CN110912444B - A bionic crawling piezoelectric driver - Google Patents

Abstract

The invention relates to a bionic crawling piezoelectric driver, which mainly includes a piezoelectric stack, an asymmetric thin-walled flexible hinge mechanism and a mover. Two piezoelectric stacks are installed in the asymmetric thin-walled flexible hinge mechanism; the preload knob adjusts the initial preload force between the asymmetrical thin-walled flexible hinge mechanism and the mover; the base supports and installs and fixes other parts. The advantages are: the asymmetric thin-walled flexible hinge mechanism has high rigidity, can withstand a large load, and improves the output load of the driving device; the two piezoelectric stacks provide driving force alternately through the timing control of the electrical signal, increasing the The output load improves the output performance; two asymmetric thin-walled flexible hinge mechanisms are alternately driven by two piezoelectric stacks to perform a bionic crawling motion, which can eliminate the retraction of the mover during the motion cycle; the device has a simple structure , can be used in the fields of precision ultra-precision machining, micro-electromechanical systems, and micro-manipulation robots.

Description

A bionic crawling piezoelectric driver

technical field

The invention relates to the fields of precision ultra-precision machining, micro-nano operation robots, and micro-electromechanical systems, in particular to a bionic crawling piezoelectric driver.

Background technique

Precision drive technology with micro/nano-level positioning accuracy is a key technology in high-tech fields such as ultra-precision machining and measurement, optical engineering, modern medical care, and aerospace technology. In order to achieve micro/nano-level output precision, the application of modern precision drive technology puts forward higher requirements for the precision of the drive device. The traditional driving device has low output precision and large overall size, which cannot meet the requirements of micro/nano-level high precision and small size of the driving device in the precision system of modern advanced technology. Piezoelectric ceramic drivers have the advantages of small size, high displacement resolution, large output load, and high energy conversion rate. They can achieve micro/nano-level output accuracy, and have been increasingly used in micro-positioning and precision ultra-precision machining. middle. The existing piezoelectric inertial drive device usually places the piezoelectric element and the mover mass in parallel to its motion direction, the preload force is perpendicular to the main output direction of the piezoelectric element, and the output load of the overall device mainly depends on the preload force generated. friction force. However, piezoelectric elements such as piezoelectric stacks usually use the d33 working mode, which has less rigidity on the cross-section perpendicular to the main output direction, and generates less preload, which greatly reduces the output load of the overall device, and the piezoelectric The element's greater stiffness in the main output direction is not fully utilized; a single piezoelectric stack provides a small output load; back-off phenomena in motion further degrade output performance. Therefore, it is necessary to design a kind of rigidity that makes full use of the main output direction of the piezoelectric stack, eliminates the back-off phenomenon, increases the output load, and generates the preload force and driving force at the same time through the parasitic inertial motion of the asymmetric thin-walled flexible hinge mechanism. , a piezoelectric driver that further improves the output load of the piezoelectric drive device.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a bionic crawling piezoelectric driver, which solves the above problems existing in the prior art. The invention has the characteristics of simple and compact structure, high output precision, large output rigidity and output load, and high output frequency, and can realize the output function of linear motion at the same time.

The invention adopts two sets of piezoelectric drive units, the main output direction of the piezoelectric stack is arranged obliquely with the moving direction of the mover, and two asymmetric flexible hinge mechanisms connected by four thin-walled flexible hinges are used. Under the alternating drive of the stack, the asymmetric thin-walled flexible hinge mechanism realizes parasitic inertial motion in sequence according to the time sequence. This bionic crawling can eliminate the retraction of the mover in the motion cycle, greatly improve the output performance of the device, and realize the mover Linear motion in a certain direction.

The above-mentioned purpose of the present invention is achieved through the following technical solutions:

A bionic crawling piezoelectric driver, comprising a piezoelectric stack (3), an asymmetric thin-walled flexible hinge mechanism (4), a piezoelectric stack (7), an asymmetrical thin-walled flexible hinge mechanism (6), A mover (5), a preload wedge (2), a preload wedge (8), a preload knob (1), a preload knob (10) and a base (9), the precision drive device utilizes the principle of parasitic inertia Realize micro-nano-level bionic crawling precision linear drive. The mover (5) adopts a high-precision linear guide with a slider, and the guide is fixed on the base (9) by screws; the asymmetric thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6) Installed on the base (9) by screws; the preload wedge (2) is arranged between the piezoelectric stack (3) and the asymmetric thin-walled flexible hinge mechanism (4), and the preload wedge (8) is arranged on the Between the piezoelectric stack (7) and the asymmetric thin-walled flexible hinge mechanism (6), the piezoelectric stack (3) and the piezoelectric stack (7) can pass through the preload wedge (2) and the preload respectively The wedge (8) is pre-tightened; the pre-tightening knob (1) and the pre-tightening knob (10) are fastened on the base (9), and the asymmetric thin-walled hinge mechanism (4) and the asymmetrical thin-walled hinge mechanism are fastened on the base (9). (6) Contact at the lower end; the asymmetric thin-walled hinge mechanism (4) and the asymmetrical thin-walled hinge mechanism (6) are connected by four thin-walled flexible hinges to form an asymmetrical form, and the upper arc structure is connected to the mover (5) Contact; the base (9) plays the role of supporting and installing and fixing other parts.

The piezoelectric stack (3) and the piezoelectric stack (7) are respectively arranged in the asymmetric thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6) to drive the piezoelectric stack The stack (3) drives the asymmetric thin-walled flexible hinge mechanism (4) to extend, drives the piezoelectric stack (7) to drive the asymmetrical thin-walled flexible hinge mechanism (6) to extend, and drives the piezoelectric stack ( 3) The time sequence between the piezoelectric stack (7) and the asymmetric thin-walled flexible hinge mechanism (4), the asymmetrical thin-walled flexible hinge mechanism (6) and the mover (5) realize the bionic crawling type move, and then drive the mover (5) to move precisely in a straight line.

The initial pre-tightening force between the asymmetric thin-walled flexible hinge mechanism (4), the asymmetrical thin-walled flexible hinge mechanism (6) and the mover (5) is obtained through the pre-tightening knob (1), the pre-tightening force, respectively. Knob (10) adjustment;

The piezoelectric stack (3) and the piezoelectric stack (7) use a piezoelectric ceramic stack PZT with a shape controllable surface type, and the parasitic inertial motion is obtained by aligning the piezoelectric stack (3) and the piezoelectric stack. The voltage control of the stack (7) is implemented, and the bionic crawling linear drive can be realized by orderly controlling the voltage of the piezoelectric stack (3) and the piezoelectric stack (7).

The main advantages of the invention are: using the principle of parasitic inertial motion, the main output direction of the piezoelectric stack and the moving direction of the mover are arranged obliquely; two asymmetric flexible hinge mechanisms connected by four thin-walled flexible hinges are used; Under the alternating drive of two piezoelectric stacks, the asymmetric thin-walled flexible hinge mechanism performs parasitic inertial motion in sequence according to the time sequence, and this bionic crawling motion can eliminate the retraction phenomenon of the mover in the motion cycle; Greatly improve the output performance of the device, realize the linear motion of the mover in a certain direction, and have the advantages of high driving reliability, good stability, and high work efficiency; it can be used in precision ultra-precision machining, micro-manipulation Large-scale integrated circuit manufacturing, biotechnology and other important scientific and engineering fields; the invention has simple structure, compact arrangement, stable movement, high efficiency, low investment, and high benefits, and has broad application prospects.

Description of drawings

Fig. 1 is the overall structure schematic diagram of the present invention;

2 is a schematic front view of the present invention;

Fig. 3 is the left side view schematic diagram of the present invention;

4 is a schematic diagram of the asymmetric thin-walled flexible hinge mechanism of the present invention.

Detailed ways

The details of the present invention and the specific implementations thereof will be further described below with reference to the accompanying drawings.

Referring to Figures 1 to 4, a bionic crawling piezoelectric driver mainly includes a mover (5), a piezoelectric stack (3), a piezoelectric stack (7), a preloaded wedge (2), Preload wedge (8), preload knob (1), preload knob (10), asymmetric thin-wall flexible hinge mechanism (4), asymmetric thin-wall flexible hinge mechanism (6) and base (9) , the precision driving device realizes piezoelectric linear precision driving through the principle of parasitic inertia. The mover (5) adopts a high-precision linear guide with a slider, and the guide is fixed on the base by screws; the asymmetric thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6) are installed by screws on the base; the piezoelectric stack (3) and the piezoelectric stack (7) are respectively installed in the asymmetric thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6). The direction and the moving direction of the mover (5) are arranged obliquely; the preload wedge (2) is arranged between the piezoelectric stack (3) and the asymmetric thin-walled flexible hinge mechanism (4), and the preload wedge (8) Arranged between the piezoelectric stack (7) and the asymmetric thin-walled flexible hinge mechanism (6), the piezoelectric stack (3) and the piezoelectric stack (7) can pass through the preloading wedges (2) and The pre-tightening wedge (8) is pre-tightened; the pre-tightening knob (1) and the pre-tightening knob (10) are fastened on the base (9). The lower end of the hinge mechanism (6) is in contact; the asymmetric thin-walled hinge mechanism (4) and the asymmetrical thin-walled hinge mechanism (6) are connected by four thin-walled flexible hinges to form an asymmetrical form. The mover (5) is in contact; the base (9) plays the role of supporting, installing and fixing other parts, and the asymmetric thin-walled flexible hinge mechanism (4), the asymmetrical thin-walled flexible hinge mechanism (6) and the mover (5) pass through The screws are mounted on the base (9).

The bionic crawling piezoelectric driver utilizes the principle of parasitic inertia to realize piezoelectric linear precision drive. The main output direction of the piezoelectric stack (3) and the piezoelectric stack (7) are arranged obliquely with the moving direction of the mover (5). The large rigidity is fully utilized; the asymmetric thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6) have good rigidity output performance, can withstand large preloading force, and move stably and efficiently. The piezoelectric stack (3) and the piezoelectric stack (7) are energized to transmit the linear motion of the mover (5) through the asymmetric thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6) respectively. the driving force and the pre-tightening force between the asymmetric thin-walled flexible hinge mechanism (4), the asymmetrical thin-walled flexible hinge mechanism (6) and the mover (5), thereby greatly improving the output load of the piezoelectric drive device , to achieve linear motion in a certain direction.

The initial pre-tightening force between the asymmetric thin-walled flexible hinge mechanism (4), the asymmetrical thin-walled flexible hinge mechanism (6) and the mover (5) is obtained through the pre-tightening knob (1), the pre-tightening knob (10) Adjustment.

The piezoelectric stack (3) and the piezoelectric stack (7) adopt the piezoelectric ceramic stack PZT with a controllable surface type, and the parasitic inertial motion is obtained by aligning the piezoelectric stack (3) and the piezoelectric stack. The voltage control of the stack (7) is realized.

1 to 4, the specific working process of the present invention is as follows:

The realization of the linear motion of the mover, the initial state: adjust the pre-tightening knob (1) to adjust the contact distance between the asymmetric thin-walled flexible hinge mechanism (4) and the mover (5), and adjust the pre-tightening knob (10) to adjust The contact distance between the asymmetric thin-walled flexible hinge mechanism (6) and the mover (5), that is, the initial pre-tightening force during the parasitic motion; piezoelectric signals in the form of sawtooth waves or triangular waves are used to control the piezoelectric stack (3 ) and the piezoelectric stack (7), by controlling the voltage, the piezoelectric stack (3) and the piezoelectric stack (7) are charged in sequence according to the time sequence; the piezoelectric stack (3) and the piezoelectric stack (7) are not When electrified, the system is in a free state; when the piezoelectric stack (3) is energized, it stretches through the inverse piezoelectric effect, pushing the asymmetric thin-walled flexible hinge mechanism (4) to deform, and the asymmetrical thin-walled flexible hinge mechanism (4) ) press the mover (5), and the asymmetric thin-walled flexible hinge mechanism (4) drives the mover (5) to move under the action of static friction with the mover (5); when the piezoelectric stack (3) When the power is lost and quickly returns to the initial position, the asymmetric thin-walled flexible hinge mechanism (4) also returns to the initial state, and the mover (5) remains in the moved position under the action of inertial force, while the piezoelectric stack (7) It is charged and elongated through the inverse piezoelectric effect, pushing the asymmetric thin-walled flexible hinge mechanism (6) to deform, and the asymmetrical thin-walled flexible hinge mechanism (6) presses the mover (5), and the asymmetrical thin-walled The flexible hinge mechanism (6) drives the mover (5) to move under the action of the static friction force with the mover (5); when the piezoelectric stack (7) loses power and quickly returns to the initial position, the asymmetrical thin The wall-type flexible hinge mechanism (6) also returns to the initial state, and the mover (5) remains in the position after the second movement under the action of inertial force, thus completing one movement cycle of the driving device. By repeating the above steps, the driving device can achieve linear motion in the desired direction and obtain a larger output displacement.

The bionic crawling piezoelectric driver involved in the present invention adopts two sets of piezoelectric stacks as the driving source and the asymmetric thin-walled flexible hinge mechanism as the power transmission element, and has the advantages of low heat generation, stable driving, reliability and high efficiency. Features, and can achieve linear precision motion and other functions.

Claims (3)

1. A bionic crawling piezoelectric driver, comprising a piezoelectric stack (3), an asymmetric thin-walled flexible hinge mechanism (4), a piezoelectric stack (7), and an asymmetrical thin-walled flexible hinge mechanism (6) ), a mover (5), a pre-tightening wedge (2), a pre-tightening wedge (8), a pre-tightening knob (1), a pre-tightening knob (10), and a base (9), characterized in that: a piezoelectric stack The stack (3) and the piezoelectric stack (7) are respectively arranged in the asymmetric thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6), and the piezoelectric stack (3) is driven, and the non-symmetrical thin-walled flexible hinge mechanism (6) is respectively arranged. The symmetrical thin-walled flexible hinge mechanism (4) is extended to drive the piezoelectric stack (7), and the asymmetrical thin-walled flexible hinge mechanism (6) is extended to drive the piezoelectric stack (3) and the piezoelectric stack by controlling The sequence between the stacks (7) realizes the bionic crawling motion between the asymmetric thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6) and the mover (5), thereby driving the mover (5) Do linear motion; the mover (5) adopts a high-precision linear guide with a slider, and the guide is fixed on the base by screws to achieve high-precision linear motion; asymmetric thin-walled flexible hinge mechanism (4) and the asymmetric thin-walled flexible hinge mechanism (6) are mounted on the base by screws; the piezoelectric stack (3) and the piezoelectric stack (7) can be respectively preloaded through the wedge block (2) and the preload The wedge (8) is pre-tightened; the pre-tightening knob (1) and the pre-tightening knob (10) respectively adjust the asymmetric thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6) and the mover (5) initial preload force; the asymmetric thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6) can be made of spring steel and high-strength aluminum alloy materials. Four thin-walled flexible hinges are connected to form an asymmetrical parallelogram structure. 2. The bionic crawling piezoelectric driver according to claim 1 is characterized in that the parasitic inertia driving principle of the asymmetric thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6) is adopted, and a single When the piezoelectric stack (3) and the piezoelectric stack (7) are respectively energized, the asymmetrical thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6) are respectively pushed to generate two directions of movement. Compound motion, namely main motion and parasitic motion, the parasitic motion is the linear motion of the mover (5), and the main motion is the asymmetric thin-walled flexible hinge mechanism (4) and the asymmetrical thin-walled flexible hinge mechanism (6). Sub (5) applies preload. 3. The bionic crawling piezoelectric driver according to claim 1, characterized in that the drive voltage is alternately provided by the sequential control of two groups of piezoelectric drive units I and II, and the asymmetric thin-walled flexible hinge mechanism (4) The asymmetric thin-walled flexible hinge mechanism (6) is driven alternately by the piezoelectric stack (3) and the piezoelectric stack (7) to perform a bionic crawling motion.

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