CN104124891A - Piezoelectric vibrator and precise displacement platform comprising same - Google Patents
Piezoelectric vibrator and precise displacement platform comprising same Download PDFInfo
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
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Abstract
The invention discloses a piezoelectric vibrator and a precise displacement platform comprising same and belongs to the technical field of piezoelectricity. An upper surface and a lower surface of the piezoelectric vibrator are provided with multiple layers of piezoelectric ceramics; one side of the piezoelectric vibrator is provided with a ceramic contact; inner electrodes are arranged between layers and an innermost surface of the multiple layers of piezoelectric ceramics; the inner electrodes of the multiple layers of piezoelectric ceramics are connected in a parallel mode and are connected with outer electrodes; the multiple layers of piezoelectric ceramics on the upper surface and the lower surface of the piezoelectric vibrator are divided into four electrode areas respectively, the piezoelectric ceramics are polarized along the thickness direction, and the polarization directions of the adjacent two electrode areas are opposite; the four electrode areas of the upper surface and the lower surface of the piezoelectric vibrator are symmetrical, connecting lines are in accordance with charging ways, and the charging ways of the adjacent two electrode areas in the same surface are opposite. According to the piezoelectric vibrator, the multiple layers of piezoelectric ceramics are adopted, large driving force can be provided with small driving force, and the driving stability is improved.
Description
Technical field
The present invention relates to piezo technology field, refer to especially a kind of piezoelectric vibrator and comprise the precision displacement platform of this piezoelectric vibrator.
Background technology
Piezoelectric actuator is the inverse piezoelectric effect of utilizing piezoelectric, excite elastomer to produce the micro breadth oscillation of supersonic range, force the particle of contact-making surface to produce similar elliptical orbit motion, and convert thereof into rotation or the rectilinear motion of mover by the friction between fixed and moving son.Piezoelectric actuator has that version is various, positional precision is high, inertia is little, low noise operation, response are fast, cut off self-lock, do not produce magnetic field is not also subject to the advantages such as electromagnetic interference.Owing to having above plurality of advantages, piezoelectric actuator has obtained a large amount of application in fields such as industrial automation, Aero-Space, medical treatment, bioengineering, and has brought into play huge effect.
The CN102664552A patent application that Nanjing Aero-Space University proposes, name is called " a kind of double-driving foot rectangular piezoelectric plate formula linear ultrasonic motor ", it comprises pedestal, stator and mover, wherein stator comprises a rectangular slab piezoelectric ceramic and two ceramic driving foot, the end face of rectangular slab piezoelectric ceramic, bottom surface all by silver as electrode layer; Described two ceramic driving foot is bonded in respectively crest and the trough place of rectangular slab piezoelectric ceramic side 2 rank bending vibrations; Mover comprises slide block and aluminium oxide ceramics bar, and described aluminium oxide ceramics bar is bonded in a side of slide block; The end face of pedestal forms containing cavity, and a side of this containing cavity is provided with track, and mover is located on track slidably; Stator is located in containing cavity, and two ceramic driving foots on stator are contacted with the aluminium oxide ceramics bar on mover.
The CN100514832C patent that the people such as the Zhou Tieying of Tsing-Hua University propose, name is called " piezoelectric ceramic metal composite plate in-plane vibration linear ultrasound motor ", this motor forms by the mover of stator, output torque and to the pre-pressure mechanism of mover pressurization, stator is made up of eight piezoelectric ceramic pieces and metallic plate, and the side of metallic plate is provided with and drives foot.This each piezoelectric ceramic piece symmetry sticks on two surfaces of metallic plate, and all polarize along the thickness direction of stator, the surface that this piezoelectric ceramic piece connects exciting electrode scribbles external electrode, for applying electric field along the direction vertical with piezoelectric ceramic polarised direction, utilizes the d of piezoelectric ceramic
31effect motivates the complex vibration of bending vibration and longitudinal vibration on stator, and this technology is to reach driving effect by the collaborative work of multi-disc piezoelectric ceramic.
Above-mentioned two schemes, all uses individual layer piezoelectric ceramic, reach higher power output, required driving voltage is larger, external force increase simultaneously can cause piezoelectric vibrator (being stator) mode of oscillation to change, thereby makes the service behaviour variation of piezoelectric vibrator, drives stability decreases.
Summary of the invention
The technical problem to be solved in the present invention is to provide the piezoelectric vibrator that a kind of driving voltage is little, actuating force large, driving stability is high and comprises the precision displacement platform of this piezoelectric vibrator.
For solving the problems of the technologies described above, the invention provides technical scheme as follows:
The invention provides a kind of piezoelectric vibrator and comprise the precision displacement platform of this piezoelectric vibrator, described piezoelectric vibrator on two surfaces, be respectively arranged with multilayer piezoelectric ceramic up and down, a side of described piezoelectric vibrator is provided with ceramic contact, wherein:
Between every layer of described multilayer piezoelectric ceramic and on inner surface, be provided with interior electrode, in the outmost surface of described multilayer piezoelectric ceramic, be provided with external electrode, the interior electrode of described multilayer piezoelectric ceramic adopts mode in parallel to connect, and is connected with described external electrode;
The two lip-deep described multilayer piezoelectric ceramics up and down of described piezoelectric vibrator are divided into respectively four electrode districts, through-thickness polarization, and the polarised direction of adjacent two electrode districts is contrary;
Two surperficial four electrode district symmetries up and down of described piezoelectric vibrator and line be with to power up mode consistent, be positioned at the same face adjacent two electrode districts to power up mode contrary.
Further, two surperficial multilayer piezoelectric ceramics up and down of described piezoelectric vibrator are tubulose integrative-structure, by being formed by banded piezoelectric ceramic film continuous crisping and the high temperature sintering of a lot of electrode district in advance.
Further, described piezoelectric vibrator also comprises upper and lower two metal circular tubes that surface is plane, and described multilayer piezoelectric ceramic is on laminated structure and two surfaces up and down that are arranged on described metal circular tube;
Or described piezoelectric vibrator also comprises metal rectangular shell, described multilayer piezoelectric ceramic is on laminated structure and two surfaces up and down that are arranged on described metal rectangular shell.
Further, described multilayer piezoelectric ceramic is laminated structure, and described piezoelectric vibrator is connected to form by two described multilayer piezoelectric ceramics.
Further, four electrode districts of described multilayer piezoelectric ceramic are uniformly distributed by matts mode, and the number of plies of described multilayer piezoelectric ceramic is at least 5 layers, and the quantity of described ceramic contact is 2 and is arranged in two ends of described piezoelectric vibrator.
Further, described piezoelectric vibrator is the piezoelectric vibrator described in arbitrary claim in claim 1 to 5; Described precision displacement platform comprises upper platform body and lower platform body, wherein:
Described upper platform body is connected by crossed roller guide rail with lower platform body;
One side of described upper platform body is provided with aluminium oxide ceramics bar, and phase the same side of described lower platform body is provided with putting part, and described piezoelectric vibrator is positioned at described putting part, and the ceramic contact of described piezoelectric vibrator contacts with described aluminium oxide ceramics bar.
Further, be provided with the Flexible clamp that clamps along its length described piezoelectric vibrator in described putting part, the length direction two ends of described Flexible clamp are provided with dish spring.
Further, between long limit one side of described Flexible clamp and described putting part, be provided with spring.
Further, on described putting part, be provided with for regulating longitudinal pretightning force to described piezoelectric vibrator and/or the horizontal adjusting device of pretightning force.
Further, described piezoelectric vibrator is provided with reference column in a side contrary with described ceramic contact, and described Flexible clamp is provided with location hole in the position corresponding with described reference column.
When work, the electrode district of the arbitrary lip-deep multilayer piezoelectric ceramic to piezoelectric vibrator loads the sine voltage signal of certain frequency, can inspire single order longitudinal vibration and the second order bending vibration of multilayer piezoelectric ceramic, two kinds of vibration meetings are coupled into elliptical vibration at ceramic contact place simultaneously.If two surperficial multilayer piezoelectric ceramics up and down of piezoelectric vibrator power up simultaneously, can strengthen at double the elliptical vibration that ceramic contact place is coupled into, increase actuating force.The elliptical vibration that pottery contact place forms, in the aluminium oxide ceramics bar of the upper platform body of precision displacement platform, and then drives precision displacement platform to move by rubbing action.
The present invention has following beneficial effect:
Compared with prior art, the present invention adopts multilayer piezoelectric ceramic, the thickness of each lamination electroceramics is relatively little, the driving voltage needing is less, by multilayer piezoelectric ceramic parallel connection, can be less at total voltage magnitude, produce larger actuating force, the scheme of this more traditional use individual layer piezoelectric ceramic, is used less driving voltage that larger actuating force just can be provided.
And, adopt individual layer piezoelectric ceramic, in order to produce larger vibration displacement and actuating force, need piezoelectric ceramic to be operated under resonance frequency, and resonance frequency is subject to the impact of ceramic physical dimension larger, the dimensional discrepancy causing due to mismachining tolerance can affect the resonance frequency of piezoelectric ceramic, thereby can affect the overall driveability of piezoelectric vibrator, cause the driving of piezoelectric vibrator unstable, the present invention uses multilayer piezoelectric ceramic can avoid this problem, makes to drive stability to improve.
Brief description of the drawings
Fig. 1 is the structural representation of a kind of execution mode of piezoelectric vibrator of the present invention;
Fig. 2 is the structural representation of the another kind of execution mode of piezoelectric vibrator of the present invention;
Fig. 3 is the structural representation of another execution mode of piezoelectric vibrator of the present invention;
Fig. 4 is the structural representation of another execution mode of piezoelectric vibrator of the present invention;
Fig. 5 is the electrode lead-out mode schematic diagram of the multilayer piezoelectric ceramic of piezoelectric vibrator of the present invention;
Fig. 6 is the exploded perspective view of a kind of execution mode of precision displacement platform of the present invention;
Fig. 7 is the assembling schematic diagram of the another kind of execution mode of precision displacement platform of the present invention;
Fig. 8 is the assembling schematic diagram of another execution mode of precision displacement platform of the present invention.
Embodiment
For making the technical problem to be solved in the present invention, technical scheme and advantage clearer, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
On the one hand, the invention provides a kind of piezoelectric vibrator, as Figure 1-5, on two surfaces up and down of piezoelectric vibrator, be respectively arranged with multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ', a side of piezoelectric vibrator is provided with ceramic contact 11,11 ', 11 ", 11 " '.It should be noted that, in order clearly to show the structure of piezoelectric vibrator, in Fig. 1-4 by edge-on piezoelectric vibrator placement, two surfaces up and down when the two sides, front and back of the piezoelectric vibrator of seeing in Fig. 1-4 is its normal placement.And Fig. 1 has demonstrated the structure on the two sides, front and back of piezoelectric vibrator simultaneously.
Multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' every layer between and multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' inner surface be provided with interior electrode, multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' outmost surface on be provided with external electrode 12,12 ', 12 ", 12 " ', multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' interior electrode adopt mode in parallel to connect, with external electrode 12,12 ', 12 ", 12 " ' (electrode lead-out mode can with reference to the 14a-14e in figure 5) be connected;
Two surperficial multilayer piezoelectric ceramics 14,14 ', 14 up and down of piezoelectric vibrator ", 14 " ' be divided into respectively four electrode districts, through-thickness polarization, the polarised direction 13,13 ', 13 of adjacent two electrode districts ", 13 " ' contrary;
Two surperficial four electrode district symmetries up and down of piezoelectric vibrator and line be with to power up mode consistent, be positioned at the same face adjacent two electrode districts to power up mode contrary.
When work, to the arbitrary lip-deep multilayer piezoelectric ceramic 14,14 ', 14 of piezoelectric vibrator ", 14 " ' electrode district load the sine voltage signal of certain frequency, can inspire single order longitudinal vibration and the second order bending vibration of multilayer piezoelectric ceramic, two kinds of vibrations can be at ceramic contact 11,11 ', 11 simultaneously ", 11 " ' locate to be coupled into elliptical vibration.If two surperficial multilayer piezoelectric ceramics 14,14 ', 14 up and down of piezoelectric vibrator ", 14 " ' power up simultaneously, can strengthen at double ceramic contact 11,11 ', 11 ", 11 " ' elliptical vibration that is coupled into of place, increase actuating force.
Compared with prior art, the present invention adopts multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ', the thickness of each lamination electroceramics is relatively little, the driving voltage needing is less, by multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' parallel connection, can be less at total voltage magnitude, produce larger actuating force, the scheme of this more traditional use individual layer piezoelectric ceramic, is used less driving voltage that larger actuating force just can be provided.
Traditionally, adopt individual layer piezoelectric ceramic, in order to produce larger vibration displacement and actuating force, need piezoelectric ceramic to be operated under resonance frequency, and resonance frequency is subject to the impact of ceramic physical dimension larger, the dimensional discrepancy causing due to mismachining tolerance can affect the resonance frequency of piezoelectric ceramic, thereby can affect the overall driveability of piezoelectric vibrator, cause the driving of piezoelectric vibrator unstable, the present invention uses multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' can avoid this problem, make to drive stability improve.
Further, on the basis of above-mentioned principle, piezoelectric vibrator of the present invention can adopt various structures form, only enumerate below four kinds of ratios be easier to realize version be explained.
Version one:
As shown in Figure 1, two surperficial multilayer piezoelectric ceramics 14 up and down of piezoelectric vibrator are tubulose integrative-structure, by being formed by banded piezoelectric ceramic film continuous crisping and the high temperature sintering of a lot of electrode district in advance.This structure is convenient to making and the processing of piezoelectric vibrator.
Version two:
As shown in Figure 2, piezoelectric vibrator comprises the metal circular tube 15 that upper and lower two surfaces are plane, and multilayer piezoelectric ceramic 14 ' is for laminated structure and setting (can paste setting) are on two surfaces up and down of metal circular tube 15.And, on the side of metal circular tube 15, can be provided with fluting, to reduce the rigidity of metallic matrix.The benefit of this version is to have overcome because piezoelectric ceramic fragility is larger, causes the frangible shortcoming of piezoelectric ceramic.
Version three:
As shown in Figure 3, piezoelectric vibrator comprises metal rectangular shell 16, multilayer piezoelectric ceramic 14 " be laminated structure and being arranged on two surfaces up and down of metal rectangular shell 16.In this embodiment, adopt metal rectangular shell 16 structures, the symmetry of structure is realized favourable, the technique of being convenient to structural symmetry realizes; Simultaneously because the wall thickness of metal rectangular shell 16 is even, can make to stick on piezoelectric ceramic 14 above " stressed more even; and reduced the impact on piezoelectric ceramic diaphragm state, the requirement can more be close to design in the time of actual motion time, meets instructions for use more.
Version four:
As shown in Figure 4, multilayer piezoelectric ceramic 14 " ' be laminated structure, piezoelectric vibrator is by two described multilayer piezoelectric ceramics 14 " ' be connected to form.In this embodiment, directly by two multilayer piezoelectric ceramics 14 " ' arrange and link together up and down, form piezoelectric vibrator, easy to process quick.
Should be understood that; in the illustrated embodiment of Fig. 1-4, only show the preferred four kinds of different versions of piezoelectric vibrator; those skilled in the art can change on this basis and adjust, and to form how different version, all belong to protection scope of the present invention.
In the above-described embodiments, multilayer piezoelectric ceramic 14, 14 ', 14 ", 14 " four electrode districts ' are preferably uniformly distributed by matts mode, and in order to improve power output, multilayer piezoelectric ceramic 14, 14 ', 14 ", 14 " number of plies ' is preferably at least 5 layers, in addition, pottery contact 11, 11 ', 11 ", 11 " quantity ' is preferably 2, preferably be arranged in two ends of piezoelectric vibrator, thereby the elliptical vibration that can effectively utilize piezoelectric ceramic to produce two ends, compare the more existing scheme that only uses a ceramic contact, can better utilize the electric energy of input, be beneficial to reduction energy consumption.
On the other hand, corresponding with above-mentioned piezoelectric vibrator, the invention provides a kind of precision displacement platform, on it, be provided with piezoelectric vibrator, precision displacement platform comprises upper platform body 9,9 ', 9 " and lower platform body 10,10 ', 10 ", wherein:
Upper platform body 9,9 ', 9 " with lower platform body 10,10 ', 10 " by crossed roller guide rail 8,8 ', 8 " be connected;
Upper platform body 9,9 ', 9 " a side be provided with aluminium oxide ceramics bar 7,7 ', 7 ", lower platform body 10,10 ', 10 " phase the same side be provided with putting part 4,4 ', 4 ", piezoelectric vibrator is positioned at putting part 4,4 ', 4 ", the ceramic contact 11,11 ', 11 of piezoelectric vibrator ", 11 " ' with aluminium oxide ceramics bar 7,7 ', 7 " contact.
When work, single order longitudinal vibration and second order bending vibration that piezoelectric vibrator itself produces, at ceramic contact 11,11 ', 11 ", 11 " ' locate to be coupled into elliptical vibration, elliptical vibration is by ceramic contact 11,11 ', 11 ", 11 " ' and in upper platform body 9,9 ', 9 " the upper aluminium oxide ceramics bar 7,7 ', 7 of pasting " between friction drive upper platform body 9,9 ', 9 " do the motion of sub-micron to length nano-stepping.Aluminium oxide ceramics bar 7,7 ', 7 " use can reduce piezoelectric vibrator and upper platform body 9,9 ', 9 " between wearing and tearing, improve stability and the precision stability of precision displacement platform operation.
Further, putting part 4,4 ', 4 in the present invention " in can be provided with the Flexible clamp 2,2 ', 2 that clamps along its length piezoelectric vibrator ", the length direction two ends of this Flexible clamp can be provided with dish spring 1,1 ', 1 ".Flexible clamp 2,2 ', 2 " preferably use engineering plastics for materials processing, its advantage is the resilient clamp that can realize piezoelectric vibrator, simultaneously realize insulation, this be beneficial to piezoelectric vibrator at two ends by electrode, realize low voltage drive.
And, Flexible clamp 2,2 ', 2 " long limit one side preferably and putting part 4,4 ', 4 " between be provided with spring 3,3 ', 3 ", to realize the adjustment of the horizontal pretightning force to piezoelectric vibrator.
For the ease of regulating longitudinal pretightning force and/or the laterally adjusting of pretightning force to piezoelectric vibrator, on putting part, be preferably provided with adjusting device.Concrete, putting part 4,4 ', 4 " above can be provided with putting part protecgulum 5,5 ', 5 ", putting part protecgulum 5,5 ', 5 " by semicircle pin 6,6 ', 6 " be connected to putting part 4,4 ', 4 " go up, for changing horizontal pretightning force; Or, putting part and lower platform body 10,10 ', 10 " between can use bolt to be connected, for changing longitudinal pretightning force size.
In addition, piezoelectric vibrator with ceramic contact 11,11 ', 11 ", 11 " ' a contrary side is preferably provided with reference column 15, Flexible clamp 2,2 ', 2 " be provided with location hole 16 in the position corresponding with reference column.When installation, reference column coordinates with location hole, has retrained the axial rotation of piezoelectric vibrator, can improve the stability of piezoelectric vibrator work.
To sum up, the present invention has following beneficial effect:
1, compared with prior art, the present invention adopts multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ', the thickness of each lamination electroceramics is relatively little, the driving voltage needing is less, by multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' parallel connection, produce larger actuating force can be less at total voltage magnitude, adopt individual layer piezoelectric ceramic, in order to produce larger vibration displacement and actuating force, need piezoelectric ceramic to be operated under resonance frequency, and resonance frequency is subject to the impact of ceramic physical dimension larger, the dimensional discrepancy causing due to mismachining tolerance can affect the resonance frequency of piezoelectric ceramic, thereby can affect the overall driveability of piezoelectric vibrator, cause the driving of piezoelectric vibrator unstable, the present invention uses multilayer piezoelectric ceramic 14, 14 ', 14 ", 14 " ' can avoid this problem, piezoelectric vibrator stability is improved, be beneficial to the conversion from two driving heads to multiple driving heads.
2, multilayer piezoelectric ceramic 14, 14 ', 14 ", 14 " ' after sine voltage signal, form single order longitudinal vibration and second order bending vibration adding simultaneously, at ceramic contact 11, 11 ', 11 ", 11 " ' locate to form elliptical vibration, elliptical vibration is by ceramic contact 11, 11 ', 11 ", 11 " friction ' and between the aluminium oxide ceramics of pasting in upper platform body drives upper platform body 9, 9 ', 9 " do the motion of sub-micron to length nano-stepping, use aluminium oxide ceramics bar 7, 7 ', 7 " piezoelectric vibrator and upper platform body 9 have been reduced, 9 ', 9 " wearing and tearing between, stability and the precision stability of precision displacement platform operation are improved.
3, ceramic contact 11,11 ', 11 ", 11 " ' be preferably 2 and be arranged in two ends of piezoelectric vibrator, can effectively utilize multilayer piezoelectric ceramic 14,14 ', 14 ", 14 " ' elliptical vibration that produces in two ends of piezoelectric vibrator, compare the more existing scheme that only uses a ceramic contact, the electric energy that can better utilize input, is beneficial to reduction energy consumption.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, do not departing under the prerequisite of principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (10)
1. a piezoelectric vibrator, is characterized in that, described piezoelectric vibrator on two surfaces, be respectively arranged with multilayer piezoelectric ceramic up and down, a side of described piezoelectric vibrator is provided with ceramic contact, wherein:
Between every layer of described multilayer piezoelectric ceramic and on inner surface, be provided with interior electrode, in the outmost surface of described multilayer piezoelectric ceramic, be provided with external electrode, the interior electrode of described multilayer piezoelectric ceramic adopts mode in parallel to connect, and is connected with described external electrode;
The two lip-deep described multilayer piezoelectric ceramics up and down of described piezoelectric vibrator are divided into respectively four electrode districts, through-thickness polarization, and the polarised direction of adjacent two electrode districts is contrary;
Two surperficial four electrode district symmetries up and down of described piezoelectric vibrator and line be with to power up mode consistent, be positioned at the same face adjacent two electrode districts to power up mode contrary.
2. piezoelectric vibrator according to claim 1, is characterized in that, two surperficial multilayer piezoelectric ceramics up and down of described piezoelectric vibrator are tubulose integrative-structure, by being formed by banded piezoelectric ceramic film continuous crisping and the high temperature sintering of a lot of electrode district in advance.
3. piezoelectric vibrator according to claim 1, is characterized in that, described piezoelectric vibrator also comprises upper and lower two metal circular tubes that surface is plane, and described multilayer piezoelectric ceramic is on laminated structure and two surfaces up and down that are arranged on described metal circular tube;
Or described piezoelectric vibrator also comprises metal rectangular shell, described multilayer piezoelectric ceramic is on laminated structure and two surfaces up and down that are arranged on described metal rectangular shell.
4. piezoelectric vibrator according to claim 1, is characterized in that, described multilayer piezoelectric ceramic is laminated structure, and described piezoelectric vibrator is connected to form by two described multilayer piezoelectric ceramics.
5. according to the piezoelectric vibrator described in arbitrary claim in claim 1 to 4, it is characterized in that, four electrode districts of described multilayer piezoelectric ceramic are uniformly distributed by matts mode, the number of plies of described multilayer piezoelectric ceramic is at least 5 layers, and the quantity of described ceramic contact is 2 and is arranged in two ends of described piezoelectric vibrator.
6. a precision displacement platform, is provided with piezoelectric vibrator on it, it is characterized in that, described piezoelectric vibrator is the piezoelectric vibrator described in arbitrary claim in claim 1 to 5; Described precision displacement platform comprises upper platform body and lower platform body, wherein:
Described upper platform body is connected by crossed roller guide rail with lower platform body;
One side of described upper platform body is provided with aluminium oxide ceramics bar, and phase the same side of described lower platform body is provided with putting part, and described piezoelectric vibrator is positioned at described putting part, and the ceramic contact of described piezoelectric vibrator contacts with described aluminium oxide ceramics bar.
7. precision displacement platform according to claim 6, is characterized in that, is provided with the Flexible clamp that clamps along its length described piezoelectric vibrator in described putting part, and the length direction two ends of described Flexible clamp are provided with dish spring.
8. precision displacement platform according to claim 7, is characterized in that, between long limit one side of described Flexible clamp and described putting part, is provided with spring.
9. precision displacement platform according to claim 8, is characterized in that, is provided with for regulating longitudinal pretightning force to described piezoelectric vibrator and/or the horizontal adjusting device of pretightning force on described putting part.
10. according to the precision displacement platform described in arbitrary claim in claim 6 to 9, it is characterized in that, described piezoelectric vibrator is provided with reference column in a side contrary with described ceramic contact, and described Flexible clamp is provided with location hole in the position corresponding with described reference column.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105071687A (en) * | 2015-08-24 | 2015-11-18 | 苏州大学张家港工业技术研究院 | Stick-slip driving cross-scale precision positioning platform provided with side part friction force adjusting mechanism |
| CN106953540A (en) * | 2016-01-07 | 2017-07-14 | 南京纳摩森电子科技有限公司 | Piezoelectric vibrator includes the driver and micropositioner of the piezoelectric vibrator |
| CN109004858A (en) * | 2017-06-06 | 2018-12-14 | 广州简成光电有限公司 | A kind of piezo-electric motor |
| CN109088564A (en) * | 2018-06-20 | 2018-12-25 | 长春工业大学 | The clamping of piezoelectric type micro-nano, positioning adjustment device and its application method |
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| CN204068758U (en) * | 2014-07-25 | 2014-12-31 | 北京派和科技股份有限公司 | Piezoelectric vibrator and comprise the precision displacement platform of this piezoelectric vibrator |
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| CN106953540B (en) * | 2016-01-07 | 2019-07-26 | 北京派和智能装备技术有限公司 | Piezoelectric vibrator, driver and micropositioner including the piezoelectric vibrator |
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| CN109088564A (en) * | 2018-06-20 | 2018-12-25 | 长春工业大学 | The clamping of piezoelectric type micro-nano, positioning adjustment device and its application method |
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