CN208597034U - A device for suppressing the retraction motion of parasitic piezoelectric actuators by hinges with arc structure - Google Patents
A device for suppressing the retraction motion of parasitic piezoelectric actuators by hinges with arc structure Download PDFInfo
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- CN208597034U CN208597034U CN201821567629.4U CN201821567629U CN208597034U CN 208597034 U CN208597034 U CN 208597034U CN 201821567629 U CN201821567629 U CN 201821567629U CN 208597034 U CN208597034 U CN 208597034U
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- arcuate structure
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- guide rail
- primary clearance
- piezoelectric actuator
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Abstract
The utility model relates to the devices that a kind of arcuate structure hinge inhibits parasitic piezoelectric actuator rollback movement, belong to precision positioning field.The driving unit and primary clearance adjustment unit of device pass through screw respectively and connect with pedestal.Primary clearance by rotating the knob of horizontal fine motion adjustment mechanism, in adjustable driving unit between arcuate structure flexible hinge and guide rail slide block.Under specific primary clearance, when the driving voltage rapid decrease of piezoelectric stack, arcuate structure flexible hinge causes the frictional force moved that retracts since the frictional force that elastic recovery generates balances, and then effectively inhibits to retract to move, and greatly improves the kinetic stability of piezoelectric actuator.Advantage is: the characteristics of inheriting simple parasitic motion principle activation configuration, easy to control, high resolution effectively eliminates rollback phenomenon, realizes steady step motion, improve the overall output performance of parasitic motion principle piezoelectric actuator.
Description
Technical field
The utility model relates to precision positioning field, in particular to a kind of arcuate structure hinge inhibits parasitic piezoelectric actuator
Retract the device moved, can be applied to precision machinery, microelectronics manufacturing industry, precision optical system, micromanipulation, precision/superfinishing
Close processing and other fields realize big stroke, without rollback and high accuracy positioning.
Background technique
Piezoelectric driving technology, basic principle are the inverse piezoelectric effects based on piezoceramic material, are become by controlling its machinery
Shape generates rotation or linear motion, has the characteristics that simple structure, flexible design, high-precision and high-resolution.Based on piezoresistive material
The driver of material has in fields such as precision machinery, microelectronics manufacturing industry, precision optical system, microoperation, precision/Ultra-precision Turnings
Important application.In existing research, researcher proposes a variety of driving principles, such as Bionic inchworm, stick-slip, used
Property, parasitic motion principle.Correspondingly, various types of big stroke piezoelectric actuators are designed and tested, are expanded to a certain extent
Application range and the field of piezoelectric actuator are opened up.However, every kind of driving principle still has some intrinsic disadvantages.For example,
The piezoelectric actuator of looper principle design, it usually needs use 3 pieces of piezoelectric stacks, and need to carry out work according to specific timing
Make, therefore the structure of the type piezoelectric actuator and control are often more complicated, processing and assembly are all very difficult.Using viscous
The locating platform of sliding, inertia and parasitic motion principle design, although structure and control are relatively easy, it is general during exporting
Store-through seriously affects its output performance, limits its application in the movement that retracts.For example, existing some parasitic motion principle pressures
1 piece of piezoelectric stack is used only in electric drive, and structure is simple and convenient to operate, bearing capacity is big, and big stroke may be implemented
Forward and reverse movement.However, passing through test data it is found that observing the significant fortune that retracts in their output displacement curve
It is dynamic.Similar rollback movement also appears in the locating platform designed by stick-slip principle.To inhibit the movement that retracts, Morita et al.
Propose a kind of mode of resonance smooth impact driving mechanism (2013 Jpn. J. Appl. of Takeshi Morita et al
Phys. 52 07HE05), after this, this method is further used and is studied by other researchers, it was confirmed that utilizes this method
It can obviously inhibit to retract and move.However, this method can bring some other problems, such as increases the complexity of control and cause
The unstability of movement.
In conclusion the movement that retracts is still that limitation stick-slip principle, a parasitic motion principle driver are widely applied
Major issue.Therefore, it is necessary to move and inhibit the method for rollback movement to carry out further research to the rollback during driving.
Summary of the invention
The purpose of this utility model is to provide a kind of arcuate structure hinges to inhibit parasitic piezoelectric actuator rollback movement
Device solves the above problem of the existing technology.The utility model passes through arcuate structure flexible hinge special in driver
The rollback movement that the flexible deformation of chain inhibits parasitic motion principle intrinsic, on the one hand inherits parasitic motion principle driver knot
The characteristics of structure is simple, easy to control, high resolution, during on the other hand eliminating the driving of parasitic motion principle piezoelectric actuator
Rollback phenomenon, enhance its movement stability.By rotating the knob of horizontal fine motion adjustment mechanism, adjustable driving is single
Primary clearance in member between arcuate structure flexible hinge and guide rail slide block.Under specific primary clearance, when piezoelectric stack
When driving voltage rapid decrease, arcuate structure flexible hinge, which causes to retract since the frictional force that elastic recovery generates balances, to be moved
Frictional force, and then effectively inhibit retract move, greatly improve the kinetic stability of piezoelectric actuator.The utility model is
Development is provided simultaneously with big stroke, high stability, high bearing capacity, structure and the simple piezoelectric actuator of control and provides a kind of solution
Certainly scheme has in fields such as precision machinery, microelectronics manufacturing industry, precision optical system, micromanipulation, precision/Ultra-precision Turnings
Wide application prospect.
The above-mentioned purpose of the utility model is achieved through the following technical solutions:
Arcuate structure hinge inhibits parasitic piezoelectric actuator to retract the device of movement, including pedestal 1, driving unit and initial
Clearance adjusting unit, the driving unit, primary clearance adjustment unit pass through screw respectively and connect with pedestal 1；The driving is single
Member is made of 3, two pieces of piezoelectric stacks 4 of arcuate structure flexible hinge, guide rail slide block 5 and guide rail fixing end 6, two pieces of piezo stacks
Heap 4 is separately mounted in two slots of arcuate structure flexible hinge 3 using interference fit type, and arcuate structure flexible hinge 3 is logical
It crosses screw to be connected with the upper surface of the horizontal fine motion adjustment mechanism 2 of primary clearance adjustment unit, guide rail fixing end 6 passes through screw
It is fixed on pedestal 1, guide rail slide block 5 is horizontally moved along guide rail direction.
The primary clearance adjustment unit includes horizontal fine motion adjustment mechanism 2, and the horizontal fine motion adjustment mechanism 2 passes through
Screw is connected with pedestal 1, by rotating the knob of horizontal fine motion adjustment mechanism 2 to arcuate structure flexible hinge in driving unit
Primary clearance between 3 and guide rail slide block 5 is adjusted.
The arcuate structure flexible hinge 3 is by the natural resiliency deformation during driving and replys, and inhibits parasitic fortune
The intrinsic rollback phenomenon of dynamic principle piezoelectric actuator.
The utility model has the beneficial effects that: inheriting big stroke, the high-resolution of parasitic motion principle piezoelectric actuator
Rate, structure and the simple advantage of control, while by using arcuate structure flexible hinge, overcome the drive of parasitic motion principle piezoelectricity
The intrinsic rollback phenomenon of dynamic device, greatly improves the kinetic stability and self-locking performance of piezoelectric actuator, to develop while having
Accurate piezoelectric actuator for big stroke, high-precision, high bearing capacity, high stability provides a kind of feasible program.It can be used for essence
Realize big stroke and micro- in the fields such as close machinery, microelectronics manufacturing industry, precision optical system, micromanipulation, precision/Ultra-precision Turning
Nano precision positioning.
Detailed description of the invention
Attached drawing described herein is used to provide a further understanding of the present invention, and is constituted part of this application,
The illustrative example and its explanation of the utility model do not constitute the improper limit to the utility model for explaining the utility model
It is fixed.
Fig. 1 is the three-dimensional knot for the device that the arcuate structure hinge of the utility model inhibits parasitic piezoelectric actuator rollback movement
Structure schematic diagram；
Fig. 2 is the structural schematic diagram of the arcuate structure flexible hinge of the utility model；
Fig. 3 is the timing control figure of the driving voltage of the utility model.
In figure: 1, pedestal；2, horizontal fine motion adjustment mechanism；3, arcuate structure flexible hinge；4, piezoelectric stack；5, guide rail is sliding
Block；6, guide rail fixing end.
Specific embodiment
The detailed content and its specific embodiment of the utility model are further illustrated with reference to the accompanying drawing.
Shown in Figure 1, the arcuate structure hinge of the utility model inhibits the device of parasitic piezoelectric actuator rollback movement,
Including pedestal 1, driving unit and primary clearance adjustment unit, the driving unit, primary clearance adjustment unit pass through spiral shell respectively
Nail is connect with pedestal 1；The driving unit is consolidated by 3, two pieces of piezoelectric stacks 4 of arcuate structure flexible hinge, guide rail slide block 5 and guide rail
Fixed end 6 forms, and two pieces of piezoelectric stacks 4 are separately mounted to two of arcuate structure flexible hinge 3 using interference fit type
In slot, arcuate structure flexible hinge 3 passes through the upper surface phase of screw and the horizontal fine motion adjustment mechanism 2 of primary clearance adjustment unit
Connection, guide rail fixing end 6 are fixed by screws on pedestal 1, and guide rail slide block 5 is horizontally moved along guide rail direction；
The primary clearance adjustment unit includes horizontal fine motion adjustment mechanism 2, and the horizontal fine motion adjustment mechanism 2 passes through spiral shell
Nail is connected with pedestal 1, by rotating the knob of horizontal fine motion adjustment mechanism 2 to arcuate structure flexible hinge 3 in driving unit
Primary clearance between guide rail slide block 5 is adjusted.
Shown in Figure 2, the movement realization of the piezoelectric actuator of the utility model is based on parasitic motion principle ZL
201210114613.9, the type driver can realize the big stroke of grade and micro/nano level positioning, but there is apparent return
Move back movement.For this purpose, the utility model by using arcuate structure flexible hinge 3, is eliminated in such piezoelectric actuator motion process
Rollback phenomenon, realize stable step motion.
The arcuate structure flexible hinge 3 can inhibit parasitic fortune by the natural resiliency deformation and reply during driving
The intrinsic rollback phenomenon of dynamic principle piezoelectric actuator, and then greatly promote the kinetic stability of piezoelectric actuator and self-locking
Property.
It is shown in Figure 3, it is the timing control figure of the utility model driving voltage, input voltage is with this waveform to piezo stack
Heap is driven.
The foregoing is merely the preferred embodiments of the utility model, are not intended to limit the utility model, for ability
For the technical staff in domain, various modifications and changes may be made to the present invention.It is all to made by the utility model it is any modification,
Equivalent replacement, improvement etc., should be included within the scope of protection of this utility model.
Claims (2)
1. the device that a kind of arcuate structure hinge inhibits parasitic piezoelectric actuator rollback movement, it is characterised in that: including pedestal
(1), driving unit and primary clearance adjustment unit, the driving unit, primary clearance adjustment unit pass through screw and base respectively
Seat (1) connection；The driving unit is by arcuate structure flexible hinge (3), two pieces of piezoelectric stacks (4), guide rail slide block (5) and guide rail
Fixing end (6) composition, two pieces of piezoelectric stacks (4) are separately mounted to arcuate structure flexible hinge using interference fit type
(3) in two slots, arcuate structure flexible hinge (3) passes through the horizontal fine motion adjustment mechanism of screw and primary clearance adjustment unit
(2) upper surface is connected, and guide rail fixing end (6) is fixed by screws on pedestal (1), and guide rail slide block (5) is along guide rail side
To being horizontally moved.
2. arcuate structure hinge according to claim 1 inhibits the device of parasitic piezoelectric actuator rollback movement, feature
Be: the primary clearance adjustment unit includes horizontal fine motion adjustment mechanism (2), and the horizontal fine motion adjustment mechanism (2) is logical
Screw is crossed to be connected with pedestal (1), it is soft to arcuate structure in driving unit by the knob for rotating horizontal fine motion adjustment mechanism (2)
Primary clearance between property hinge (3) and guide rail slide block (5) is adjusted.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821567629.4U CN208597034U (en) | 2018-09-26 | 2018-09-26 | A device for suppressing the retraction motion of parasitic piezoelectric actuators by hinges with arc structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821567629.4U CN208597034U (en) | 2018-09-26 | 2018-09-26 | A device for suppressing the retraction motion of parasitic piezoelectric actuators by hinges with arc structure |
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| CN208597034U true CN208597034U (en) | 2019-03-12 |
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| CN201821567629.4U Expired - Fee Related CN208597034U (en) | 2018-09-26 | 2018-09-26 | A device for suppressing the retraction motion of parasitic piezoelectric actuators by hinges with arc structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110912444A (en) * | 2019-04-08 | 2020-03-24 | 浙江师范大学 | Bionic creeping type piezoelectric actuator |
| CN112271953A (en) * | 2020-10-30 | 2021-01-26 | 浙江工业职业技术学院 | Inchworm stick-slip hybrid drive type piezoelectric linear driver and installation process |
-
2018
- 2018-09-26 CN CN201821567629.4U patent/CN208597034U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110912444A (en) * | 2019-04-08 | 2020-03-24 | 浙江师范大学 | Bionic creeping type piezoelectric actuator |
| CN112271953A (en) * | 2020-10-30 | 2021-01-26 | 浙江工业职业技术学院 | Inchworm stick-slip hybrid drive type piezoelectric linear driver and installation process |
| CN112271953B (en) * | 2020-10-30 | 2022-09-02 | 浙江工业职业技术学院 | Inchworm stick-slip hybrid drive type piezoelectric linear driver and installation process |
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