CN105293039B - Substrate transfer device - Google Patents
Substrate transfer device Download PDFInfo
- Publication number
- CN105293039B CN105293039B CN201510340642.0A CN201510340642A CN105293039B CN 105293039 B CN105293039 B CN 105293039B CN 201510340642 A CN201510340642 A CN 201510340642A CN 105293039 B CN105293039 B CN 105293039B
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- Prior art keywords
- belt
- substrate
- pressing portion
- position space
- conveyor belt
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- 239000000758 substrate Substances 0.000 title claims abstract description 136
- 238000012546 transfer Methods 0.000 title claims abstract description 47
- 238000003825 pressing Methods 0.000 claims description 73
- 230000003028 elevating effect Effects 0.000 claims description 7
- 230000001174 ascending effect Effects 0.000 claims 1
- 238000005520 cutting process Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 3
- 239000011521 glass Substances 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000006063 cullet Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Crystal (AREA)
Abstract
The utility model relates to a substrate transfer device, which can smoothly transfer a substrate without damaging the substrate when transferring to the next step after scribing and cutting a brittle material substrate. The substrate transfer device comprises a conveying belt (20) for transferring the substrate from a 1 st position space part (A) to a 2 nd position space part (B), and a belt rotation driving part arranged between the 1 st position space part (A) and the 2 nd position space part (B); the belt rotation driving unit is configured to: the upper belt of the conveyor belt (20) is pressed down to lower the lower belt corresponding to the upper belt, and the lower belt is pressed up to raise the upper belt.
Description
Technical Field
The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus capable of smoothly transferring a glass substrate used for a display panel of a liquid crystal display device to a next step without damaging the glass substrate.
Background
In general, a display panel of a liquid crystal display device or the like is formed using a glass substrate made of a brittle material. A pair of glass substrates are bonded with an appropriate gap therebetween, and a liquid crystal is sealed between the glass substrates to form a display panel.
In manufacturing such a display panel, a bonded mother substrate obtained by bonding mother glass substrates is divided, and a plurality of display panels are manufactured from the bonded mother substrate. A substrate separation apparatus for separating the bonded mother substrates as described above is disclosed in korean laid-open patent publication No. 2006-0125915 (hereinafter, referred to as patent document 1).
Fig. 1 is a perspective view schematically showing a main configuration of a substrate dividing apparatus shown in fig. 32 of patent document 1.
Referring to fig. 1, the substrate cutting system 200 includes a positioning unit 220, a scribing unit 240, a breaking and conveying unit 260, a steam breaking unit 280, a panel reversing unit 320, and a panel terminal separating unit 340.
When the side where the positioning unit 220 is disposed is used as the substrate carrying-in side and the side where the panel terminal separating portion 340 is disposed is used as the substrate carrying-out side, after the substrate is supplied to the positioning unit 220 on the substrate carrying-in side, the substrate dividing operation is performed while the substrate is sequentially transferred along the scribing unit 240, the breaking and conveying portion 260, the steam breaking unit 280, the panel reversing unit 320, and the panel terminal separating portion 340, and then the substrate is transferred to the substrate carrying-out side.
The substrate supplied to the positioning unit 220 provided on the mounting table 230 is placed on a plurality of substrate supporting units (not shown) formed in the positioning unit 220, and after the position of the substrate is positioned on a belt (not shown) provided in the substrate supporting units, the substrate is transferred to the scribing unit 240 at the next stage by the rotation of the belt.
On the other hand, the scribing unit section 240 includes a dividing device guide body 242 provided on the installation table 250 in the X direction, and a 1 st substrate supporting unit section 241A and a 2 nd substrate supporting unit section 241B arranged in the Y direction with the dividing device guide body 242 interposed therebetween. The 1 st substrate supporting unit 244A of the 1 st substrate supporting unit portion 241A and the 2 nd substrate supporting unit 244B of the 2 nd substrate supporting unit portion 241B are arranged in parallel with respect to the frame 243A and the frame 243B, respectively.
In this case, the substrate transferred from the positioning unit 220 to the scribing unit 240 is placed on the 1 st substrate supporting unit 244A of the 1 st substrate supporting unit 241A, and is clamped by the clamping device 251. Thereafter, the belt provided in the 1 st substrate supporting unit 244A is rotated and moved and the chuck device 251 is moved in the Y direction, whereby the substrate is scribed by the cutting device guide 242, and the scribed substrate is transferred to the 2 nd substrate supporting unit 244B of the 2 nd substrate supporting unit 241B.
The substrate transferred to the 2 nd substrate supporting unit 244B is transferred to the belt 261 of the breaking and transferring unit 260 provided separately from the belt of the 2 nd substrate supporting unit 244B by rotating the belt provided in the 2 nd substrate supporting unit 244B, and thereafter, the substrate is completely divided by the steam breaking unit 280, and is transferred to the substrate carrying-out side by a robot or the like through the substrate transferring unit 300, the panel reversing unit 320, and the panel terminal separating unit 340.
In general, the substrate on the belt that has completed the scribing operation and has been transferred to the 2 nd substrate supporting unit 244B is transferred to the breaking transfer unit 260 by the rotational movement of the belt of the 2 nd substrate supporting unit 244B. The substrate having been transferred to the breaking and conveying unit 260 is broken by the steam breaking unit 280 in a state where the rotational movement of the belt of the breaking and conveying unit 260 is stopped, and then picked up and discharged by a pick-up robot or the like. In addition, in a state where the rotation of the belt of the breaking and conveying unit 260 is stopped, the belts of the 1 st substrate supporting unit 244A and the 2 nd substrate supporting unit 244B constituting the scribing unit 240 are controlled to continuously rotate for scribing the substrate.
Patent document 1: korean laid-open patent publication No. 2006-0125915. In view of the above problems of the conventional substrate dividing apparatus, the present inventors have made extensive research and innovation based on practical experience and professional knowledge of many years of design and manufacture of such products, and also have studied and created a substrate transfer apparatus with a novel structure in cooperation with the application of theory, so as to solve the problems of the conventional substrate dividing apparatus and make it more practical. After continuous research and design and repeated trial production and improvement, the utility model with practical value is finally created.
Disclosure of Invention
However, in the conventional substrate dividing apparatus as described above, when the scribed substrate is transferred from the scribing unit 240 to the breaking conveyor 260, more specifically, when the scribed substrate is transferred from the belt of the 2 nd substrate supporting unit 244B to the breaking conveyor 260, since the belt of the 2 nd substrate supporting unit 244B and the belt of the breaking conveyor 260 are exchanged with each other, glass cullet (glass chipping) or the like occurs between the 2 nd substrate supporting unit 244B and the breaking conveyor 260, which causes dropping of end glass (dummy glass) or breaking of the substrate. The problems caused by such a replacement will be described in more detail with reference to fig. 2.
Fig. 2 is a view schematically showing a process of transferring a substrate from a scribing unit to a pickup transporting section after scribing the substrate by a conventional substrate dividing apparatus. In fig. 2, reference numeral 100 denotes a feeding section for positioning and/or rotating a substrate transferred from a substrate carrying-in side, reference numerals 110 and 120 denote an upstream side scribing section and a downstream side scribing section, respectively, and reference numeral 130 denotes a pick-up and transfer section for picking up and discharging a divided substrate by a robot or the like.
Referring to fig. 2, the substrate held by the substrate holding mechanism 114 is moved back and forth between the upstream scribing part 110 and the downstream scribing part 120, and is scribed while contacting the scribing head 118 provided on the scribing beam 116. Then, the scribed substrate 102a placed on the belt of the downstream scribing unit 120 is transferred to the belt 135 of the pickup transport unit 130.
However, since there is a transfer section between the belt of the downstream scribing section 120 and the belt 135 of the pickup and conveyance section 130, the end glass may fall from the substrate 102a when the substrate 102a is transferred to the position of 102 b.
In addition, when the substrate 102a is transferred from the downstream side scribing part 120 to the pickup transporting part 130, undulation is generated in the substrate 102a, and accordingly, the scribed portions of the substrate 102a collide with each other to generate glass cullet which partially cracks the substrate. Even if the heights of the downstream side scoring part 120 and the pickup conveying part 130 from the ground are designed to be the same, there is a subtle difference in the actual heights or either one of the two is obliquely disposed, thereby causing generation of glass cullet. Particularly, in recent years, thin substrates are often handled, and therefore such problems become more serious.
The utility model aims to provide a substrate transfer device which can prevent the problems caused by the transfer of the conveying and transfer the substrate to the next stage without damaging the scribed substrate.
The purpose of the utility model and the technical problem to be solved are realized by adopting the following technical scheme.
The present invention provides a substrate transfer device, comprising: a conveying belt 20 that is installed on the plurality of 1 st fixed rotating bodies 10 and rotates so as to transfer the substrate from the 1 st position space portion a to the 2 nd position space portion B; a belt rotation driving unit disposed between the 1 st-position space portion a and the 2 nd-position space portion B, configured such that a lower belt corresponding to an upper belt of the conveyor belt 20 on which the substrate is placed is also lowered when the upper belt is pressed downward, and the upper belt is also raised when the lower belt is pressed upward; and a 2 nd fixed rotator 60 which is disposed to be erected inside the lower belt, is installed to be moved and fixed when the upper and lower belts are lowered and raised, and rotates according to the lowering and raising distances of the upper and lower belts.
The object of the present invention and the technical problems solved thereby can be further achieved by the following technical measures.
Preferably, in the substrate transfer apparatus, the belt rotation driving unit may include: a lower pressing portion 40 which is installed to move up or down the lower belt in a state of being in contact with the lower belt; and an upper pressing portion 30 disposed above the lower pressing portion 40 and outside the upper belt, for pressing the upper belt toward the lower pressing portion 40.
Preferably, in the substrate transfer apparatus, the belt rotation driving unit includes an elevating unit, and the elevating unit may be configured by any one of a cylinder, a ball screw, and a linear motor.
Preferably, in the substrate transfer apparatus, the lower pressing portion 40 and the upper pressing portion 30 may be rollers.
Preferably, the substrate transfer apparatus may further include a brake for stopping the rotation of the conveyor belt 20.
Preferably, in the substrate transfer apparatus, the brake may be respectively installed in the 1 st position space portion a and the 2 nd position space portion B of the conveyor belt 20.
In the substrate transfer apparatus, preferably, two or more rollers may be provided in the horizontal direction at positions corresponding to each other in the lower pressing portion 40 and the upper pressing portion 30.
Compared with the prior art, the utility model has obvious advantages and beneficial effects. By the technical scheme, the substrate transfer device at least has the following advantages and beneficial effects:
the substrate transfer device provided by the utility model not only can smoothly transfer the substrate without damaging the substrate when transferring the scribed brittle material substrate to the next step, but also can transfer the substrate by operating the belt through a simple structure.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented in accordance with the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more clearly understood, the following preferred embodiments are described in detail with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic view showing a conventional substrate cutting apparatus;
FIG. 2 is a schematic view showing a state where a substrate is transferred by a conventional substrate cutting apparatus;
fig. 3 is a schematic view showing a substrate transfer apparatus according to the present invention;
fig. 4 is a schematic view showing the structure of the substrate transfer device according to the present invention;
fig. 5 is a schematic view showing the operation of the conveyor belt in the space portion a at the 1 st position in the operating state of the substrate transfer device according to the present invention;
fig. 6 is a schematic view showing the operation of the conveyor belt in the space portion 2 at the position B in the operating state of the substrate transfer device according to the present invention.
[ description of main element symbols ]
A: space at position 1B: space part at position 2
10: 1 st fixed rotator 20: conveying belt
30: upper-side pressing portion 40: lower part side pressing part
70a, 70 b: brake
60. 60a, 60b, 60c, 60 d: 2 nd fixed rotator
Detailed Description
Hereinafter, one embodiment of the substrate transfer device according to the present invention will be described in detail with reference to the attached drawings. However, the present invention may be embodied in various forms, and is not limited to the embodiments described herein. In the drawings, portions that are not related to the description are omitted for simplicity and clarity of the description of the present invention, and the same reference numerals are given to the same or similar components throughout the specification.
Referring to fig. 3 and 4, the conveyor belt 20 is provided so as to move over the space portion a at position 1 and the space portion B at position 2.
The conveyor belt 20 is not provided in the 1 st position space a and the 2 nd position space B to be rotated separately as in the conventional art, but is integrally connected to the 1 st position space a and the 2 nd position space B so as to be continuously movable.
A plurality of 1 st fixed rotating bodies 10 are provided in a portion where the conveyor belt 20 is bent so as to move smoothly the conveyor belt 20.
The 1 st-position space portion A and the 2 nd-position space portion B are slightly separated from each other.
A belt rotation driving part is provided between the 1 st position space part A and the 2 nd position space part B in order to transfer the substrate from the 1 st position space part A to the 2 nd position space part B.
The belt rotation driving unit is formed to move up and down an upper belt of the conveyor belt 20 on which the substrate is placed and a lower belt of the conveyor belt 20 corresponding to the upper belt in the same direction.
Further, the 2 nd fixed rotator 60, which rotates according to the pressing or lifting distance when the belt rotation driving part presses or lifts the conveyor belt 20, is installed on the lower belt with a certain interval.
The belt rotation driving unit includes an upper pressing unit 30 disposed outside the upper belt of the conveyor belt 20 and pressing the upper belt of the conveyor belt 20 downward, and a lower pressing unit 40 disposed outside the lower belt of the conveyor belt 20 and supporting the lower belt of the conveyor belt 20 in a state of always abutting against the outer surface of the lower belt of the conveyor belt 20, in order to move the conveyor belt 20 to transfer the substrate.
The lower pressing portion 40 and the upper pressing portion 30 are positioned on the same line in the vertical direction, and are installed such that the lower pressing portion 40 and the upper pressing portion 30 move integrally when the upper belt and the lower belt of the conveyor belt 20 move up and down.
In the belt rotation driving unit, an elevating unit is additionally installed to press down and raise the transport belt 20 by only one driving device, and it is needless to say that a cylinder, a ball screw, a linear motor, or the like can be used as the elevating unit. However, the elevating unit of the present invention is not limited to this, and is not limited to a device that can drive the conveyor belt 20.
The lower pressing portion 40 and the upper pressing portion 30 may include rollers to reduce friction with the conveyor belt 20 and to smoothly move the conveyor belt 20. In the present embodiment, 2 rollers are provided in the horizontal direction at positions corresponding to each other in the lower pressing portion 40 and the upper pressing portion 30.
When the conveyor belt 20 is pressed down or raised up by the operation of the belt rotation driving unit, a brake for stopping the movement of the conveyor belt 20 is additionally provided so that the entire length of the conveyor belt 20 located in the 1 st-position space portion a and the 2 nd-position space portion B is not changed.
Next, the operation of the substrate transfer apparatus of the present invention configured as described above will be specifically described with reference to the drawings.
Referring to fig. 3 to 5, in the substrate transfer apparatus according to the present invention, in order to transfer a substrate (not shown) to the 2 nd position space B side in a state where the substrate is placed on the transfer belt 20 of the 1 st position space a, the brake 70B provided in the 2 nd position space B is operated to fix the transfer belt 20 so as not to move to the 2 nd position space B side.
When the brake 70B is lowered as shown in fig. 5 in the space portion B at the 2 nd position, the conveyor belt 20 in the space portion B at the 2 nd position is fixed so as not to move by the brake 70B, while the conveyor belt 20 in the space portion a at the 1 st position is freely movable in the arrow direction as shown in fig. 5.
At this time, the belt rotation driving unit installed between the 1 st position space portion a and the 2 nd position space portion B is moved down.
When the belt rotation driving portion descends, the upper pressing portion 30 of the belt rotation driving portion descends while pressing the upper belt of the conveyor belt 20 downward as shown in fig. 5.
Simultaneously with the lowering of the upper pressing portion 30, the lower pressing portion 40 is also lowered in a state of being in contact with the lower belt outer side of the conveyor belt 20.
The 2 nd fixed rotating body 60 of the conveyor belt 20 is mounted below the lower pressing portion 40 so as to be vertically movable relative to the upper pressing portion 30 and the lower pressing portion 40, and is not changed in the vertical position.
The 2 nd fixed rotating body 60 rotates only by mounting the conveyor belt 20, and its height position is fixed.
As shown in fig. 4, the 2 nd fixed rotating body 60 on which the conveyor belt 20 is mounted is connected to the lower pressing portion 40 that performs the lifting operation in a staggered manner.
The 2 nd fixed rotating bodies 60a and 60d are installed at a constant interval on the same horizontal line so as to be in contact with the inner surface of the conveyor belt 20, and the lower pressing portion 40 is installed and operated so as to be in contact with the outer surface of the conveyor belt 20, opposite to the 2 nd fixed rotating bodies 60a and 60 d.
When the other 2 nd fixed rotating bodies 60b and 60c are installed between the 2 nd fixed rotating bodies 60a and 60d and are connected to the lower pressing portion 40 in a staggered manner, the moving distance of the conveyor belt 20 can be increased.
When the lower pressing portion 40 moves so that the lower pressing portion 40 approaches the position of the 2 nd fixed rotating body 60, the upper pressing portion 30, which is integrally attached to and driven by the lower pressing portion 40, simultaneously presses and lowers the upper belt of the conveyor belt 20.
At this time, since the movement of the conveyor belt 20 located on the 2 nd-position space B side is fixed by the brake 70B attached to the 2 nd-position space B, the conveyor belt 20 descends, and the conveyor belt 20 in the 1 st-position space a moves to the 2 nd-position space B side as shown in fig. 5.
Therefore, the substrate placed on the conveyor belt 20 in the space portion a at position 1 is transferred onto the conveyor belt 20 on the side of the space portion B at position 2.
In this manner, since the upper pressing portion 30 functions to press down the conveyor belt 20, the lower pressing portion 40 functions to release the conveyor belt 20 while lowering by the length pulled by the upper pressing portion 30 while pulling the conveyor belt 20 in the direction of the arrow in fig. 5 by the amount of pressing down the conveyor belt 20.
The lower pressing portion 40 abuts against and supports the lower belt outer surface of the conveyor belt 20, and the upper pressing portion 30 moves while pressing down the upper belt outer surface of the conveyor belt 20. By the lowering operation of the upper pressing portion 30 and the lower pressing portion 40 in this manner, the transport belt 20 in the 1 st position space portion a moves while being pulled, and the substrate placed on the transport belt 20 moves to the 2 nd position space portion B side.
In order to continuously transfer the substrate of the conveyor belt 20 transferred to the 2 nd position space B in the traveling direction in the 2 nd position space B, the lowered brake 70B is raised, the other brake 70a attached to the 1 st position space a is lowered, and the conveyor belt 20 of the 1 st position space a is fixed so as not to rotate.
Then, in a state where the rotation of the conveyor belt 20 in the 1 st-position space portion a is stopped by the stopper 70a, the lower pressing portion 40 and the upper pressing portion 30 which have been lowered are raised as shown in fig. 6.
As shown in fig. 6, when the lower pressing portion 40 and the upper pressing portion 30, which are integrally installed, are raised, the lower pressing portion 40 is raised while pulling the conveyor belt 20 in the space portion at position 2B.
Therefore, the conveyor belt 20 in the space portion B at position 2 moves in the direction of the arrow.
Specifically, the lower pressing portion 40 moves up while pulling the conveyor belt 20 in the space portion B at position 2, and the upper pressing portion 30 simultaneously moves up while loosening the conveyor belt 20, so that the conveyor belt 20 moves in the direction of the arrow in fig. 6.
When the distance between the lower pressing portion 40 of the conveyor belt 20 and the 2 nd fixed rotating body 60 is the closest or the farthest, the moving distance of the substrate placed on the conveyor belt 20 is the largest.
The distance between the lower pressing portion 40 and the 2 nd fixed rotating body 60 determines the moving distance of the conveyor belt 20.
The present invention can integrally operate the upper pressing part 30 and the lower pressing part 40 for moving the conveying belt 20, and has a very simple structure.
Further, since it is only necessary to integrally lift and lower the upper pressing portion 30 and the lower pressing portion 40, it is possible to easily drive the lifting portion by using a cylinder, a ball screw, a linear motor, or the like as the lifting portion for performing the linear motion, and the manufacturing thereof is extremely simple and the size thereof can be reduced.
The substrate transfer device of the present invention is not limited to a device that cuts a substrate or the like, and may be applied to a device that can transfer other articles or the like.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the utility model as defined by the appended claims.
Claims (6)
1. A substrate transfer apparatus, comprising:
a conveying belt (20) which is arranged on a plurality of 1 st fixed rotating bodies (10) in a mode of transferring the substrate from the 1 st position space part (A) to the 2 nd position space part (B) and rotates;
a belt rotation driving part arranged between the 1 st position space part (A) and the 2 nd position space part (B), and formed to simultaneously descend a lower belt corresponding to the upper belt when the upper belt of the conveying belt (20) for loading the substrate is pressed downwards and simultaneously ascend the upper belt when the lower belt is pressed upwards, comprising: a lower pressing part (40) installed to raise or lower the lower belt in a state of being in contact with the outer side of the lower belt, the belt rotation driving part further comprising: an upper pressing portion (30) disposed above the lower pressing portion (40) and outside the upper belt, for pressing the upper belt toward the lower pressing portion (40), wherein the lower pressing portion (40) and the upper pressing portion (30) are vertically aligned, and are mounted such that the lower pressing portion (40) and the upper pressing portion (30) move integrally;
and a plurality of 2 nd fixed rotating bodies (60) which are connected to the lower pressing part (40) performing the lifting operation in a staggered manner, are arranged on the same line at a certain interval in a manner of being abutted against and erected on the inner side of the lower belt, are installed to be moved and fixed when the belt rotation driving part descends and ascends, and rotate according to the descending and ascending distances of the upper belt and the lower belt.
2. The substrate transfer apparatus according to claim 1, wherein the belt rotation driving unit includes an elevating unit, and the elevating unit is configured by one of a cylinder, a ball screw, and a linear motor.
3. The substrate transfer device according to claim 1, wherein the lower side pressing portion (40) and the upper side pressing portion (30) are rollers.
4. The substrate transfer apparatus according to any one of claims 1 to 3, characterized by having a brake that stops the rotational movement of the conveyor belt (20).
5. The substrate transfer apparatus according to claim 4, wherein the stopper is respectively installed in the 1 st position space (A) and the 2 nd position space (B) of the conveyor belt (20).
6. The substrate transfer apparatus according to claim 3, wherein the lower pressing portion (40) and the upper pressing portion (30) are provided with two or more rollers in a horizontal direction at positions corresponding to each other.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020140093687A KR101579818B1 (en) | 2014-07-24 | 2014-07-24 | Apparatus for transferring substrate |
| KR10-2014-0093687 | 2014-07-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105293039A CN105293039A (en) | 2016-02-03 |
| CN105293039B true CN105293039B (en) | 2022-04-01 |
Family
ID=55084350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510340642.0A Active CN105293039B (en) | 2014-07-24 | 2015-06-18 | Substrate transfer device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6459742B2 (en) |
| KR (1) | KR101579818B1 (en) |
| CN (1) | CN105293039B (en) |
| TW (1) | TWI681917B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112466785B (en) * | 2020-11-23 | 2022-09-02 | 江西世星科技有限公司 | Integrated circuit V-shaped groove grooving machine |
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| KR101406607B1 (en) * | 2013-04-03 | 2014-06-12 | 주식회사 포스코 | Conveyer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH0719236U (en) * | 1994-07-13 | 1995-04-07 | オークラ輸送機株式会社 | Carrier |
| JP4134484B2 (en) * | 2000-03-23 | 2008-08-20 | 松下電器産業株式会社 | Inspection device |
| KR100812718B1 (en) | 2004-03-15 | 2008-03-12 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | Substrate dividing system, substrate manufacturing equipment, substrate scribing method and substrate dividing method |
| KR101535136B1 (en) * | 2014-06-11 | 2015-07-14 | 한국미쯔보시다이아몬드공업(주) | Panel cutting device and method of transferring panel in the same |
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2014
- 2014-07-24 KR KR1020140093687A patent/KR101579818B1/en active Active
-
2015
- 2015-04-17 JP JP2015084695A patent/JP6459742B2/en not_active Expired - Fee Related
- 2015-04-20 TW TW104112548A patent/TWI681917B/en not_active IP Right Cessation
- 2015-06-18 CN CN201510340642.0A patent/CN105293039B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1648019A (en) * | 2004-01-28 | 2005-08-03 | 满留安机械株式会社 | Transport system of glass base |
| JP2009286123A (en) * | 2008-05-27 | 2009-12-10 | Heidelberger Druckmas Ag | Transfer method of transfer layer, and sheet transfer machine for conducting this method |
| KR101330148B1 (en) * | 2010-08-31 | 2013-11-15 | 한국미쯔보시다이아몬드공업(주) | Panel cutting device and panel cutting method using the same |
| CN103449714A (en) * | 2012-06-01 | 2013-12-18 | 三星钻石工业股份有限公司 | Substrate breaking device and substrate transferring method of the substrate breaking device |
| KR101406607B1 (en) * | 2013-04-03 | 2014-06-12 | 주식회사 포스코 | Conveyer |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016025344A (en) | 2016-02-08 |
| TWI681917B (en) | 2020-01-11 |
| CN105293039A (en) | 2016-02-03 |
| TW201604102A (en) | 2016-02-01 |
| KR101579818B1 (en) | 2015-12-24 |
| JP6459742B2 (en) | 2019-01-30 |
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