CN204013280U - The bionical linear piezoelectric actuator of many contact-actuatings and precise jiggle platform - Google Patents
The bionical linear piezoelectric actuator of many contact-actuatings and precise jiggle platform Download PDFInfo
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- CN204013280U CN204013280U CN201420417048.8U CN201420417048U CN204013280U CN 204013280 U CN204013280 U CN 204013280U CN 201420417048 U CN201420417048 U CN 201420417048U CN 204013280 U CN204013280 U CN 204013280U
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- 210000002683 foot Anatomy 0.000 claims abstract description 112
- 239000000919 ceramic Substances 0.000 claims abstract description 75
- 239000000758 substrate Substances 0.000 claims abstract description 60
- 230000010287 polarization Effects 0.000 claims abstract description 22
- 239000007769 metal material Substances 0.000 claims abstract description 4
- 238000009413 insulation Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 7
- 229910000906 Bronze Inorganic materials 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 239000010974 bronze Substances 0.000 claims description 6
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 6
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical group [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 229910001369 Brass Inorganic materials 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000010951 brass Substances 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 3
- -1 dilval Chemical compound 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 description 8
- 230000033001 locomotion Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 241000446313 Lamella Species 0.000 description 1
- 241000592274 Polypodium vulgare Species 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The utility model provides the bionical linear piezoelectric actuator of a kind of many contact-actuatings and precise jiggle platform, belongs to piezoelectric actuator technical field; Described piezoelectric actuator comprises four identical driving foots that the substrate of metal material and the side from substrate are stretched out, each piezoelectric ceramic piece that drives the identical both sides of foot to be provided with through-thickness polarization, described substrate is rectangle, circle or oval, described driving foot around the center of described substrate distributed rectangular on described substrate.In the utility model, four drive sufficient boundary condition identical, and distortion and resonance frequency harmony are good, drive stability high.
Description
Technical field
The utility model relates to piezoelectric actuator technical field, refers to especially the bionical linear piezoelectric actuator of a kind of many contact-actuatings and comprises the precise jiggle platform of this piezoelectric actuator.
Background technology
The Chu Xiang of Tsing-Hua University really waits the CN101795088B patent documentation proposing, name is called " polypody linear piezoelectric actuator and workbench ", its implementation is, the square shape sheet stretching out on the metal substrate of piezoelectric actuator drives foot-shape to become pectinate texture, be bonded in the square piezoelectric ceramic piece that drives sufficient side, piezoelectric ceramic piece through-thickness polarization, the sufficient end face of all drivings is in one plane; The signal of telecommunication is introduced to the electrode surface of piezoelectric ceramic piece, can excite simultaneously and drive sufficient one-order stretching vibration and single order or second order flexural vibrations, the coupling of two kinds of vibrations makes to drive plantar surfaces of toe particle to do elliptic motion, and the elliptical vibration accumulation in the multiple volas of driver is superposed to macroscopical rectilinear motion.
The DE 4408618 A1 patent documentations that Germany Anmelder. etc. proposes, name is called " twin lamella adjustment drive unit ", its implementation is, whole matrix is all piezoelectric ceramic, and stretches four legs, and four legs are multi-layer ceramicss, and in one line, electrode is brushed in the both sides of four legs stretching, and wherein the electrode of a side surface connects the signal of telecommunication, the electrode grounding on opposite side surface; Whole matrix is the equal of just the stator of a motor, below the substrate of matrix, apply upward a pretightning force, four ends above leg are contacted with a draw runner (being called mover), article four, the track of leg upper end is an ellipse, under the effect of pretightning force, by frictional force effect, mover is moved with mover.
In above-mentioned two schemes, article four, driving foot is to be all from left to right in one line, when the clamping rear work of driver, because driver itself is not full symmetric, two of the left and right sides drive sufficient boundary condition difference, can cause the driving foot of both sides and middle two to drive sufficient resonance frequency slightly to have any different, have influence on the end elliptical trajectory shape of driver and the operating characteristic of driver.
Utility model content
The technical problems to be solved in the utility model is to provide the ovalizing deflection bionical linear piezoelectric actuator of on all four many contact-actuatings of the sufficient resonance frequency of a kind of each driving and end and comprises the precise jiggle platform of this piezoelectric actuator.
For solving the problems of the technologies described above, the utility model provides technical scheme as follows:
The bionical linear piezoelectric actuator of a kind of many contact-actuatings, comprise four identical driving foots that the substrate of metal material and the side from described substrate are stretched out, each piezoelectric ceramic piece that drives the identical both sides of foot to be provided with through-thickness polarization, described substrate is rectangle, circle or oval, described driving foot around the center of described substrate distributed rectangular on described substrate.
Further, the two sides of described piezoelectric ceramic piece is by electrode, and wherein one side is near the sufficient electrode grounding signal of described driving, and another side adds the signal of telecommunication away from the sufficient electrode of described driving;
Two driving foots adjacent on the thickness direction of described piezoelectric ceramic piece are one group, each polarised direction of two piezoelectric ceramic pieces on foot that drives is contrary, two in same group drive the polarization mode of sufficient piezoelectric ceramic piece identical, power up mode contrary, not the polarization mode of the driving foot on the same group and to power up mode all identical.
Further, described substrate is rectangle, described driving foot word order on the length direction of described substrate; Described piezoelectric ceramic piece is arranged at the sufficient both sides of described driving along the Width of described substrate.
Further, the two sides of described piezoelectric ceramic piece is by electrode, and wherein one side is near the sufficient electrode grounding signal of described driving, and another side adds the signal of telecommunication away from the sufficient electrode of described driving;
Described driving foot is divided into two groups along the middle symmetry of described substrate, each polarised direction of two piezoelectric ceramic pieces on foot that drives is contrary, two in same group drive the polarization mode of sufficient piezoelectric ceramic piece identical, power up mode contrary, not the polarization mode of the driving foot on the same group and to power up mode all identical.
Further, described driving foot and substrate delivery/reception place are provided with insulation boss between described substrate and described piezoelectric ceramic piece, and the height of described insulation boss is less than the thickness of described piezoelectric ceramic piece.
The half of the thickness that further, the height of described insulation boss is described piezoelectric ceramic piece.
Further, on the sufficient distal face of described driving, be pasted with wear-resistant contact, described contact is T shape, and described contact contacts with driven member line.
Further, the material of described contact is aluminium oxide structure pottery.
Further, described driving foot is structure as a whole with substrate, and described foot and the material of substrate of driving is the compound or aluminum alloy nickel plated of brass, phosphor bronze, stainless steel, dilval, tin bronze, aluminum steel.
A kind of precise jiggle platform, comprises the above-mentioned bionical linear piezoelectric actuator of many contact-actuatings.
The utlity model has following beneficial effect:
Compared with prior art, of the present utility model four drive foot around substrate center's distributed rectangular on substrate, replace four of tradition to drive foot to be from left to right word order, make the each state of foot in complete lattice symmetry that drive of driver of the present utility model, after driver is clamping, the sufficient boundary condition of each driving is just the same, thereby make four to drive sufficient compatible deformation more perfect, article four, drive the ovalizing deflection of sufficient resonance frequency and end in full accord, improved the service behaviour of driver.
Brief description of the drawings
Fig. 1 is the bionical linear piezoelectric actuator composition of many contact-actuatings of the present utility model structural representation;
Fig. 2 is a certain driving foot of the bionical linear piezoelectric actuator of many contact-actuatings of the present utility model distortion schematic diagram;
Fig. 3 is that a certain driving foot of the bionical linear piezoelectric actuator of many contact-actuatings of the present utility model adds electrical schematic;
Fig. 4 is that a certain group of the bionical linear piezoelectric actuator of many contact-actuatings of the present utility model drives foot distortion schematic diagram;
Fig. 5 is that a certain group of the bionical linear piezoelectric actuator of many contact-actuatings of the present utility model drives foot to add electrical schematic;
Fig. 6 is that the bionical linear piezoelectric actuator of many contact-actuatings of the present utility model is from four vertical views that drive foot to see substrate;
Fig. 7 is the structural representation of the another kind of execution mode of the bionical linear piezoelectric actuator of many contact-actuatings of the present utility model;
Fig. 8 is that the bionical linear piezoelectric actuator of many contact-actuatings shown in Fig. 7 sees that from substrate four drive sufficient vertical view.
Embodiment
For making the technical problems to be solved in the utility model, technical scheme and advantage clearer, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
As shown in Fig. 1-6, the utility model provides a kind of many contact-actuatings bionical linear piezoelectric actuator, comprise four identical driving foots 2,3,4,5 that the substrate 1 of metal material and the side from substrate 1 are stretched out, each piezoelectric ceramic piece 21,22,31,32,41,42,51,52 that drives the identical both sides of foot 2,3,4,5 to be all pasted with through-thickness polarization, substrate 1 is rectangle, circle or oval, drive foot 2,3,4,5 around the center of substrate 1 distributed rectangular on substrate 1.
Compared with prior art, four of the present utility model drive foot 2, 3, 4, 5 around substrate center's distributed rectangular on substrate 1, replace four of tradition to drive foot 2, 3, 4, 5 are from left to right word order, make each driving foot 2 of driver of the present utility model, 3, 4, 5 states in complete lattice symmetry, after driver is clamping, each driving foot 2, 3, 4, 5 boundary condition is just the same, thereby make four to drive foot 2, 3, 4, 5 compatible deformation is more perfect, article four, drive foot 2, 3, 4, 5 resonance frequency and the ovalizing deflection of end are in full accord, improve the service behaviour of driver.
In the embodiment shown in fig. 1, substrate 1 is rectangle, four drive foot 2,3,4,5 around substrate 1 center distributed rectangular in substrate 1 edge.
The utility model structural design compactness, four unlike existing driver drive foot to be arranged in a row, but be symmetrically distributed on the edge of substrate 1, this has increased the flexibility of precise jiggle platform global design, if in the design of precise jiggle platform, imbedded precise jiggle platform inside, overall structure can be smaller.
Then, owing to adopting piezoelectric bimorph chip architecture, so when the utility model work, can adopt the multiple mode that powers up, preferred, as shown in Figure 2, we drive foot 11 drive sufficient polarization as example illustrates and power up mode taking one, the two sides of piezoelectric ceramic piece 12,13 is by electrode, and wherein one side is near the electrode grounding signal that drives foot 11, and another side adds the signal of telecommunication away from the electrode that drives foot 11.
When work, two driving foots adjacent on the thickness direction of piezoelectric ceramic piece 21,22,31,32,41,42,51,52 are one group, each polarised direction of two piezoelectric ceramic pieces 21,22,31,32,41,42,51,52 on foot 2,3,4,5 that drives is contrary, the polarization mode of the piezoelectric ceramic piece 21,22,31,32,41,42,51,52 of two driving foots 2,3,4,5 in same group is identical, power up mode contrary, not the polarization mode of the foot of the driving on the same group 2,3,4,5 and to power up mode all identical.
To driving foot 11, as shown in Figure 2, drive the left electrodes access signal of telecommunication A (t) of the first piezoelectric ceramic 12 of foot 11, right electrodes ground connection, drive the right side access signal of telecommunication B (t) of the Article 2 piezoelectric ceramic 13 of foot 11, left electrodes ground connection.Wherein, signal of telecommunication A (t) and B (t) are as shown in Figure 3, when A, the B signal of telecommunication in Fig. 3 1. time, A, B are for just, the first piezoelectric ceramic 12 that now single driving is sufficient and single second piezoelectric ceramic 13 that drives foot all extend, there are elongation strains in single driving foot 11, now the Q point of the single contact 14 that drives foot 11 is in oval the top, as in Fig. 2 1.; When A, the B signal of telecommunication in Fig. 3 2. time, A is for negative, B is for just, now the single first piezoelectric ceramic 12 that drives foot 11 shrinks, the single Article 2 piezoelectric ceramic 13 that drives foot 11 extends, there are flexural deformations left in the single foot 11 that drives, the Q point of the sufficient contact 14 of now single driving is in oval high order end, as in Fig. 2 2.; Work as A, the B signal of telecommunication in Fig. 3 3. time, A, B is negative, now drive the first piezoelectric ceramic 12 of foot 11 and drive the Article 2 piezoelectric ceramic 13 of foot 11 all to shrink, drive foot 11 to shrink distortion, now drive foot 11 contact 14 Q point in ellipse bottom, as in Fig. 2 3.; Work as A, the B signal of telecommunication in Fig. 3 4. time, A is for just, B is for negative, now drive the first piezoelectric ceramic 12 of foot 11 to extend, drive the Article 2 piezoelectric ceramic 13 of foot 11 to shrink, the flexural deformation that drives foot 11 to occur to the right, now drive the Q point of foot 11 contact 14 in oval low order end, as in Fig. 2 4.; Work as A, 3. 2. 1. the B signal of telecommunication when 1. 2. 3. 4. mode periodically continuously changes in Fig. 3, drive the Q of the contact 14 of foot 11 to name a person for a particular job to produce in Fig. 2 continuous modification 4., thereby form the elliptical trajectory that the Q of the contact 14 that drives foot 11 is ordered.
Every two such driving foots 2,3 or 4,5 form one group, drive driven member to travel forward.Drive foot 2,3 both sides piezoelectric ceramic 21,22,31,32 polarize and power up by the mode shown in Fig. 5 to first group, second group drives the polarization of foot 4,5 both sides piezoelectric ceramic 41,42,51,52 with to power up mode identical with first group.In Fig. 5, drive piezoelectric ceramic 21,22,31,32 polarization modes on foot 2,3 both sides identical, and power up on the contrary, so just can make every group of interior two motion symmetries that drive between foot, produce elliptic motion as shown in Figure 4.
Between two groups, drive the big or small direction of foot, structure composition, power up mode, identical with motion state, can increase the power output of driven member (being draw runner), in every group two drives between foot big or small direction identical, and motion is independent, and can produce two symmetrical elliptic motions and make driver can export continuous displacement.
The utility model can also have various structures way of realization, and for simple for production, as shown in Figure 7, substrate 19 is rectangle to optimal way, and drive foot 15,16,17,18 is word order on the length direction of substrate 19; And piezoelectric ceramic piece 151,152,161,162,171,172,181,182 is arranged on described driving foot upper 15,16,17,18 along substrate 19 side surface direction.As shown in Figure 8, for looking to driving foot 15,16,17,18 from substrate 19, the bonding method figure of piezoelectric ceramic piece 151,152,161,162,171,172,181,182.
Drive foot to power up while producing vibration, piezoelectric ceramic piece 151,152,161,162,171,172,181,182 is attached to the outside (as Fig. 8) of driver matrix, the inner side (as Fig. 6) that relative piezoelectric ceramic piece 21,22,31,32,41,42,51,52 is attached to driver matrix has larger space, facilitate stickup and the lead-in wire of piezoelectric ceramic piece, meanwhile, this frame mode has also reduced the possibility of piezoelectric ceramic piece double-sided electrode short circuit.On the other hand, because vibration wave is along piezoelectric ceramic potsherd 151, 152, 161, 162, 171, 172, 181, 182 direction of vibration transmit, perpendicular to piezoelectric ceramic piece 151, 152, 161, 162, 171, 172, 181, 182 direction conduction, for damping vibration ripple is to piezoelectric ceramic piece 151, 152, 161, 162, 171, 172, 181, 182 impact, and by piezoelectric ceramic piece 151, 152, 161, 162, 171, 172, 181, 182 drive foot 15 perpendicular to driving sufficient orientation to be pasted on described four, 16, 17, on 18, make each driving foot 15, 16, 17, between 18, impact is very little almost can ignore.
Same, drive foot have multiple polarization and power up mode, preferably, drive foot 15, 16, 17, 18 adopt the polarization identical with driving foot 11 (Fig. 2) and power up mode, as shown in Figure 7, drive foot 15, 16, 17, 18 are divided into two groups along the center position symmetry of substrate, each driving foot 15, 16, 17, two piezoelectric ceramic pieces 151 on 18, 152, 161, 162, 171, 172, 181, 182 polarised direction is contrary, two in same group drive foot 15, 16 or 17, 18 piezoelectric ceramic piece 151, 152, 161, 162, 171, 172, 181, 182 polarization mode is identical, power up mode contrary, the not foot of the driving on the same group 15, 16, 17, 18 polarization mode and to power up mode all identical, specific works process as previously mentioned.
The big or small direction that drives foot 15,16 and 17,18 between two groups, powers up mode, identical, can increase the power output of driven member (draw runner) while powering up simultaneously.
As one of the present utility model is improved, drive foot 2,3,4,5 and substrate 1 or drive foot 15,16,17,18 and substrate 19 junctions, substrate 1 or 19 and piezoelectric ceramic piece 21,22,31,32,41,42,51,52 or 151,152,161,162,171,172,181,182 between can be provided with insulation boss (not shown), the height of insulation boss is less than the thickness of piezoelectric ceramic piece 21,22,31,32,41,42,51,52 or 151,152,161,162,171,172,181,182.During due to drive operation, drive foot in dither state, this structure has effectively avoided stress to concentrate and fatigue damage; And the height of insulation boss is less than the thickness of piezoelectric ceramic piece 21,22,31,32,41,42,51,52 or 151,152,161,162,171,172,181,182, avoid the edge surface of piezoelectric ceramic piece 21,22,31,32,41,42,51,52 or 151,152,161,162,171,172,181,182 to contact with substrate 1 or 19, thereby avoided piezoelectric ceramic piece 21,22,31,32,41,42,51,52 or 151,152,161,162,171,172,181,182 upper and lower surface electric pole short circuits.Preferably, the height of insulation boss is the half of the thickness of piezoelectric ceramic piece 21,22,31,32,41,42,51,52 or 151,152,161,162,171,172,181,182.
In the utility model, as shown in Figure 1, on the distal face of driving foot 2,3,4,5 or 15,16,17,18, be pasted with wear-resistant contact 6,7,8,9 or 61,62,63,64, contact 6,7,8,9 or 61,62,63,64 is T shape, and contact 6,7,8,9 or 61,62,63,64 contacts with driven member line.
Between driving foot and driven member, be added with wear-resistant contact, avoid driving foot 2,3,4,5 or 15,16,17,18 itself to participate in friction directly, strengthen the abrasion resistance that drives foot 2,3,4,5 or 15,16,17,18, thereby strengthen the performance of driver, comprised life-span and precision.Contact of the present utility model can adopt various structures form, the preferred T shape structure that adopts, as shown in Figure 6, look to substrate 1 or 19 along driving foot 2,3,4,5 or 15,16,17,18, contact wire is positioned at and drives foot to drive in the middle of foot 2,3,4,5 or 15,16,17,18, use the contact of T shape structure, make line contact replace traditional some contact to contact with face, effectively strengthened the exercise performance of driver.
When actual production is made, contact can adopt various suitable materials, and preferred, the material of contact 6,7,8,9 or 61,62,63,64 is aluminium oxide structure pottery.
In order to simplify manufacture craft and flow process, drive foot 2,3,4,5 or 15,16,17,18 and substrate 1 or 19 to be structure as a whole.Drive foot 2,3,4,5 or 15,16,17,18 and the material of substrate 1 or 19 to be preferably the compound or aluminum alloy nickel plated of brass, phosphor bronze, stainless steel, dilval, tin bronze, aluminum steel; Individual layer piezoelectric ceramic piece is sticked on metallic matrix, avoid the multilayer piezoelectric ceramic structure of PI, greatly reduce manufacturing process and manufacturing cost, and metal is easy to processing and clamping.
The utility model also provides a kind of precise jiggle platform that comprises the bionical linear piezoelectric actuator of above-mentioned many contact-actuatings, because the structure of piezoelectric actuator is with upper identical, repeats no more herein.
The beneficial effects of the utility model are as follows:
1, in precise jiggle platform of the present utility model four of piezoelectric actuator drive foot around substrate center's distributed rectangular on substrate, make the each state of foot in complete lattice symmetry that drive, after driver is clamping, the sufficient boundary condition of each driving is just the same, thereby make four to drive sufficient compatible deformation more perfect, article four, drive the ovalizing deflection of sufficient resonance frequency and end in full accord, improved the service behaviour of driver, also improved the service behaviour of precise jiggle platform.
2, piezoelectric ceramic piece is attached to the outside of driver matrix, the inner side (as Fig. 6) that relative piezoelectric ceramic piece is attached to driver matrix has larger space, facilitate stickup and the lead-in wire of piezoelectric ceramic piece, also reduced the possibility of piezoelectric ceramic piece double-sided electrode short circuit simultaneously.On the other hand, because vibration wave transmits along piezoelectric ceramic potsherd direction of vibration, conduct perpendicular to piezoelectric ceramic piece direction, for the impact of damping vibration ripple on piezoelectric ceramic piece, and piezoelectric ceramic piece is arranged to the sufficient both sides of described driving along described substrate width direction, make between each described driving foot that impact is very little almost can be ignored.
The above is preferred implementation of the present utility model; should be understood that; for those skilled in the art; do not departing under the prerequisite of principle described in the utility model; can also make some improvements and modifications, these improvements and modifications also should be considered as protection range of the present utility model.
Claims (10)
1. the bionical linear piezoelectric actuator of contact-actuating more than a kind, comprise four identical driving foots that the substrate of metal material and the side from described substrate are stretched out, each piezoelectric ceramic piece that drives the identical both sides of foot to be provided with through-thickness polarization, it is characterized in that, described substrate is rectangle, circle or oval, described driving foot around the center of described substrate distributed rectangular on described substrate.
2. the bionical linear piezoelectric actuator of many contact-actuatings according to claim 1, it is characterized in that, the two sides of described piezoelectric ceramic piece is by electrode, and wherein one side is near the sufficient electrode grounding signal of described driving, and another side adds the signal of telecommunication away from the sufficient electrode of described driving;
Two driving foots adjacent on the thickness direction of described piezoelectric ceramic piece are one group, each polarised direction of two piezoelectric ceramic pieces on foot that drives is contrary, two in same group drive the polarization mode of sufficient piezoelectric ceramic piece identical, power up mode contrary, not the polarization mode of the driving foot on the same group and to power up mode all identical.
3. the bionical linear piezoelectric actuator of many contact-actuatings according to claim 1, is characterized in that, described substrate is rectangle, described driving foot word order on the length direction of described substrate; Described piezoelectric ceramic piece is arranged at the sufficient both sides of described driving along the Width of described substrate.
4. the bionical linear piezoelectric actuator of many contact-actuatings according to claim 3, it is characterized in that, the two sides of described piezoelectric ceramic piece is by electrode, and wherein one side is near the sufficient electrode grounding signal of described driving, and another side adds the signal of telecommunication away from the sufficient electrode of described driving;
Described driving foot is divided into two groups along the middle symmetry of described substrate, each polarised direction of two piezoelectric ceramic pieces on foot that drives is contrary, two in same group drive the polarization mode of sufficient piezoelectric ceramic piece identical, power up mode contrary, not the polarization mode of the driving foot on the same group and to power up mode all identical.
5. according to the bionical linear piezoelectric actuator of many contact-actuatings described in arbitrary claim in claim 1 to 4, it is characterized in that, described driving foot and substrate delivery/reception place, between described substrate and described piezoelectric ceramic piece, be provided with insulation boss, the height of described insulation boss is less than the thickness of described piezoelectric ceramic piece.
6. the bionical linear piezoelectric actuator of many contact-actuatings according to claim 5, is characterized in that the half of the thickness that the height of described insulation boss is described piezoelectric ceramic piece.
7. according to the bionical linear piezoelectric actuator of many contact-actuatings described in arbitrary claim in claim 1 to 4, it is characterized in that, on the sufficient distal face of described driving, be pasted with wear-resistant contact, described contact is T shape, and described contact contacts with driven member line.
8. the bionical linear piezoelectric actuator of many contact-actuatings according to claim 7, is characterized in that, the material of described contact is aluminium oxide structure pottery.
9. according to the bionical linear piezoelectric actuator of many contact-actuatings described in arbitrary claim in claim 1 to 4, it is characterized in that, described driving foot is structure as a whole with substrate, and described foot and the material of described substrate of driving is the compound or aluminum alloy nickel plated of brass, phosphor bronze, stainless steel, dilval, tin bronze, aluminum steel.
10. a precise jiggle platform, is characterized in that, comprises the bionical linear piezoelectric actuator of many contact-actuatings described in arbitrary claim in claim 1 to 9.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420417048.8U CN204013280U (en) | 2014-07-25 | 2014-07-25 | The bionical linear piezoelectric actuator of many contact-actuatings and precise jiggle platform |
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| CN201420417048.8U CN204013280U (en) | 2014-07-25 | 2014-07-25 | The bionical linear piezoelectric actuator of many contact-actuatings and precise jiggle platform |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105471316A (en) * | 2016-01-08 | 2016-04-06 | 南京航空航天大学 | Motor stator, novel multi-channel steering gear control micro ultrasonic motor and control method thereof |
| CN106877733A (en) * | 2015-12-03 | 2017-06-20 | 精工爱普生株式会社 | Piezo drives, motors, robots, and pumps |
| CN113005364A (en) * | 2021-02-05 | 2021-06-22 | 广东诗奇制造有限公司 | Piezoelectric actuator, iron-nickel-chromium alloy material, and preparation method and application thereof |
-
2014
- 2014-07-25 CN CN201420417048.8U patent/CN204013280U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106877733A (en) * | 2015-12-03 | 2017-06-20 | 精工爱普生株式会社 | Piezo drives, motors, robots, and pumps |
| US10601345B2 (en) | 2015-12-03 | 2020-03-24 | Seiko Epson Corporation | Piezoelectric driving device, motor, robot, and pump |
| CN105471316A (en) * | 2016-01-08 | 2016-04-06 | 南京航空航天大学 | Motor stator, novel multi-channel steering gear control micro ultrasonic motor and control method thereof |
| CN113005364A (en) * | 2021-02-05 | 2021-06-22 | 广东诗奇制造有限公司 | Piezoelectric actuator, iron-nickel-chromium alloy material, and preparation method and application thereof |
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Inventor after: Zhu Cong Inventor after: Cui Hongchao Inventor before: Zhu Cong Inventor before: Cui Hongchao Inventor before: Chu Xiangcheng |
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