[go: up one dir, main page]

CN110601597B - A dual-mode composite inchworm ultrasonic motor - Google Patents

A dual-mode composite inchworm ultrasonic motor Download PDF

Info

Publication number
CN110601597B
CN110601597B CN201910905048.XA CN201910905048A CN110601597B CN 110601597 B CN110601597 B CN 110601597B CN 201910905048 A CN201910905048 A CN 201910905048A CN 110601597 B CN110601597 B CN 110601597B
Authority
CN
China
Prior art keywords
rotor
piezoelectric ceramic
piezoelectric
piezoelectric stack
ceramic piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910905048.XA
Other languages
Chinese (zh)
Other versions
CN110601597A (en
Inventor
张锦
刘佩珊
殷玉枫
吉正杰
冯毅杰
王向梅
刘燚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyuan University of Science and Technology
Original Assignee
Taiyuan University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyuan University of Science and Technology filed Critical Taiyuan University of Science and Technology
Priority to CN201910905048.XA priority Critical patent/CN110601597B/en
Publication of CN110601597A publication Critical patent/CN110601597A/en
Application granted granted Critical
Publication of CN110601597B publication Critical patent/CN110601597B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

本发明涉及一种双模态复合型尺蠖超声波电机,属于压电驱动技术领域,本发明包括底座、轴承、纵板、固定板、模态转换器、压电陶瓷片、压电叠堆、转子、输出轴;所述模态转换器、压电陶瓷片、压电叠堆构成超声波电机的定子组件;所述压电陶瓷片的数量为两个,所述压电叠堆的数量为两个,所述输出轴为一个;所述转子与输出轴固定连接,输出轴穿过纵板上的通孔通过轴承与纵板连接;所述模态转换器上有两个椭圆固定器,同时有两个驱动足;所述驱动足与转子外弧面之间设有供驱动足振动的间隙。本发明将压电陶瓷片的纵向振动和压电叠堆的伸缩振动复合成驱动足对转子的微幅驱动,通过摩擦耦合在惯性作用下推动转子进行正向旋转运动或反向旋转运动,能效利用率高、使用灵活。

Figure 201910905048

The invention relates to a dual-mode composite inchworm ultrasonic motor, which belongs to the technical field of piezoelectric driving. The invention comprises a base, a bearing, a vertical plate, a fixed plate, a mode converter, a piezoelectric ceramic sheet, a piezoelectric stack, and a rotor , the output shaft; the modal converter, the piezoelectric ceramic sheet, and the piezoelectric stack constitute the stator assembly of the ultrasonic motor; the number of the piezoelectric ceramic sheet is two, and the number of the piezoelectric stack is two , the output shaft is one; the rotor is fixedly connected to the output shaft, and the output shaft passes through the through hole on the vertical plate and is connected to the vertical plate through a bearing; there are two elliptical fixers on the modal converter, and at the same time there are Two driving feet; a gap for the vibration of the driving feet is provided between the driving feet and the outer arc surface of the rotor. The invention combines the longitudinal vibration of the piezoelectric ceramic sheet and the expansion and contraction vibration of the piezoelectric stack into a small amplitude drive of the rotor by the driving foot, and pushes the rotor to perform forward rotation or reverse rotation under the action of inertia through friction coupling. High utilization rate and flexible use.

Figure 201910905048

Description

一种双模态复合型尺蠖超声波电机A dual-mode composite inchworm ultrasonic motor

技术领域technical field

本发明涉及压电驱动技术领域,特别涉及一种双模态复合型尺蠖超声波电机。The invention relates to the technical field of piezoelectric driving, in particular to a dual-mode composite inchworm ultrasonic motor.

背景技术Background technique

随着科学研究和生产实践的不断发展,系统中必不可少的微电机伺服系统很大程度上决定了系统整体性能的优劣,为了适应现代电子技术体积小、响应快、精度高和无磁场干扰等要求,超声波电机(USM)应运而生,超声波电机利用压电材料的逆压电效应将振动(机械振动频率在20kHz以上)或准静态变形转化为机械能,打破了传统电机需由电磁效应获得转速和转矩的概念,自20世纪80年代以来就备受关注。超声波电机转矩密度大、可控性好、不受外界磁场干扰、噪声小、可以实现低速运转,在医疗设备、未来空天飞行器、机器人、微电机系统(MEMS)、超高精度测量、新型武器装备以及生命科学等领域有着十分广阔的应用前景。With the continuous development of scientific research and production practice, the indispensable micro-motor servo system in the system largely determines the overall performance of the system. In order to adapt to the small size, fast response, high precision and no magnetic field of modern electronic technology Ultrasonic motor (USM) came into being in response to the requirements of interference and other requirements. The ultrasonic motor uses the inverse piezoelectric effect of piezoelectric materials to convert vibration (mechanical vibration frequency above 20kHz) or quasi-static deformation into mechanical energy, breaking the traditional motor need to be affected by electromagnetic effects. The concept of obtaining speed and torque has been in the spotlight since the 1980s. Ultrasonic motors have high torque density, good controllability, no interference from external magnetic fields, low noise, and can achieve low-speed operation. Weapons and equipment and life science and other fields have very broad application prospects.

在20世纪80年代末90年代初,超声波电机获得了我国科学工作者的关注,并在微型超声波电机的设计理论、控制技术、性能分析以及产业化关键技术等方面取得了一系列研究成果,已开发研制了多种结构完整能实际运行的超声波电机,有的已经在工程上得到了应用,超声波电机的产业化应用前景被国内大型企业和传统电机生产厂家看好。目前,国内外研究工作者主要的研究思路侧重于发明新型电机结构以及驱动控制技术,但是只有结合有效的控制方法和控制策略,才能发挥超声波电机的卓越性能。In the late 1980s and early 1990s, ultrasonic motors attracted the attention of Chinese scientists, and achieved a series of research results in the design theory, control technology, performance analysis and key technologies of industrialization of micro ultrasonic motors. A variety of ultrasonic motors with complete structures and practical operation have been developed, and some of them have been applied in engineering. The industrial application prospects of ultrasonic motors are favored by large domestic enterprises and traditional motor manufacturers. At present, the main research ideas of domestic and foreign researchers focus on the invention of new motor structures and drive control technologies, but only by combining effective control methods and control strategies can the excellent performance of ultrasonic motors be brought into play.

随着新材料、新工艺和新结构的不断涌现,超声波电机的种类不断扩充,但能够真正实现商业化生产的超声波电机却少之又少,故需设计一种接近实际要求并有望逐步实现批量生产的超声波电机。With the continuous emergence of new materials, new processes and new structures, the types of ultrasonic motors continue to expand, but there are very few ultrasonic motors that can truly realize commercial production. Therefore, it is necessary to design a kind of ultrasonic motor that is close to the actual requirements and is expected to gradually realize batch Production of ultrasonic motors.

在公开号为CN109861582A,发明名称为《一种惯性旋转压电马达》的专利提出了一种在一对质量块的作用下在松开状态下连续旋转一个微小的角度以实现压电马达的单向旋转运动。这种压电马达工作时的摩擦损害小、运动效率提高5%-10%。但该发明存在效率较低,摩擦损耗较大等问题。In the patent with publication number CN109861582A and the invention titled "An Inertia Rotation Piezoelectric Motor", it is proposed to continuously rotate a tiny angle under the action of a pair of mass blocks in a loosened state to realize a single piezoelectric motor. Rotation movement. The friction damage of the piezoelectric motor is small, and the motion efficiency is increased by 5%-10%. However, this invention has problems such as low efficiency and large friction loss.

超声波电机具有良好的电气参数和机械参数,但是结构复杂、磨损消耗大、驱动效率较低阻碍了超声波电机进一步发展,本发明结构简单,利用压电双晶片与压电叠堆的复合作用产生驱动转子旋转的驱动力,并采用双足驱动的原理提高了超声波电机的驱动效率。The ultrasonic motor has good electrical parameters and mechanical parameters, but the complex structure, high wear consumption and low driving efficiency hinder the further development of the ultrasonic motor. The driving force of the rotor rotation, and the principle of bipedal driving is adopted to improve the driving efficiency of the ultrasonic motor.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于提供一种双模态复合型尺蠖超声波电机,从而解决现在技术中存在的前述问题。The purpose of the present invention is to provide a dual-mode composite inchworm ultrasonic motor, so as to solve the aforementioned problems existing in the present technology.

为了实现上述目的,本发明采用的技术方案如下:In order to achieve the above object, the technical scheme adopted in the present invention is as follows:

一种尺蠖型超声波电机,主要包括定子组件和转子,其特征在于:所述超声波电机包括底座1、轴承2、纵板3、固定板4、模态转换器5、压电陶瓷片6、压电叠堆7、椭圆固定器8、转子9、输出轴10;所述底座1与纵板3固连,所述模态转换器5是一体件,材料为弹性体,所述固定板4包含左右两个固定板,压紧固定模态转换器5;所述模态转换器5设置有固定压电叠堆的椭圆固定器8;所述模态转换器5上半部分弹性板的左右两侧各黏贴一片压电陶瓷片,下半部分利用椭圆固定器固定两个压电叠堆。An inchworm-type ultrasonic motor mainly includes a stator assembly and a rotor, and is characterized in that: the ultrasonic motor includes a base 1, a bearing 2, a vertical plate 3, a fixed plate 4, a mode converter 5, a piezoelectric ceramic sheet 6, a pressure The electric stack 7, the elliptical holder 8, the rotor 9, and the output shaft 10; the base 1 is fixedly connected with the vertical plate 3, the mode converter 5 is an integral piece, and the material is an elastic body, and the fixing plate 4 includes The left and right fixed plates press and fix the modal converter 5; the modal converter 5 is provided with an elliptical holder 8 for fixing the piezoelectric stack; A piezoelectric ceramic sheet is pasted on each side, and two piezoelectric stacks are fixed by an elliptical holder on the bottom half.

所述压电陶瓷片6包括左侧压电陶瓷片A1和右侧压电陶瓷片A2,左侧压电陶瓷片A1与右侧压电陶瓷片A2均沿厚度方向极化。The piezoelectric ceramic sheet 6 includes a left piezoelectric ceramic sheet A1 and a right piezoelectric ceramic sheet A2, and both the left piezoelectric ceramic sheet A1 and the right piezoelectric ceramic sheet A2 are polarized along the thickness direction.

所述压电叠堆7包括左侧压电叠堆a1和右侧压电叠堆a2,压电叠堆a1和压电叠堆a2将多层沿厚度极化的压电陶瓷片胶接在一起,并在内部嵌入电极,输出的总变形量为各层压电陶瓷片的变形输出量之和。The piezoelectric stack 7 includes a left piezoelectric stack a1 and a right piezoelectric stack a2, and the piezoelectric stack a1 and the piezoelectric stack a2 glue multiple layers of piezoelectric ceramic sheets polarized along the thickness on each other. Together with electrodes, the total output deformation is the sum of the deformation output of each layer of piezoelectric ceramic sheets.

所述压电陶瓷片A1和压电陶瓷片A2通过导电环氧树脂胶对称粘接于Y型弹性体的两侧,表面镀层金属为银,引线方式为锡焊。锡焊工艺的可靠性高于胶接工艺,可提高超声波电机的工作寿命和工作效率。The piezoelectric ceramic sheet A1 and the piezoelectric ceramic sheet A2 are symmetrically bonded to both sides of the Y-shaped elastic body through conductive epoxy resin glue, the surface plating metal is silver, and the lead method is soldering. The reliability of the soldering process is higher than that of the gluing process, which can improve the working life and working efficiency of the ultrasonic motor.

所述压电叠堆a1和压电叠堆a2利用导电环氧树脂胶粘接于椭圆固定装置的内侧表面。The piezoelectric stack a1 and the piezoelectric stack a2 are bonded to the inner surface of the elliptical fixing device by using conductive epoxy resin glue.

所述两个椭圆固定装置之间的夹角大小为90度。The included angle between the two elliptical fixing devices is 90 degrees.

优选的,所述轴承采用滚珠轴承。Preferably, the bearing adopts a ball bearing.

更进一步,所述两个驱动足与转子接触的表面粘接有A摩擦材料。Furthermore, A friction material is adhered to the surfaces of the two driving feet in contact with the rotor.

更进一步,所述转子的外弧面粘接有B摩擦材料。Further, the outer arc surface of the rotor is bonded with B friction material.

本发明采用以上技术方案与现有技术相比,具有以下技术效果:Compared with the prior art, the present invention adopts the above technical scheme, and has the following technical effects:

本发明提出的超声波电机利用压电陶瓷片的纵向振动和压电叠堆的伸缩振动复合成驱动足对转子的微幅驱动,通过摩擦耦合在惯性作用下推动转子进行顺时针旋转运动或逆时针旋转运动,能效利用率高;超声波电机的结构具有对称性,使得超声波电机的阻抗特性也具有良好对称性。The ultrasonic motor proposed by the invention utilizes the longitudinal vibration of the piezoelectric ceramic sheet and the expansion and contraction vibration of the piezoelectric stack to form a micro-amplitude drive of the rotor by the driving foot, and pushes the rotor to rotate clockwise or counterclockwise through friction coupling under the action of inertia. Rotational motion, high energy efficiency and utilization; the structure of the ultrasonic motor has symmetry, which makes the impedance characteristics of the ultrasonic motor also have good symmetry.

附图说明Description of drawings

图1是双模态复合型尺蠖超声波电机的结构示意图。图中标号名称:1-底座;2-轴承;3-纵板;4-固定板;5-模态转换器;6-压电陶瓷片;7-压电叠堆;8-椭圆固定器;9-转子;10-输出轴。Figure 1 is a schematic diagram of the structure of a dual-mode composite inchworm ultrasonic motor. Label name in the figure: 1-base; 2-bearing; 3-vertical plate; 4-fixed plate; 5-modal converter; 6-piezoelectric ceramic sheet; 7-piezoelectric stack; 8-ellipse holder; 9-rotor; 10-output shaft.

图2是模态转换器示意图。图中标号名称:A1-左侧压电陶瓷片;A2-右侧压电陶瓷片;a1-左侧压电叠堆;a2-右侧压电叠堆。Figure 2 is a schematic diagram of a modal converter. Label name in the figure: A1-left piezoelectric ceramic sheet; A2-right piezoelectric ceramic sheet; a1-left piezoelectric stack; a2-right piezoelectric stack.

图3是施加幅值为20Vp-p的交变电压时双模态复合型尺蠖超声波电机顺时针旋转的工作模态示意图。FIG. 3 is a schematic diagram of the working mode of the dual-mode composite inchworm ultrasonic motor rotating clockwise when an alternating voltage with an amplitude of 20V pp is applied.

图4是施加幅值为20Vp-p的交变电压时双模态复合型尺蠖超声波电机逆时针旋转的工作模态示意图。4 is a schematic diagram of the working mode of the dual-mode composite inchworm ultrasonic motor rotating counterclockwise when an alternating voltage with an amplitude of 20V pp is applied.

图中,箭头代表压电叠堆的伸缩方向。虚线表示模态转换器的变形情况。In the figure, the arrows represent the stretching direction of the piezoelectric stack. The dashed line represents the deformation of the modal converter.

具体实施方式Detailed ways

为了更清楚地说明本方案的技术特点,下面结合附图对本发明进行详细阐述。In order to illustrate the technical features of the solution more clearly, the present invention will be described in detail below with reference to the accompanying drawings.

一种双模态复合型尺蠖超声波电机的结构如图1所示,包含1-底座;2-轴承;3-纵板;4-固定板;5-模态转换器;6-压电陶瓷片;7-压电叠堆;8-椭圆固定器;9-转子;10-输出轴。所述底座1与纵板3固连,所述模态转换器5是一体件,材料为弹性体。The structure of a dual-mode composite inchworm ultrasonic motor is shown in Figure 1, including 1-base; 2-bearing; 3-vertical plate; 4-fixing plate; 5-mode converter; 6-piezoelectric ceramic sheet ; 7-piezoelectric stack; 8-elliptical holder; 9-rotor; 10-output shaft. The base 1 and the vertical plate 3 are fixedly connected, and the mode converter 5 is an integral piece, and the material is an elastic body.

对于经过极化处理的压电陶瓷片,压电应变常数矩阵d的分量分为3个非零分量d33,d31,d15。本文提出的超声波电机的压电陶瓷片工作在d31横向振动模态,压电叠堆工作在d33纵向工作模态。For the polarized piezoelectric ceramic sheet, the components of the piezoelectric strain constant matrix d are divided into three non-zero components d33, d31, and d15. The piezoelectric ceramic sheet of the ultrasonic motor proposed in this paper works in the d31 transverse vibration mode, and the piezoelectric stack works in the d33 longitudinal working mode.

如图2所示,所述定子组件包括Y型模态转换器5、左侧压电陶瓷片A1、右侧压电陶瓷片A2、左侧压电叠堆a1和右侧压电叠堆a2;模态转换器上设有两个椭圆固定器8,用来固定两个压电叠堆。所述模态转换器5为一体化结构,下端有两个驱动足;所述压电陶瓷片6和所述压电叠堆7用于接收外部激励信号,并转化为超声振动。As shown in FIG. 2 , the stator assembly includes a Y-shaped modal converter 5 , a left piezoelectric ceramic sheet A1 , a right piezoelectric ceramic sheet A2 , a left piezoelectric stack a1 and a right piezoelectric stack a2 ; There are two elliptical holders 8 on the modal converter for fixing two piezoelectric stacks. The modal converter 5 is an integrated structure with two driving feet at the lower end; the piezoelectric ceramic sheet 6 and the piezoelectric stack 7 are used to receive external excitation signals and convert them into ultrasonic vibrations.

所述转子与输出轴固定连接,所述输出轴穿过纵板上的通孔,所述输出轴和所述通孔并通过轴承连接。The rotor is fixedly connected with the output shaft, the output shaft passes through the through hole on the longitudinal plate, and the output shaft and the through hole are connected through a bearing.

所述底板与纵板固连。The bottom plate is fixedly connected with the vertical plate.

所述两片压电陶瓷片沿厚度方向极化,通过导电环氧树脂胶对称胶粘于模态转换器两侧,所述压电陶瓷片的表面镀层金属为银,并在压电陶瓷片与胶粘面相对的表面设置引线,引线方式为锡焊,通过引线向两片压电陶瓷片施加两相交流电信号。The two piezoelectric ceramic sheets are polarized along the thickness direction, and are symmetrically glued on both sides of the modal converter through conductive epoxy resin glue. A lead wire is arranged on the surface opposite to the adhesive surface, and the lead wire method is soldering, and a two-phase alternating current signal is applied to the two piezoelectric ceramic sheets through the lead wire.

所述压电叠堆将多层沿厚度极化的压电陶瓷片胶接在一起,并在内部嵌入电极,输出的总变形量为各层压电陶瓷片的变形输出量之和。所述压电叠堆利用导电环氧树脂胶粘接于椭圆固定装置的内侧表面,在胶粘的表面镀银并设置引线。The piezoelectric stack glues together multiple layers of piezoelectric ceramic sheets polarized along the thickness, and embeds electrodes inside, and the total output deformation is the sum of the deformation output of each layer of piezoelectric ceramic sheets. The piezoelectric stack is bonded to the inner surface of the elliptical fixing device with conductive epoxy resin glue, and the glued surface is plated with silver and provided with lead wires.

本发明还公开了一种该双模态复合型尺蠖超声波电机的工作方式:The invention also discloses a working mode of the dual-mode composite inchworm ultrasonic motor:

向沿厚度极化的压电陶瓷片的上下表面施加交变电压时,压电陶瓷片会产生一阶纵向振动。如图3(1)所示,向左侧压电陶瓷片A1施加20Vp-p的正向电压,左侧压电陶瓷片伸长;向右侧压电陶瓷片A2施加20Vp-p的反向电压,右侧压电陶瓷片收缩,模态转换器的上半部分产生图中虚线所示的形变,使模态转换器的下半部分产生图中虚线所示的位移;左侧驱动足压紧转子,与转子外弧面形成一个摩擦耦合面;右侧驱动足离开转子外弧面一定距离,不与转子产生接触面。此时向左侧压电叠堆a1和右侧压电叠堆a2同时施加反向电压,左侧压电叠堆和右侧压电叠堆同时缩短,左侧驱动足通过与转子外弧面形成的摩擦耦合面利用摩擦力给转子一个驱动力,方向为右上,推动转子顺时针旋转。When an alternating voltage is applied to the upper and lower surfaces of the piezoelectric ceramic sheet polarized along the thickness, the piezoelectric ceramic sheet will generate first-order longitudinal vibration. As shown in Figure 3(1), a forward voltage of 20V pp is applied to the left piezoelectric ceramic sheet A1, and the left piezoelectric ceramic sheet is stretched; a reverse voltage of 20 V pp is applied to the right piezoelectric ceramic sheet A2, The right piezoelectric ceramic sheet shrinks, the upper half of the modal converter produces the deformation shown by the dotted line in the figure, and the lower half of the modal converter produces the displacement shown by the dotted line in the figure; the left driving foot presses the rotor , forming a friction coupling surface with the outer arc surface of the rotor; the right driving foot is separated from the outer arc surface of the rotor by a certain distance and does not have a contact surface with the rotor. At this time, a reverse voltage is applied to the left piezoelectric stack a1 and the right piezoelectric stack a2 at the same time, the left piezoelectric stack and the right piezoelectric stack are shortened at the same time, and the left driving foot passes through the outer arc surface of the rotor. The formed friction coupling surface uses the friction force to give the rotor a driving force in the upper right direction, which pushes the rotor to rotate clockwise.

如图3(2)所示,向左侧压电陶瓷片A1施加20Vp-p的反向电压,左侧压电陶瓷片收缩;向右侧压电陶瓷片A2施加20Vp-p的正向电压,右侧压电陶瓷片伸长,模态转换器的上半部分产生图中虚线所示的形变,使模态转换器的下半部分产生图中虚线所示的位移;左侧驱动足离开转子外弧面一定距离,不产生接触面;右侧驱动足压紧转子,与转子外弧面形成一个摩擦耦合面。此时向左侧压电叠堆a1和右侧压电叠堆a2同时施加正向电压,左侧压电叠堆和右侧压电叠堆同时伸长,右侧驱动足通过与转子外弧面形成的摩擦耦合面利用摩擦力给转子一个驱动力,方向为右下,推动转子顺时针旋转。As shown in Figure 3(2), apply a reverse voltage of 20V pp to the left piezoelectric ceramic sheet A1, and the left piezoelectric ceramic sheet shrinks; apply a forward voltage of 20 V pp to the right piezoelectric ceramic sheet A2, and the right piezoelectric ceramic sheet A2 The side piezoelectric ceramic sheet is elongated, and the upper half of the modal converter produces the deformation shown by the dotted line in the figure, so that the lower half of the modal converter produces the displacement shown by the dotted line in the figure; the left driving foot leaves the rotor. The arc surface is at a certain distance, and there is no contact surface; the right driving foot presses the rotor to form a friction coupling surface with the outer arc surface of the rotor. At this time, a forward voltage is applied to the left piezoelectric stack a1 and the right piezoelectric stack a2 at the same time, the left piezoelectric stack and the right piezoelectric stack are stretched at the same time, and the right driving foot passes through the outer arc with the rotor. The friction coupling surface formed by the surface uses the friction force to give the rotor a driving force, and the direction is the lower right, which pushes the rotor to rotate clockwise.

图3(3)和图3(4)是以上两个基本工作模态的重复过程,模态转换器按照图3(1)~图3(4)所示工作模态连续运动,使两个驱动足在两点分别驱动,转子可以实现连续顺时针旋转运动。Figures 3(3) and 3(4) are the repetitive processes of the above two basic working modes. The modal converter moves continuously according to the working modes shown in Figures 3(1) to 3(4), so that the two The driving foot is driven at two points respectively, and the rotor can realize continuous clockwise rotation.

逆时针旋转运动的运动机理与顺时针旋转运动的运动机理一致,仅改变施加压电的正负,工作模态如图4所示,此处不再赘述。The motion mechanism of the counterclockwise rotational motion is consistent with the motion mechanism of the clockwise rotational motion, only the positive and negative of the applied piezoelectric are changed, and the working mode is shown in Figure 4, which will not be repeated here.

本发明提出的超声波电机利用压电陶瓷片的纵向振动和压电叠堆的伸缩振动复合成驱动足对转子的微幅驱动,通过摩擦耦合在惯性作用下推动转子进行正向旋转运动或反向旋转运动,能效利用率高、使用灵活。定子组件采用了贴片式结构,易于加工,节约成本。The ultrasonic motor proposed by the invention utilizes the longitudinal vibration of the piezoelectric ceramic sheet and the expansion and contraction vibration of the piezoelectric stack to form a micro-amplitude drive of the rotor by the driving foot, and pushes the rotor to perform forward rotation or reverse rotation under the action of inertia through friction coupling. Rotating motion, high energy efficiency and flexible use. The stator assembly adopts a patch structure, which is easy to process and saves costs.

本发明通过上述实施方式进行了说明,但应当理解的是,上述实施方式仅用于举例和说明,并非意在将本发明限制在所描述的实施方式范围内。本领域技术人员可以理解的是,根据本发明的教导还可以做出更多种的变型和修改,这些变型和修改均属于本发明的保护范围。The present invention has been described by the above-mentioned embodiments, but it should be understood that the above-mentioned embodiments are only used for illustration and description, and are not intended to limit the present invention to the scope of the described embodiments. It can be understood by those skilled in the art that more variations and modifications can be made according to the teachings of the present invention, which all belong to the protection scope of the present invention.

Claims (5)

1. A bimodal composite inchworm ultrasonic motor comprises a base, a bearing, a modal converter, a piezoelectric ceramic piece, a piezoelectric stack, a rotor and an output shaft, wherein the stator assembly comprises the modal converter, the piezoelectric ceramic piece and the piezoelectric stack;
the mode converter is a Y-type mode integrated piece made of an elastomer; a piezoelectric ceramic piece is respectively adhered to the left side and the right side of the elastic plate at the upper half part of the modal converter, two driving feet are arranged at the lower half part of the modal converter, and the driving feet face the rotor surface and are respectively fixed with one piezoelectric stack; the rotor is a disk metal body, and the outer arc surface of the rotor and the two driving feet form two friction coupling surfaces;
the piezoelectric ceramic piece is polarized along the thickness direction, and the longitudinal vibration of the piezoelectric ceramic piece and the telescopic vibration of the piezoelectric stack are compounded to be driven by a micro amplitude of the rotor, so that the rotor is pushed to rotate;
when alternating voltage is applied to the upper surface and the lower surface of the piezoelectric ceramic sheet polarized along the thickness, the piezoelectric ceramic sheet can generate first-order longitudinal vibration; applying a forward voltage of 20Vp-p to the left piezoelectric ceramic piece, and extending the left piezoelectric ceramic piece; applying reverse voltage of 20Vp-p to the right piezoelectric ceramic piece, shrinking the right piezoelectric ceramic piece, and generating deformation on the upper half part of the modal converter to enable the lower half part of the modal converter to generate displacement; the left driving foot presses the rotor to form a friction coupling surface with the outer arc surface of the rotor; the left driving foot is away from the outer arc surface of the rotor by a certain distance and does not generate a contact surface with the rotor, reverse voltage is simultaneously applied to the left piezoelectric stack and the right piezoelectric stack, the left piezoelectric stack and the right piezoelectric stack are simultaneously shortened, the left driving foot applies a driving force to the rotor by using friction force through a friction coupling surface formed by the left driving foot and the outer arc surface of the rotor, the direction is upward right, and the rotor is pushed to rotate clockwise; applying a reverse voltage of 20Vp-p to the left piezoelectric ceramic piece, and contracting the left piezoelectric ceramic piece; applying a forward voltage of 20Vp-p to the right piezoelectric ceramic piece, extending the right piezoelectric ceramic piece, and generating deformation on the upper half part of the modal converter to enable the lower half part of the modal converter to generate displacement; the left driving foot is away from the outer arc surface of the rotor by a certain distance, and no contact surface is generated; the right side driving foot compresses the rotor to form a friction coupling surface with the outer arc surface of the rotor, forward voltage is applied to the left side piezoelectric stack and the right side piezoelectric stack at the same time, the left side piezoelectric stack and the right side piezoelectric stack extend at the same time, the right side driving foot utilizes friction force to provide driving force for the rotor through the friction coupling surface formed with the outer arc surface of the rotor, and the rotor is pushed to rotate clockwise in the downward right direction.
2. The bimodal compound inchworm ultrasonic motor of claim 1, wherein: the base is vertically connected with the longitudinal plate, and the number of the output shafts is one; the rotor is fixedly connected with the output shaft, and the output shaft penetrates through the through hole in the longitudinal plate and is connected with the longitudinal plate through the bearing.
3. The bimodal compound inchworm ultrasonic motor of claim 1, wherein: the piezoelectric ceramic plates are symmetrically adhered to two sides of the upper half part of the elastic plate of the mode converter through conductive epoxy resin glue, the surface plating layer metal is silver, and the lead mode is tin soldering.
4. The bimodal compound inchworm ultrasonic motor of claim 1, wherein: the fixed die converter also comprises a left fixed plate and a right fixed plate which are used for compressing the fixed die converter; the mode converter is provided with 2 elliptical fixing devices for fixing the piezoelectric stacks, and the included angle of a vertical plane between the two elliptical fixing devices is 90 degrees.
5. The bimodal compound inchworm ultrasonic motor of claim 1, wherein: the piezoelectric stack is used for gluing a plurality of layers of piezoelectric ceramic pieces polarized along the thickness together, electrodes are embedded in the piezoelectric stack, and the total output deformation is the sum of the output deformation of each layer of piezoelectric ceramic piece.
CN201910905048.XA 2019-09-24 2019-09-24 A dual-mode composite inchworm ultrasonic motor Active CN110601597B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910905048.XA CN110601597B (en) 2019-09-24 2019-09-24 A dual-mode composite inchworm ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910905048.XA CN110601597B (en) 2019-09-24 2019-09-24 A dual-mode composite inchworm ultrasonic motor

Publications (2)

Publication Number Publication Date
CN110601597A CN110601597A (en) 2019-12-20
CN110601597B true CN110601597B (en) 2022-07-15

Family

ID=68862950

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910905048.XA Active CN110601597B (en) 2019-09-24 2019-09-24 A dual-mode composite inchworm ultrasonic motor

Country Status (1)

Country Link
CN (1) CN110601597B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116476119B (en) * 2023-06-21 2023-09-12 季华实验室 Opening angle type two-finger clamp and excitation method thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004304963A (en) * 2003-03-31 2004-10-28 Seiko Epson Corp Piezo actuator
US6979936B1 (en) * 1999-10-31 2005-12-27 Nanomotion Ltd. Piezoelectric motors and motor driving configurations

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH696993A5 (en) * 2004-06-24 2008-02-29 Miniswys Sa Piezoelectric drive unit positioning optical component, has resonator connecting pair of arms which oscillate to and from each other, causing movement along shaft
JP4209463B2 (en) * 2007-03-15 2009-01-14 パナソニック株式会社 Ultrasonic actuator
JP5186495B2 (en) * 2007-06-14 2013-04-17 パナソニック株式会社 Vibrating actuator and drive device including the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6979936B1 (en) * 1999-10-31 2005-12-27 Nanomotion Ltd. Piezoelectric motors and motor driving configurations
JP2004304963A (en) * 2003-03-31 2004-10-28 Seiko Epson Corp Piezo actuator

Also Published As

Publication number Publication date
CN110601597A (en) 2019-12-20

Similar Documents

Publication Publication Date Title
CN107147328B (en) It is bent the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom movement realized using the driver
CN103746597B (en) SMD T-shaped dual-feet linear piezoelectric supersonic motor vibrator
CN106953539A (en) Longitudinal-bending compound peristaltic precision piezoelectric actuator and its excitation method
CN108111056B (en) Rotary ultrasonic motor driven by four tuning fork type piezoelectric vibrators and working mode
CN107070294B (en) A kind of inertia jump Piexoelectric actuator based on flexible hinge
CN110601597B (en) A dual-mode composite inchworm ultrasonic motor
CN101072001B (en) Toothless Traveling Wave Rotary Ultrasonic Motor and Its Working Mode and Electric Excitation Method
CN1667934A (en) Slotted Metal Square Pillar Piezoelectric Composite Ultrasonic Micromotor
CN102237818A (en) Tower-like ultrasonic motor with asymmetrical structure and asymmetrical modes thereof as well as electric excitation mode of asymmetrical modes
CN110601596B (en) A Standing Wave Magnetic Repulsion Unidirectional Rotary Motor Based on Piezoelectric Ceramics
CN104124891A (en) Piezoelectric vibrator and precise displacement platform comprising same
CN103560694A (en) Longitudinal-bending combined type ultrasonic motor
CN204013280U (en) The bionical linear piezoelectric actuator of many contact-actuatings and precise jiggle platform
CN104716864B (en) Linear piezoelectric motor of inertia type middle-sized structure and control method thereof
CN102118118A (en) Linear type ultrasonic micromotor
CN106533253A (en) Ultrasonic motor with multiple axially laminated stators
CN106982005B (en) Asymmetric biplate piezoelectric fabric inertia drive
CN110022089A (en) A kind of sandwich magnetic repulsion rotating electric machine based on piezoelectric ceramics
US20070176515A1 (en) Stator and Carriage for a Piezoelectric Liner Motor
CN109639177B (en) A patch type linear ultrasonic motor based on 3D printing resin stator
CN106533250A (en) Ultrasonic motor of multi-stator planar array structure
CN201312268Y (en) Ultrasonic motor with double diaphragm type stator
CN1610238A (en) Double-rotor cylinder traveling wave type single-phase drive ultrasonic motor
CN206370784U (en) An ultrasonic motor with multi-stator planar array structure
CN222169638U (en) Linear ultrasonic motor vibrator module

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant