CN211183830U - Secondary Displacement Amplified Piezoelectric Driver - Google Patents

Abstract

The utility model relates to a secondary displacement amplification type piezoelectric actuator belongs to piezoelectricity precision drive field. The device comprises a stator, a pre-tightening mechanism, a mover, a base and the like. The stator is fixedly arranged on the base through a pre-tightening mechanism, and the stator and the rotor realize positioning and driving transmission in an elastic contact mode. The stator comprises a triangular flexible hinge displacement amplification mechanism, a driving foot, a hexagonal flexible hinge displacement amplification mechanism and a piezoelectric stack actuator. The driving foot is a circular arc-shaped thin metal plate, two identical flexible thin plates are arranged on the metal plate, are symmetrically arranged and are flexibly connected with the metal plate. Through applying the control signal of telecommunication to piezoelectric stack actuator, promote the flexible hinge mechanism of amplifying and produce forward displacement and then realize displacement and enlarge, arc drive foot produces self bending deformation simultaneously, and the flexible sheet metal receives the positive pressure change and produces self elongation, realizes that the secondary displacement enlargies. Has the advantages of simple structure, high precision, large stroke and the like.

Description

Secondary Displacement Amplified Piezoelectric Driver

technical field

The utility model relates to the field of miniature precision drives, in particular to a secondary displacement amplification type piezoelectric driver.

Background technique

High-precision positioning technology is a hot research topic, and piezoelectric actuators are the core research content. At present, piezoelectric actuators are playing a key role in aerospace, ultra-precision machining and other fields. Although the traditional piezoelectric driver has a high driving speed, it is often not compact enough in structure, low in resolution, and poor in motion accuracy. With the improvement of scientific and technological level, the traditional piezoelectric driver can no longer meet the demand, and the research of new piezoelectric driver with high speed, high precision and miniaturization is one of the most important issues at present.

SUMMARY OF THE INVENTION

The purpose of the present utility model is to provide a secondary displacement amplification piezoelectric driver, which solves the above-mentioned problems existing in the prior art. The displacement of traditional direct-acting piezoelectric actuators is often small. In order to achieve the purpose of amplifying the displacement, the primary displacement amplification effect is achieved through the flexible hinge amplification mechanism, and the surface treatment of the driving foot is performed to achieve the secondary displacement amplification effect. The secondary displacement amplification piezoelectric linear actuator uses the tiny deformation and force generated by the inverse piezoelectric effect of the piezoelectric stack to drive the flexible hinge amplification mechanism to generate a large overall displacement, and generate positive pressure to deform the surface of the driving foot to achieve secondary displacement. The effect of displacement magnification. The secondary displacement amplifying piezoelectric linear driver of the utility model can realize the movement of large stroke, high precision and large load, and can realize the linear movement in both positive and negative directions at the same time. The triangular flexible hinge mechanism of the proposed piezoelectric linear actuator can amplify the tiny deformation of the piezoelectric stack, generate a large positive motion, and achieve primary displacement amplification, while the driving foot itself deforms to achieve secondary displacement amplification.

The above-mentioned purpose of the present utility model is achieved through the following technical solutions:

The secondary displacement amplified piezoelectric driver includes a base 1, a sliding block 2, a stator 3 and a preloading mechanism 4. The sliding block 2 and the preloading mechanism 4 are installed on the base 1, and the stator 3 is installed on the preloading mechanism. on the mechanism 4, and elastically contact with the slider 2;

The stator 3 includes a hexagonal flexible hinge mechanism one 3-1, a hexagonal flexible hinge mechanism two 3-2, a triangular flexible hinge 3-3, an arc-shaped driving foot 3-4, and a piezoelectric stack one 3- 5. Piezoelectric stack 2 3-6, installation hole 1 3-7 and installation hole 2 3-8, the hexagonal flexible hinge mechanism 1 3-1 includes a bottom fixing beam 1 3-1-1, a side part The flexible hinge one 3-1-2 and the top connecting beam one 3-1-3; the two ends of the piezoelectric stack one 3-5 are respectively connected with the bottom fixed beam one 3-1-1 and the top connecting beam one 3-1 -3 are connected in a tight fit; the hexagonal flexible hinge mechanism one 3-1 is fixed on the preloading mechanism 4 through the mounting hole one 3-7; the hexagonal flexible hinge mechanism two 3-2 and the hexagonal flexible hinge mechanism One 3-1 has exactly the same structure, and the two are symmetrically installed on the preloading mechanism 4; the triangular flexible hinge 3-3 includes hinge one 3-3-1, hinge two 3-3-2, and top connecting beam one 3-1- 3 is connected to the bottom of the hinge one 3-3-1 of the triangular flexible hinge 3-3, and the top connecting beam two 3-2-3 is connected to the bottom of the hinge two 3-3-2 of the triangular flexible hinge 3-3.

The arc-shaped driving foot 3-4 includes a circular arc thin plate 3-4-1, a flexible thin plate 3-4-2 and a flexible thin plate 2 3-4-3, and the circular arc thin plate 3-4-1 is The deformable metal sheet is flexibly connected to the top of the triangular flexible hinge 3-3, and the included angles between the arc sheet 3-4-1 and the top of the triangular flexible hinge 3-3 are respectively θ1 and θ2; the surface of the arc sheet 3-4-1 is set There are two symmetrically arranged flexible sheets one 3-4-2 and two flexible sheets 3-4-3, the one flexible sheet 3-4-2 and the arc sheet 3-4-1 are inclined at an angle of α1, and have a radian. β1; the second flexible sheet 3-4-3 and the arc sheet 3-4-1 are inclined at an angle of α2, and have an arc β2; flexible sheet one 3-4-2, flexible sheet two 3-4-3 and the slider 2 are in surface contact.

When the positive movement of the slider 2 along the x-axis is required, a sawtooth wave electrical signal is applied to the piezoelectric stack-3-5, and the bottom of the hinge-3-3-1 of the triangular flexible hinge 3-3 produces a positive displacement of the y-axis , under the restriction of the top slider 2, the triangular flexible hinge 3-3 is inclined to the right as a whole, and the imaginary motion trajectory of the contact point between the arc-shaped driving foot 3-4 and the slider 2 can be decomposed into the displacements in the x and y directions, When the arc-shaped driving foot 3-4 is in close contact with the slider 2, the arc-shaped thin plate 3-4-1 of the arc-shaped driving foot 3-4 is deformed by the positive pressure. 5 is elongated, the force point is concentrated on the left side, θ1 decreases, and θ2 increases; the arc β1 of the flexible sheet-3-4-2 itself becomes smaller, and the angle α1 formed with the arc sheet 3-4-1 becomes smaller, It tends to be flat, resulting in its own elongation, and at the same time, the contact area with the slider 2 increases, increasing the positive driving friction; the flexible sheet 2 3-4-3 is far away from the slider 2, α2, β2 become larger, and the second is achieved. Displacement magnification effect.

The motion of the quadratic displacement amplified piezoelectric driver has bidirectional consistency, and the overall structure is completely symmetrical. The action of the arc-shaped driving feet 3-4 will generate movement in the negative direction of the x-axis.

The beneficial effect of the utility model is that: using a piezoelectric stack in one working cycle, two displacement amplifications are generated to improve the output efficiency of the driver; at the same time, the consistency of bidirectional motion can be realized. The secondary displacement amplifying piezoelectric linear driver of the utility model can realize the movement of large stroke, high precision and large load, and can realize the linear movement in both positive and negative directions at the same time. The triangular flexible hinge mechanism of the proposed piezoelectric linear actuator can amplify the tiny deformation of the piezoelectric stack, generate a large positive motion, and achieve primary displacement amplification, while the driving foot itself deforms to achieve secondary displacement amplification. The utility model has the advantages of simple and compact structure, convenient control and the like, and has a good application prospect in the fields of micro-nano precision driving and positioning such as precision medical instruments, optical precision instruments and semiconductor processing.

Description of drawings

The accompanying drawings described here are used to provide a further understanding of the present invention, and constitute a part of the present application.

Fig. 1 is the structural representation of the utility model;

Fig. 2 is the stator schematic diagram of the utility model;

3 is a schematic diagram of the hexagonal flexible hinge mechanism and the triangular flexible hinge structure of the present invention;

4 is a schematic structural diagram of a circular arc-shaped driving foot of the present invention;

Fig. 5 is the working principle diagram of the arc-shaped driving foot of the utility model;

FIG. 6 is a working principle diagram of the secondary displacement amplifying driver of the present invention.

In the figure: 1. Base; 2. Slider; 3. Stator; 4. Preloading mechanism;

3-1, hexagonal flexible hinge mechanism one; 3-2, hexagonal flexible hinge mechanism two; 3-3, triangular flexible hinge; 3-4, arc-shaped driving foot; 3-5, piezoelectric Stack one; 3-6, piezoelectric stack two; 3-7, mounting hole one; 3-8, mounting hole two; 3-1-1, bottom fixing beam one; 3-1-2, side flexible Hinge one; 3-1-3, top connecting beam one; 3-2-3, top connecting beam two; 3-3-1, hinge one; 3-3-2, hinge two; 3-4-1, circle Arc sheet; 3-4-2, flexible sheet one; 3-4-3, flexible sheet two.

Detailed ways

The details of the present utility model and specific implementations thereof will be further described below in conjunction with the accompanying drawings.

Referring to FIGS. 1 to 6 , the secondary displacement amplified piezoelectric driver of the present invention includes a base 1, a slider 2, a stator 3 and a preloading mechanism 4. The slider 2 and the preloading mechanism 4 are both Installed on the base 1 , the stator 3 is installed on the preloading mechanism 4 and is in elastic contact with the slider 2 ; the preloading mechanism 4 is used to preload the stator 3 and the slider 2 .

The stator 3 includes a hexagonal flexible hinge mechanism one 3-1, a hexagonal flexible hinge mechanism two 3-2, a triangular flexible hinge 3-3, an arc-shaped driving foot 3-4, and a piezoelectric stack one 3- 5. Piezoelectric stack 2 3-6, installation hole 1 3-7 and installation hole 2 3-8, the hexagonal flexible hinge mechanism 1 3-1 includes a bottom fixing beam 1 3-1-1, a side part The flexible hinge one 3-1-2 and the top connecting beam one 3-1-3; the two ends of the piezoelectric stack one 3-5 are respectively connected with the bottom fixed beam one 3-1-1 and the top connecting beam one 3-1 -3 are connected in a tight fit, the bottom fixed beam one 3-1-1 is connected with the end of the top connecting beam one 3-1-3 through the side flexible hinge one 3-1-2; piezoelectric stack two 3- 6 is connected in the same way as piezoelectric stack one 3-5. The hexagonal flexible hinge mechanism 1 3-1 is fixed on the preloading mechanism 4 through the installation hole 1 3-7, and the hexagonal flexible hinge mechanism 2 3-2 is fixed on the preloading mechanism 4 through the installation hole 2 3-8; The hexagonal flexible hinge mechanism 2 3-2 has exactly the same structure as the hexagonal flexible hinge mechanism 1 3-1, and the two are symmetrically installed on the preloading mechanism 4; the triangular flexible hinge 3-3 includes the hinge one 3-3-1 , Hinge two 3-3-2, top connecting beam one 3-1-3 is connected to the bottom of hinge one 3-3-1 of triangular flexible hinge 3-3, top connecting beam two 3-2-3 and triangular flexible hinge 3 -3 hinges two 3-3-2 bottoms connected.

When the positive movement of the slider 2 along the x-axis is required, in a working cycle in which the electric signal excites the extension/contraction of the piezoelectric stack, at the stage of 0T to 3/4T, the piezoelectric stack is moved to a 3-5 The positive sawtooth wave signal is applied to stimulate the positive displacement of the y-axis, which drives the hexagonal flexible hinge mechanism-3-1y-axis to elongate in the positive direction. Due to the geometry, the hinge on one side of the triangular flexible hinge 3-3 is 3-3. -3-1 The bottom y-axis rises in the positive direction. Since the slider 2 restricts the y-direction displacement, the end of the triangular flexible hinge 3-3 will generate x-direction displacement and y-direction positive pressure, that is, the top of the triangular flexible hinge 3-3 is driven in an arc shape Foot 3-4 produces x-direction displacement and y-direction positive pressure, and the arc-shaped driving foot 3-4 itself is subjected to -y-direction positive pressure to produce bending deformation. Since only one side of the piezoelectric stack is elongated, the arc-shaped driving foot 3 -4 One side is subjected to a large positive pressure, one side of the flexible sheet 1 3-4-2 is subjected to positive pressure, the bending deflection becomes smaller, the angle between the arc sheet 3-4-1 becomes smaller, and the flexible sheet 2 3-4-3 drives the slider 2 to generate x-direction displacement to achieve the effect of secondary displacement amplification.

In the stage from 3/4T to T, the sawtooth wave signal rapidly drops to 0 to achieve rapid reset. Due to the inertial force, the retraction displacement is small.

The arc-shaped driving foot 3-4 includes a circular arc thin plate 3-4-1, a flexible thin plate 3-4-2 and a flexible thin plate 2 3-4-3, and the circular arc thin plate 3-4-1 is The deformable metal sheet is flexibly connected to the top of the triangular flexible hinge 3-3, and the included angles between the arc sheet 3-4-1 and the top of the triangular flexible hinge 3-3 are respectively θ1 and θ2; the surface of the arc sheet 3-4-1 is set There are two symmetrically arranged flexible sheets one 3-4-2 and two flexible sheets 3-4-3. The flexible sheet one 3-4-2 and the arc sheet 3-4-1 are inclined at an angle of α1, and have a certain Arc β1; flexible sheet 2 3-4-3 and circular arc sheet 3-4-1 are inclined at an angle of α2, and have a certain arc β2; flexible sheet 1 3-4-2, flexible sheet 2 3-4-3 and The slider 2 is in surface contact. Piezoelectric stack 1 3-5 applies an electrical signal, the right side of the triangular flexible hinge 3-3 is inclined, and the imaginary motion trajectory of the contact point between the arc-shaped driving foot 3-4 and the slider 2 can be decomposed into displacements in the x and y directions , when the arc-shaped driving foot 3-4 is in close contact with the slider 2, the arc-shaped thin plate 3-4-1 of the arc-shaped driving foot 3-4 is subjected to positive pressure to produce a large self-deformation, and the force point is concentrated on the left side, the curvature of the flexible sheet 1 3-4-2 becomes smaller, tends to be flat, and generates a certain amount of elongation by itself. At the same time, the contact area with the slider 2 becomes larger, which increases the driving friction; the flexible sheet 2 3-4- 3 away from the slider 2, to achieve the secondary displacement amplification effect.

The motion of the secondary displacement amplified piezoelectric driver has bidirectional consistency, and the overall structure is completely symmetrical. The slider 2 is acted on by the arc-shaped driving feet 3-4 and will move in the negative direction of the x-axis.

Example:

Referring to FIGS. 1 to 4 , a secondary displacement amplification piezoelectric driver is composed of a base 1 , a slider 2 , a stator 3 and a preloading mechanism 4 . The slider 2 and the pre-tightening mechanism 4 are both mounted on the base 1 by screws, and the stator 3 is mounted on the pre-tightening mechanism 4 by screws and is in elastic contact with the slider 2 . The preloading mechanism 4 is used to preload the stator 3 and the slider 2 . The stator 3 includes a hexagonal flexible hinge mechanism one 3-1, a hexagonal flexible hinge mechanism two 3-2, a triangular flexible hinge 3-3, an arc-shaped driving foot 3-4, and a piezoelectric stack one 3- 5. Piezoelectric stack two 3-6, mounting hole one 3-7 and mounting hole two 3-8.

Hexagonal flexible hinge mechanism one 3-1 includes bottom fixed beam one 3-1-1, side flexible hinge one 3-1-2 and top connecting beam one 3-1-3; piezoelectric stack one 3-5 The two ends are respectively connected with the bottom fixed beam 1 3-1-1 and the top connecting beam 1 3-1-3 in a tight fit manner; the hexagonal flexible hinge mechanism 1 3-1 is fixed on the preload through the installation hole 1 3-7. Institution 4 on. The second hexagonal flexible hinge mechanism 3-2 has the same structure as the first 3-1 hexagonal flexible hinge mechanism, and the two are symmetrically installed on the preloading mechanism 4 . The triangular flexible hinge 3-3 includes the first hinge 3-3-1 and the second hinge 3-3-2. The top connecting beam one 3-1-3 is connected with the bottom of the hinge one 3-3-1 of the triangular flexible hinge 3-3. The top connecting beam two 3-2-3 is connected with the bottom of the hinge two 3-3-2 of the triangular flexible hinge 3-3.

The arc-shaped driving foot 3-4 includes an arc thin plate 3-4-1, a flexible thin plate 3-4-2 and a flexible thin plate 2 3-4-3; the arc thin plate 3-4-1 is an easily deformable metal thin plate, It is flexibly connected to the top of the triangular flexible hinge 3-3, and the included angles between the circular arc thin plate 3-4-1 and the top of the triangular flexible hinge 3-3 are θ1 and θ2 respectively. The surface of the arc thin plate 3-4-1 is provided with two symmetrically arranged flexible thin plates 1 3-4-2 and flexible thin plates 3-4-3, flexible thin plates 1 3-4-2 and arc thin plates 3-4- 1 is inclined at an angle of α1, and has a certain radian β1. The flexible sheet 2 3-4-3 and the arc thin plate 3-4-1 are inclined at an angle of α2, and have a certain radian β2; they are in surface contact with the slider 2.

Referring to Figure 4 and Figure 5, when the slider 2x axis needs to move forward, a sawtooth wave electrical signal is applied to the piezoelectric stack one 3-5, and the bottom of the hinge one 3-3-1 of the triangular flexible hinge 3-3 The positive displacement of the y-axis is generated. It can be known from geometry that under the restriction of the top slider 2, the triangular flexible hinge 3-3 is inclined to the right as a whole, and the arc-shaped driving foot 3-4 is the imaginary motion trajectory of the contact point of the slider 2 It can be decomposed into displacements in the x and y directions. When the driving foot is in close contact with the slider 2, the circular arc thin plate 3-4-1 of the driving foot is subjected to a large amount of positive pressure to produce its own deformation. 3-5 is elongated, the force point is concentrated on the left side, θ1 decreases, and θ2 increases; flexible sheet-3-4-2’s own arc β1 becomes smaller, and the angle α1 formed with circular arc sheet 3-4-1 becomes smaller. Small, self-elongation occurs, and at the same time, the contact area with the slider 2 increases, which increases the positive driving friction force; the flexible sheet 2 3-4-3 is far away from the slider 2, α2, β2 become larger, and the secondary displacement amplification effect is achieved. .

Referring to Fig. 6, it is a working principle diagram of the secondary displacement amplifying driver proposed by the present utility model, and the driving method is carried out according to the following steps:

Step a: From t0 to t1, apply a positive sawtooth wave signal excitation to the piezoelectric stack-3-5, and the y-axis of the piezoelectric stack-3-5 is extended h in the positive direction, driving the hexagonal flexible hinge mechanism-1. 3-1 The y-axis is elongated in the positive direction by h. Due to the geometry, the y-axis of the hinge-3-3-1 bottom of the triangular flexible hinge 3-3-1 rises in the positive direction by h, and the imaginary motion trajectory of the end point P can be decomposed into the x-direction and The displacement in the y direction (lx and ly), that is, the arc-shaped driving foot 3-4 at the top of the triangular flexible hinge 3-3 produces the positive displacement of the x-axis and the positive force of the y-axis (lx and Fp), resulting in the driving friction force Fs Push the slider 2 forward along the positive x-axis to achieve a displacement amplification effect.

With the increase of Fp, when the driving foot is in close contact with the slider 2, the arc-shaped driving foot 3-4 itself is bent and deformed by the negative pressure Fn of the y-axis. 4-2 is forced to make its own radian smaller, and the angle formed with the arc thin plate 3-4-1 becomes smaller, and the contact area between itself and the slider 2 becomes larger, which increases the driving friction force Fs and pushes the The slider 2 moves forward along the positive x-axis to achieve a secondary displacement amplification effect.

Step b: During the period from t1 to t2, the sawtooth wave signal drops rapidly to 0, and the piezoelectric stack 1 3-5 retracts to achieve rapid reset. Due to the inertial force, the slider 2 will remain in the position shown in Figure 6 ( c) Position shown in part. By repeating steps a and b, the piezoelectric actuator gradually realizes a large working stroke movement along the positive x-axis.

When the piezoelectric stacks 2 3-6 are excited by the same positive sawtooth wave signal, the slider 2 will generate the negative movement of the x-axis, which can realize the consistency of the bidirectional movement.

The secondary displacement amplifying piezoelectric stick-slip driver of the utility model is composed of a stator, a preloading mechanism, a mover, a base and the like. The stator is installed and fixed on the base through a pre-tightening mechanism, and the stator and the mover realize positioning and driving transmission through elastic contact. The stator includes a triangular flexible hinge displacement amplifying mechanism, a driving foot, a hexagonal flexible hinge displacement amplifying mechanism and a piezoelectric stack actuator. The driving foot is a circular arc-shaped thin metal plate, and there are two identical flexible thin plates on the metal plate, which are placed symmetrically and are flexibly connected with the metal plate. By applying a control electrical signal to the piezoelectric stack actuator, the triangular flexible hinge amplifying mechanism is pushed to generate a positive displacement to achieve a displacement amplification. At the same time, the arc-shaped driving foot generates its own bending deformation, and the positive pressure on the flexible sheet changes to generate its own expansion. Length, to achieve secondary displacement amplification. The utility model has the characteristics of simple structure, high precision, large stroke, etc. The triangular flexible amplifying mechanism and the arc-shaped driving foot structure are used to produce secondary amplification effect, and the bidirectional driving motion can be realized.

The above descriptions are only preferred examples of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made to the present utility model shall be included within the protection scope of the present utility model.

Claims (4)

1. A secondary displacement amplification piezoelectric driver, characterized in that it comprises a base (1), a slider (2), a stator (3) and a preloading mechanism (4), the slider (2) and The pre-tightening mechanism (4) is installed on the base (1), and the stator (3) is installed on the pre-tightening mechanism (4) and is in elastic contact with the slider (2); The stator (3) includes a hexagonal flexible hinge mechanism one (3-1), a hexagonal flexible hinge mechanism two (3-2), a triangular flexible hinge (3-3), an arc-shaped driving foot (3- 4) Piezoelectric stack one (3-5), piezoelectric stack two (3-6), mounting hole one (3-7) and mounting hole two (3-8), the hexagonal flexible hinge The first mechanism (3-1) includes a bottom fixed beam (3-1-1), a side flexible hinge (3-1-2) and a top connecting beam (3-1-3); the piezoelectric stack The two ends of the pile one (3-5) are respectively connected with the bottom fixed beam one (3-1-1) and the top connecting beam one (3-1-3) in a tight fit; the hexagonal flexible hinge mechanism one (3- 1) It is fixed on the preloading mechanism (4) through the mounting hole one (3-7); the hexagonal flexible hinge mechanism two (3-2) has the same structure as the hexagonal flexible hinge mechanism one (3-1). The two are symmetrically installed on the preloading mechanism (4); the triangular flexible hinge (3-3) includes the first hinge (3-3-1), the second hinge (3-3-2), and the top connecting beam (3-1) -3) Connect with the bottom of the hinge one (3-3-1) of the triangular flexible hinge (3-3), and connect the beam two (3-2-3) at the top with the hinge two (3) of the triangular flexible hinge (3-3) -3-2) The bottom is connected. 2. The secondary displacement amplification piezoelectric driver according to claim 1, characterized in that: the arc-shaped driving foot (3-4) comprises a circular arc thin plate (3-4-1), a flexible thin plate (3-4-2) and the second flexible sheet (3-4-3), the arc sheet (3-4-1) is an easily deformable metal sheet, which is flexibly connected to the top of the triangular flexible hinge (3-3), The angle between the arc sheet (3-4-1) and the top of the triangular flexible hinge (3-3) is θ1 and θ2 respectively; the surface of the arc sheet (3-4-1) is provided with two symmetrically arranged flexible sheets one ( 3-4-2) and the second flexible sheet (3-4-3), the flexible sheet one (3-4-2) and the arc sheet (3-4-1) are inclined at an angle of α1, and have an arc β1; The second flexible sheet (3-4-3) and the arc sheet (3-4-1) are inclined at an angle of α2, and have an arc β2; the first flexible sheet (3-4-2), the second flexible sheet (3-4 -3) It is in surface contact with the slider (2). 3. The secondary displacement amplifying piezoelectric driver according to claim 1 or 2, characterized in that: when the slider (2) moves in the positive direction of the x-axis, applying pressure to the piezoelectric stack one (3-5) Sawtooth wave electrical signal, the bottom of hinge one (3-3-1) of the triangular flexible hinge (3-3) produces a positive displacement of the y-axis, under the limit of the top slider (2), the triangular flexible hinge (3-3) The whole is inclined to the right, and the imaginary motion trajectory of the contact point between the arc-shaped driving foot (3-4) and the slider (2) can be decomposed into displacements in the x and y directions. When the slider (2) is in close contact, the arc thin plate (3-4-1) of the arc-shaped driving foot (3-4) is deformed by the positive pressure, because only the piezoelectric stack one (3-5) stretches. Long, the force point is concentrated on the left side, θ1 decreases, θ2 increases; flexible sheet 1 (3-4-2) itself radian β1 becomes smaller, and the angle α1 formed with the arc sheet (3-4-1) becomes Small, tends to be flat, resulting in its own elongation, and at the same time, the contact area with the slider (2) increases, increasing the positive driving friction; the second flexible sheet (3-4-3) is far away from the slider (2), α2 , β2 becomes larger, and the secondary displacement amplification effect is achieved. 4. The secondary displacement amplified piezoelectric driver according to claim 1, wherein the movement of the secondary displacement amplified piezoelectric driver has bidirectional consistency, and the overall structure is completely symmetrical from left to right. , When the piezoelectric stack two (3-6) is excited by the same positive sawtooth wave signal, the slider (2) will move along the negative direction of the x-axis under the action of the arc-shaped driving foot (3-4).

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