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CN112466785B - Integrated circuit V-shaped groove grooving machine - Google Patents

Integrated circuit V-shaped groove grooving machine Download PDF

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CN112466785B
CN112466785B CN202011318664.4A CN202011318664A CN112466785B CN 112466785 B CN112466785 B CN 112466785B CN 202011318664 A CN202011318664 A CN 202011318664A CN 112466785 B CN112466785 B CN 112466785B
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bearing
integrated circuit
main shaft
conveying
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CN112466785A (en
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凌丹璐
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Jiangsu Sesumg Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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Abstract

The integrated circuit V-shaped groove grooving machine includes conveying part, base plate, supporting part and working part. The conveying part comprises two main conveying belts and two pressing belts, the two main conveying belts are respectively positioned on two sides, and the two pressing belts are respectively positioned above the two main conveying belts. The supporting part comprises a cross beam and a sliding groove, the cross beam is positioned above the conveying part, the sliding groove is formed in the cross beam, and the working part is installed in the sliding groove. The working part comprises a main shaft, a cushion block, a bearing, a nut, a cutter, a belt wheel and a gear, the main shaft is installed in the bearing, the bearing is pressed into the upper portion of the cushion block, the cushion block is installed in a sliding groove of the supporting portion, the cushion block is fixed on the sliding groove through the nut, and the cutter is installed at the bottom of the main shaft. And one main shaft at the outermost side is provided with a belt wheel, and the belt wheel is connected with an external driving device through a belt.

Description

一种集成电路V形槽开槽机An integrated circuit V-groove slotting machine

技术领域technical field

本发明属于集成电路制造技术领域,尤其涉及一种集成电路V形槽开槽机。The invention belongs to the technical field of integrated circuit manufacturing, and in particular relates to a V-groove slotting machine for integrated circuits.

背景技术Background technique

集成电路制造的前期通常将多块集成电路阵列排布在一个大的基板上,整个大的基板完成制造后再分解成多个集成电路单元,为了便于后期的分解工作,通常预先在大的基板上按照集成电路单元的尺寸开出V形槽,后期分解时可以容易的从V形槽处断开。当前常见的做法是使用V形开槽刀具在预定的开槽位置开槽,如遇到划分的单元数量较多时,V形开槽刀具需要多次往复运动才能完成多条V形槽的开槽工作,对于不同尺寸的开槽操作,还需要频繁编制新的数控程序来控制开槽机工作。In the early stage of integrated circuit manufacturing, multiple integrated circuit arrays are usually arranged on a large substrate. After the entire large substrate is fabricated, it is decomposed into multiple integrated circuit units. According to the size of the integrated circuit unit, a V-shaped groove is opened on the top, and it can be easily disconnected from the V-shaped groove when disassembled later. The current common practice is to use a V-shaped slotting tool to slot at a predetermined slotting position. If the number of divided units is large, the V-shaped slotting tool needs multiple reciprocating movements to complete the slotting of multiple V-shaped slots. For different sizes of grooving operations, new CNC programs need to be frequently compiled to control the work of the grooving machine.

发明内容SUMMARY OF THE INVENTION

本发明提供一种集成电路V形槽开槽机,以解决上述背景技术中的问题。The present invention provides an integrated circuit V-groove slotting machine to solve the above-mentioned problems in the background art.

本发明所解决的技术问题采用以下技术方案来实现:The technical problem solved by the present invention adopts the following technical solutions to realize:

一种集成电路V形槽开槽机,包括传送部、基板、支撑部和工作部,基板随传送部向前移动,支撑部位于传送部上方,工作部安装在支撑部上。传送部包括主传送带和压紧带,主传送带具有两个,分别位于两侧,压紧带具有两个,分别位于两个主传送带的上方。支撑部包括横梁和滑槽,横梁位于传送部上方,横梁上具有滑槽,滑槽内安装工作部。工作部包括主轴、垫块、轴承、螺母、刀具、带轮和齿轮,主轴安装在轴承内,轴承压入垫块上部,垫块安装在支撑部的滑槽内,螺母将垫块固定在滑槽上,刀具安装主轴底部,根据需要开槽的数量以及V形槽的距离确定工作部的安装数量,并选择相应尺寸的齿轮,将齿轮安装在主轴顶部,相邻两个齿轮之间互相拟合,使得多个主轴之间转动互相传递,驱动所有主轴同步转动。最外侧的一个主轴上安装带轮,带轮通过皮带连接外部驱动装置,外部驱动装置驱动带轮转动,带轮带动其所在的主轴转动。An integrated circuit V-groove slotting machine includes a conveying part, a base plate, a supporting part and a working part, the base plate moves forward with the conveying part, the supporting part is located above the conveying part, and the working part is installed on the supporting part. The conveying part includes a main conveying belt and a pressing belt. There are two main conveying belts, which are respectively located on both sides. There are two pressing belts, which are respectively located above the two main conveying belts. The support part includes a cross beam and a chute, the cross beam is located above the conveying part, the cross beam is provided with a chute, and the working part is installed in the chute. The working part includes the main shaft, spacer, bearing, nut, tool, pulley and gear. The main shaft is installed in the bearing, the bearing is pressed into the upper part of the spacer, the spacer is installed in the chute of the support part, and the nut fixes the spacer on the slide. On the groove, the tool is installed on the bottom of the main shaft. Determine the installation quantity of the working part according to the required number of grooves and the distance of the V-shaped groove, and select the gear of the corresponding size, install the gear on the top of the main shaft, and fit the adjacent two gears to each other. Combined, the rotation of multiple spindles is transmitted to each other, and all the spindles are driven to rotate synchronously. A pulley is installed on the outermost spindle, the pulley is connected to an external drive device through a belt, the external drive device drives the pulley to rotate, and the pulley drives the spindle where it is located to rotate.

进一步的,主传送带和压紧带之间预留间隙以容纳基板。Further, a gap is reserved between the main conveyor belt and the pressing belt to accommodate the substrate.

进一步的,主传送带和压紧带之间预留的间隙控制在基板厚度的0.9倍。Further, the gap reserved between the main conveyor belt and the pressing belt is controlled to be 0.9 times the thickness of the substrate.

进一步的,压紧带的前部比主传送带短,便于完成开槽的基板从传送部上取出。Further, the front part of the pressing belt is shorter than the main conveyor belt, so that the substrate after the slotting is completed is easily taken out from the conveyor part.

进一步的,主轴包括主杆、卡盘和六角头,主杆安装在轴承上,主杆底部为卡盘,卡盘选用最为常见的三爪卡盘,刀具安装在卡盘上,主杆顶部为六角头,齿轮安装在六角头上。Further, the main shaft includes a main rod, a chuck and a hexagonal head. The main rod is installed on the bearing, the bottom of the main rod is a chuck, the most common three-jaw chuck is selected for the chuck, the tool is installed on the chuck, and the top of the main rod is Hex head on which the gears are mounted.

进一步的,垫块包括方头、方块、轴承孔、螺纹台和中心孔,方头位于方块顶部,方块嵌入滑槽内,方头内具有轴承孔,轴承孔内安装轴承,放款底部具有螺纹台,螺纹台上安装螺母,螺母将垫块固定在横梁上的合适位置,垫块中部具有中心孔,中心孔内穿过主轴。Further, the spacer includes a square head, a square block, a bearing hole, a threaded table and a central hole, the square head is located on the top of the square, the square is embedded in the chute, the square head has a bearing hole, the bearing is installed in the bearing hole, and the bottom of the release has a threaded table. , The nut is installed on the threaded table, and the nut fixes the spacer block in the proper position on the beam. The center of the spacer block has a center hole, and the center hole passes through the main shaft.

本发明的有益效果是:The beneficial effects of the present invention are:

本发明用于集成电路板基板的开槽操作,其模块化的设计使得整个开槽机可以根据基板上需要开出的V形槽的数量和间隔配置所需数量的工作部,并配备合适尺寸的齿轮连环驱动各个工作部,基板一次行程便可以完成一向的所有V形槽的开槽工作,本领域技术人员可以很容易的在本技术方案的基础上设置互相垂直的两条传送带相互衔接以完成一次行程双向开槽的操作。The invention is used for the slotting operation of the substrate of the integrated circuit board, and its modular design enables the entire slotting machine to configure the required number of working parts according to the number and interval of the V-shaped grooves to be cut out on the substrate, and is equipped with suitable size The gears are connected to drive each working part, and the substrate can complete the slotting work of all the V-shaped grooves in one stroke. Those skilled in the art can easily set up two conveyor belts that are perpendicular to each other on the basis of this technical solution. Complete one-stroke bidirectional grooving operation.

附图说明Description of drawings

图1是本发明的示意图;Fig. 1 is the schematic diagram of the present invention;

图2是本发明的右视图;Fig. 2 is the right side view of the present invention;

图3是本发明的爆炸图;Fig. 3 is the exploded view of the present invention;

图4是本发明的局部爆炸图;Fig. 4 is a partial exploded view of the present invention;

图中:10.传送部,11.主传送带,12.压紧带,20.基板,30.支撑部,31.横梁,32.滑槽,40.工作部,41.主轴,411.主杆,412.卡盘,413.六角头,42.垫块,421.方头,422.方块,423.轴承孔,424.螺纹台,425.中心孔,43.轴承,44.螺母,45.刀具,46.带轮,47.齿轮。In the figure: 10. Conveying part, 11. Main conveyor belt, 12. Pressing belt, 20. Base plate, 30. Supporting part, 31. Beam, 32. Chute, 40. Working part, 41. Spindle, 411. Main bar , 412. Chuck, 413. Hexagon head, 42. Spacer, 421. Square head, 422. Square, 423. Bearing hole, 424. Thread table, 425. Center hole, 43. Bearing, 44. Nut, 45. Tool, 46. Pulley, 47. Gear.

具体实施方式Detailed ways

为了便于理解本发明,下面将参照相关附图对本发明进行更全面的描述。附图中给出了本发明的首选实施例。但是,本发明可以以许多不同的形式来实现,并不限于本文所描述的实施例。相反地,提供这些实施例的目的是使对本发明的公开内容更加透彻全面。In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the related drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention may be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

参见图1-图4所示的集成电路V形槽开槽机,包括传送部10、基板20、支撑部30和工作部40,基板20随传送部20向前移动,支撑部30位于传送部10上方,工作部40安装在支撑部30上。Referring to the integrated circuit V-groove slotting machine shown in FIG. 1-FIG. 4, it includes a conveying part 10, a substrate 20, a supporting part 30 and a working part 40. The substrate 20 moves forward with the conveying part 20, and the supporting part 30 is located in the conveying part. Above 10 , the working part 40 is mounted on the support part 30 .

传送部10包括主传送带11和压紧带12,主传送带11具有两个,分别位于两侧,压紧带12具有两个,分别位于两个主传送带11的上方,主传送带11和压紧带12之间预留间隙以容纳基板,主传送带11和压紧带12之间预留的间隙控制在基板厚度的0.9倍。压紧带12的前部比主传送带11短,便于完成开槽的基板20从传送部10上取出。The conveying part 10 includes a main conveying belt 11 and a pressing belt 12. There are two main conveying belts 11, which are located on both sides respectively, and two pressing belts 12 are located above the two main conveying belts 11. A gap is reserved between 12 to accommodate the substrate, and the reserved gap between the main conveyor belt 11 and the pressing belt 12 is controlled to be 0.9 times the thickness of the substrate. The front part of the pressing belt 12 is shorter than the main conveyor belt 11 , so that the substrate 20 after the slotting is completed is easy to take out from the conveyor part 10 .

基板20从主传送带11和压紧带12之间的间隙沿着传送部10向前移动。The substrate 20 moves forward along the conveying part 10 from the gap between the main conveying belt 11 and the pressing belt 12 .

支撑部30包括横梁31和滑槽32,横梁31位于传送部10上方,横梁31上具有滑槽32,滑槽32内安装工作部40。The support part 30 includes a cross beam 31 and a chute 32 , the cross beam 31 is located above the conveying part 10 , the cross beam 31 has a chute 32 , and the working part 40 is installed in the chute 32 .

工作部40包括主轴41、垫块42、轴承43、螺母44、刀具45、带轮46和齿轮47,主轴41安装在轴承43内,轴承43压入垫块42上部,垫块42安装在支撑部30的滑槽32内,螺母44将垫块42固定在滑槽32上,刀具45安装主轴41底部,根据需要开槽的数量以及V形槽的距离确定工作部40的安装数量,并选择相应尺寸的齿轮47,将齿轮47安装在主轴41顶部,相邻两个齿轮47之间互相拟合,使得多个主轴41之间转动互相传递,驱动所有主轴41同步转动。最外侧的一个主轴41上安装带轮46,带轮46通过皮带连接外部驱动装置,外部驱动装置驱动带轮46转动,带轮46带动其所在的主轴41转动,再通过齿轮47传递该转动,使得所有主轴41同步转动,完成基板上的V形槽开槽工作。The working part 40 includes a main shaft 41, a spacer 42, a bearing 43, a nut 44, a cutter 45, a pulley 46 and a gear 47. The main shaft 41 is installed in the bearing 43, the bearing 43 is pressed into the upper part of the spacer block 42, and the spacer block 42 is installed on the support In the chute 32 of the part 30, the nut 44 fixes the spacer 42 on the chute 32, the cutter 45 is installed at the bottom of the main shaft 41, and the number of installations of the working part 40 is determined according to the number of grooves and the distance of the V-shaped groove, and select For gears 47 of corresponding size, the gears 47 are installed on the top of the main shaft 41, and two adjacent gears 47 are fitted to each other, so that the rotations of the plurality of main shafts 41 are transmitted to each other, and all the main shafts 41 are driven to rotate synchronously. A pulley 46 is installed on the outermost main shaft 41. The pulley 46 is connected to an external drive device through a belt. The external drive device drives the pulley 46 to rotate. The pulley 46 drives the spindle 41 where it is located to rotate, and then transmits the rotation through the gear 47. All spindles 41 are rotated synchronously to complete the V-groove grooving work on the substrate.

主轴41包括主杆411、卡盘412和六角头413,主杆411安装在轴承43上,主杆411底部为卡盘412,卡盘412选用最为常见的三爪卡盘,刀具45安装在卡盘412上,主杆411顶部为六角头413,齿轮47安装在六角头413上。The main shaft 41 includes a main rod 411, a chuck 412 and a hexagonal head 413. The main rod 411 is installed on the bearing 43, the bottom of the main rod 411 is a chuck 412, and the chuck 412 is the most common three-jaw chuck. On the disk 412 , the top of the main rod 411 is a hexagonal head 413 , and the gear 47 is mounted on the hexagonal head 413 .

垫块42包括方头421、方块422、轴承孔423、螺纹台424和中心孔425,方头421位于方块422顶部,方块422嵌入滑槽32内,方头421内具有轴承孔423,轴承孔423内安装轴承43,放款422底部具有螺纹台424,螺纹台424上安装螺母44,螺母44将垫块42固定在横梁31上的合适位置,垫块42中部具有中心孔425,中心孔425内穿过主轴41。The spacer 42 includes a square head 421, a square block 422, a bearing hole 423, a threaded table 424 and a center hole 425. The square head 421 is located on the top of the square block 422, and the square block 422 is embedded in the chute 32. The square head 421 has a bearing hole 423 and a bearing hole. The bearing 43 is installed in the 423, the bottom of the release 422 has a threaded table 424, and the nut 44 is installed on the threaded table 424. The nut 44 fixes the spacer 42 in the proper position on the beam 31. Pass through the main shaft 41 .

本发明的工作原理是:首先按照附图将开槽机装配完毕,根据需要开出的V形槽的数量和间隔安装合适数量的工作部40,并为工作部40配备数量和尺寸合适的齿轮47,将带轮46连接至动力源,启动开槽机,使得所有刀具45在主轴41的带动下转动,从传送部10的间隙内依次送入基板20,使基板20随传送部10向前运动,基板20经过刀具45时完成开槽工作,基板20继续运动,从传送部10的前部脱离传送部10。The working principle of the present invention is as follows: firstly, assemble the slotting machine according to the attached drawings, install a suitable number of working parts 40 according to the number and interval of the V-shaped grooves to be opened, and equip the working part 40 with gears of suitable number and size. 47. Connect the pulley 46 to the power source, start the slotting machine, so that all the cutters 45 are rotated under the drive of the main shaft 41, and the substrates 20 are sequentially fed into the gap of the conveying part 10, so that the substrates 20 move forward with the conveying part 10 When the substrate 20 moves through the cutter 45 , the slotting work is completed, and the substrate 20 continues to move and separates from the conveying part 10 from the front of the conveying part 10 .

以上实施例主要说明了本发明的集成电路V形槽开槽机。尽管只对其中有限的实施例和技术特征进行了描述,本领域技术人员应当了解,本发明可以在不偏离其主旨与范围内以许多其他的形式实施。因此,所展示的实施例被视为示意性的而非限制形的,在不脱离所附权利要求所定义的本发明的精神及范围的情况下,本发明可能涵盖各种修改与替换的方案。The above embodiments mainly describe the integrated circuit V-groove slotting machine of the present invention. Although only limited embodiments and technical features thereof have been described, those skilled in the art will appreciate that the present invention may be embodied in many other forms without departing from the spirit and scope thereof. Accordingly, the embodiments shown are to be regarded as illustrative rather than restrictive, and the present invention may cover various modifications and alternatives without departing from the spirit and scope of the invention as defined by the appended claims .

Claims (6)

1.一种集成电路V形槽开槽机,包括传送部(10)、基板(20)、支撑部(30)和工作部(40),其特征在于,所述基板(20)随传送部(10)向前移动,支撑部(30)位于传送部(10)上方,工作部(40)安装在支撑部(30)上,传送部(10)包括主传送带(11)和压紧带(12),主传送带(11)具有两个,分别位于两侧,压紧带(12)具有两个,分别位于两个主传送带(11)的上方,基板(20)从主传送带(11)和压紧带(12)之间的间隙沿着传送部(10)向前移动,支撑部(30)包括横梁(31)和滑槽(32),横梁(31)位于传送部(10)上方,横梁(31)上具有滑槽(32),滑槽(32)内安装工作部(40),工作部(40)包括主轴(41)、垫块(42)、轴承(43)、螺母(44)、刀具(45)、带轮(46)和齿轮(47),主轴(41)安装在轴承(43)内,轴承(43)压入垫块(42)上部,垫块(42)安装在支撑部(30)的滑槽(32)内,螺母(44)将垫块(42)固定在滑槽(32)上,刀具(45)安装主轴(41)底部,根据需要开槽的数量以及V形槽的距离确定工作部(40)的安装数量,并选择相应尺寸的齿轮(47),将齿轮(47)安装在主轴(41)顶部,相邻两个齿轮(47)之间互相拟合,最外侧的一个主轴(41)上安装带轮(46),带轮(46)通过皮带连接外部驱动装置。1. An integrated circuit V-groove slotting machine, comprising a conveying part (10), a substrate (20), a supporting part (30) and a working part (40), characterized in that the substrate (20) follows the conveying part (10) moves forward, the supporting part (30) is located above the conveying part (10), the working part (40) is mounted on the supporting part (30), and the conveying part (10) includes a main conveying belt (11) and a pressing belt ( 12), there are two main conveyor belts (11), which are located on both sides, respectively, and two pressing belts (12), which are located above the two main conveyor belts (11). The gap between the pressing belts (12) moves forward along the conveying part (10), the supporting part (30) comprises a cross beam (31) and a chute (32), the cross beam (31) is located above the conveying part (10), The beam (31) is provided with a chute (32), a working part (40) is installed in the chute (32), and the working part (40) includes a main shaft (41), a spacer (42), a bearing (43), and a nut (44) ), tool (45), pulley (46) and gear (47), the main shaft (41) is installed in the bearing (43), the bearing (43) is pressed into the upper part of the spacer (42), and the spacer (42) is installed in the In the chute (32) of the support part (30), the nut (44) fixes the spacer (42) on the chute (32), the tool (45) is installed at the bottom of the spindle (41), and the number of slots and The distance of the V-shaped groove determines the number of installations of the working part (40), and select the gear (47) of the corresponding size, install the gear (47) on the top of the main shaft (41), and fit the adjacent two gears (47) to each other. In combination, a pulley (46) is installed on the outermost main shaft (41), and the pulley (46) is connected to an external drive device through a belt. 2.如权利要求1所述的集成电路V形槽开槽机,其特征在于,所述主传送带(11)和压紧带(12)之间预留间隙以容纳基板。2. The integrated circuit V-groove slotting machine according to claim 1, characterized in that a gap is reserved between the main conveyor belt (11) and the pressing belt (12) to accommodate the substrate. 3.如权利要求1所述的集成电路V形槽开槽机,其特征在于,所述主传送带(11)和压紧带(12)之间预留的间隙控制在基板厚度的0.9倍。3. The integrated circuit V-groove slotting machine according to claim 1, characterized in that, the reserved gap between the main conveyor belt (11) and the pressing belt (12) is controlled to be 0.9 times the thickness of the substrate. 4.如权利要求1所述的集成电路V形槽开槽机,其特征在于,所述压紧带(12)的前部比主传送带(11)短,便于完成开槽的基板(20)从传送部(10)上取出。4. The integrated circuit V-groove slotting machine according to claim 1, characterized in that the front part of the pressing belt (12) is shorter than the main conveyor belt (11), which is convenient for completing the slotted substrate (20) Take out from the conveying part (10). 5.如权利要求1所述的集成电路V形槽开槽机,其特征在于,所述主轴(41)包括主杆(411)、卡盘(412)和六角头(413),主杆(411)安装在轴承(43)上,主杆(411)底部为卡盘(412),卡盘(412)选用最为常见的三爪卡盘,刀具(45)安装在卡盘(412)上,主杆(411)顶部为六角头(413),齿轮(47)安装在六角头(413)上。5. The integrated circuit V-groove slotting machine according to claim 1, wherein the main shaft (41) comprises a main rod (411), a chuck (412) and a hexagonal head (413), and the main rod (413) 411) is installed on the bearing (43), the bottom of the main rod (411) is a chuck (412), the most common three-jaw chuck is selected for the chuck (412), and the tool (45) is installed on the chuck (412), The top of the main rod (411) is a hexagonal head (413), and the gear (47) is mounted on the hexagonal head (413). 6.如权利要求1所述的集成电路V形槽开槽机,其特征在于,所述垫块(42)包括方头(421)、方块(422)、轴承孔(423)、螺纹台(424)和中心孔(425),方头(421)位于方块(422)顶部,方块(422)嵌入滑槽(32)内,方头(421)内具有轴承孔(423),轴承孔(423)内安装轴承(43),方块(422)底部具有螺纹台(424),螺纹台(424)上安装螺母(44),螺母(44)将垫块(42)固定在横梁(31)上的合适位置,垫块(42)中部具有中心孔(425),中心孔(425)内穿过主轴(41)。6. The integrated circuit V-groove slotting machine according to claim 1, wherein the spacer block (42) comprises a square head (421), a square block (422), a bearing hole (423), a threaded table (421) 424) and the central hole (425), the square head (421) is located on the top of the square (422), the square (422) is embedded in the chute (32), the square head (421) has a bearing hole (423), the bearing hole (423) ) inside the bearing (43), the bottom of the block (422) has a threaded table (424), a nut (44) is installed on the threaded table (424), and the nut (44) fixes the spacer (42) on the beam (31) In an appropriate position, a central hole (425) is provided in the middle of the spacer block (42), and the central hole (425) passes through the main shaft (41).
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