be described in further detail below. Contents that are not described in detail in the embodiments of the present invention belong to the prior art known to those skilled in the art.

本发明的基于激光超声检测材料内部缺陷形状的检测系统,其较佳的具体实施方式是:The preferred specific embodiment of the detection system based on the laser ultrasonic detection material internal defect shape of the present invention is:

包括激励模块、检测模块、数据采集处理模块、精密二维移动平台1,所述精密二维移动平台1上放置被测材料2;It includes an excitation module, a detection module, a data acquisition and processing module, and a precise two-dimensional mobile platform 1, on which the tested material 2 is placed;

所述的激励模块包括脉冲激光发生器9、散热器10,控制手柄11、激发光路和激光发射探头4;The excitation module includes a pulsed laser generator 9, a radiator 10, a control handle 11, an excitation optical path and a laser emission probe 4;

所述的检测模块包括光纤分离器5、双波混合干涉仪6、连续激光发生器12和光纤;The detection module includes a fiber splitter 5, a dual-wave hybrid interferometer 6, a continuous laser generator 12 and an optical fiber;

所述的数据采集处理模块包括NI PXI-5114数据采集卡7、超声波检测探头3和PC机8。The data acquisition and processing module includes an NI PXI-5114 data acquisition card 7 , an ultrasonic detection probe 3 and a PC 8 .

所述的激光发射探头4通过激发光路与脉冲激光发生器9连接;The laser emission probe 4 is connected with the pulsed laser generator 9 through the excitation optical path;

所述的脉冲激光发生器9与散热器10连接;The pulsed laser generator 9 is connected with the radiator 10;

所述的控制手柄11与散热器10连接;The control handle 11 is connected with the radiator 10;

所述的散热器10与NI PXI-5114数据采集卡7连接;The radiator 10 is connected with the NI PXI-5114 data acquisition card 7;

所述的超声波检测探头3通过光纤分别与光纤分离器5和双波混合干涉仪6连接;The ultrasonic detection probe 3 is respectively connected with the fiber optic splitter 5 and the dual-wave hybrid interferometer 6 through the optical fiber;

所述的连续激光发生器12与光纤分离器5连接;The continuous laser generator 12 is connected with the fiber splitter 5;

所述的光纤分离器5与双波混合干涉仪6连接;The optical fiber splitter 5 is connected with the dual-wave hybrid interferometer 6;

所述的波混合干涉仪6与NI PXI-5114数据采集卡7连接;The wave mixing interferometer 6 is connected with the NI PXI-5114 data acquisition card 7;

所述的NI PXI-5114数据采集卡7与PC机8连接;The NI PXI-5114 data acquisition card 7 is connected with the PC 8;

所述的精密二维移动平台1与PC机8连接。The precise two-dimensional mobile platform 1 is connected with a PC 8 .

所述的激光发射探头4与超声波检测探头3位于被测材料的同侧,并且光斑基本重合。The laser emitting probe 4 and the ultrasonic detection probe 3 are located on the same side of the material to be tested, and the light spots are basically coincident.

所述的连续激光发生器12为固体Nd:YAG型脉冲激光器,其波长为1064nm,脉宽为6ns,单次激发脉冲最大能量可以到达50mJ,所述的激发探头的孔径为25mm,焦距为50-100mm,光斑直径为100-200μm,所述的控制手柄11可调节脉冲激光的能力、功率、脉冲重复频率和激发模式;The continuous laser generator 12 is a solid Nd:YAG pulsed laser with a wavelength of 1064 nm and a pulse width of 6 ns. The maximum energy of a single excitation pulse can reach 50 mJ. The aperture of the excitation probe is 25 mm and the focal length is 50 mJ. -100mm, the spot diameter is 100-200μm, the control handle 11 can adjust the capability, power, pulse repetition frequency and excitation mode of the pulsed laser;

所述的双波混合干涉仪6的检测带宽为120M;The detection bandwidth of the dual-wave hybrid interferometer 6 is 120M;

所述的NI PXI-5114数据采集卡7实时采样速率为250MS/s;The real-time sampling rate of the NI PXI-5114 data acquisition card 7 is 250 MS/s;

所述的被测材料2的被测表面具有涂层,该涂层主要作用是抑制表面波和横波的产生,并放大纵波。The measured surface of the measured material 2 has a coating, and the main function of the coating is to suppress the generation of surface waves and transverse waves, and to amplify longitudinal waves.

所述的精密二维移动平台1在X轴和Y轴的有效移动范围为0-400mm,最小步长为6.3微米。The effective movement range of the precise two-dimensional moving platform 1 in the X-axis and the Y-axis is 0-400 mm, and the minimum step size is 6.3 microns.

上述的基于激光超声检测材料内部缺陷形状的检测系统进行三维重构的检测方法,其特征在于,包括如下具体步骤:The above-mentioned detection method for three-dimensional reconstruction based on a detection system for laser ultrasonic detection of internal defect shapes of materials is characterized in that it includes the following specific steps:

步骤1:接通实验电源,打开连续激光发生器12和光纤分离5器开关,打开设置激发激光参数,在待检测区域发现红色光斑,调整精密二维移动平台1,调整激发光束和检测光束,使激发光束垂直于被测区域表面并且激发光束和检测光束光斑重合;Step 1: Turn on the experimental power supply, turn on the switches of the CW laser generator 12 and the fiber splitter 5, turn on and set the excitation laser parameters, find a red spot in the area to be detected, adjust the precision two-dimensional mobile platform 1, adjust the excitation beam and detection beam, Make the excitation beam perpendicular to the surface of the measured area and the excitation beam and the detection beam spot coincide;

步骤2:微调激光发射探头4与被测材料2的距离,使激发光斑大小改变,观察直流输出变化量,使其调整到最大值;Step 2: Fine-tune the distance between the laser emission probe 4 and the measured material 2 to change the size of the excitation spot, observe the DC output change, and adjust it to the maximum value;

步骤3:打开双波混合干涉仪6,调节光纤分离器5的分光率调节旋钮,调节输出信号为正弦信号,并且调节到正弦信号为最大时结束;Step 3: Turn on the dual-wave hybrid interferometer 6, adjust the spectroscopic rate adjustment knob of the fiber splitter 5, adjust the output signal to be a sine signal, and end when the sine signal is adjusted to the maximum;

步骤4:打开散热器10,通过控制手柄11设置激光参数,激发连续脉冲激光,打开PC机8上的信号采集软件,设置采集参数;Step 4: open the radiator 10, set the laser parameters through the control handle 11, excite the continuous pulse laser, open the signal acquisition software on the PC 8, and set the acquisition parameters;

步骤5:信号采集软件控制精密二维移动平台1带动被测材料2按照规定的路径做c扫,步长为1mm;Step 5: The signal acquisition software controls the precise two-dimensional mobile platform 1 to drive the tested material 2 to perform c-scanning according to the specified path, and the step length is 1mm;

步骤6:当被测材料2的完成c扫时,被测材料旋转1800,精密二维移动平台1按照原来的路径做c扫,原来路径起始点为本次路径终止点,原来路径终止点为本次路径起始点;Step 6: When the c-scan of the tested material 2 is completed, the tested material rotates by 1800, and the precision 2D mobile platform 1 performs the c-scan according to the original path. The original path starting point is the current path ending point, and the original path ending point is The starting point of this path;

步骤7:对检测的超声波信号进行处理。Step 7: Process the detected ultrasonic signal.

对被测材料2内部缺陷进行三维重构,建立三维直角坐标系,坐标系的原点为激光激发的起始点,激发路径上的每一个激发点设置为(X,Y,L),其中X,Y为激发点的平面坐标,L为激发点位置内部缺陷边缘到激发平面的距离,L=CL*t/2,式中CL为纵波波速,t为激光激发到接收到纵波的时间;Three-dimensional reconstruction is performed on the internal defects of the tested material 2, and a three-dimensional rectangular coordinate system is established. The origin of the coordinate system is the starting point of laser excitation, and each excitation point on the excitation path is set to (X, Y, L), where X, Y is the plane coordinate of the excitation point, L is the distance from the edge of the defect inside the excitation point to the excitation plane, L=CL*t/2, where CL is the longitudinal wave velocity, and t is the time from the laser excitation to the reception of the longitudinal wave;

将被测材料2进行1800翻转,按照第一次激发路径做c扫,第一次激发路径起始点为第二次激发路径终止点,第一次激发路径终止点为第二次激发路径起始点。此时的激发路径上的每一个激发点仍然设置为(X,Y,L),其中X,Y为激发点的平面坐标,L为激发点位置内部缺陷边缘到激发平面的距离,L=d-CL*t/2,式中d为被测材料的厚度,CL为纵波波速,t为激光激发到接收到纵波的时间;Turn the tested material 2 over 1800 degrees, and do c-scan according to the first excitation path. The starting point of the first excitation path is the second excitation path termination point, and the first excitation path termination point is the second excitation path start point. . At this time, each excitation point on the excitation path is still set to (X, Y, L), where X, Y are the plane coordinates of the excitation point, L is the distance from the edge of the defect inside the excitation point to the excitation plane, L=d -CL*t/2, where d is the thickness of the measured material, CL is the longitudinal wave velocity, and t is the time from the laser excitation to the reception of the longitudinal wave;

将位于内部的点连接成面就是材料内部缺陷的形状。Connecting the points located on the inside into a face is the shape of the defect inside the material.

本发明的基于激光超声检测材料内部缺陷形状的检测系统及方法,利用该方法可以有效检测板材内部缺陷,并对内部缺陷进行三维重构,掌握内部缺陷的形状和方位。The detection system and method based on the laser ultrasonic detection of the shape of the internal defect of the material of the present invention can effectively detect the internal defect of the plate, carry out three-dimensional reconstruction of the internal defect, and grasp the shape and orientation of the internal defect.

具体实施例:Specific examples:

如图1至图4所示,一种基于激光超声检测材料内部缺陷形状的检测系统,主要包括激励模块、检测模块、数据采集处理模块、精密二维移动平台1和被测材料2。所述的激励模块包括脉冲激光发生器9、散热器10,控制手柄11、激发光路和激光发射探头4,所述的连续激光发生器12为固体Nd:YAG型脉冲激光器,其波长为1064nm,脉宽为6ns,单次激发脉冲最大能量可以到达50mJ,所述的激发探头的孔径为25mm,焦距为50-100mm,光斑直径为100-200μm,所述的控制手柄11可调节脉冲激光的能力、功率、脉冲重复频率和激发模式。所述的检测模块包括光纤分离器5、双波混合干涉仪6、连续激光发生器12和光纤。所述的双波混合干涉仪6的检测带宽为120MHz。所述的数据采集处理模块包括NI PXI-5114数据采集卡7、超声波检测探头3和PC机8,所述的NI PXI-5114数据采集卡7实时采样速率为250MS/s。所述的被测材料2的被测表面具有特殊涂层,主要作用是抑制表面波和横波的产生,放大纵波。所述的精密二维移动平台1X轴和Y轴的有效移动范围为0-400mm,最小步长为6.3微米。As shown in Figures 1 to 4, a detection system based on laser ultrasonic detection of internal defect shapes of materials mainly includes an excitation module, a detection module, a data acquisition and processing module, a precision two-dimensional mobile platform 1 and a material to be tested 2. The excitation module includes a pulsed laser generator 9, a radiator 10, a control handle 11, an excitation light path and a laser emission probe 4, and the continuous laser generator 12 is a solid Nd:YAG type pulsed laser with a wavelength of 1064 nm, The pulse width is 6ns, and the maximum energy of a single excitation pulse can reach 50mJ. The aperture of the excitation probe is 25mm, the focal length is 50-100mm, and the spot diameter is 100-200μm. The control handle 11 can adjust the ability of the pulsed laser , power, pulse repetition rate and excitation mode. The detection module includes an optical fiber splitter 5, a dual-wave hybrid interferometer 6, a continuous laser generator 12 and an optical fiber. The detection bandwidth of the dual-wave hybrid interferometer 6 is 120MHz. The data acquisition and processing module includes an NI PXI-5114 data acquisition card 7, an ultrasonic detection probe 3 and a PC 8, and the NI PXI-5114 data acquisition card 7 has a real-time sampling rate of 250 MS/s. The tested surface of the tested material 2 has a special coating, which is mainly used to suppress the generation of surface waves and transverse waves and to amplify longitudinal waves. The effective movement range of the 1X-axis and the Y-axis of the precise two-dimensional moving platform is 0-400mm, and the minimum step size is 6.3 microns.

本发明的具体连接方式如下:The specific connection mode of the present invention is as follows:

所述的激光发射探头4通过激发光路与脉冲激光发生器9连接。The laser emission probe 4 is connected with the pulsed laser generator 9 through the excitation optical path.

所述的脉冲激光发生器9与散热器10连接。The pulsed laser generator 9 is connected to the heat sink 10 .

所述的控制手柄11与散热器10连接。The control handle 11 is connected to the radiator 10 .

所述的散热器10与NI PXI-5114数据采集卡7连接。The radiator 10 is connected to the NI PXI-5114 data acquisition card 7 .

所述的超声波检测探头3通过光纤分别与光纤分离器5和双波混合干涉仪6连接。The ultrasonic detection probe 3 is connected to the fiber optic splitter 5 and the dual-wave hybrid interferometer 6 through optical fibers, respectively.

所述的连续激光发生器12与光纤分离器5连接。The continuous laser generator 12 is connected to the fiber splitter 5 .

所述的光纤分离器5与双波混合干涉仪6连接。The optical fiber splitter 5 is connected with the dual-wave hybrid interferometer 6 .

所述的波混合干涉仪6与NI PXI-5114数据采集卡7连接。The wave mixing interferometer 6 is connected to the NI PXI-5114 data acquisition card 7 .

所述的NI PXI-5114数据采集卡7与PC机8连接。The NI PXI-5114 data acquisition card 7 is connected with the PC 8 .

所述的精密二维移动平台1与PC机8连接。The precise two-dimensional mobile platform 1 is connected with a PC 8 .

所述的激光发射探头4与超声波检测探头3位于被测材料的同侧,并且光斑基本重合。The laser emitting probe 4 and the ultrasonic detection probe 3 are located on the same side of the material to be tested, and the light spots are basically coincident.

一种基于激光超声检测材料内部缺陷形状的检测系统及方法,所述的检测方法主要包括如下具体步骤:A detection system and method based on laser ultrasonic detection of the shape of internal defects in materials, the detection method mainly includes the following specific steps:

步骤1:接通实验电源,打开连续激光发生器12和光纤分离5器开关,打开设置激发激光参数,在待检测区域发现红色光斑,调整精密二维移动平台1,调整激发光束和检测光束,使激发光束垂直于被测区域表面并且激发光束和检测光束光斑重合。Step 1: Turn on the experimental power supply, turn on the switches of the CW laser generator 12 and the fiber splitter 5, turn on and set the excitation laser parameters, find a red spot in the area to be detected, adjust the precision two-dimensional mobile platform 1, adjust the excitation beam and detection beam, Make the excitation beam perpendicular to the surface of the area to be measured and the excitation beam and detection beam spots coincide.

步骤2:微调激光发射探头4与被测材料2的距离,使激发光斑大小改变,观察直流输出变化量,使其调整到最大值。Step 2: Fine-tune the distance between the laser emitting probe 4 and the material to be tested 2 to change the size of the excitation spot, observe the change in the DC output, and adjust it to the maximum value.

步骤3:打开双波混合干涉仪6,调节光纤分离器5的分光率调节旋钮,调节输出信号为正弦信号,并且调节到正弦信号为最大时结束。Step 3: Turn on the dual-wave hybrid interferometer 6, adjust the light splitting rate adjustment knob of the fiber splitter 5, adjust the output signal to be a sine signal, and end when the sine signal is adjusted to the maximum.

步骤4:打开散热器10,通过控制手柄11设置激光参数,激发连续脉冲激光,打开PC机8上的信号采集软件,设置采集参数。Step 4: Open the radiator 10, set the laser parameters through the control handle 11, excite the continuous pulse laser, open the signal acquisition software on the PC 8, and set the acquisition parameters.

步骤5:信号采集软件控制精密二维移动平台1带动被测材料2按照规定的路径做c扫,步长为1mm。Step 5: The signal acquisition software controls the precise two-dimensional mobile platform 1 to drive the tested material 2 to perform c-scanning according to the specified path, and the step length is 1mm.

步骤6:当被测材料2的完成c扫时,被测材料旋转1800,精密二维移动平台1按照原来的路径做c扫,原来路径起始点为本次路径终止点,原来路径终止点为本次路径起始点。Step 6: When the c-scan of the tested material 2 is completed, the tested material rotates by 1800, and the precision 2D mobile platform 1 performs the c-scan according to the original path. The original path starting point is the current path ending point, and the original path ending point is The starting point of this path.

步骤7:对检测的超声波信号进行处理。Step 7: Process the detected ultrasonic signal.

对被测材料2内部缺陷进行三维重构,建立三维直角坐标系,坐标系的原点为激光激发的起始点,激发路径上的每一个激发点设置为(X,Y,L),其中X,Y为激发点的平面坐标,L为激发点位置内部缺陷边缘到激发平面的距离,L=CL*t/2,式中CL为纵波波速,t为激光激发到接收到纵波的时间。将被测材料2进行1800翻转,按照第一次激发路径做c扫,第一次激发路径起始点为第二次激发路径终止点,第一次激发路径终止点为第二次激发路径起始点。此时的激发路径上的每一个激发点仍然设置为(X,Y,L),其中X,Y为激发点的平面坐标,L为激发点位置内部缺陷边缘到激发平面的距离,L=d-CL*t/2,式中d为被测材料的厚度,CL为纵波波速,t为激光激发到接收到纵波的时间。将位于内部的点连接成面就是材料内部缺陷的形状。Three-dimensional reconstruction is performed on the internal defects of the tested material 2, and a three-dimensional rectangular coordinate system is established. The origin of the coordinate system is the starting point of laser excitation, and each excitation point on the excitation path is set to (X, Y, L), where X, Y is the plane coordinate of the excitation point, L is the distance from the edge of the defect inside the excitation point to the excitation plane, L=CL*t/2, where CL is the longitudinal wave velocity, and t is the time from the laser excitation to the reception of the longitudinal wave. Turn the tested material 2 over 1800 degrees, and do c-scan according to the first excitation path. The starting point of the first excitation path is the second excitation path termination point, and the first excitation path termination point is the second excitation path start point. . At this time, each excitation point on the excitation path is still set to (X, Y, L), where X, Y are the plane coordinates of the excitation point, L is the distance from the edge of the defect inside the excitation point to the excitation plane, L=d -CL*t/2, where d is the thickness of the material to be measured, CL is the longitudinal wave velocity, and t is the time from the laser excitation to the reception of the longitudinal wave. Connecting the points located on the inside into a face is the shape of the defect inside the material.

以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明披露的技术范围内,可轻易想到的变化或替换,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应该以权利要求书的保护范围为准。The above description is only a preferred embodiment of the present invention, but the protection scope of the present invention is not limited to this. Substitutions should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims (7)

1.一种基于激光超声检测材料内部缺陷形状的检测系统,其特征在于,包括激励模块、检测模块、数据采集处理模块、精密二维移动平台(1),所述精密二维移动平台(1)上放置被测材料(2);1. a detection system based on laser ultrasonic detection material internal defect shape, is characterized in that, comprises excitation module, detection module, data acquisition and processing module, precision two-dimensional mobile platform (1), described precision two-dimensional mobile platform (1) ) on the material to be tested (2); 所述的激励模块包括脉冲激光发生器(9)、散热器(10),控制手柄(11)、激发光路和激光发射探头(4);The excitation module comprises a pulsed laser generator (9), a radiator (10), a control handle (11), an excitation light path and a laser emission probe (4); 所述的检测模块包括光纤分离器(5)、双波混合干涉仪(6)、连续激光发生器(12)和光纤;The detection module comprises an optical fiber splitter (5), a dual-wave hybrid interferometer (6), a continuous laser generator (12) and an optical fiber; 所述的数据采集处理模块包括NI PXI-5114数据采集卡(7)、超声波检测探头(3)和PC机(8)。The data acquisition and processing module includes an NI PXI-5114 data acquisition card (7), an ultrasonic detection probe (3) and a PC (8). 2.根据权利要求1所述的基于激光超声检测材料内部缺陷形状的检测系统,其特征在于:2. The detection system based on laser ultrasonic detection material internal defect shape according to claim 1, is characterized in that: 所述的激光发射探头(4)通过激发光路与脉冲激光发生器(9)连接;The laser emission probe (4) is connected with the pulsed laser generator (9) through an excitation optical path; 所述的脉冲激光发生器(9)与散热器(10)连接;The pulsed laser generator (9) is connected with the radiator (10); 所述的控制手柄(11)与散热器(10)连接;The control handle (11) is connected with the radiator (10); 所述的散热器(10)与NI PXI-5114数据采集卡(7)连接;The radiator (10) is connected with the NI PXI-5114 data acquisition card (7); 所述的超声波检测探头(3)通过光纤分别与光纤分离器(5)和双波混合干涉仪(6)连接;The ultrasonic detection probe (3) is respectively connected with the optical fiber splitter (5) and the dual-wave hybrid interferometer (6) through the optical fiber; 所述的连续激光发生器(12)与光纤分离器(5)连接;The continuous laser generator (12) is connected with the fiber splitter (5); 所述的光纤分离器(5)与双波混合干涉仪(6)连接;The optical fiber splitter (5) is connected with the dual-wave hybrid interferometer (6); 所述的波混合干涉仪6与NI PXI-5114数据采集卡(7)连接;Described wave mixing interferometer 6 is connected with NI PXI-5114 data acquisition card (7); 所述的NI PXI-5114数据采集卡(7)与PC机(8)连接;The NI PXI-5114 data acquisition card (7) is connected with the PC (8); 所述的精密二维移动平台(1)与PC机(8)连接。The precise two-dimensional mobile platform (1) is connected with a PC (8). 3.根据权利要求2所述的基于激光超声检测材料内部缺陷形状的检测系统,其特征在于,所述的激光发射探头(4)与超声波检测探头(3)位于被测材料的同侧,并且光斑基本重合。3. The detection system based on laser ultrasonic detection of the shape of internal defects in materials according to claim 2, wherein the laser emission probe (4) and the ultrasonic detection probe (3) are located on the same side of the material to be tested, and The spots are basically coincident. 4.根据权利要求3所述的基于激光超声检测材料内部缺陷形状的检测系统,其特征在于:4. The detection system based on the laser ultrasonic detection material internal defect shape according to claim 3, is characterized in that: 所述的连续激光发生器(12)为固体Nd:YAG型脉冲激光器,其波长为1064nm,脉宽为6ns,单次激发脉冲最大能量可以到达50mJ,所述的激发探头的孔径为25mm,焦距为50-100mm,光斑直径为100-200μm,所述的控制手柄(11)可调节脉冲激光的能力、功率、脉冲重复频率和激发模式;The continuous laser generator (12) is a solid Nd:YAG type pulsed laser, its wavelength is 1064nm, the pulse width is 6ns, the maximum energy of a single excitation pulse can reach 50mJ, the aperture of the excitation probe is 25mm, and the focal length is 25mm. is 50-100mm, the diameter of the light spot is 100-200μm, and the control handle (11) can adjust the capability, power, pulse repetition frequency and excitation mode of the pulsed laser; 所述的双波混合干涉仪(6)的检测带宽为120M;The detection bandwidth of the dual-wave hybrid interferometer (6) is 120M; 所述的NI PXI-5114数据采集卡(7)实时采样速率为250MS/s;The real-time sampling rate of the NI PXI-5114 data acquisition card (7) is 250 MS/s; 所述的被测材料(2)的被测表面具有涂层,该涂层主要作用是抑制表面波和横波的产生,并放大纵波。The measured surface of the measured material (2) has a coating, and the main function of the coating is to suppress the generation of surface waves and transverse waves, and to amplify longitudinal waves. 5.根据权利要求4所述的基于激光超声检测材料内部缺陷形状的检测系统,其特征在于,所述的精密二维移动平台(1)在X轴和Y轴的有效移动范围为0-400mm,最小步长为6.3微米。5. The detection system based on laser ultrasonic detection of the shape of internal defects in materials according to claim 4, wherein the effective movement range of the precise two-dimensional moving platform (1) in the X-axis and the Y-axis is 0-400mm , with a minimum step size of 6.3 μm. 6.一种权利要求1至5任一项所述的基于激光超声检测材料内部缺陷形状的检测系统进行三维重构的检测方法,其特征在于,包括如下具体步骤:6. A detection method for three-dimensional reconstruction based on a detection system for laser ultrasonic detection of internal defect shapes in materials according to any one of claims 1 to 5, characterized in that, comprising the following specific steps: 步骤1:接通实验电源,打开连续激光发生器(12)和光纤分离5器开关,打开设置激发激光参数,在待检测区域发现红色光斑,调整精密二维移动平台(1),调整激发光束和检测光束,使激发光束垂直于被测区域表面并且激发光束和检测光束光斑重合;Step 1: Turn on the experimental power supply, turn on the switch of the continuous laser generator (12) and the optical fiber splitter 5, turn on and set the excitation laser parameters, find a red spot in the area to be detected, adjust the precision two-dimensional mobile platform (1), and adjust the excitation beam and the detection beam, so that the excitation beam is perpendicular to the surface of the measured area and the excitation beam and the detection beam spot coincide; 步骤2:微调激光发射探头(4)与被测材料(2)的距离,使激发光斑大小改变,观察直流输出变化量,使其调整到最大值;Step 2: Fine-tune the distance between the laser emission probe (4) and the material to be tested (2) to change the size of the excitation spot, observe the change in the DC output, and adjust it to the maximum value; 步骤3:打开双波混合干涉仪(6),调节光纤分离器(5)的分光率调节旋钮,调节输出信号为正弦信号,并且调节到正弦信号为最大时结束;Step 3: Turn on the dual-wave hybrid interferometer (6), adjust the light splitting rate adjustment knob of the fiber splitter (5), adjust the output signal to be a sine signal, and end when the sine signal is adjusted to the maximum; 步骤4:打开散热器(10),通过控制手柄(11)设置激光参数,激发连续脉冲激光,打开PC机(8)上的信号采集软件,设置采集参数;Step 4: open the radiator (10), set the laser parameters through the control handle (11), excite the continuous pulse laser, open the signal acquisition software on the PC (8), and set the acquisition parameters; 步骤5:信号采集软件控制精密二维移动平台(1)带动被测材料(2)按照规定的路径做c扫,步长为1mm;Step 5: The signal acquisition software controls the precise two-dimensional mobile platform (1) to drive the material to be tested (2) to perform c-scanning according to the specified path, and the step length is 1mm; 步骤6:当被测材料(2)的完成c扫时,被测材料旋转1800,精密二维移动平台(1)按照原来的路径做c扫,原来路径起始点为本次路径终止点,原来路径终止点为本次路径起始点;Step 6: When the c-scan of the tested material (2) is completed, the tested material rotates 1800, and the precision two-dimensional moving platform (1) performs the c-scan according to the original path. The end point of the path is the start point of the current path; 步骤7:对检测的超声波信号进行处理。Step 7: Process the detected ultrasonic signal. 7.根据权利要求6所述的基于激光超声检测材料内部缺陷形状的检测方法,其特征在于,对被测材料(2)内部缺陷进行三维重构,建立三维直角坐标系,坐标系的原点为激光激发的起始点,激发路径上的每一个激发点设置为(X,Y,L),其中X,Y为激发点的平面坐标,L为激发点位置内部缺陷边缘到激发平面的距离,L=CL*t/2,式中CL为纵波波速,t为激光激发到接收到纵波的时间;7. The detection method based on laser ultrasonic detection of the shape of internal defects in materials according to claim 6, characterized in that, three-dimensional reconstruction is performed on the internal defects of the tested material (2), and a three-dimensional rectangular coordinate system is established, and the origin of the coordinate system is The starting point of laser excitation, each excitation point on the excitation path is set to (X, Y, L), where X, Y are the plane coordinates of the excitation point, L is the distance from the edge of the defect inside the excitation point to the excitation plane, L =CL*t/2, where CL is the longitudinal wave velocity, and t is the time from the laser excitation to the reception of the longitudinal wave; 将被测材料(2)进行1800翻转,按照第一次激发路径做c扫,第一次激发路径起始点为第二次激发路径终止点,第一次激发路径终止点为第二次激发路径起始点。此时的激发路径上的每一个激发点仍然设置为(X,Y,L),其中X,Y为激发点的平面坐标,L为激发点位置内部缺陷边缘到激发平面的距离,L=d-CL*t/2,式中d为被测材料的厚度,CL为纵波波速,t为激光激发到接收到纵波的时间;Perform 1800 inversion of the tested material (2), and perform c-scan according to the first excitation path. The starting point of the first excitation path is the end point of the second excitation path, and the end point of the first excitation path is the second excitation path. starting point. At this time, each excitation point on the excitation path is still set to (X, Y, L), where X, Y are the plane coordinates of the excitation point, L is the distance from the edge of the defect inside the excitation point to the excitation plane, L=d -CL*t/2, where d is the thickness of the measured material, CL is the longitudinal wave velocity, and t is the time from the laser excitation to the reception of the longitudinal wave; 将位于内部的点连接成面就是材料内部缺陷的形状。Connecting the points located on the inside into a face is the shape of the defect inside the material.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113008803A (en) * 2021-02-01 2021-06-22 太原理工大学 Laser ultrasonic nondestructive online detection method and device for surface cracks of bar
CN116202968A (en) * 2023-03-13 2023-06-02 哈尔滨工业大学(威海) Laser ultrasonic defect detection system and laser ultrasonic phase coherent imaging detection method for additive titanium alloy
CN118330036A (en) * 2024-06-12 2024-07-12 浙江大学 Composite material curved surface structure layered damage imaging method based on ultrasonic guided waves

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103808802A (en) * 2014-02-26 2014-05-21 南京理工大学 Full-optical laser ultrasonic measuring method for internal defect of material
CN107271370A (en) * 2017-07-04 2017-10-20 九江学院 A kind of laser ultrasonic detection system and its method detected based on material internal defect
CN109387568A (en) * 2018-12-21 2019-02-26 西安增材制造国家研究院有限公司 A kind of laser ultrasonic detection device and increasing material manufacturing, detection integrated equipment
CN110487897A (en) * 2019-08-28 2019-11-22 华中科技大学 A kind of compound non-contact detection system of Laser Photoacoustic of element and defect
CN111175233A (en) * 2020-03-05 2020-05-19 南京光声超构材料研究院有限公司 Laser ultrasonic detection method and system for laser precision spot welding quality
CN111426919A (en) * 2020-04-08 2020-07-17 国网山西省电力公司电力科学研究院 Basin-type insulator detection device based on laser-induced ultrasound
CN111521566A (en) * 2020-06-09 2020-08-11 中国计量科学研究院 Laser ultrasonic nondestructive testing system based on dual-wave mixing

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103808802A (en) * 2014-02-26 2014-05-21 南京理工大学 Full-optical laser ultrasonic measuring method for internal defect of material
CN107271370A (en) * 2017-07-04 2017-10-20 九江学院 A kind of laser ultrasonic detection system and its method detected based on material internal defect
CN109387568A (en) * 2018-12-21 2019-02-26 西安增材制造国家研究院有限公司 A kind of laser ultrasonic detection device and increasing material manufacturing, detection integrated equipment
CN110487897A (en) * 2019-08-28 2019-11-22 华中科技大学 A kind of compound non-contact detection system of Laser Photoacoustic of element and defect
CN111175233A (en) * 2020-03-05 2020-05-19 南京光声超构材料研究院有限公司 Laser ultrasonic detection method and system for laser precision spot welding quality
CN111426919A (en) * 2020-04-08 2020-07-17 国网山西省电力公司电力科学研究院 Basin-type insulator detection device based on laser-induced ultrasound
CN111521566A (en) * 2020-06-09 2020-08-11 中国计量科学研究院 Laser ultrasonic nondestructive testing system based on dual-wave mixing

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
张海超: "基于激光超声的管道裂纹定量表征及三维成像方法研究", 中国优秀硕士学位论文全文数据库 工程科技Ⅱ辑, no. 09, pages 1353 - 57 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113008803A (en) * 2021-02-01 2021-06-22 太原理工大学 Laser ultrasonic nondestructive online detection method and device for surface cracks of bar
CN113008803B (en) * 2021-02-01 2022-09-16 太原理工大学 Laser ultrasonic nondestructive online detection method and device for surface cracks of bar
CN116202968A (en) * 2023-03-13 2023-06-02 哈尔滨工业大学(威海) Laser ultrasonic defect detection system and laser ultrasonic phase coherent imaging detection method for additive titanium alloy
CN116202968B (en) * 2023-03-13 2024-05-03 哈尔滨工业大学(威海) A laser ultrasonic defect detection system for additive titanium alloy and a laser ultrasonic phase coherent imaging detection method
CN118330036A (en) * 2024-06-12 2024-07-12 浙江大学 Composite material curved surface structure layered damage imaging method based on ultrasonic guided waves

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