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CN105928995A - 一种基于方酸菁聚合物的湿敏传感器及其制备方法和用途 - Google Patents

一种基于方酸菁聚合物的湿敏传感器及其制备方法和用途 Download PDF

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CN105928995A
CN105928995A CN201610378962.XA CN201610378962A CN105928995A CN 105928995 A CN105928995 A CN 105928995A CN 201610378962 A CN201610378962 A CN 201610378962A CN 105928995 A CN105928995 A CN 105928995A
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路建美
贺竞辉
肖昕
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Abstract

本发明公开了一种基于方酸菁聚合物的湿敏传感器及其制备方法和用途。具体而言,本发明的湿敏传感器包含镀膜材料和叉指电极,镀膜材料为如式I所示的方酸菁聚合物,其中n为40~50中的任一整数,其被刷图在叉指电极上,厚度为100~400 μm。本发明的湿敏传感器具有如下优点:制备便捷,操作简单;响应时间短,对于湿度变化响应高于常见的金属氧化物;回复时间短,器件性能稳定;在高湿度环境下,器件滞湿性强。

Description

一种基于方酸菁聚合物的湿敏传感器及其制备方法和用途
技术领域
本发明属于有机半导体材料技术领域,具体涉及一种基于方酸菁聚合物的湿敏传感器,其制备方法,及其在空气湿度检测中的用途。
背景技术
随着科技的发展,众多领域对环境湿度的要求更加苛刻,例如航天工业、农业、精密机械以及实验室都需要对环境湿度进行有效监控。目前,湿敏传感器是传感器件领域众多研究方向中的一个热点,常见的湿敏传感器件基本上都基于金属氧化物材料,虽然其稳定性较好,但选择性较差,制备工艺较为复杂,不能适用于大规模应用。为了满足目前市场对传感器价廉、实用、易制备等方面的要求,亟需开发出一种新型的湿敏传感器。
发明内容
针对上述情况,本发明采用一种方酸菁聚合物PMPS(其结构如下所示,n为40~50中的任一整数)来制备湿敏传感器,并且通过在不同湿度下观察传感器的复阻抗变化来检测不同湿度的空气。本发明测试了湿敏传感器在不同频率下的阻抗变化,从而选择出其在100Hz下的复阻抗最大。本发明还测试了器件的回复性,先将器件置于相对湿度(RH)为11%的湿度氛围内,测得其阻抗大约为7×108,然后置于95%的湿度氛围内,测得其阻抗大约为1×104。本发明还测试了器件吸脱附的性能,测试其在11%~95%的湿度氛围内的吸脱附能力。
具体而言,本发明采用如下技术方案:
一种基于方酸菁聚合物的湿敏传感器,其包含镀膜材料和叉指电极,所述镀膜材料为如式(I)所示的方酸菁聚合物,其中n为40~50中的任一整数,其被刷图在所述叉指电极上,厚度为100~400 μm。
优选的,在上述基于方酸菁聚合物的湿敏传感器中,所述叉指电极以氧化铝(Al2O3)为基底,厚度为1~2 mm,其上设置有银-钯(Ag-Pd)合金,厚度为100~200 nm。
优选的,在上述基于方酸菁聚合物的湿敏传感器中,所述叉指电极的叉指宽度为200~300 μm,叉指间距为100~200 μm。
一种基于方酸菁聚合物的湿敏传感器的制备方法,其包括如下步骤:
(1)清洁基板,并将叉指电极固定在所述基板上;
(2)按照方酸菁聚合物:溶剂=4:1000~2000的重量比,将如式(I)所示的方酸菁聚合物溶解于溶剂中,超声使其分散均匀,得到方酸菁聚合物溶液;
(3)将方酸菁聚合物溶液刷图在叉指电极上,于室温下放置,挥干溶剂后,于60~80℃干燥1~2小时,得到基于方酸菁聚合物的湿敏传感器。
优选的,在上述制备方法中,步骤(1)中所述基板选自玻璃基板、PE基板、铁片基板中的任意一种,优选玻璃基板。
优选的,在上述制备方法中,步骤(1)中所述固定通过双面胶粘合的方式来完成。
优选的,在上述制备方法中,步骤(2)中所述溶剂选自乙醇、二氯甲烷、乙酸乙酯中的任意一种,优选乙醇。
优选的,在上述制备方法中,步骤(3)中所述干燥通过真空烘箱来完成。
优选的,在上述制备方法中,步骤(3)中所述干燥的温度为60℃,时间为1小时。
上述基于方酸菁聚合物的湿敏传感器在空气湿度检测中的用途。
与现有技术相比,利用上述技术方案的本发明具有如下优点:
(1)器件制备便捷,操作简单;
(2)响应时间短,对于湿度变化响应高于常见的金属氧化物;
(3)回复时间短,器件性能稳定;
(4)在高湿度环境下,器件滞湿性强。
附图说明
图1为方酸菁聚合物PMPS的SEM谱图。
图2为方酸菁聚合物PMPS的IR谱图。
图3为基于方酸菁聚合物的湿敏传感器的结构示意图。
图4为湿敏传感器在不同频率下对湿度的阻抗响应测试效果图。
图5为湿敏传感器在11%和95%之间的相对湿度下的回复性测试效果图。
图6为湿敏传感器在不同湿度下的吸脱附曲线图。
具体实施方式
下文将结合附图和具体实施例来进一步说明本发明的技术方案。除非另有说明,下列实施例中所使用的试剂、材料、仪器等均可通过商业手段获得。
实施例1:PMPS的合成与传感器的制备。
(1)PMPS分子的合成:
称取N-甲基吡咯(1.62 g,20 mmol)和方酸(2.32 g,20 mmol),并置于正丁醇(150 mL)中,加热并回流反应18 h,反应结束后过滤,固体置于索氏提取器中,用乙酸乙酯洗涤4 h,干燥,得到PMPS(3 g;产率75 %;元素分析:理论值:N:8.58,C:66.25,H:5.56;实际值:N:8.23,C:65.84,H:5.48;利用GPC测定其分子量为6500~8200,并计算其聚合度n为40~50),其SEM显微结构如图1所示,其IR光谱如图2所示。
由图1可以看出,PMPS为相对均一的球形小颗粒,其堆积孔隙较多,有利于制备成用于检测环境湿度的传感器件。
由图2可以看出,聚合反应完成后,方酸中的羟基特征峰消失,C=O双键特征峰保留,C-N键特征峰的峰位由于电荷密度发生变化而产生一定迁移,说明已成功制得聚合物PMPS分子。
(2)传感器的制备:
(a)清洁玻璃基板,并通过双面胶将叉指电极粘合在基板上,该叉指电极以Al2O3(1mm)为基底,其上设置有Ag-Pd合金电极(100 nm),叉指宽度为0.2 μm,叉指间距为0.2 μm;
(b)将PMPS(4 mg)溶解于乙醇(2 g)中,超声使其分散均匀,得到方酸菁聚合物的乙醇溶液;
(c)将方酸菁聚合物的乙醇溶液刷图在叉指电极上,于室温下放置,挥干乙醇后,置于真空烘箱中于60℃干燥1 h,得到基于方酸菁聚合物的湿敏传感器,其结构示意图如图3所示,其中PMPS镀膜厚度为300 μm。
实施例2:湿敏传感器在不同频率下对湿度的阻抗响应测定实验。
将实施例1中制备的器件置于测试机器内,在10 Hz~100 kHz范围内调节频率,并测试器件在11%、33%、54%、75%、85%、95%等不同相对湿度氛围内的阻抗变化,其结果如图4所示。
从图4中可以看出,对于不同浓度的湿度氛围,基于方酸菁聚合物的湿敏传感器在不同频率条件下均有不同的阻抗变化,从中可以看出在100 Hz时,器件线性关系最好,响应强度最强。
实施例3:湿敏传感器在11%和95%之间的相对湿度下的回复性测定实验。
在频率为100 Hz的条件下,首先将器件置于11%的相对湿度条件下,阻抗稳定后,再将器件置于95%的相对湿度条件下,同样待阻抗稳定后,将器件再次置于11%的相对湿度条件下,重复以上循环,其结果如图5所示。
从图5中可以发现,器件的稳定性非常好,器件测试响应时间短至3 s左右,器件的回复时间短至16 s,由此可见,器件不仅稳定性好,而且响应时间短,回复时间短。
实施例4:基于方酸菁聚合物的湿敏传感器的吸脱附性能测定实验。
控制频率为100 Hz,将湿敏传感器置于不同的相对湿度氛围内,测试器件的吸脱附性能,其结果如图6所示,从中可以看出,器件的吸脱附性能良好。
综上所述,本发明通过将一种方酸菁聚合物制作成结构简单的电阻式薄膜传感器,实现了针对不同湿度的空气的进行检测,并且响应时间快回复时间快,解决了目前缺乏有机聚合物湿敏传感器的难题,本发明的基于方酸菁聚合物的湿敏传感器对于未来环境湿度的控制具有很高的应用价值。

Claims (10)

1.一种基于方酸菁聚合物的湿敏传感器,其包含镀膜材料和叉指电极,所述镀膜材料为如式I所示的方酸菁聚合物,其中n为40~50中的任一整数,其被刷图在所述叉指电极上,厚度为100~400 μm;
2.根据权利要求1所述的基于方酸菁聚合物的湿敏传感器,其特征在于:
所述叉指电极以氧化铝为基底,厚度为1~2 mm,其上设置有银-钯合金,厚度为100~200nm。
3.根据权利要求1所述的基于方酸菁聚合物的湿敏传感器,其特征在于:
所述叉指电极的叉指宽度为200~300 μm,叉指间距为100~200 μm。
4.一种根据权利要求1至3中任一项所述的基于方酸菁聚合物的湿敏传感器的制备方法,其包括如下步骤:
1)清洁基板,并将叉指电极固定在所述基板上;
2)按照方酸菁聚合物:溶剂=4:1000~2000的重量比,将如式I所示的方酸菁聚合物溶解于溶剂中,超声使其分散均匀,得到方酸菁聚合物溶液;
3)将方酸菁聚合物溶液刷图在叉指电极上,于室温下放置,挥干溶剂后,于60~80℃干燥1~2小时,得到基于方酸菁聚合物的湿敏传感器。
5.根据权利要求4所述的制备方法,其特征在于:
步骤1)中所述基板选自玻璃基板、PE基板、铁片基板中的任意一种。
6.根据权利要求4所述的制备方法,其特征在于:
步骤1)中所述固定通过双面胶粘合的方式来完成。
7.根据权利要求4所述的制备方法,其特征在于:
步骤2)中所述溶剂选自乙醇、二氯甲烷、乙酸乙酯中的任意一种。
8.根据权利要求4所述的制备方法,其特征在于:
步骤3)中所述干燥通过真空烘箱来完成。
9.根据权利要求4所述的制备方法,其特征在于:
步骤3)中所述干燥的温度为60℃,时间为1小时。
10.根据权利要求1至3中任一项所述的基于方酸菁聚合物的湿敏传感器在空气湿度检测中的用途。
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